Photoresist resin reaction kettle liquid level monitoring device

Abstract

The utility model belongs to cauldron body liquid level monitoring equipment technical field discloses a kind of photoresist resin reaction kettle liquid level monitoring devices, including reaction kettle body, further include: transparent observation window, observation window is along the vertical direction of reaction kettle body Setting, and located at the top of reaction kettle body;Buoyancy assembly, buoyancy assembly includes the float ball in reaction kettle body and rigidly mounted on the inner permanent magnet of float ball outer surface;Liquid level indicating mechanism, liquid level indicating mechanism includes the rotating shaft that is installed on observation window by bearing, the outer permanent magnet rotatably by rotating shaft, pointer and scale ring, scale ring is installed on observation window, outer permanent magnet and inner permanent magnet are mutually magnetic force coupling.The utility model is magnetically coupled design by mechanical type, utilizes inner permanent magnet and outer permanent magnet magnetic force coupling transmission liquid level signal, thoroughly insulates the contact of electronic sensor and material, eliminate metal ion pollution source, while ensuring 365nm i line, ArF / KrF and other high-end photoresist resin purity.

Description

Technical Field

[0001] This utility model relates to the technical field of liquid level monitoring equipment for reactors, and in particular to a liquid level monitoring device for a photoresist resin reactor. Background Technology

[0002] In the synthesis and production of photoresist resins, the liquid level in the reactor is a crucial process parameter. Precise liquid level control directly affects the accuracy of reactant ratios, the stability of the reaction process, and the quality of the final product. This is especially true for high-end photoresists, such as the resins used in anti-reflective coatings, ArF anti-reflective coatings, and KrF anti-reflective coatings that are compatible with 365nm i-line photoresists, whose synthesis process is extremely sensitive to impurities and the intensity of the reaction.

[0003] Currently, most common liquid level monitoring methods use electronic sensors, such as capacitive, ultrasonic, or radar level gauges. However, in the specific scenario of photoresist resin synthesis, the following problems exist: 1) Contamination risk: The sensor probe comes into direct contact with the reaction material, which may introduce impurities such as metal ions, contaminating the high-purity photoresist resin. 2) Low reliability: The reaction vessel is often accompanied by strong mechanical stirring, changes in material viscosity, and possible polymer adhesion to the wall, which can interfere with the accuracy of electronic signals and lead to measurement inaccuracies. Therefore, we propose a liquid level monitoring device for photoresist resin reaction vessel. Utility Model Content

[0004] In view of the problems of pollution risk and low reliability of the existing liquid level monitoring methods, this utility model is proposed.

[0005] To solve the above-mentioned technical problems, this utility model provides the following technical solution: A photoresist resin reaction vessel level monitoring device includes a reaction vessel body and further includes: A transparent observation window is provided along the vertical direction of the reactor body and is located at the top of the reactor body; A buoyancy assembly, comprising a float located within the reactor body and an inner permanent magnet rigidly mounted on the outer surface of the float; A liquid level indicating mechanism includes a rotating shaft mounted on the observation window via a bearing, an outer permanent magnet rotatably mounted on the rotating shaft, a pointer fixed on the rotating shaft, and a scale ring corresponding to the pointer. The scale ring is mounted on the observation window, and the outer permanent magnet and the inner permanent magnet are magnetically coupled to each other.

[0006] As a technical solution of the photoresist resin reactor liquid level monitoring device of this utility model, the observation window is made of borosilicate glass or sapphire glass.

[0007] As a technical solution of the photoresist resin reactor liquid level monitoring device of the present invention, the density of the float is configured to be adapted to the density of a specific type of photoresist resin during the reaction process.

[0008] As a technical solution of the photoresist resin reactor liquid level monitoring device of the present invention, the specific type of photoresist resin includes resins used for 365nm i-line photoresist anti-reflection coatings, ArF anti-reflection coatings, or KrF anti-reflection coatings.

[0009] As a technical solution of the photoresist resin reactor liquid level monitoring device of this utility model, the scale ring is provided with a colored marking area corresponding to different types of photoresist resin.

[0010] As a technical solution of the photoresist resin reactor liquid level monitoring device of this utility model, the observation window can be provided in multiple sets along the vertical direction, and correspondingly provided with the same number of buoyancy components and liquid level indicating mechanisms. In the device arranged in parallel, the floats have different densities.

[0011] Compared with the prior art, the present invention has at least the following beneficial effects: 1. This utility model, through mechanical magnetic coupling design, uses the magnetic coupling between the inner permanent magnet and the outer permanent magnet to transmit liquid level signals, completely isolates the contact between the electronic sensor and the material, eliminates the source of metal ion contamination, and at the same time ensures the purity of high-end photoresist resins such as 365nm i-line and ArF / KrF.

