Furnace door and process furnace

Abstract

This disclosure relates to the fields of semiconductor and photovoltaic technology, and particularly to a furnace door and process furnace, addressing the problem of sealing failure in related technologies due to the furnace door being exposed to a high-temperature environment for extended periods. The furnace door includes a door body and a cooling flow channel, which includes an inlet and an outlet. The cooling flow channel comprises a first flow channel, a second flow channel, a first channel, and a second channel that are interconnected. The first and second flow channels are arranged opposite each other along a first direction, and the first and second channels are arranged opposite each other along a second direction. The first end of the first flow channel and the first end of the second flow channel are connected through the first channel, and the second end of the first flow channel and the second end of the second flow channel are connected through the second channel. The inlet is located at the first end of the first flow channel, and the outlet is located at the first end of the second flow channel. The furnace door and process furnace provided by this disclosure are beneficial for increasing the coverage area and flow velocity of the cooling medium in the furnace door, thereby improving the cooling effect of the furnace door and preventing sealing failure.

Description

Technical Field

[0001] This disclosure relates to the fields of semiconductor and photovoltaic technology, and in particular to a furnace door and a process furnace. Background Technology

[0002] With the development of semiconductor and photovoltaic technologies, solar cells are widely used in various fields. The manufacturing process of solar cells requires the use of process furnaces to perform various processes on silicon wafers, such as surface coating and passivation. During the processing of silicon wafers within the furnace cavity, it is necessary to maintain a relatively stable high-temperature environment within the furnace for extended periods. However, the furnace door used to seal the cavity is prone to seal failure due to prolonged exposure to high temperatures, leading to an inability to maintain a constant temperature within the furnace cavity and thus affecting the processing results. Utility Model Content

[0003] In view of this, the present disclosure provides a furnace door and a process furnace to solve the problem in the related art that the furnace door of the process furnace is prone to sealing failure due to being in a high-temperature environment for a long time.

[0004] In a first aspect, one embodiment of this disclosure provides a furnace door applied to a process furnace. The furnace door includes: a furnace door body; and a cooling flow channel disposed on the furnace door body. The cooling flow channel is configured to allow a cooling medium to pass through, and includes an inlet and an outlet communicating with the outside for the cooling medium to pass through. The cooling flow channel includes a first flow channel, a second flow channel, a first channel, and a second channel that are connected to each other. The first flow channel and the second flow channel are arranged opposite to each other along a first direction, and the first channel and the second channel are arranged opposite to each other along a second direction. The first direction and the second direction intersect. The first end of the first flow channel and the first end of the second flow channel are fluidly connected through the first channel, and the second end of the first flow channel and the second end of the second flow channel are fluidly connected through the second channel. The inlet is located at the first end of the first flow channel, and the outlet is located at the first end of the second flow channel.

[0005] In some embodiments, it further includes: a seal fitted around the periphery of the furnace door body, the seal being configured to seal the gap between the furnace door body and the process furnace; wherein at least a portion of the first flow channel and at least a portion of the second flow channel are disposed near the seal and arranged along the inner periphery of the seal.

[0006] In some embodiments, the first flow channel includes a first edge flow channel, and the second flow channel includes a second edge flow channel. The first edge flow channel and the second edge flow channel are arranged along the inner circumferential side of the seal, wherein the first edge flow channel and the second edge flow channel are arranged opposite to each other in a first direction, and the two ends of the first edge flow channel and the second edge flow channel in a second direction are connected by a first channel and a second channel, respectively.

[0007] In some embodiments, the first flow channel further includes a first central flow channel that communicates end-to-end with the first edge flow channel, the first central flow channel extending at least partially along a second direction, and an inlet provided at a location where the first edge flow channel and the first central flow channel communicate; and / or, the second flow channel further includes a second central flow channel that communicates end-to-end with the second edge flow channel, the second central flow channel extending at least partially along a second direction, and an outlet provided at a location where the second edge flow channel and the second central flow channel communicate.

[0008] In some embodiments, the second direction is parallel to the gravity direction of the furnace door body, the first direction is perpendicular to the gravity direction of the furnace door body, the inlet and outlet are arranged opposite to each other in the first direction, and the first channel is located above the inlet and outlet in the second direction. The first channel is configured to discharge the gas of the first flow channel from the outlet through the first channel.

[0009] In some embodiments, the cross-sectional area of ​​the first channel is less than or equal to the cross-sectional area of ​​the second channel.

