A micro-displacement measurement system

Abstract

The utility model discloses a low -cost and reduce a kind of micro displacement measurement system in displacement process error, to solve above-mentioned technical problem, the utility model provides the following technical scheme, including support, the horizontal arrangement electromagnetic coil is respectively fixedly connected with the inside of support both ends, support outside is equipped with the adjusting handle of adjusting electromagnetic coil position, the linear drive motor is equipped between two electromagnetic coils in support middle part, linear drive motor side is connected with grating ruler, linear drive motor drives moving piece to move longitudinally, machine base is equipped above moving piece, machine base is detachably connected with the magnetic ratcheting rod of vertical arrangement and cooperation with moving piece, magnetic ratcheting rod protruding end fixedly connected piezoelectric ceramic, piezoelectric ceramic protruding end is connected with tungsten probe.

Description

Technical Field

[0001] This utility model relates to the field of micro-displacement measurement technology. Specifically, it relates to a micro-displacement measurement system. Background Technology

[0002] Currently, CNC machine tools use servo motors driven by control system commands to drive the spindle for micro-displacement control. Introducing magnetostrictive micro-displacement measurement to achieve nanometer-precision measurement is a novel research direction. When the sensor operates, it uses the material's λ-H curve to control the excitation current and generate a magnetic field corresponding to a specific displacement, thus outputting a displacement. When the displacement increases and contacts the boundary of the detection distance, it triggers the piezoelectric ceramic and stops. The displacement corresponding to the magnetic field strength on the curve is the micro-displacement measurement value. This is the working principle of a micro-displacement sensor. Existing micro-current sensors are essential equipment for testing extremely weak currents below the nanosecond level. Furthermore, the measurement transmission... The system suffers from significant transmission errors. Whether using a high-module reduction gear transmission module or a series precision reducer (i.e., a harmonic reducer or planetary reducer (low module, high precision) after the high-module gear to reduce accumulated errors), or using direct drive + gear assistance (i.e., using a direct drive motor for precision positioning and the high-module gear only for force amplification), none of these solutions can completely eliminate transmission errors. Therefore, a micro-displacement sensor that can be controlled in real time by a piezoelectric ceramic actuator was designed. Simultaneously, it is driven by a linear motor combined with a grating ruler to further reduce measurement errors, thereby obtaining a measurement drive scheme that meets the requirements. Utility Model Content

[0003] Therefore, the technical problem to be solved by this utility model is to provide a low-cost micro-displacement measurement system that reduces errors during the displacement process.

[0004] To solve the above-mentioned technical problems, this utility model provides the following technical solution:

[0005] A micro-displacement measurement system includes a support frame. Horizontally arranged electromagnetic coils are fixedly connected to the inner sides of both ends of the support frame. An adjustment handle for adjusting the position of the electromagnetic coils is provided on the outer side of the support frame. A linear drive motor is located in the middle of the support frame between the two electromagnetic coils. A grating ruler is connected to the side of the linear drive motor. The linear drive motor drives a moving component to move longitudinally. A base is provided above the moving component. A vertically arranged magnetostrictive rod that cooperates with the moving component is detachably connected to the base. A piezoelectric ceramic is fixedly connected to the extended end of the magnetostrictive rod, and a tungsten probe is connected to the extended end of the piezoelectric ceramic.

[0006] Preferably, the support is a U-shaped structure, with electromagnetic coils located on the inner sides of both ends of the U-shaped structure, and the two electromagnetic coils are arranged horizontally.

[0007] Preferably, the distance between the two electromagnetic coils is less than the radius of the electromagnetic coils.

[0008] Preferably, the grating ruler is arranged longitudinally and embedded in the side of the linear drive motor.

[0009] Preferably, the base includes a fixing rod, with a clamping plate threaded to both ends of the fixing rod to cooperate with the side of the electromagnetic coil. A vertically arranged connecting hole is provided in the middle of the fixing rod corresponding to the position of the moving part, and a fastening screw is provided on the side of the connecting hole.

[0010] Preferably, the magnetostrictive rod, piezoelectric ceramic and tungsten probe are integrated into one structure, and the upper end of the magnetostrictive rod is detachably connected to the connection hole.

[0011] Preferably, the magnetostrictive rod is located at the upper end, the tungsten probe is located at the lower end as a contact part, and the piezoelectric ceramic is located in the middle to connect the magnetostrictive rod and the tungsten probe.

[0012] Preferably, the linear drive motor is fixedly connected to the bracket between the two electromagnetic coils, the moving part is located at the upper end of the linear drive motor, and the moving part moves horizontally through the drive motor.

[0013] Preferably, the moving part includes a top plate, a bottom plate, and connecting rods. The bottom plate is located at the lower end and is connected to a linear drive motor. The top plate is located above the bottom plate and is arranged parallel to the bottom plate. There are multiple connecting rods used to connect the top plate and the bottom plate. The connecting rods are located at the outer edges of the bottom plate and the top plate, respectively.

