Cutting assembly for polishing pad and cutting apparatus

Abstract

The application provides a cutting assembly for a grinding pad and a cutting device, which can include a base, and an adsorption platform and a cutting platform which are sequentially stacked on the base; wherein the cutting platform is used to carry the grinding pad, the cutting platform includes oppositely arranged first upper and lower surfaces, and is provided with an air passage channel penetrating through the first upper and lower surfaces; the adsorption platform includes a second upper surface and a main flow air hole, the second upper surface is provided with a flow path which is in communication with the air passage channel, and is connected with a vacuum generating device through the main flow air hole, so that a negative pressure is formed on the first upper surface of the cutting platform by the vacuum generating device to adsorb the grinding pad. The cutting assembly provided by the application can realize cutting processing of products with various sizes, and can avoid product damage or scrap caused by displacement of the product during processing.

Description

Technical Field

[0001] This application relates to the field of industrial processing, and in particular to a cutting test assembly for an abrasive pad, and a cutting device having the cutting assembly. Background Technology

[0002] Chemical mechanical planarization (CMP) is a common technique used to planarize or polish workpieces (e.g., semiconductor wafers) and remove excess material in damascene processes, front-end-of-line (FEOL) processes, or back-end-of-line (BEOL) processes. Polishing pads are a frequently used consumable in CMP processes. In a CMP process, the polishing pad rotates relative to the semiconductor wafer, and the wafer surface is planarized by the polishing surface of the pad and the polishing medium (e.g., CMP polishing slurry) on that surface.

[0003] Generally, the grinding pad manufacturing process requires cutting the grinding pad to obtain a finished grinding pad of a suitable size. Currently, the grinding and cutting turntables and cutters of existing equipment can only cut a limited number of sizes, which cannot meet the needs of producing grinding pads of various sizes. Furthermore, while existing technologies use cylinders to fix the grinding pads, the maximum pressure applied by the cylinders cannot completely secure the product. Because the material on the back of the product is smooth, it is prone to displacement during cutting, causing damage or rendering the product unusable. Utility Model Content

[0004] To address the aforementioned processing issues of some abrasive pads, this application provides a cutting assembly for abrasive pads. This cutting assembly can perform cutting processing on products of various sizes, while avoiding product displacement during processing that could cause product damage or scrap.

[0005] This application provides a cutting assembly for an abrasive pad. The cutting assembly may include: a base, and an adsorption platform and a cutting platform stacked sequentially on the base; wherein, the cutting platform is used to support the abrasive pad, and the cutting platform includes a first upper surface and a first lower surface disposed opposite to each other, and an air passage is formed through the first upper surface and the first lower surface; the adsorption platform includes a second upper surface and a main vent hole, the second upper surface has a flow path communicating with the air passage, and is connected to a vacuum generating device through the main vent hole, so that the vacuum generating device forms a negative pressure on the first upper surface of the cutting platform for adsorbing the abrasive pad.

[0006] According to some embodiments of this application, the adsorption platform can be fixedly mounted on the base and has a through hole coaxial with the base; the cutting platform is connected to the connecting platform disposed in the through hole and rotates with the connecting platform; the cutting blade disposed on the cutting platform cuts the grinding pad.

[0007] According to some embodiments of this application, the first upper surface may have a plurality of concentric cutting rings; the cutting blade is placed in one of the plurality of cutting rings.

[0008] According to some embodiments of this application, the connecting platform can be fixedly connected to an external rotating mechanism, which drives the connecting platform to rotate, thereby driving the cutting platform to rotate.

[0009] According to some embodiments of this application, the flow path may include a plurality of concentric circular grooves and a plurality of connecting grooves connecting the plurality of concentric circular grooves; the gas passage includes a plurality of air holes, the orthographic projection of the air holes on the adsorption platform being located within the concentric circular grooves or the connecting grooves.

[0010] According to some embodiments of this application, the cutting assembly may further include a mounting plate disposed between the base and the adsorption platform; the mounting plate is used to place the vacuum generating device, and the air extraction port of the vacuum generating device extends into the main air vent to extract air to form a negative pressure on the first upper surface.