[0010] In some embodiments, the furnace door body includes: a main body having a flow channel groove arranged on one side in the thickness direction, the thickness direction, the first direction, and the second direction intersecting each other; and a cover plate covering the side of the main body where the flow channel groove is provided, the cover plate having an inlet and an outlet communicating with the flow channel groove, the cover plate and the main body forming a cooling flow channel by the cover plate and the main body.

[0011] In some embodiments, the body has a recess on one side in the thickness direction, a cover plate covers the opening of the recess, the bottom wall of the recess has a central protrusion extending in a second direction, the central protrusion divides the recess into a first flow channel and a second flow channel arranged in a first direction, and the central protrusion has gaps between its two ends in the second direction and the side wall of the recess, respectively, to form the first channel and the second channel.

[0012] In some embodiments, the recessed bottom wall is further provided with a snap-fit ​​portion, and the cover plate is provided with a snap-fit ​​hole that mates with the snap-fit ​​portion. When the cover plate covers the opening of the recess, the snap-fit ​​portion passes through the snap-fit ​​hole and is snapped into place with the snap-fit ​​hole.

[0013] Secondly, this disclosure also provides a process furnace, including: a furnace body having a furnace opening; and a furnace door as described above, wherein the furnace door is disposed at a position on the furnace body corresponding to the furnace opening, and the furnace door is configured to open or close the furnace opening.

[0014] This disclosure provides a furnace door and process furnace. A first flow channel and a second flow channel are arranged opposite to each other in a first direction on the furnace door body. A first channel is connected to the first end of the first flow channel and the first end of the second flow channel. A second channel is connected to the second end of the first flow channel and the second flow channel. The inlet is located at the first end of the first flow channel, and the outlet is located at the first end of the second flow channel. The second channel is used to introduce the cooling medium from the first flow channel into the second flow channel, and the first channel is used to introduce the gas from the first flow channel into the second flow channel and finally exit from the outlet. This allows the cooling medium to quickly fill the entire cooling flow channel and circulate rapidly along it, thereby improving the cooling efficiency of the furnace door. When the furnace door is in a high-temperature environment, the cooling flow channel can continuously and stably cool the furnace door, preventing deformation and other problems caused by high temperatures that could lead to sealing failure of the furnace cavity. This helps maintain the furnace cavity temperature at a constant level, ensuring the process effect of the workpieces to be processed within the furnace cavity.

[0015] In addition, by setting the first channel, as the cooling medium enters the first channel, as the amount of cooling medium increases, excess air in the first channel can be guided from the first channel to the second channel and then discharged from the outlet. This is beneficial for the cooling medium to quickly fill the entire first and second channels, increasing the coverage area of ​​the cooling medium on the furnace door body and further improving the cooling effect on the furnace door. Attached Figure Description

[0016] The above and other objects, features, and advantages of this disclosure will become more apparent from the more detailed description of the embodiments thereof in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this disclosure and form part of the specification. They are used together with the embodiments of this disclosure to explain the disclosure and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The diagram shown is a schematic diagram of a process furnace provided in an embodiment of this disclosure.

[0018] Figure 2 The diagram shown is a schematic diagram of a furnace door provided in an embodiment of this disclosure.

[0019] Figure 3 The image shown is a front view of a furnace door arrangement cooling flow channel provided in an embodiment of this disclosure.

[0020] Figure 4 The image shown is a front view of a furnace door arrangement cooling flow channel provided in another embodiment of this disclosure.

[0021] Figure 5 The image shown is a front view of a furnace door arrangement cooling flow channel provided in another embodiment of this disclosure.

[0022] Figure 6 The diagram shown is a schematic representation of the main body provided in an embodiment of this disclosure.

[0023] Figure 7 The image shown is a front view of a cover plate provided in an embodiment of this disclosure.

