A sheet metal riveting device for semiconductor device processing

Abstract

This utility model discloses a sheet metal riveting device for semiconductor equipment processing, relating to the field of sheet metal riveting technology. It includes a fixing mechanism and a riveting mechanism. The fixing mechanism includes a support base, with a fixed plate mounted on one top end and a movable plate mounted on the other top end. Clamping components are provided on the inner sides of both the fixed plate and the movable plate. The riveting mechanism includes a fixing frame, with an adjusting component on one side of the fixing frame. A third hydraulic cylinder is located on the inner bottom of the adjusting component, and a pressure plate is located at the bottom of the third hydraulic cylinder. This utility model can clamp and fix sheet metal parts of different sizes using the clamping components. The positions of the pressure plate and the support plate can be easily adjusted through the operation of the first hydraulic cylinder and the adjusting component. Therefore, under the combined action of the pressure plate and the support plate, the sheet metal parts can be stably riveted, improving the riveting efficiency.

Description

Technical Field

[0001] This utility model relates to the field of sheet metal riveting technology, specifically to a sheet metal riveting device for semiconductor equipment processing. Background Technology

[0002] Semiconductor equipment refers to the collective term for various precision instruments and tools used in the manufacturing, packaging, and testing of semiconductor devices (such as integrated circuits). As the "mother machines" of chip manufacturing, these devices transform circuit designs into nanoscale physical structures through core processes such as photolithography, etching, and thin-film deposition, directly impacting chip performance and mass production efficiency. Semiconductor equipment processing requires the riveting of sheet metal parts, necessitating the use of riveting devices. Semiconductor equipment riveting devices are assembly equipment specifically designed for precision sheet metal parts in semiconductor equipment, solving the problems of low efficiency and poor precision associated with traditional manual operations through automated positioning and riveting technology.

[0003] A sheet metal riveting device, disclosed in CN218532685U, includes a worktable. A support plate is fixedly connected to the top of the worktable, and a limiting plate is fixedly connected to one side of the support plate. A positioning groove is formed inside the limiting plate, and a sliding plate is movably connected inside the positioning groove. The advantages are: by setting a positioning plate with a positioning hole inside, the riveting head at the bottom of the second cylinder is located at the top of the positioning hole. In use, pushing the positioning plate upwards causes the connecting rod to move upwards within the sliding plate, compressing the spring. The sheet metal is then placed on top of the riveting table. Releasing the positioning plate, due to the spring force, pushes the positioning plate to the top of the sheet metal. The position of the positioning plate at the positioning hole on the sheet metal is the riveting position. Because the positioning plate is located at the top of the sheet metal, the sheet metal can be moved directly according to the position of the positioning hole, eliminating the need for multiple adjustments by moving the riveting head, making operation simple.

[0004] The existing technology has the following shortcomings: When riveting sheet metal parts of semiconductor equipment, the existing riveting device cannot be easily adjusted according to the riveting requirements of the sheet metal parts, making it impossible for the device to stably perform riveting operations at different positions of the sheet metal parts. As a result, the riveting of the sheet metal parts is prone to loosening, which affects the quality of the sheet metal parts riveting. Utility Model Content

[0005] The purpose of this invention is to provide a sheet metal riveting device for semiconductor equipment processing. The device can clamp and fix sheet metal parts of different sizes through the clamping component. The position of the pressure plate and the support plate can be easily adjusted through the operation of the first hydraulic cylinder and the adjusting component. Thus, the sheet metal parts can be riveted stably under the cooperation of the pressure plate and the support plate, which can improve the riveting efficiency of sheet metal parts and solve the above-mentioned shortcomings in the technology.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a sheet metal riveting device for semiconductor equipment processing, including a fixing mechanism, and further comprising: The riveting mechanism, located at the top of the fixing mechanism, is used for riveting the sheet metal of semiconductor equipment. The fixing mechanism includes a support base, a control panel is fixedly installed on the outer wall of one end of the support base, a fixed plate is fixedly installed on one end of the top of the support base, and a movable plate is movably installed on the other end of the top of the support base. Clamping components are provided on the inner sides of both the fixed plate and the movable plate. The riveting mechanism includes a fixing frame disposed on the outer wall of one side of the support base. A first hydraulic cylinder is disposed at one end of the fixing frame, an adjusting component is disposed on one side of the fixing frame, a third hydraulic cylinder is disposed on the inner side of the bottom of the adjusting component, a pressure plate is disposed at the bottom of the third hydraulic cylinder, and a support plate is fixedly installed on the bottom of the outer wall of one side of the fixing frame.