[0011] According to some embodiments of this application, a sealing ring may be provided between the cutting platform and the adsorption platform.

[0012] According to some embodiments of this application, the sealing ring can abut against the first lower surface of the cutting platform and the second upper surface of the adsorption platform, respectively.

[0013] According to some embodiments of this application, a mounting groove may be formed on the first lower surface of the cutting platform and / or the second upper surface of the adsorption platform, and the sealing ring is placed in the mounting groove.

[0014] This application also provides a cutting device for abrasive pads, which may include the cutting components described above.

[0015] The abrasive pad cutting assembly provided in this application can cut abrasive pads of different sizes. Furthermore, during the cutting process, a negative pressure is created to keep the product attached to the cutting platform, preventing movement and thus avoiding product damage or scrap caused by displacement during cutting.

[0016] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0017] This application will be further described by way of exemplary embodiments, which will be described in detail with reference to the accompanying drawings. These embodiments are not limiting; in these embodiments, the same reference numerals denote the same structures, wherein:

[0018] Figure 1 These are exemplary structural schematic diagrams of the cutting assembly shown in some embodiments of this application;

[0019] Figure 2 This is an exemplary exploded structural diagram of a cutting component according to some embodiments of this application;

[0020] Figure 3 This is an exemplary structural diagram of the cutting platform and connecting table of the cutting assembly according to some embodiments of this application;

[0021] Figure 4 This is another exemplary structural schematic diagram of the cutting platform and connecting table of the cutting assembly shown in some embodiments of this application;

[0022] Figure 5 This is an exemplary structural schematic diagram of the adsorption platform of the cutting component shown in some embodiments of this application;

[0023] Figure 6 This is another exemplary structural schematic diagram of the cutting assembly shown in some embodiments of this application;

[0024] Figure 7 This is an exemplary schematic diagram of the cross-section of the adsorption platform of the cutting assembly shown in some embodiments of this application.

[0025] Explanation of reference numerals in the attached figures:

[0026] 1: Base; 11: First through hole;

[0027] 2: Adsorption platform; 21: Concentric circular groove; 22: Connecting groove; 23: Main vent hole; 24: Second through hole;

[0028] 3: Cutting platform; 31: Air hole; 32: Cutting ring;

[0029] 4: Connecting platform;

[0030] 5: Mounting plate; 51: Third through hole;

[0031] 6: Sealing ring;

[0032] 7: Vacuum generating device. Detailed Implementation

[0033] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0034] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains. The terminology used in this application and in its specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The terms "and / or" or "and / or" as used in this application include any and all combinations of one or more of the associated listed items.

[0035] The following describes some embodiments of this application. It should be noted that the following description is for illustrative purposes and is not intended to limit the scope of protection of this application.

[0036] refer to Figures 1-5 This application provides a cutting assembly for an abrasive pad, such as... Figures 1-5 As shown, the cutting component H may include a base 1 and an adsorption platform 2 and a cutting platform 3 stacked sequentially on the base 1.

[0037] The grinding pad P to be cut is placed on the cutting platform 3. To prevent the grinding pad P from shifting during the cutting process, a negative pressure is created between the cutting platform 3 and the grinding pad P, causing the grinding pad P to be adsorbed and tightly adhered to the first upper surface of the cutting platform 3. In some implementations, an air passage is provided on the cutting platform 3, connecting the first upper surface and the first lower surface. Air is continuously drawn through this air passage, thereby creating a negative pressure on the first upper surface of the cutting platform 3. This air passage also connects to a flow path formed on the second upper surface of the adsorption platform 2, which is connected to the main air passage 23 of the adsorption platform 2. The suction port of the vacuum generator extends into the main air passage 23, thereby drawing air through the main air passage, the flow path, and the air passage.