[0024] Figure label:

[0025] 100. Process furnace; 10. Furnace door; 1. Furnace door body; 1a. Centerline; 11. Main body; 111. First sub-slot; 112. Second sub-slot; 113. Third sub-slot; 114. Fourth sub-slot; 115. First groove; 116. Groove; 12. Cover plate; 121. Second opening; 122. Third opening; 123. First opening; 124. Snap-fit ​​hole; 13. Snap-fit ​​part; 14. First protrusion; 15. Second protrusion; 16. Central protrusion; 2 1. Cooling flow channel; 2a. Inlet; 2b. Outlet; 2a1. Water inlet pipe; 2b1. Water outlet pipe; 21. First flow channel; 211. First edge flow channel; 212. First center flow channel; 22. Second flow channel; 221. Second edge flow channel; 222. Second center flow channel; 23. First channel; 24. Second channel; 3. Sealing element; 20. Furnace body; 201. Furnace cavity; 30. Part to be processed; X. First direction; Y. Second direction; Z. Thickness direction. Detailed Implementation

[0026] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0027] Figure 1 The diagram shown is a schematic diagram of a process furnace provided in an embodiment of this disclosure. Figure 2 The diagram shown is a schematic diagram of a furnace door provided in an embodiment of this disclosure. Figure 3 The image shows a front view of a furnace door arrangement for a cooling flow channel according to an embodiment of this disclosure. Arrow X points to a first direction, arrow Y points to a second direction, and arrow Z points to the thickness direction of the furnace door body 1, which is also the extension direction of the furnace cavity 201 in the furnace body 20. The first direction X, the second direction Y, and the thickness direction Z intersect each other. In this embodiment, the first direction X, the second direction Y, and the thickness direction Z are perpendicular to each other. When the furnace door 10 is installed at the furnace opening of the furnace body 20, the second direction Y is parallel to the gravity direction of the furnace door body 1, and the first direction X is perpendicular to the gravity direction of the furnace door body 1, but this is not a limitation. Furthermore, Figure 3 The direction indicated by the dashed arrow inside the flow channel is the flow direction of the cooling medium.

[0028] This disclosure provides an embodiment of a furnace door, such as... Figures 1 to 3 The furnace door 10 is applied to the process furnace 100. The furnace door 10 includes a furnace door body 1 and a sealing element 3, which is sleeved around the periphery of the furnace door body 1. The process furnace 100 includes a furnace body 20 having a furnace cavity 201. At least one side of the furnace body 20 is provided with a furnace opening communicating with the furnace cavity 201. The furnace door body 1 is movably connected to the furnace body 20 near the furnace opening. The furnace door body 1 can open or close the furnace opening to allow the process component 30 to enter and exit the furnace cavity 201 from the furnace opening.

[0029] Optionally, the furnace door body 1 can be movably or rotatably connected to the furnace body 20 at the position corresponding to the furnace opening, so that the furnace door body 1 can be opened or sealed at the furnace opening, which will not be described in detail.

[0030] Understandably, when the furnace door body 1 blocks the furnace opening, the sealing element 3 is configured to seal the gap at the mating point between the furnace door body 1 and the furnace opening of the process furnace 100, so as to keep the furnace cavity 201 in a sealed state. The sealing element 3 can be, for example, a ring-shaped sealing ring structure fitted onto the outer periphery of the furnace door body 1. The material of the sealing element 3 can be rubber with deformability, and can be adapted to actual needs without specific limitations.

[0031] Optionally, the outer edge of the furnace door body 1 on the side facing the furnace body 20 in the thickness direction Z can be pre-set with an annular mounting groove, and the sealing element 3 can be fitted into the annular mounting groove. The shape of the furnace body 20 can be set as circular, square, polygonal, etc., and can be adapted to the shape of the furnace body 20 without being specifically limited. In the embodiment of this disclosure, the shape of the furnace door body 1 is set as circular, and the sealing element 3 is set as an annular sealing ring structure, but it is not limited to this.

[0032] Optionally, the workpiece to be processed can be a silicon wafer used to prepare solar cells or semiconductors. The shape of the silicon wafer includes square, round, etc. With the furnace door 10 open, one or more unprocessed silicon wafers can be placed into the furnace chamber 201 or processed silicon wafers can be removed from the furnace chamber 201. With the furnace door 10 closed, the furnace chamber 201 is in a sealed environment, allowing for the processing of one or more silicon wafers placed inside the furnace chamber 201. The process furnace 100 can be a processing furnace used for crystallization and coating of silicon wafer surfaces in a coating equipment, an annealing furnace used for annealing silicon wafers in an annealing equipment, a passivation furnace used for passivating silicon wafer surfaces in a passivation equipment, or any other furnace in process equipment that requires maintaining the furnace chamber 201 at a high temperature during the process; no specific limitation is made.

