Electronic grade hydrogen long tube car continuous gas supply device

Abstract

The utility model relates to an electronic grade hydrogen long -tube trailer continuous gas supply device, including two hydrogen long -tube trailer, first grade hydrogen left road precision pressure reducing device, first grade hydrogen right road precision pressure reducing device, second grade hydrogen left road precision pressure reducing device, second grade hydrogen right road precision pressure reducing device, excess gas pressure reducing device, hydrogen molecule purifier, nitrogen gas purging equipment. The electronic grade hydrogen long -tube trailer continuous gas supply device can satisfy the demand of market, and its simple structure, stable and practical, reduce the security risk, stable and efficient. Make high -value electronic grade hydrogen to be safe, efficient, continuous, stable use, greatly save the production cost, and create the profit for the enterprise.

Description

Technical Field

[0001] This utility model relates to a continuous hydrogen supply device for an electronic-grade hydrogen long-tube vehicle, and particularly to a continuous hydrogen supply device for the semiconductor industry. Background Technology

[0002] The limitations of domestic hydrogen supply equipment for continuous and stable supply of electronic-grade hydrogen to semiconductors are mainly: existing continuous automatic hydrogen supply equipment for electronic-grade hydrogen is complex, has many safety hazards, and may experience unstable supply or even gas outages, causing great losses and safety accidents to downstream semiconductor manufacturing suppliers.

[0003] To address the aforementioned technical challenges, this paper proposes an electronic-grade hydrogen long-tube vehicle continuous gas supply device that meets market demands, is simple, stable, practical, reduces safety hazards, and is stable and efficient. Utility Model Content

[0004] In view of the shortcomings of the prior art, the technical problem to be solved by this utility model is to provide a continuous gas supply device for an electronic-grade hydrogen long tube vehicle.

[0005] To solve the above-mentioned technical problems, the technical solution of this utility model is: an electronic-grade hydrogen long tube vehicle continuous gas supply device, including two hydrogen long tube trailers, a first-stage hydrogen left-path precision pressure reducing device, a first-stage hydrogen right-path precision pressure reducing device, a second-stage hydrogen left-path precision pressure reducing device, a second-stage hydrogen right-path precision pressure reducing device, a residual gas pressure reducing device, a hydrogen molecule purifier, and a nitrogen purging device.

[0006] The gas outlets of the two hydrogen tube trailers are connected to the inlet ends of the left and right precision pressure reducing devices for the primary hydrogen system.

[0007] The outlet of the first-stage hydrogen left and right precision pressure reducing device is connected to the inlet of the second-stage hydrogen left and right precision pressure reducing device;

[0008] The outlet of the secondary hydrogen left and right precision pressure reducing device is connected to the hydrogen inlet of the hydrogen molecule purifier;

[0009] The hydrogen outlet of the hydrogen molecule purifier is connected to the user's pipeline.

[0010] The inlet end of the residual gas pressure reducing device is connected to the inlet end pipeline of the first-stage hydrogen left and right precision pressure reducing device, and the outlet end of the residual gas pressure reducing device is connected to the outlet end pipeline of the second-stage hydrogen left and right precision pressure reducing device.

[0011] The inlet of the nitrogen purging equipment is connected to a nitrogen source, and the outlet of the nitrogen purging equipment is connected to the inlet pipeline of the first-stage hydrogen left and right precision pressure reducing device.

[0012] Preferably, the gas outlets of the two hydrogen long-tube trailers are first connected to the fixed flange port via high-pressure hoses, and the fixed flange port is then connected to the inlet of the first-stage hydrogen left and right precision pressure reducing device via pipes and hand valves.

[0013] Preferably, the outlet of the primary hydrogen left and right precision pressure reducing device is connected to the inlet of the secondary hydrogen left and right precision pressure reducing device via a pipeline and a hand valve.

[0014] Preferably, a hydrogen flow meter is connected between the secondary hydrogen left and right precision pressure reducing device and the hydrogen molecule purifier.