[0038] The adsorption platform 2 is fixedly connected to the base 1, and methods such as screws, adhesives, welding, and riveting can be used. The adsorption platform 2 and the base 1 have coaxial through holes. For example, the base has a first through hole 11, and the adsorption platform 2 has a second through hole 24, which are coaxial. For example, they are concentric and have the same inner diameter. The connecting platform 4 is disposed in these through holes and rotates under external force. The cutting platform 3 is fixedly connected to the connecting platform 4, for example, by screws. In this way, the cutting platform 3 will rotate with the connecting platform 4. That is, when the connecting platform 4 is driven to rotate by external force, the cutting platform 3 also rotates together. The cutting blade placed on the cutting platform 3 can be fixed for cutting or follow the rotation for cutting, thereby cutting the grinding pad to be cut adsorbed on the cutting platform 3.

[0039] In some implementations, the aforementioned external force can be provided by an external rotating mechanism, such as a rotary motor. For example, a process operating table is provided. After the base 1 of the cutting assembly H and the adsorption platform 2 are fixedly installed, the base 1 is also installed on the table surface of the process operating table using threads or adhesive. An opening is made in the table surface corresponding to the connecting platform 4 to expose the rotating shaft of the rotary motor located below the table surface. The connecting platform 4 is fixedly connected to the rotating shaft of the rotary motor. When the motor starts, the rotating shaft will drive the connecting platform 4 to rotate, thereby driving the cutting platform 3 to rotate.

[0040] Multiple concentric cutting rings 32 are formed on the first upper surface of the cutting platform 3. Physical machining methods such as milling or optical processing methods such as laser etching can be used to form the cutting rings 32 on the first upper surface of the cutting platform 3. The cutting rings 32 are used to hold cutting tools, and their contours correspond to grinding pads of different sizes. When cutting is required, the cutting tool is placed in the corresponding size cutting ring 32. The cutting tool will rotate with the cutting platform 3, thereby cutting the grinding pad to be cut attached to the first upper surface of the cutting platform 3, ultimately obtaining a grinding pad of the target size.

[0041] One implementation of the air passage on the cutting platform 3 is an air hole 31. For example, a through air hole 31 can be directly generated on the cutting platform 3 using a drilling machine or laser as the air passage. The flow path on the second upper surface of the adsorption platform 2 may include multiple concentric circular grooves 21 and multiple connecting grooves 22 connecting the multiple concentric circular grooves 21. Similarly, various grooving tools or processes can be applied here to form the concentric circular grooves 21 and the connecting grooves 22. In some implementations, the orthogonal projection of the air hole 31 on the adsorption platform 2 will be located within the concentric circular groove 21 or the connecting groove 22. When the cutting platform 3 rotates, the air passage (e.g., the air hole 31) is always connected to the flow path (e.g., the concentric circular groove 21 and / or the connecting groove 22). In this way, the rotation of the cutting platform 3 will not affect the formation of negative pressure on its first upper surface.

[0042] The adsorption platform 2 is also provided with a main vent hole 23, which is located within a concentric circular groove 21 or a connecting groove 22. A vacuum generating device 7 for creating negative pressure is mounted on the base 1. The main vent hole 23 is designed to penetrate the adsorption platform 2. When the adsorption platform 2 is fixedly mounted on the base 1, the suction port of the vacuum generating device 7 can be inserted into the main vent hole 23. Based on this design, when air is extracted through the vacuum generating device 7, all the air in the entire flow path will be extracted, and then the air between the first upper surface of the cutting platform 3 and the grinding pad P to be cut will be extracted through the air passage, thereby creating a negative pressure to adsorb the grinding pad P to be cut. As for the placement of the air passage pipes or other components of the vacuum generating device 7, they can be accommodated by slotting or slitting the lower surface of the adsorption platform 2 (which can also be referred to as the second lower surface in this application). This does not affect the fixed installation connection between the base 1 and the adsorption platform 2 or cause the air passage pipes to be squeezed, making it impossible to extract gas.