[0012] 2. This utility model, through the mechanical pointer reading design, combined with the customized float density and corrosion-resistant observation window, can resist stirring turbulence, viscosity change and polymer wall interference, and maintain stable monitoring in the high viscosity and strong exothermic reaction of photoresist resin synthesis. Attached Figure Description

[0013] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Among them: Figure 1 This is a schematic diagram of the main structure of this utility model.

[0014] Figure 2 This is a cross-sectional structural diagram of the present invention.

[0015] Figure 3For the present utility model Figure 2 Enlarged structural diagram at point A in the middle.

[0016] Figure 4 For the present utility model Figure 2 Enlarged structural diagram at point B.

[0017] Explanation of reference numerals in the attached figures: In the diagram: 1. Reactor body; 2. Observation window; 301. Float; 302. Inner permanent magnet; 401. Rotating shaft; 402. Outer permanent magnet; 403. Pointer; 404. Scale ring; 4041. Color marking area. Detailed Implementation

[0018] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0019] Reference Figures 1-4 A photoresist resin reactor level monitoring device is provided. This device includes a reactor body 1 and further includes: A transparent observation window 2 is set along the vertical direction of the reactor body 1 and is located at the top of the reactor body 1. The surface of the observation window 2 is coated with an anti-fog coating and has a temperature resistance range of -50℃ to 300℃. The buoyancy assembly includes a float 301 located inside the reactor body 1 and an inner permanent magnet 302 rigidly mounted on the outer surface of the float 301. The float 301 is a hollow sphere of titanium alloy coated with polytetrafluoroethylene (PTFE) (density adjustable range of 0.85–1.35 g / cm³) and filled with an inert gas (such as argon). The inner permanent magnet 302 is a neodymium iron boron magnetic ring (N52 grade) and is bonded to the outer surface of the float 301 with epoxy resin adhesive, with the magnetic pole direction perpendicular to the liquid surface. The liquid level indicating mechanism includes a rotating shaft 401 mounted on the observation window 2 via a bearing (such as a ceramic bearing), an outer permanent magnet 402 rotatably mounted on the rotating shaft 401, a pointer 403 fixed on the rotating shaft 401, and a scale ring 404 corresponding to the pointer 403. The correspondence between the pointer 403 and the scale ring 404 needs to be pre-calibrated using a density and liquid level calibration curve (e.g., KrF resin density 1.12 g / cm³ corresponds to the green marking area). The scale ring 404 is mounted on the observation window 2, and the outer permanent magnet 402 and the inner permanent magnet 302 are magnetically coupled to each other. The outer permanent magnet 402 and the inner permanent magnet 302 are opposite each other with the same pole (repulsive coupling) and the magnetic gap is ≤5mm. In application, the inner permanent magnet 302 on the float 301 and the outer permanent magnet 402 on the outer rotating shaft 401 of the observation window 2 transmit the liquid level signal through magnetic coupling, completely avoiding contact between the sensor and the material, eliminating the risk of metal ion contamination (such as iron and nickel ions), meeting the high purity requirements of photoresist resin, and directly displaying the liquid level through the pointer 403 and the scale ring 404 without the need for electronic signal conversion. It is resistant to stirring vibration, viscosity change and polymer wall interference, and improves reliability.

[0020] Reference Figure 1 and Figure 2 The observation window 2 is made of high borosilicate glass or sapphire glass. In application, the material of observation window 2 is optimized. The high borosilicate glass or sapphire glass has ultra-high corrosion resistance, low coefficient of thermal expansion and high transparency. It can withstand the chemical corrosion of photoresist resin (such as acidic solvents) and reaction temperature fluctuations for a long time, ensuring the clarity and durability of the observation.

[0021] Reference Figure 2 and Figure 3 The density of float 301 is configured to adapt to the density of a specific type of photoresist resin during the reaction process. This specific type of photoresist resin includes resins used for 365nm i-line photoresist anti-reflective coatings, ArF anti-reflective coatings, or KrF anti-reflective coatings. In applications, the density of float 301 is customized to precisely match the buoyancy for different photoresist resins (such as 365nm i-line / ArF / KrF anti-reflective coating resins) during the reaction process (typically 0.9–1.3 g / cm³), avoiding liquid level measurement deviations caused by density mismatch.