[0015] Preferably, the outlet of the secondary hydrogen left and right precision pressure reducing device is first connected to the inlet of the hydrogen supply flow meter, and the outlet of the hydrogen supply flow meter is then connected to the hydrogen inlet of the hydrogen molecule purifier.

[0016] Preferably, the continuous gas supply device for the electronic-grade hydrogen long tube vehicle further includes a pressure transmitter.

[0017] Preferably, the sampling ports of the two pressure transmitters are connected to the inlet pipes of the first-stage hydrogen left and right precision pressure reducing devices, and the sampling port of the one pressure transmitter is connected to the outlet pipes of the second-stage hydrogen left and right precision pressure reducing devices.

[0018] Preferably, the pressure transmitter is electrically connected to the pressure alarm controller.

[0019] Compared with existing technologies, this utility model has the following advantages: The continuous gas supply device for electronic-grade hydrogen in a long-tube vehicle can meet market demands. It features a simple, stable, and practical structure, reduces safety hazards, and is stable and efficient. It enables the safe, efficient, continuous, and stable use of high-value electronic-grade hydrogen, greatly saving production costs and generating profits for enterprises.

[0020] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of an embodiment of the present utility model.

[0022] In the diagram: 1. Hydrogen long-tube trailer; 2. Primary hydrogen left-circuit precision pressure reducing device; 3. Primary hydrogen right-circuit precision pressure reducing device; 4. Secondary hydrogen left-circuit precision pressure reducing device; 5. Secondary hydrogen right-circuit precision pressure reducing device; 6. Pressure transmitter; 7. Pressure alarm controller; 8. Hydrogen supply flow meter; 9. Residual gas pressure reducing device; 10. Hydrogen molecule purifier; 11. Nitrogen purging equipment. Detailed Implementation

[0023] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0024] It should be noted that the following detailed descriptions are exemplary and intended to provide further explanation of this application. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0025] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0026] like Figure 1 As shown, this embodiment provides an electronic-grade hydrogen long-tube continuous gas supply device, including two hydrogen long-tube trailers 1, a primary hydrogen left-circuit precision pressure reducing device 2, a primary hydrogen right-circuit precision pressure reducing device 3, a secondary hydrogen left-circuit precision pressure reducing device 4, a secondary hydrogen right-circuit precision pressure reducing device 5, a residual gas pressure reducing device 9, a hydrogen molecule purifier 10, and a nitrogen purging device 11.

[0027] The gas outlets of the two hydrogen tube trailers are connected to the inlet ends of the left and right precision pressure reducing devices for the primary hydrogen system.

[0028] The outlet of the first-stage hydrogen left and right precision pressure reducing device is connected to the inlet of the second-stage hydrogen left and right precision pressure reducing device;

[0029] The outlet of the secondary hydrogen left and right precision pressure reducing device is connected to the hydrogen inlet of the hydrogen molecule purifier;

[0030] The hydrogen outlet of the hydrogen molecule purifier is connected to the user's pipeline.

[0031] The inlet end of the residual gas pressure reducing device is connected to the inlet end pipeline of the first-stage hydrogen left and right precision pressure reducing device, and the outlet end of the residual gas pressure reducing device is connected to the outlet end pipeline of the second-stage hydrogen left and right precision pressure reducing device.

[0032] The inlet of the nitrogen purging equipment is connected to a nitrogen source, and the outlet of the nitrogen purging equipment is connected to the inlet pipeline of the first-stage hydrogen left and right precision pressure reducing device.

[0033] In this embodiment of the utility model, the gas outlets of the two hydrogen long-tube trailers are first connected to the fixed flange port via high-pressure hoses, and the fixed flange port is then connected to the inlet end of the first-stage hydrogen left and right precision pressure reducing device via pipes and hand valves.

[0034] In this embodiment of the invention, the outlet of the first-stage hydrogen left and right precision pressure reducing device is connected to the inlet of the second-stage hydrogen left and right precision pressure reducing device via a pipe and a hand valve.