[0033] The furnace door 10 also includes a cooling channel 2, which is arranged in the furnace door body 1. The cooling channel 2 is configured to allow cooling medium to pass through. The cooling channel 2 includes an inlet 2a and an outlet 2b that are connected to the outside for the cooling medium to pass through. The inlet 2a is configured to be connected to an external device for introducing cooling medium, and the outlet 2b is configured to be connected to an external device for discharging cooling medium, so that the cooling medium can be introduced into or out of the cooling channel 2, and the cooling medium can circulate in the cooling channel 2 when the inlet 2a and the outlet 2b are always connected to the external device, thereby cooling the furnace door 10.

[0034] Optionally, the cooling medium can be set as coolant, water, or cooling gas, etc., and can be adapted to meet actual needs. For ease of understanding and explanation, the cooling medium in this embodiment is set as cooling water, but it is not limited thereto.

[0035] Specifically, the cooling channel 2 includes a first channel 21, a second channel 22, a first passage 23, and a second passage 24 that are connected to each other. The first channel 21 and the second channel 22 are arranged opposite each other along a first direction X, and the first passage 23 and the second passage 24 are arranged opposite each other along a second direction Y. The first end of the first channel 21 and the first end of the second channel 22 are fluidly connected through the first passage 23, and the second end of the first channel 21 and the second end of the second channel 22 are fluidly connected through the second passage 24. The inlet 2a is located at the first end of the first channel 21, and the outlet 2b is located at the first end of the second channel 22. In the process of introducing the cooling medium from the inlet 2a into the cooling channel 2, the cooling medium first enters the first end of the first channel 21. Under the action of gravity, the cooling medium can quickly flow into the second end of the first channel 21 and then into the first channel 21 from the second channel 24. As the amount of cooling medium in the first channel 21 and the second channel 22 increases, the excess gas in the first channel 21 can be guided to the second channel 22 through the first channel 23 and then discharged from the outlet 2b, so that the cooling medium can quickly fill the first channel 21 and the second channel 22 and quickly realize the circulation of the cooling medium.

[0036] Optionally, the furnace door body 1 can be made of metal materials, such as stainless steel or alloy steel that are resistant to high temperatures and not easily deformed, without specific limitations.

[0037] The furnace door provided in this embodiment comprises a first flow channel 21 and a second flow channel 22 disposed opposite to each other in a first direction X on the furnace door body 1, a first channel 23 connecting the first end of the first flow channel 21 and the first end of the second flow channel 22, and a second channel 24 connecting the second end of the first flow channel 21 and the second end of the second flow channel 22. An inlet 2a is disposed at the first end of the first flow channel 21, and an outlet 2b is disposed at the first end of the second flow channel 22. The second channel 24 is used to introduce the cooling medium of the first flow channel 21 into the second flow channel 22. 23 is used to introduce the gas from the first flow channel 21 into the second flow channel 22 and finally out from the outlet 2b, so that the cooling medium can quickly fill the entire cooling flow channel 2 and circulate rapidly along the cooling flow channel 2, thereby improving the cooling efficiency of the furnace door 10. When the furnace door 10 is in a high temperature environment, the cooling flow channel 2 can continuously and stably cool the furnace door 10, so as to avoid the furnace door 10 from deforming due to high temperature and other problems, which would cause the furnace cavity 201 to fail to seal. This is conducive to maintaining a constant temperature in the furnace cavity 201, so as to ensure the process effect of the workpiece 30 to be processed in the furnace cavity 201.

[0038] In addition, by setting the first channel 23, as the cooling medium enters the first flow channel 21, as the amount of cooling medium increases, excess air in the first flow channel 21 can be guided from the first channel 23 to the second flow channel 22, and then discharged from the outlet 2b. This is beneficial for the cooling medium to quickly fill the entire first flow channel 21 and the second flow channel 22, increasing the coverage area of ​​the cooling medium on the furnace door body 1, and further improving the cooling effect on the furnace door 10.

[0039] In some embodiments, when the seal 3 is sleeved on the periphery of the furnace door body 1, at least a portion of the first flow channel 21 and at least a portion of the second flow channel 22 are disposed near the seal 3 and arranged along the inner periphery of the seal 3. This allows the cooling medium to carry away the heat of the seal 3 in contact with the furnace door body 1 during the flow of the cooling flow channel 2, thereby cooling the seal 3 and preventing the seal 3 from easily deforming, being damaged, or aging due to long-term exposure to high temperatures. This ensures the sealing effect of the seal 3, eliminates the need for frequent replacement, and improves production efficiency.