[0014] Preferably, the moving part is made of nylon, and the upper end of the top plate has a longitudinally arranged receiving groove.

[0015] The technical solution of this utility model has achieved the following beneficial technical effects:

[0016] The most important component of a magnetostrictive displacement sensor is the piezoelectric ceramic-magnetostrictive dual displacement detection system. The experimental principle primarily utilizes the excellent magnetostrictive properties of magnetostrictive iron-gallium alloys and the inverse piezoelectric effect of PZT piezoelectric ceramics. By combining these two properties, precise positioning of minute displacements (experimental target 0.01 micrometers) is achieved.

[0017] During the transmission motion, a linear motor is used for coarse adjustment. The principle of the linear motor is direct electromagnetic drive without intermediate transmission mechanism, thereby achieving micron-level resolution. Then, magnetostrictive iron gallium alloy and PZT fine adjustment are used to further reduce transmission error, achieving zero backlash, high acceleration and high precision at the same time. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0019] Figure 2This is a perspective view of the overall structure of this utility model;

[0020] Figure 3 This is a structural diagram of the linear drive motor of this utility model.

[0021] The reference numerals in the figure are as follows: 1. Support; 2. Electromagnetic coil; 3. Adjusting handle; 4. Linear drive motor; 5. Grating ruler; 6. Base; 7. Magnetostrictive rod; 8. Fixing rod; 9. Pressure plate; 10. Connecting hole; 11. Fastening screw; 12. Top plate; 13. Bottom plate; 14. Connecting rod; 15. Receiving groove; 16. Moving part. Detailed Implementation

[0022] This embodiment will be described in detail with reference to the accompanying drawings when in use.

[0023] In this embodiment, the bracket 1 serves as the main support and is a U-shaped support frame. The lower end of the bracket 1 is horizontally arranged, and its horizontal orientation is adjusted by a horizontal adjustment component. Electromagnetic coils 2 are fixedly connected to the inner sides of both ends of the support frame. The axes of the electromagnetic coils 2 are horizontally arranged, and the two electromagnetic coils 2 are symmetrically arranged at both ends of the support frame. An adjustment handle 3 for lateral displacement of the electromagnetic coils 2 is provided on the outer side of the bracket 1. The adjustment handle 3 is connected to the electromagnetic coils 2 through a rotating wheel, so that the position of the electromagnetic coils 2 can be adjusted by rotating the adjustment handle 3, thereby adjusting the spacing between the electromagnetic coils 2. The two electromagnetic coils 2 are located at both ends of the support frame, and the distance between the two electromagnetic coils 2 is less than the radius of the electromagnetic coils 2, because the iron cores in the electromagnetic coils 2 will form a parallel magnetic field. This makes it easy to measure the magnetic induction intensity using a gaussmeter and a Hall probe.

[0024] The measurement system includes a detection area between two electromagnetic coils 2, and a linear drive motor 4 fixedly connected to the middle of a bracket 1. The lower end of the linear drive motor 4 is fixedly connected to the bracket 1. The linear drive motor 4 is arranged longitudinally, and a moving part 16 is located above the linear drive motor 4. The moving part 16 is driven by the drive motor and moves longitudinally. Because the driving force of the drive motor is limited, the moving part 16 has a hollow structure. In order to avoid the influence of magnetic fields and further reduce weight, the moving part 16 is made of nylon material. The moving part 16 includes a base plate 13 located at the lower end, and the base plate 13 is connected to the linear drive motor 4. The bottom plate 13 is fixedly connected to the top plate 12 via multiple connecting rods 14. The top plate 12 is located above the bottom plate 13, and the top plate 12 and the bottom plate 13 are arranged in a row. The top end of the top plate 12 is the area for placing the test piece. The top end of the top plate 12 is a horizontal plane. In order to facilitate the limiting of the test piece, a receiving groove 15 can be set on the top end of the top plate 12. There are multiple connecting rods 14, which are located on the outer edge between the top plate 12 and the bottom plate 13. The height of the upper surface of the top plate 12 corresponds to the height of the axis of the linear drive motor 4, so that the test piece on the top plate 12 is always within the optimal detection range of the detection area.

[0025] The linear drive motor 4 is arranged longitudinally, and a grating ruler 5 is embedded in the side of the linear drive motor 4. The grating ruler 5 works in conjunction with the linear drive motor 4 to precisely control the movement of the moving part 16.

[0026] A base 6 is provided above the linear drive motor 4. A detection component for testing is detachably connected to the base 6. The base 6 includes a horizontally arranged fixing rod 8. Both ends of the fixing rod 8 are threaded with clamping plates 9. By rotating the clamping plates 9, they are connected to the inner side of the electromagnetic coil 2, thereby positioning the fixing rod 8. A vertically arranged connecting hole 10 is provided in the middle of the fixing rod 8. A fastening screw 11 is machined in the connecting hole 10. The upper end of the magnetostrictive rod 7 is positioned by the fastening screw 11, so that the positioned magnetostrictive rod 7 is in a vertical position, which makes it easier to perform testing.