[0007] Preferably, the top end of the support base is provided with a movable groove, and the clamping component includes a first lead screw rotatably installed on the inner wall of the movable groove. A movable seat is threaded onto the outer wall of the first lead screw, and the top of the movable seat is fixedly connected to the bottom of the movable plate.

[0008] Preferably, a first motor is fixedly installed on the outer wall of one end of the support base, and the first motor is connected to one end of the first lead screw through an output shaft. The top of both the fixed plate and the movable plate are provided with mounting grooves.

[0009] Preferably, a dual-axis motor is fixedly installed at the middle position of the inner wall of the mounting groove, and the two output shafts of the dual-axis motor are each driven by a second lead screw, and the outer walls of the two second lead screws are threaded with clamping plates.

[0010] Preferably, the adjusting component includes a second hydraulic cylinder, which is fixedly mounted on the top of the fixing frame, and a guide plate is fixedly mounted on the bottom of the piston rod of the second hydraulic cylinder.

[0011] Preferably, the inner wall of the fixing frame is provided with a limiting groove, the inner wall of the limiting groove is slidably connected to the outer wall of one side of the guide plate, and a fixing rack is fixedly installed on the top of the guide plate.

[0012] Preferably, a movable sleeve plate is movably sleeved on the outer side of the guide plate, and a second motor is fixedly installed on the outer wall of one end of the movable sleeve plate. A movable gear is fixedly sleeved on the outer side of the output shaft of the second motor, and the movable gear meshes with a fixed rack.

[0013] Preferably, the bottom inner side of the movable sleeve is fixedly connected to the third hydraulic cylinder, and the piston rod of the third hydraulic cylinder passes through the bottom of the movable sleeve and is fixedly connected to the top of the pressure plate.

[0014] The technical effects and advantages provided by this utility model in the above technical solution are as follows: 1. The first motor drives the first lead screw to rotate, which can adjust the position of the movable plate. The operation of the dual-axis motor can drive the two second lead screws to rotate, which can adjust the distance between two adjacent clamping plates, thereby stably clamping and fixing sheet metal parts of different sizes and shapes. The operation of the first hydraulic cylinder can adjust the lateral position of the pressure plate and the support plate, and the operation of the second hydraulic cylinder can adjust the height of the pressure plate. The operation of the second motor, through the meshing action between the movable gear and the fixed rack, can adjust the longitudinal position of the pressure plate. Then, the operation of the third hydraulic cylinder causes the pressure plate to press downward. With the cooperation of the pressure plate and the support plate, the sheet metal parts can be riveted. The device can be easily adjusted according to the riveting requirements of the sheet metal parts, making the riveting of the sheet metal parts more secure. 2. The movable slot can limit the movement of the movable seat, so that the movable plate remains stable during movement. The mounting slot can limit the movement of two adjacent clamping plates, so that it can stably clamp sheet metal parts of different shapes. At the same time, the limiting slot can limit the movement of the guide plate, and the guide plate can limit the movement of the movable sleeve plate, so that the pressure plate remains stable during height and longitudinal adjustment, so that it can stably punch the rivets. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings.

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0017] Figure 2 This is a partial sectional view of the present invention.

[0018] Figure 3 This is an exploded view of the fixing mechanism of this utility model.

[0019] Figure 4 This is an exploded view of the riveting mechanism of this utility model.