[0040] Figure 4 The image shown is a front view of a furnace door arrangement cooling flow channel provided in another embodiment of this disclosure. Figure 5 The image shown is a front view of a furnace door arrangement cooling channel provided in another embodiment of this disclosure. The direction indicated by the dashed arrows within the channel is the flow direction of the cooling medium.

[0041] Combination Figures 3 to 5 The arrangement of the first flow channel 21 and the second flow channel 22 in the furnace door body 1 can be varied, as follows:

[0042] like Figure 3 The first flow channel 21 includes a first edge flow channel 211, and the second flow channel 22 includes a second edge flow channel 221. The first edge flow channel 211 and the second edge flow channel 221 are arranged along the inner circumference of the seal 3. The first edge flow channel 211 and the second edge flow channel 221 are arranged opposite to each other in the first direction X, and the first edge flow channel 211 and the second edge flow channel 221 are respectively connected to the first channel 23 and the second channel 24 at their two ends in the second direction Y. The connection of the first edge flow channel 211, the second channel 24, the second edge flow channel 221 and the first channel 23 allows the cooling medium to be fully filled into the cooling flow channel 2. At the same time, the first edge flow channel 211 and the second edge flow channel 221 can more efficiently cool the seal 3, which is beneficial to improving the cooling effect on the furnace door 10, thereby extending the service life of the furnace door 10.

[0043] Optionally, the first edge channel 211, the second channel 24, the second edge channel 221, and the first channel 23 can be connected end-to-end to form a ring structure with the same shape as the seal 3. The flow channels of the ring structure are as close as possible to the seal 3, such as the distance from the flow channels of the ring structure to the seal 3 being less than or equal to 50 mm, to further improve the cooling effect on the seal 3. In other examples, the first edge channel 211, the second channel 24, the second edge channel 221, and the first channel 23 can also be connected end-to-end to form a ring structure with a different shape from the seal 3. This can be adapted according to actual needs and is not specifically limited.

[0044] Optionally, the furnace door body 1 has a centerline 1a extending along the second direction Y, and the first edge flow channel 211 and the second edge flow channel 221 are symmetrically arranged with respect to the centerline 1a.

[0045] Optionally, the inlet 2a and outlet 2b are also symmetrically arranged on both sides of the centerline 1a, and along the second direction Y, the distance from the inlet 2a to the second channel 24 is the same as the distance from the outlet 2b to the second channel 24. It should be emphasized that the cross-sectional area of ​​the inlet 2a can be the same as or different from the cross-sectional area of ​​the outlet 2b, and can be adjusted adaptively according to actual conditions. In this embodiment, the cross-sectional areas of the inlet 2a and the outlet 2b are the same, and the inlet 2a is connected to an inlet pipe 2a1, and the outlet 2b is connected to an outlet pipe 2b1.

[0046] like Figure 4 and Figure 5Based on the first edge flow channel 21, the first flow channel 21 also includes a first central flow channel 212 that is connected end-to-end with the first edge flow channel 211. The first central flow channel 212 extends at least partially along the second direction Y, and an inlet 2a is provided at the position where the first edge flow channel 211 and the first central flow channel 212 connect. That is, the two ends of the parallel connection of the first edge flow channel 211 and the first central flow channel 212 are respectively connected to the first channel 23 and the second channel 24, which is beneficial to increasing the flow velocity of the cooling medium in the first flow channel 21 and increasing the coverage area of ​​the cooling medium on the furnace door body 1, thereby improving the cooling effect on the furnace door 10.

[0047] Optionally, the first central flow channel 212 can be located near the centerline 1a, and the first central flow channel 212 can be a straight flow channel structure that extends entirely along the second direction Y, or it can be a bent flow channel structure that extends partly along the second direction Y and partly or more along other directions. It can be adapted to actual needs and is not specifically limited.

[0048] Continue as Figure 4 and Figure 5 In addition to the second edge flow channel 221, the second flow channel 22 also includes a second central flow channel 222 that is connected end-to-end with the second edge flow channel 221. The second central flow channel 222 extends at least partially along the second direction Y, and an outlet 2b is provided at the position where the second edge flow channel 221 and the second central flow channel 222 connect. That is, the two ends of the parallel connection between the second edge flow channel 221 and the second central flow channel 222 are respectively connected to the first channel 23 and the second channel 24, which is beneficial to increasing the flow velocity of the cooling medium in the second flow channel 22 and increasing the coverage area of ​​the cooling medium on the furnace door body 1, thereby improving the cooling effect on the furnace door 10.