[0022] Reference Figure 1 and Figure 2The scale ring 404 is provided with color marking areas 4041 corresponding to different types of photoresist resins. The color marking areas 4041 on each scale ring 404 are divided according to the resin type (e.g., blue = 365nm i-line, red = ArF, green = KrF). In application, the color marking areas 4041 on the scale ring 404 can intuitively distinguish the liquid level safety range corresponding to the resin type, reduce the risk of human error in interpretation, and adapt to the rapid switching needs of multi-product production lines.

[0023] Reference Figures 1-4 Multiple sets of observation windows 2 can be set vertically, and each set has the same number of buoyancy components and liquid level indicators. In the parallel-connected device, the floats 301 have different densities. Three sets of observation windows 2 (top, middle, and bottom) are installed at different heights of the reaction body 1, and floats 301 with increasing densities (e.g., 0.95 / 1.10 / 1.25 g / cm³) are configured respectively. In application, the liquid level of layered or mixed materials in the same reaction vessel body 1 (e.g., the interface of layered reaction) can be monitored synchronously through multiple sets of independent buoyancy components (float 301 with different densities) and liquid level indicators, or the co-line production requirements of multiple types of resins can be met.

[0024] The working principle of this utility model is as follows: Installation and calibration operation: First, select float 301 according to the target resin type (e.g., select float 301 with 1.05g / cm³ for ArF resin). Fine-tune the density by adding or removing internal counterweights. Then, perform magnetic coupling calibration. In the empty vessel state, manually rotate the shaft 401 to make the pointer 403 point to the initial position (i.e., the "0" position) of the scale ring 404, ensuring that the polarity of the outer permanent magnet 402 and the inner permanent magnet 302 are aligned. Finally, inject a known volume of resin, record the correspondence between the position of the pointer 403 and the theoretical liquid level, and correct the error of the scale ring 404 (the error must be ≤±2%). Routine monitoring operation: First, observe the pointer 403 on the outer rotating shaft 401 of the top observation window 2 to ensure that the liquid level reaches the preset feeding threshold (such as the upper limit of the green indicator area). Then monitor the dynamics of the pointer 403. If it rises at a uniform speed, it indicates that the reaction is stable. If it fluctuates violently, it indicates that boiling or stratification may occur. If multiple groups are connected in parallel and stratification monitoring is performed, compare the difference between the pointer 403 in the middle and bottom observation windows 2 to determine the stratification of the material (if the difference is greater than 5%, an alarm should be triggered). Maintenance and switching operations: If it is necessary to switch resin types, the corresponding density float 301 should be replaced and the colored marking area 4041 of the scale ring 404 should be adjusted to the safe range of the new resin. After each batch of reaction, the inner wall of the observation window 2 should be purged with ultrapure water and nitrogen to prevent resin residue. The magnetic flux decay of the outer permanent magnet 402 and the inner permanent magnet 302 should be checked every six months (if the decay is greater than 15%, it needs to be replaced).

[0025] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A photoresist resin reactor level monitoring device, comprising a reactor body (1), characterized in that: Also includes: A transparent observation window (2) is provided along the vertical direction of the reactor body (1) and is located at the top of the reactor body (1); The buoyancy assembly includes a float (301) located inside the reactor body (1) and an inner permanent magnet (302) rigidly mounted on the outer surface of the float (301). The liquid level indicator mechanism includes a rotating shaft (401) mounted on the observation window (2) via a bearing, an outer permanent magnet (402) rotatably mounted on the rotating shaft (401), a pointer (403) fixed on the rotating shaft (401), and a scale ring (404) corresponding to the pointer (403). The scale ring (404) is mounted on the observation window (2), and the outer permanent magnet (402) and the inner permanent magnet (302) are magnetically coupled to each other.

2. The photoresist resin reactor level monitoring device according to claim 1, characterized in that: The observation window (2) is made of borosilicate glass or sapphire glass.

3. The photoresist resin reactor level monitoring device according to claim 1, characterized in that: The density of the float (301) is configured to be compatible with the density of a specific type of photoresist resin during the reaction process.

4. The photoresist resin reactor level monitoring device according to claim 3, characterized in that: The specific type of photoresist resin includes resins used for 365nm i-line photoresist antireflective coatings, ArF antireflective coatings, or KrF antireflective coatings.

5. The photoresist resin reactor level monitoring device according to claim 3, characterized in that: The scale ring (404) is provided with a colored marking area (4041) corresponding to different types of photoresist resins.

6. The photoresist resin reactor level monitoring device according to claim 1, characterized in that: The observation window (2) can be set in multiple groups along the vertical direction, and is equipped with the same number of buoyancy components and liquid level indicator mechanisms. In the devices set in parallel, the floats (301) have different densities.

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