[0020] Explanation of reference numerals in the attached figures: 1. Fixing mechanism; 101. Support base; 102. Control panel; 103. Fixing plate; 104. Movable slot; 105. First lead screw; 106. First motor; 107. Movable seat; 108. Movable plate; 109. Mounting slot; 110. Dual-axis motor; 111. Second lead screw; 112. Clamping plate; 2. Riveting mechanism; 201. Fixing frame; 202. First hydraulic cylinder; 203. Limiting groove; 204. Second hydraulic cylinder; 205. Guide plate; 206. Fixed rack; 207. Movable sleeve plate; 208. Second motor; 209. Movable gear; 210. Third hydraulic cylinder; 211. Pressure plate; 212. Support plate. Detailed Implementation

[0021] This utility model provides, for example Figure 1 The sheet metal riveting device for semiconductor equipment processing shown includes a fixing mechanism 1, and further includes: The riveting mechanism 2, located on top of the fixing mechanism 1, is used for riveting the sheet metal of the semiconductor equipment.

[0022] To facilitate the clamping and fixing of sheet metal parts of different sizes and shapes, such as Figure 1-3 As shown, the fixing mechanism 1 includes a support base 101. A control panel 102 is fixedly installed on the outer wall of one end of the support base 101. A fixing plate 103 is fixedly installed on one end of the top of the support base 101. A movable plate 108 is movably installed on the other end of the top of the support base 101. Clamping components are provided on the inner sides of both the fixing plate 103 and the movable plate 108. The movable plate 108 moves on the top of the support base 101, which can adjust the distance between the movable plate 108 and the fixing plate 103, thereby clamping and fixing sheet metal parts of different lengths. The clamping components on the top of the fixing plate 103 and the movable plate 108 are controlled by the control panel 102 to clamp and fix sheet metal parts of different shapes, so that they remain stable during the riveting process.

[0023] To ensure stable riveting of sheet metal parts at different locations, such as Figure 1-4 As shown, the riveting mechanism 2 includes a fixed frame 201 disposed on the outer wall of one side of the support base 101. A first hydraulic cylinder 202 is disposed at one end of the fixed frame 201, and an adjusting component is disposed on one side of the fixed frame 201. A third hydraulic cylinder 210 is disposed on the inner side of the bottom of the adjusting component. A pressure plate 211 is disposed at the bottom of the third hydraulic cylinder 210. A support plate 212 is fixedly installed on the bottom of the outer wall of one side of the fixed frame 201. The first hydraulic cylinder 202 can be controlled to work through the control panel 102, so that the fixed frame 201 can move on the outer wall of one side of the support base 101. The lateral position of the pressure plate 211 and the support plate 212 can be adjusted. The control panel 102 controls the adjusting component to work, so that the height and longitudinal position of the pressure plate 211 can be adjusted. Then, the third hydraulic cylinder 210 is worked through the control panel 102, so that the pressure plate 211 is pressed downward. With the cooperation of the support plate 212, the rivet can stably connect the sheet metal parts.

[0024] To facilitate the adjustment of the position of the movable plate 108, such as Figure 2-3As shown, the support base 101 has a movable groove 104 at one end of its top. The clamping component includes a first lead screw 105 rotatably mounted on the inner wall of the movable groove 104. A movable seat 107 is threaded onto the outer wall of the first lead screw 105. The top of the movable seat 107 is fixedly connected to the bottom of the movable plate 108. A first motor 106 is fixedly mounted on the outer wall of one end of the support base 101. The first motor 106 is connected to one end of the first lead screw 105 through an output shaft. The top of both the fixed plate 103 and the movable plate 108 has mounting grooves 109. The control panel 102 causes the first motor 106 to drive the first lead screw 105 to rotate, which can drive the movable seat 107 to move along the inner wall of the movable groove 104 on its outer side, thereby driving the movable plate 108 to move. The distance between the movable plate 108 and the fixed plate 103 can be adjusted, and sheet metal parts of different lengths can be clamped and fixed.