[0049] Optionally, the second central flow channel 222 can be located near the centerline 1a, and the second central flow channel 222 can be a straight flow channel structure that extends entirely along the second direction Y, or a bent flow channel structure that extends partly along the second direction Y and partly or more along other directions. It can be adapted to actual needs and is not specifically limited.

[0050] It should be emphasized that the first flow channel 21 and the second flow channel 22 can also have other arrangements in the furnace door body 1. For example, based on the above scheme, the first flow channel 21 can also include a first additional flow channel communicating with the first edge flow channel 211, and the second flow channel 22 can also include a second additional flow channel communicating with the second edge flow channel 221. That is, the first flow channel 21 can include two or more parallel sub-flow channels, and the second flow channel 22 can include two or more parallel sub-flow channels, so that the flow channels cover all areas of the furnace door body 1 as much as possible, thereby improving the cooling effect on the furnace door 10. This will not be described in detail.

[0051] It is understandable that, regardless of the arrangement of the first flow channel 21 and the second flow channel 22, for the inlet 2a connected to the first flow channel 21 and the outlet 2b connected to the second flow channel 22, in order to increase the flow rate of the cooling medium and to ensure that the cooling medium can be fully filled in the cooling flow channel 2 and circulated, the second direction Y needs to be parallel to the gravity direction of the furnace door body 1, the first direction X needs to be perpendicular to the gravity direction of the furnace door body 1, the inlet 2a and the outlet 2b need to be arranged opposite each other in the first direction X, and the first channel 23 needs to be located above the inlet 2a and the outlet 2b in the second direction Y. The first channel 23 is configured to discharge excess gas from the first flow channel 21 through the first channel 23 from the outlet 2b, and the second channel 24 needs to be located at the bottom of the entire cooling flow channel 2.

[0052] Optionally, the cross-sectional area of ​​the first channel 23 is less than or equal to the cross-sectional area of ​​the second channel 24. In this embodiment of the present disclosure, the cross-sectional area of ​​the first channel 23 is set to be less than the cross-sectional area of ​​the second channel 24.

[0053] Optionally, along the second direction Y, the first channel 23 is located above the inlet 2a and the outlet 2b, and the distance from the first channel 23 to the inlet 2a or the outlet 2b in the second direction Y is greater than or equal to 1 mm.

[0054] In some embodiments, the cooling channel 2 can be an additional pipe arranged on the basis of the furnace door body 1, or it can be a channel formed by pre-preparing various concave or convex features on the furnace door body 1 to form a channel, which can be adaptively adjusted according to actual needs. In this embodiment of the present disclosure, the cooling channel 2 is a channel pre-formed on the furnace door body 1 by milling, so as to improve the cooling effect on the furnace door 10.

[0055] Figure 6 The diagram shown is a schematic representation of the main body provided in an embodiment of this disclosure. Figure 7 The image shown is a front view of a cover plate provided in an embodiment of this disclosure.

[0056] like Figure 6 and Figure 7The furnace door body 1 includes a main body 11 and a cover plate 12. The main body 11 has a flow channel groove on one side in the thickness direction Z. The cover plate 12 covers the side of the main body 11 with the flow channel groove. The cover plate 12 has an inlet 2a and an outlet 2b that communicate with the flow channel groove. The cover plate 12 and the main body 11 together enclose the flow channel groove to form a cooling flow channel 2. By using the separate structure of the main body 11 and the cover plate 12, the flow channel groove can be enclosed to form the required cooling flow channel 2 when the two are in contact. This allows the cooling medium to directly contact the furnace door body 1 during the flow of the cooling flow channel 2, which is beneficial to improving the cooling effect of the furnace door body 1.

[0057] Optionally, the flow channel grooves arranged on the main body 11 can be completed by milling, which will not be described in detail.