[0027] The detection component includes an integrated magnetostrictive rod 7, a piezoelectric ceramic, and a tungsten probe. The magnetostrictive rod 7 is located at the upper end and mainly serves a telescoping function. The tungsten probe is located at the lower end, and the piezoelectric ceramic is located in the middle. The tungsten probe acts as a contact element, and the piezoelectric material acts as a connecting part. When the piezoelectric material (such as quartz, barium titanate, lead zirconate titanate, etc.) is subjected to mechanical stress, the positive and negative charge centers in the crystal lattice undergo relative displacement, resulting in bound charges on the surface (positive piezoelectric effect). Conversely, when an external electric field is applied, ion displacement induces lattice strain (inverse piezoelectric effect). The two follow a thermodynamic reciprocity relationship. The inverse piezoelectric effect, as an important manifestation of the electromechanical coupling characteristics of piezoelectric materials, is essentially due to the ion displacement polarization induced by the non-centrosymmetry of the crystal structure under the action of an electric field. The piezoelectric ceramic is used to detect the position when a feedback force is received, thereby enabling accurate measurement.

[0028] During measurement, the position of the detection component is first adjusted to a suitable measurement position. Then, the magnetostrictive rod 7 and the piezoelectric ceramic form a dual displacement movement. By utilizing the expansion and contraction characteristics of the magnetostrictive rod 7 and the piezoelectric effect of the piezoelectric ceramic, the two are combined to achieve minute displacement, thereby enabling precise measurement.

[0029] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of the claims of this patent application.

Claims

1. A micro-displacement measurement system, characterized in that, The device includes a bracket (1), with horizontally arranged electromagnetic coils (2) fixedly connected to the inner sides of both ends of the bracket (1). An adjustment handle (3) for adjusting the position of the electromagnetic coils (2) is provided on the outer side of the bracket (1). A linear drive motor (4) is provided in the middle of the bracket (1) between the two electromagnetic coils (2). A grating ruler (5) is connected to the side of the linear drive motor (4). The linear drive motor (4) drives the moving part (16) to move longitudinally. A base (6) is provided above the moving part (16). A magnetostrictive rod (7) arranged vertically and cooperating with the moving part (16) is detachably connected to the base (6). A piezoelectric ceramic is fixedly connected to the extended end of the magnetostrictive rod (7). A tungsten probe is connected to the extended end of the piezoelectric ceramic.

2. The micro-displacement measurement system according to claim 1, characterized in that, The support (1) is a U-shaped structure, and the electromagnetic coils (2) are located on the inner sides of both ends of the U-shaped structure. The two electromagnetic coils (2) are arranged horizontally.

3. The micro-displacement measurement system according to claim 2, characterized in that, The distance between the two electromagnetic coils (2) is less than the radius of the electromagnetic coils (2).

4. The micro-displacement measurement system according to claim 1, characterized in that, The grating ruler (5) is arranged longitudinally and embedded in the side of the linear drive motor (4).

5. The micro-displacement measurement system according to claim 1, characterized in that, The base (6) includes a fixing rod (8), with a clamping plate (9) threaded to both ends of the fixing rod (8) to cooperate with the side of the electromagnetic coil (2). A vertically arranged connecting hole (10) is provided in the middle of the fixing rod (8) corresponding to the position of the moving part (16), and a fastening screw (11) is provided on the side of the connecting hole (10).

6. The micro-displacement measurement system according to claim 5, characterized in that, The magnetostrictive rod (7), piezoelectric ceramic and tungsten probe are an integrated structure, and the upper end of the magnetostrictive rod (7) can be detachably connected to the connection hole (10).

7. The micro-displacement measurement system according to claim 6, characterized in that, The magnetostrictive rod (7) is located at the upper end, the tungsten probe is located at the lower end as a contact part, and the piezoelectric ceramic is located in the middle to connect the magnetostrictive rod (7) and the tungsten probe.

8. The micro-displacement measurement system according to claim 1, characterized in that, The linear drive motor (4) is fixedly connected to the bracket (1) between the two electromagnetic coils (2), and the moving part (16) is located at the upper end of the linear drive motor (4). The moving part (16) moves horizontally through the drive motor.

9. The micro-displacement measurement system according to claim 6, characterized in that, The moving part (16) includes a top plate (12), a bottom plate (13) and connecting rods (14). The bottom plate (13) is located at the lower end and is connected to the linear drive motor (4). The top plate (12) is located above the bottom plate (13) and is arranged parallel to the bottom plate (13). There are multiple connecting rods (14) used to connect the top plate (12) and the bottom plate (13). The connecting rods (14) are located at the outer edges of the bottom plate (13) and the top plate (12) respectively.

10. The micro-displacement measurement system according to claim 9, characterized in that, The moving part (16) is made of nylon material, and the top plate (12) has a longitudinally arranged receiving groove (15) at the upper end.

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