[0043] refer to Figure 6 and Figure 7 This application provides another exemplary structure for the cutting component, compared to Figures 1-5As shown, the cutting assembly also includes a mounting plate 5 disposed between the base 1 and the adsorption platform 2. The mounting plate 5 is used to place a vacuum generator 7. For example, the vacuum generator 7 is mounted on the side or sidewall of the mounting plate 5 by means of threads or adhesive. Alternatively, the vacuum generator 7 can be mounted on the side or sidewall of the mounting plate 5 using a mounting bracket. The mounting bracket is L-shaped, with the middle area of ​​the two sides used to mount the vacuum generator 7. For example, the vacuum generator 7 is positioned on the inner side of one side by threads or adhesive, and the outer side of the other side is used for fixed connection to the mounting plate 5, thereby mounting the vacuum generator 7 onto the mounting plate 5. Similarly, the air passage will be accommodated in a groove or slot opened on the second lower surface of the adsorption platform 2, and the exhaust port at the front end will be inserted into the main vent hole 23. When the vacuum generator 7 operates, the exhaust port will draw air through the main vent hole 23, thereby creating a negative pressure on the first upper surface of the cutting platform 3.

[0044] Similarly, the mounting plate 5 will also have a through hole coaxial with the base 1. For example, the mounting plate 5 may have a third through hole 51, which may be concentric with and have the same inner diameter as the aforementioned first through hole 11 and second through hole 24. That is, the base 1, the mounting plate 5, and the adsorption platform 2 will each have holes for mounting the connecting platform 4. The connecting platform 4 will be connected to the external rotating mechanism through these through holes.

[0045] To ensure smooth air extraction or increase negative pressure for better adsorption of the grinding pad P to be cut, a sealing ring 6 can be provided between the cutting platform 3 and the adsorption platform 2. One way to install the sealing ring 6 is to fix it to the first lower surface of the cutting platform 3, for example, by bonding. After installation, the sealing ring 6 contacts the second upper surface of the adsorption platform 2 through abutment. When the cutting platform 3 rotates, the sealing ring 6 will rotate with it. Another way to install the sealing ring 6 is to place it in a mounting groove opened on the first lower surface of the cutting platform 3 and / or the second upper surface of the adsorption platform 2. The sealing ring 6 contacts both the adsorption platform 2 and the cutting platform 3, but is not fixedly connected to either. Of course, the above are only some exemplary placement methods for the sealing ring 6. For example, the sealing ring 6 can also be fixedly bonded to the second upper surface of the adsorption platform 2. These variations are all within the scope of protection of this application. It should be noted that since the cutting platform 3 rotates while the adsorption platform 2 does not, the sealing ring will experience some frictional wear. Therefore, the selected sealing ring needs to consider the physical characteristic of wear resistance.

[0046] For the use of the cutting assembly, the cutting tool can be placed first inside the cutting ring of the corresponding size, and then the grinding pad to be cut can be placed on the cutting platform 3. The vacuum generator 7 is turned on to hold the grinding pad to be cut, and the external rotation mechanism is turned on to start cutting.

[0047] The various components of the cutting assembly can be made of polymeric and / or metallic materials. For example, polymeric materials can be polyethylene (PE), polypropylene (PP), polyphenylene sulfide (PPS), polyimide (PI), polycarbonate (PC), polymethyl methacrylate (PMMA), polyetheretherketone (PEEK), polybutylene styrene (PBO), etc. Metallic materials can be iron, chromium, manganese, nickel, copper, aluminum, zinc, titanium, etc., or metal alloys such as stainless steel. In some implementations, the cutting platform 3 can be made of polyethylene. Since the cutting platform 3 rotates continuously during operation, it is easily consumed. Therefore, polyethylene is used as a consumable material to manufacture the cutting platform 3. Polyethylene is easy to process, meets hardness requirements, and is not easily deformed. At the same time, polyethylene is low in cost, effectively saving production costs. The base 1 and the adsorption platform 2 can be made of stainless steel.

[0048] The cutting assembly disclosed in this application can meet the cutting and processing needs of grinding pads of various sizes, while avoiding product loss or scrap due to displacement during processing.