[0058] Optionally, the main body 11 has a recess on one side in the thickness direction Z, and the cover plate 12 covers the opening of the recess. The bottom wall of the recess has a central protrusion 16 extending in the second direction Y. The central protrusion 16 divides the recess into a first flow channel 21 and a second flow channel 22 arranged in the first direction X. The central protrusion 16 has gaps between its two ends in the second direction Y and the sidewalls of the recess, respectively, to form a first channel 23 and a second channel 24. Optionally, when the main body 11 is machined by milling, the recess can be milled according to the desired shape of the first flow channel 21 and the second flow channel 22. The unmilled central portion serves as the central protrusion 16. The milled recess is divided according to the central protrusion 16, thereby obtaining a first groove 115 for forming the first channel 23, a second groove 116 for forming the second channel 24, a third groove for forming the first flow channel 21, and a fourth groove for forming the second flow channel 22.

[0059] Understandably, when the first flow channel 21 includes a first edge flow channel 211 and a first central flow channel 212, the recessed bottom wall is also provided with a first protrusion 14. The first protrusion 14 further divides the third groove into a parallel first sub-groove 111 and a second sub-groove 112. After the cover plate 12 is closed, the first sub-groove 111 is surrounded to form the first edge flow channel 211, and the second sub-groove 112 is surrounded to form the first central flow channel 212. Similarly, when the second flow channel 22 includes a second edge flow channel 221 and a second central flow channel 222, the recessed bottom wall is also provided with a second protrusion 15. The second protrusion 15 further divides the fourth groove into a parallel third sub-groove 113 and a fourth sub-groove 114. After the cover plate 12 is closed, the third sub-groove 113 is surrounded to form the second edge flow channel 221, and the fourth sub-groove 114 is surrounded to form the second central flow channel 222. The first protrusion 14 and the second protrusion 15 are configured as connection parts for fixing the furnace door 10 to the external mechanism.

[0060] Optionally, the shape, number, and arrangement of the first protrusion 14 and the second protrusion 15 can be adapted to actual needs without specific limitations.

[0061] In some alternative embodiments, the recessed bottom wall is further provided with a snap-fit ​​portion 13, which is configured as a passage for fixing the support paddle. One end of the support paddle is fixed to the paddle head frame, and the main body of the support paddle is used to carry the process parts into and out of the furnace chamber 201. The cover plate 12 is provided with a snap-fit ​​hole 124 that mates with the snap-fit ​​portion 13. When the cover plate 12 is closed over the recessed opening, the snap-fit ​​portion 13 passes through the snap-fit ​​hole 124 and is snapped into place. This facilitates the alignment and support of the main body 11 and the cover plate 12, thereby increasing the assembly speed.

[0062] Optionally, when the cover plate 12 covers the recessed opening, the central protrusion 16, the first protrusion 14, the second protrusion 15, etc., can abut against the cover plate 12, or extend into or out of the cover plate 12. That is, the cover plate 12 is provided with corresponding first openings 123, second openings 121 and third openings 122 at the positions corresponding to the central protrusion 16, the first protrusion 14 and the second protrusion 15, so that the central protrusion 16, the first protrusion 14 and the second protrusion 15 can extend into or even out of the cover plate 12 through the corresponding openings to enclose and form the cooling channel 2 of the desired shape.

[0063] It should be emphasized that the central protrusion 16, the first protrusion 14, the second protrusion 15, and the snap-fit ​​part 13 are welded to the cover plate 12 to form a sealed cooling channel 2, preventing leakage from the cooling channel 2 from other positions besides the inlet 2a and outlet 2b. This will not be described in detail.

[0064] Optionally, a water inlet pipe 2a1 is welded at the inlet 2a of the cover plate 12, and a water outlet pipe 2b1 is welded at the outlet 2b of the cover plate 12.

[0065] This disclosure also provides a process furnace, such as... Figure 1 The process furnace 100 includes a furnace body 20 and a furnace door 10. The furnace body 20 has at least one furnace opening that communicates with the furnace cavity 201. The furnace door 10 is located at the furnace body 20 corresponding to the furnace opening and is configured to open or close the furnace opening.

[0066] Optionally, the specific structure of the furnace door 10 and its cooperation with the process furnace 100 can be referred to the relevant descriptions of the above embodiments, and will not be repeated here.

[0067] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts and nuts, screws, clips, magnetic attraction, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, or other methods.

[0068] The basic principles of this disclosure have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this disclosure are merely examples and not limitations, and should not be considered as essential features of each embodiment of this disclosure. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the scope of this disclosure to the necessity of employing the aforementioned specific details for implementation.

[0069] The block diagrams of devices, apparatuses, devices, and systems disclosed herein are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0070] It should also be noted that in the apparatus, devices, and methods of this disclosure, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions to this disclosure.