[0035] In this embodiment of the invention, a hydrogen flow meter 8 is connected between the secondary hydrogen left and right path precision pressure reducing device and the hydrogen molecule purifier.

[0036] In this embodiment of the invention, the outlet of the secondary hydrogen left and right precision pressure reducing device is first connected to the inlet of the hydrogen supply flow meter, and the outlet of the hydrogen supply flow meter is then connected to the hydrogen inlet of the hydrogen molecule purifier.

[0037] In this embodiment of the invention, the continuous gas supply device for the electronic-grade hydrogen long tube vehicle further includes a pressure transmitter 6.

[0038] In this embodiment of the invention, the sampling ports of two pressure transmitters are connected to the inlet pipes of the first-stage hydrogen left and right precision pressure reducing devices, and the sampling port of one pressure transmitter is connected to the outlet pipes of the second-stage hydrogen left and right precision pressure reducing devices.

[0039] In this embodiment of the invention, the pressure transmitter is electrically connected to the pressure alarm controller 7.

[0040] In this embodiment of the utility model, the hydrogen long-tube trailer, the primary hydrogen left-path precision pressure reducing device, the primary hydrogen right-path precision pressure reducing device, the secondary hydrogen left-path precision pressure reducing device, the secondary hydrogen right-path precision pressure reducing device, the pressure transmitter, the pressure alarm controller, the hydrogen supply flow meter, the residual gas pressure reducing device, the hydrogen molecule purifier, and the nitrogen purging equipment are all existing equipment, wherein:

[0041] The specifications of the hydrogen-powered long-tube trailer are: 23.7m. 3 / 20MPa;

[0042] Primary hydrogen left and right circuit precision pressure reducing device: Uses model R43SLGK-CEG-00-00 from Jierui Enterprise (Shanghai) Co., Ltd., specifications: 20MPa before pressure reduction, 4MPa after pressure reduction, flow rate 130Nm³. 3 / h;

[0043] Secondary hydrogen left and right circuit precision pressure reducing device: This uses a precision pressure reducing device, model R21SLBK-EGG-00-00, from Jierui Enterprise (Shanghai) Co., Ltd., with specifications: 4MPa before pressure reduction, 1.5MPa after pressure reduction, and a flow rate of 130Nm³. 3 / h;

[0044] Pressure transmitter: The pressure transmitter is model PT601-20 from Shanghai Qizheng Information Electronic Technology Co., Ltd.

[0045] Pressure alarm controller: The pressure alarm controller is model GUMACS from Jierui Enterprise (Shanghai) Co., Ltd.

[0046] Hydrogen supply flow meter: The hydrogen supply flow meter is a Promass 80F model from Endress+Hauser (China) Automation Co., Ltd.

[0047] Residual gas pressure reducing device: Model R21SLBK-EGG-00-00 from Jierui Enterprise (Shanghai) Co., Ltd. is used. Specifications: 4MPa before pressure reduction, 2MPa after pressure reduction, flow rate 130Nm³. 3 / h;

[0048] Hydrogen molecule purifier: The hydrogen molecule purifier used is model PS7-PD2-55-2 from SAES Pure Gases.

[0049] In this embodiment of the invention, the working principle of the continuous gas supply device for the electronic-grade hydrogen long tube vehicle is as follows:

[0050] like Figure 1 As shown, some preparatory work needs to be done before the first gas supply:

[0051] 1. Check that the power supply system is normal;

[0052] 2. Check that the nitrogen purging equipment is functioning correctly;

[0053] 3. Check that the instrument gas source (nitrogen) pressure meets the requirements;

[0054] 4. Check that the hydrogen molecule purifier has been regenerated and is ready for operation;

[0055] 5. Check that the gas supply system pipes, valves, and instruments are normal, functional, and leak-free;

[0056] 6. Adjust and test each precision pressure reducing device using nitrogen:

[0057] 6.1 The pressure after pressure reduction by the precision pressure reducing device for the left and right paths of primary hydrogen is 3-4 MPa;

[0058] 6.2. Pressure after pressure reduction by the left and right precision pressure reducing devices for secondary hydrogen: 0.8 MPa;

[0059] 6.3 Pressure after pressure reduction by the residual gas pressure reducing device: 0.8 MPa;

[0060] The pressure regulators mentioned above have been adjusted after the system is installed. Only minor adjustments are needed for normal gas supply operation.