[0025] To stably clamp sheet metal parts of different sizes, such as Figure 2-3 As shown, a dual-axis motor 110 is fixedly installed in the middle of the inner wall of the mounting groove 109. The two output shafts of the dual-axis motor 110 are each driven by a second lead screw 111. The outer walls of the two second lead screws 111 are threaded with clamping plates 112. The mounting groove 109 can install and fix adjacent dual-axis motors 110 and two second lead screws 111. The two dual-axis motors 110 are controlled by the control panel 102 to rotate the two adjacent second lead screws 111, which can drive the two adjacent clamping plates 112 to move relative to or away from each other along the inner wall of the mounting groove 109 on their outer side. This allows for clamping and fixing of sheet metal parts of different sizes.

[0026] To facilitate the adjustment of the height of the pressure plate 211, such as Figure 2 and Figure 4 As shown, the adjusting component includes a second hydraulic cylinder 204, which is fixedly installed on the top of the fixed frame 201. A guide plate 205 is fixedly installed on the bottom of the piston rod of the second hydraulic cylinder 204. A limiting groove 203 is opened on the inner wall of the fixed frame 201. The inner wall of the limiting groove 203 is slidably connected to the outer wall of one side of the guide plate 205. The control panel 102 makes the second hydraulic cylinder 204 work, which can drive the guide plate 205 to move along the outer wall of the limiting groove 203, thereby adjusting the height of the pressure plate 211.

[0027] To facilitate the adjustment of the longitudinal position of the pressure plate 211, such as Figure 2 and Figure 4As shown, a fixed rack 206 is fixedly installed on the top of the guide plate 205. A movable sleeve 207 is movably sleeved on the outer side of the guide plate 205. A second motor 208 is fixedly installed on the outer wall of one end of the movable sleeve 207. A movable gear 209 is fixedly sleeved on the outer side of the output shaft of the second motor 208. The movable gear 209 meshes with the fixed rack 206. The bottom inner side of the movable sleeve 207 is fixedly connected to a third hydraulic cylinder 210. The piston rod of the third hydraulic cylinder 210 passes through the bottom of the movable sleeve 207 and is fixedly connected to the top of the pressure plate 211. The control panel 102 controls the second motor 208 to work. Through the meshing action between the movable gear 209 and the fixed rack 206, the movable sleeve 207 moves longitudinally on the outer side of the guide plate 205. The third hydraulic cylinder 210 can be installed and fixed through the movable sleeve 207, thereby adjusting the longitudinal position of the pressure plate 211.

[0028] When riveting sheet metal parts of semiconductor equipment, the sheet metal parts to be riveted are placed on top of the fixed plate 103 as required. The first motor 106 is controlled by the control panel 102 to drive the first lead screw 105 to rotate, so that the movable seat 107 moves along the inner wall of the movable groove 104 on its outer side. The distance between the movable plate 108 and the fixed plate 103 can be adjusted so that the fixed plate 103 and the movable plate 108 can support the two ends of the sheet metal parts respectively. The two dual-axis motors 110 are controlled by the control panel 102 to work, so that the two adjacent second... The lead screw 111 rotates accordingly, which can drive the two adjacent clamping plates 112 to move relative to or away from each other along the inner wall of the adjacent mounting groove 109 on their outer side, so that the two clamping plates 112 at the same end can clamp and fix the sheet metal parts. Then, the control panel 102 controls the first hydraulic cylinder 202 to work, so that the fixing frame 201 moves along the outer wall of one side of the support base 101, thereby adjusting the lateral position of the pressure plate 211 and the support plate 212, so that the support plate 212 and the pressure plate 211 are respectively at the bottom and top of the sheet metal parts riveting position; The control panel 102 controls the second hydraulic cylinder 204 to move the guide plate 205 along the inner wall of the limiting groove 203, allowing adjustment of the height of the pressure plate 211. Then, the control panel 102 drives the second motor 208 to rotate the movable gear 209. Through the meshing between the movable gear 209 and the fixed rack 206, the movable sleeve 207 moves outside the guide plate 205, allowing adjustment of the longitudinal position of the pressure plate 211, enabling it to move directly above the rivet. Then, the control panel... Plate 102 controls the third hydraulic cylinder 210 to work, causing the pressure plate 211 to move downwards, which can press the rivets. Then, with the cooperation of the support plate 212, the rivets can rivet the sheet metal parts. By adjusting the positions of the pressure plate 211 and the support plate 212, the device can perform riveting operations on different positions of the sheet metal parts according to the needs, which can improve the riveting efficiency of the sheet metal parts. This embodiment specifically solves the problem in the prior art that the sheet metal parts cannot be riveted at different positions according to the needs, resulting in the sheet metal parts being not firmly riveted and easily loosened.