[0071] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of this disclosure. Therefore, this disclosure is not intended to be limited to the aspects shown herein, but rather to be carried out within the widest scope consistent with the principles and novel features disclosed herein.

[0072] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this disclosure to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations therein.

Claims

1. A furnace door, characterized in that, Applied to a process furnace, the furnace door includes: Furnace door body; A cooling channel is arranged in the furnace door body. The cooling channel is configured to allow cooling medium to pass through. The cooling channel includes an inlet and an outlet that communicate with the outside to allow cooling medium to pass through. The cooling flow channel includes a first flow channel, a second flow channel, a first channel, and a second channel that are connected to each other. The first flow channel and the second flow channel are arranged opposite each other along a first direction, and the first channel and the second channel are arranged opposite each other along a second direction. The first direction and the second direction intersect. The first end of the first flow channel and the first end of the second flow channel are fluidly connected through the first channel, and the second end of the first flow channel and the second end of the second flow channel are fluidly connected through the second channel. The inlet is located at the first end of the first flow channel, and the outlet is located at the first end of the second flow channel.

2. The furnace door according to claim 1, characterized in that, Also includes: A sealing element is fitted around the periphery of the furnace door body, and the sealing element is configured to seal the gap at the mating point between the furnace door body and the process furnace; Wherein, at least a portion of the first flow channel and at least a portion of the second flow channel are disposed near the seal and arranged along the inner circumference of the seal.

3. The furnace door according to claim 2, characterized in that, The first flow channel includes a first edge flow channel, and the second flow channel includes a second edge flow channel, the first edge flow channel and the second edge flow channel being arranged along the inner circumferential side of the seal. The first edge channel and the second edge channel are arranged opposite to each other in the first direction, and the first edge channel and the second edge channel are respectively connected to the first channel and the second channel at both ends in the second direction.

4. The furnace door according to claim 3, characterized in that, The first flow channel further includes a first central flow channel that communicates end-to-end with the first edge flow channel, the first central flow channel extending at least partially along the second direction, and the inlet being provided at the location where the first edge flow channel and the first central flow channel connect; and / or, The second flow channel also includes a second central flow channel that is connected end-to-end with the second edge flow channel. The second central flow channel extends at least partially along the second direction, and the outlet is provided at the location where the second edge flow channel and the second central flow channel connect.

5. The furnace door according to any one of claims 1-4, characterized in that, The second direction is parallel to the direction of gravity of the furnace door body, and the first direction is perpendicular to the direction of gravity of the furnace door body. The inlet and the outlet are disposed opposite each other in the first direction, and the first channel is located above the inlet and the outlet in the second direction. The first channel is configured to discharge gas from the outlet through the first channel.

6. The furnace door according to claim 5, characterized in that, The cross-sectional area of ​​the first channel is less than or equal to the cross-sectional area of ​​the second channel.

7. The furnace door according to any one of claims 1-4, characterized in that, The furnace door body includes: The main body has a flow channel groove arranged on one side in the thickness direction, and the thickness direction, the first direction and the second direction intersect each other; A cover plate is provided on the side of the main body where the flow channel groove is provided. The cover plate is provided with the inlet and the outlet that communicate with the flow channel groove. The cover plate and the main body together enclose the flow channel groove to form the cooling flow channel.

8. The furnace door according to claim 7, characterized in that, The main body has a recess on one side in the thickness direction, and the cover plate covers the opening of the recess. The bottom wall of the recess is provided with a central protrusion extending along the second direction. The central protrusion divides the recess into a first flow channel and a second flow channel arranged along the first direction. The central protrusion has gaps at both ends of the second direction with the side wall of the recess to form the first channel and the second channel.

9. The furnace door according to claim 8, characterized in that, The recessed bottom wall is also provided with a snap-fit ​​part, and the cover plate is provided with a snap-fit ​​hole that mates with the snap-fit ​​part. When the cover plate covers the opening of the recess, the snap-fit ​​part passes through the snap-fit ​​hole and is snapped into place with the snap-fit ​​hole.

10. A process furnace, characterized in that, include: The furnace body has a furnace opening; The furnace door according to any one of claims 1 to 9, wherein the furnace door is disposed on the furnace body at a position corresponding to the furnace opening, and the furnace door is configured to open or close the furnace opening.

Images