[0049] This application also discloses a cutting device for abrasive pads, which may include the aforementioned cutting component. Exemplarily, the cutting device may include a worktable, on which the cutting component can be placed and fixedly connected to a rotary motor mounted below the worktable via a connecting platform. Thus, upon starting the motor, the cutting platform rotates to cut the abrasive pad to be cut. Of course, the cutting device may also be implemented in other ways, and the above is not a specific limitation of this application.

[0050] This application has described the basic concepts. Obviously, for those skilled in the art, the above detailed disclosure is merely illustrative and does not constitute a limitation of this specification. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements, and corrections to this specification. Such modifications, improvements, and corrections are suggested in this specification, and therefore, such modifications, improvements, and corrections still fall within the spirit and scope of the exemplary embodiments of this specification.

[0051] It should be understood that the embodiments described in this specification are merely illustrative of the principles of the embodiments described herein. Other variations may also fall within the scope of this specification. Therefore, alternative configurations of the embodiments described herein are intended to be consistent with the teachings of this specification, rather than as examples or limitations. Accordingly, the embodiments described herein are not limited to those explicitly introduced and described herein.

[0052] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0053] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A cutting assembly for a polishing pad, comprising: The cutting assembly includes: A base (1), and an adsorption platform (2) and a cutting platform (3) sequentially stacked on the base (1); wherein, The cutting platform (3) is used to carry the grinding pad. The cutting platform (3) includes a first upper surface and a first lower surface that are arranged opposite to each other, and an air passage is provided that passes through the first upper surface and the first lower surface. The adsorption platform (2) includes a second upper surface and a main vent hole (23). The second upper surface has a flow path that communicates with the air passage and is connected to a vacuum generator (7) through the main vent hole (23) so that a negative pressure is formed on the first upper surface by the vacuum generator (7) for adsorbing the grinding pad.

2. The cutting assembly for an abrasive pad of claim 1, wherein, The adsorption platform (2) is fixedly set on the base (1) and has a through hole coaxial with the base (1); the cutting platform (3) is connected to the connecting platform (4) set in the through hole and rotates with the connecting platform (4); the cutting blade set on the cutting platform (3) cuts the grinding pad.

3. The cutting assembly for an abrasive pad of claim 2, wherein, The first upper surface has a plurality of concentric cutting rings (32); the cutting blade is placed in one of the plurality of cutting rings.

4. The cutting assembly for an abrasive pad of claim 2, wherein, The connecting platform (4) is fixedly connected to the external rotating mechanism, which drives the connecting platform (4) to rotate, thereby driving the cutting platform (3) to rotate.

5. The cutting assembly for an abrasive pad of claim 2, wherein, The flow path includes multiple concentric circular grooves (21) and multiple connecting grooves (22) connecting the multiple concentric circular grooves (21); the gas passage includes multiple air holes (31), and the orthographic projection of the air holes (31) on the adsorption platform (2) is located in the concentric circular grooves (21) or in the connecting grooves (22).

6. The cutting assembly for an abrasive pad of claim 5, wherein, The cutting assembly also includes a mounting plate (5) disposed between the base (1) and the adsorption platform (2); the mounting plate (5) is used to place the vacuum generating device (7), and the air extraction port of the vacuum generating device (7) is connected to the main air vent (23) to extract air to form a negative pressure on the first upper surface.

7. The cutting assembly for an abrasive pad of claim 1, wherein, A sealing ring (6) is provided between the cutting platform (3) and the adsorption platform (2).

8. The cutting assembly for an abrasive pad of claim 7, wherein, The sealing ring (6) abuts against the first lower surface of the cutting platform (3) and the second upper surface of the adsorption platform (2), respectively.

9. The cutting assembly for an abrasive pad according to claim 7, characterized in that, The first lower surface of the cutting platform (3) and / or the second upper surface of the adsorption platform (2) are provided with mounting grooves, and the sealing ring (6) is placed in the mounting groove.

10. A cutting device for abrasive pads, characterized in that, The cutting device includes a cutting assembly for abrasive pads as described in any one of claims 1-9.

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