[0029] The foregoing description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A sheet metal riveting device for semiconductor equipment processing, comprising a fixing mechanism (1), characterized in that, Also includes: The riveting mechanism (2) is set on top of the fixing mechanism (1) and is used to perform riveting operations on the sheet metal of the semiconductor equipment. The fixing mechanism (1) includes a support base (101), a control panel (102) is fixedly installed on the outer wall of one end of the support base (101), a fixing plate (103) is fixedly installed on one end of the top of the support base (101), and a movable plate (108) is movably installed on the other end of the top of the support base (101). Clamping components are provided on the inner sides of both the fixing plate (103) and the movable plate (108). The riveting mechanism (2) includes a fixing frame (201) disposed on the outer wall of one side of the support base (101). A first hydraulic cylinder (202) is disposed at one end of the fixing frame (201). An adjusting component is disposed on one side of the fixing frame (201). A third hydraulic cylinder (210) is disposed on the inner side of the bottom of the adjusting component. A pressure plate (211) is disposed at the bottom of the third hydraulic cylinder (210). A support plate (212) is fixedly installed at the bottom of the outer wall of one side of the fixing frame (201).

2. The sheet metal riveting device for semiconductor equipment processing according to claim 1, characterized in that: The support base (101) has a movable groove (104) at one end of its top. The clamping component includes a first lead screw (105) rotatably installed on the inner wall of the movable groove (104). A movable seat (107) is threaded onto the outer wall of the first lead screw (105). The top of the movable seat (107) is fixedly connected to the bottom of the movable plate (108).

3. The sheet metal riveting device for semiconductor equipment processing according to claim 2, characterized in that: The first motor (106) is fixedly installed on the outer wall of one end of the support base (101). The first motor (106) is connected to one end of the first lead screw (105) through an output shaft. The top of the fixed plate (103) and the movable plate (108) are both provided with mounting grooves (109).

4. The sheet metal riveting device for semiconductor equipment processing according to claim 3, characterized in that: A dual-axis motor (110) is fixedly installed in the middle of the inner wall of the mounting groove (109). The two output shafts of the dual-axis motor (110) are each driven by a second lead screw (111). The outer walls of the two second lead screws (111) are threaded with clamping plates (112).

5. The sheet metal riveting device for semiconductor equipment processing according to claim 1, characterized in that: The adjusting component includes a second hydraulic cylinder (204), which is fixedly installed on the top of the fixed frame (201), and a guide plate (205) is fixedly installed on the bottom of the piston rod of the second hydraulic cylinder (204).

6. The sheet metal riveting device for semiconductor equipment processing according to claim 5, characterized in that: The inner wall of the fixed frame (201) is provided with a limiting groove (203), the inner wall of the limiting groove (203) is slidably connected to the outer wall of one side of the guide plate (205), and a fixing rack (206) is fixedly installed on the top of the guide plate (205).

7. The sheet metal riveting device for semiconductor equipment processing according to claim 6, characterized in that: A movable sleeve plate (207) is movably sleeved on the outer side of the guide plate (205). A second motor (208) is fixedly installed on the outer wall of one end of the movable sleeve plate (207). A movable gear (209) is fixedly sleeved on the outer side of the output shaft of the second motor (208). The movable gear (209) meshes with the fixed rack (206).

8. The sheet metal riveting device for semiconductor equipment processing according to claim 7, characterized in that: The bottom inner side of the movable sleeve (207) is fixedly connected to the third hydraulic cylinder (210), and the piston rod of the third hydraulic cylinder (210) passes through the bottom of the movable sleeve (207) and is fixedly connected to the top of the pressure plate (211).

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