[0061] Gas supply operation:

[0062] For first-time use, the pipeline must be purged, pressure tested, and subjected to various other tests; for subsequent use, it can be used simply by connecting the hose and replacing it if it passes the test.

[0063] 1. Connect the two hydrogen tube trailers to the inlet valve of the gas supply system via high-pressure metal hoses;

[0064] 2. Slowly open the inlet valves and other corresponding valves of the system: the first-stage hydrogen left-circuit precision pressure reducing device, the first-stage hydrogen right-circuit precision pressure reducing device, the second-stage hydrogen left-circuit precision pressure reducing device, and the second-stage hydrogen right-circuit precision pressure reducing device;

[0065] 3. Accurately adjust the pressure of each stage of the pressure reducing device for hydrogen online:

[0066] 3.1 The pressure after pressure reduction by the precision pressure reducing device for the left and right paths of primary hydrogen is 3-4 MPa;

[0067] 3.2. Pressure after pressure reduction by the secondary hydrogen left and right path precision pressure reducing device: 0.8 MPa;

[0068] 3.3 Pressure after pressure reduction by the residual gas pressure reducing device: 0.8 MPa;

[0069] 4. The hydrogen molecule purifier is put into operation;

[0070] 4.1 Slightly open the vent valve at the outlet of the hydrogen molecule purifier to replace the nitrogen in the pipeline with hydrogen;

[0071] 4.2 After the hydrogen quality at the outlet of the hydrogen molecule purifier is qualified, close the vent valve and open the gas supply valve to send the hydrogen into the main hydrogen user pipeline.

[0072] 5. Replacement of hydrogen long-tube trailer;

[0073] 5.1 When the pressure of a hydrogen long-tube trailer in use is lower than 4 MPa, the pressure alarm controller will automatically sound an alarm to remind the operator to prepare for the hydrogen long-tube trailer to be switched and to pay attention to the working status of the hydrogen supply device.

[0074] 5.2 When the pressure of the aforementioned hydrogen long-tube trailer in use is lower than 3 MPa, the other standby hydrogen long-tube trailer will be automatically switched for use via the gas supply device.

[0075] 6. Use of residual hydrogen gas in long-tube trailers;

[0076] When the pressure of a hydrogen long-tube trailer is lower than 4 MPa, it automatically switches to another standby hydrogen long-tube trailer and then automatically opens the residual gas pressure reducing device to send gas to the hydrogen molecule purifier after a certain delay (which can be set). When the pressure drops to 0.8 MPa at the outlet pressure of the secondary hydrogen left and right precision pressure reducing device, it closes the residual gas pressure reducing device after a certain delay (which can be set).

[0077] 7. Replacement of the hydrogen long-tube trailer;

[0078] 7.1 Connect the new hydrogen long-tube trailer to the inlet valve of the gas supply system via a high-pressure metal hose;

[0079] 7.2. Open the nitrogen valve, intermittently switch the vent valve to purge the air from the pipeline, then close the vent valve, and finally close the nitrogen valve.

[0080] 7.3. Slightly open the outlet valve of the new hydrogen long tube trailer, then slowly and slightly open the vent valve to purge the nitrogen in the pipeline. After confirming that it has been completely purged, close the vent valve.

[0081] 7.4 Fully open the outlet valve of the new hydrogen long-tube trailer, slowly open the inlet valve of the pressure reducing device, check that the gas supply device is working normally, and the new hydrogen long-tube trailer is in standby mode.

[0082] This continuous hydrogen supply system for long-tube vehicles meets market demands. Its simple, stable, and practical structure reduces safety hazards and ensures stable and efficient operation. It enables the safe, efficient, continuous, and stable use of high-value electronic-grade hydrogen, significantly reducing production costs and generating profits for enterprises.

[0083] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of this utility model without departing from its technical solution shall still fall within the protection scope of this utility model.

Claims

1. A continuous hydrogen supply device for an electronic-grade hydrogen long-tube vehicle, characterized in that: It includes two hydrogen long-tube trailers, a primary hydrogen left-circuit precision pressure reducing device, a primary hydrogen right-circuit precision pressure reducing device, a secondary hydrogen left-circuit precision pressure reducing device, a secondary hydrogen right-circuit precision pressure reducing device, a residual gas pressure reducing device, a hydrogen molecule purifier, and a nitrogen purging device. The gas outlets of the two hydrogen tube trailers are connected to the inlet ends of the left and right precision pressure reducing devices for the primary hydrogen system. The outlet of the first-stage hydrogen left and right precision pressure reducing device is connected to the inlet of the second-stage hydrogen left and right precision pressure reducing device; The outlet of the secondary hydrogen left and right precision pressure reducing device is connected to the hydrogen inlet of the hydrogen molecule purifier; The hydrogen outlet of the hydrogen molecule purifier is connected to the user's pipeline. The inlet end of the residual gas pressure reducing device is connected to the inlet end pipeline of the first-stage hydrogen left and right precision pressure reducing device, and the outlet end of the residual gas pressure reducing device is connected to the outlet end pipeline of the second-stage hydrogen left and right precision pressure reducing device. The inlet of the nitrogen purging equipment is connected to a nitrogen source, and the outlet of the nitrogen purging equipment is connected to the inlet pipeline of the first-stage hydrogen left and right precision pressure reducing device.

2. The continuous gas supply device for electronic-grade hydrogen long-tube vehicles according to claim 1, characterized in that: The gas outlets of the two hydrogen long-tube trailers are first connected to the fixed flange port via high-pressure hoses, and then the fixed flange port is connected to the inlet of the first-stage hydrogen left and right precision pressure reducing device via pipes and hand valves.

3. The continuous gas supply device for electronic-grade hydrogen long-tube vehicles according to claim 1, characterized in that: The outlets of the primary hydrogen left and right precision pressure reducing devices are connected to the inlet of the secondary hydrogen left and right precision pressure reducing devices via pipes and manual valves.

4. The continuous gas supply device for electronic-grade hydrogen long-tube vehicles according to claim 1, characterized in that: A hydrogen flow meter is connected between the secondary hydrogen left and right precision pressure reducing device and the hydrogen molecule purifier.

5. The continuous gas supply device for electronic-grade hydrogen long-tube vehicles according to claim 4, characterized in that: The outlet of the secondary hydrogen left and right precision pressure reducing device is first connected to the inlet of the hydrogen supply flow meter, and the outlet of the hydrogen supply flow meter is then connected to the hydrogen inlet of the hydrogen molecule purifier.

6. The continuous gas supply device for electronic-grade hydrogen long-tube vehicles according to claim 1, characterized in that: The continuous gas supply device for the electronic-grade hydrogen long-tube vehicle also includes a pressure transmitter.

7. The continuous gas supply device for electronic-grade hydrogen long-tube vehicles according to claim 6, characterized in that: The sampling ports of two pressure transmitters are connected to the inlet pipes of the first-stage hydrogen left and right precision pressure reducing devices, and the sampling port of one pressure transmitter is connected to the outlet pipes of the second-stage hydrogen left and right precision pressure reducing devices.

8. The continuous gas supply device for electronic-grade hydrogen long-tube vehicles according to claim 7, characterized in that: The pressure transmitter is electrically connected to the pressure alarm controller.

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