A cabinet type muffler for a magnetic suspension turbo vacuum pump outlet

Abstract

The utility model relates to the field of vacuum pump, concretely relates to a cabinet type silencer for magnetic suspension turbine vacuum pump outlet, including silencing cabinet, the both ends of silencing cabinet are symmetrically linked with air inlet pipe and air outlet pipe, and the coaxial fixed setting of silencing cabinet has the silencer, and the axis of silencer coincides with the central axis of air inlet pipe and air outlet pipe, the coaxial fixed setting of silencer in has spiral silencer board, and the airflow contact surface on spiral silencer board is provided with a plurality of first silencing hole of array distribution and fills sound absorption material in its inside, the annular silencing cavity that the outer wall of silencer and the inner wall of silencing cabinet surround forms, fills sound absorption material in annular silencing cavity, the second silencing hole of a plurality of of communicating silencer inner chamber and annular silencing cavity is evenly penetrated and set up on the cylinder wall of silencer, the utility model can optimize airflow path, strengthen the interaction of sound wave and silencing structure, improve noise absorption efficiency, and simultaneously avoid the adverse effect caused to the pumping performance of pump.

Description

Technical Field

[0001] This utility model relates to the field of vacuum pumps, specifically to a cabinet-type silencer for the outlet of a magnetic levitation turbine vacuum pump. Background Technology

[0002] Magnetic levitation vacuum pumps are widely used in applications requiring high cleanliness and high vacuum due to their advantages such as no mechanical friction, low vibration, and long lifespan. However, the high-speed airflow at the pump outlet generates significant noise, affecting the operating environment. To reduce noise, a silencer is typically installed at the pump outlet; common silencer structures include straight-through honeycomb silencers and labyrinth silencers.

[0003] Traditional straight-through honeycomb silencers use regularly arranged honeycomb channels, allowing airflow to pass quickly along a straight path. This results in fewer collisions between sound waves and the honeycomb walls, and sound energy cannot be effectively dissipated. At the same time, because the airflow path is too smooth, noise is difficult to be absorbed by the sound-absorbing material on the outside of the honeycomb structure, resulting in limited noise reduction effect.

[0004] Labyrinth silencers improve noise reduction by extending the airflow path, but their structure often leads to increased airflow resistance, affecting the pump's pumping efficiency, and their suppression of high-frequency noise is still not ideal. Utility Model Content

[0005] The main technical problem to be solved by this utility model is to provide a cabinet-type silencer for the outlet of a magnetic levitation turbine vacuum pump that can optimize the airflow path, enhance the interaction between sound waves and the silencer structure, improve noise absorption efficiency, and at the same time avoid adverse effects on the pumping performance of the pump.

[0006] To solve the above-mentioned technical problems, this utility model provides the following technical solution:

[0007] A cabinet-type silencer for the outlet of a magnetic levitation turbine vacuum pump includes a silencer cabinet with an inlet pipe and an outlet pipe symmetrically connected to both ends of the cabinet. A silencer cylinder is coaxially fixed inside the cabinet, with its axis coinciding with the central axes of the inlet and outlet pipes. A spiral silencer plate is coaxially fixed inside the silencer cylinder, the plate being composed of a continuous spiral curved surface that extends axially along the silencer cylinder to form a spiral flow channel. Multiple first silencer holes are arrayed on the airflow contact surface of the spiral silencer plate and filled with sound-absorbing material. An annular silencer cavity is formed by the outer wall of the silencer cylinder and the inner wall of the silencer cabinet, and this cavity is filled with sound-absorbing material. Multiple second silencer holes are uniformly perforated on the cylinder wall, connecting the inner cavity of the silencer cylinder to the annular silencer cavity.

[0008] The following are further optimizations of the above technical solution by this utility model:

[0009] The spiral silencing plate divides the inner cavity of the silencing cylinder into an upper silencing zone, a spiral silencing guide zone, and a lower silencing zone along the airflow direction. The upper silencing zone is located on the airflow inlet side and is used to absorb high-frequency vibration noise. The spiral silencing guide zone guides the airflow through a spiral curved surface to generate downward centrifugal force and reduce noise. The lower silencing zone is located on the airflow outlet side and is used to absorb low-frequency noise.

[0010] Further optimization: The radial outer edge of the spiral silencer plate is fixedly connected to and tightly fitted to the inner wall of the silencer cylinder.

[0011] Further optimization: The spiral silencer plate has at least 100 spiral turns, and its spiral angle ranges from 30° to 60°.

[0012] Further optimization: The muffler is a cylindrical pipe with both ends connected, and the diameter of the muffler is larger than the diameter of the air intake pipe.

[0013] Further optimization: The ratio of the diameter of the muffler to the diameter of the air intake pipe is 1.2:1 to 1.5:1.

[0014] Further optimization: The air inlet pipe and air outlet pipe are integrally formed with the soundproof cabinet.

[0015] In this invention, the continuous spiral curved surface formed by the spiral silencing plate creates a spiral flow channel inside the silencing cylinder, guiding the airflow to flow smoothly along the axial direction and reducing turbulent noise. At the same time, the sound-absorbing material filled inside the spiral silencing plate and the first silencing hole on the surface can absorb the sound waves generated by airflow friction, achieving simultaneous operation of flow guidance and silencing.

[0016] In this invention, the spiral silencing plate and the annular silencing cavity form a double-layer sound-absorbing structure. The inner layer is the spiral silencing plate, and the outer annular silencing cavity is filled with sound-absorbing material. Through the second silencing holes evenly distributed on the silencing cylinder wall, it effectively absorbs sound waves penetrating the cylinder wall and noise of different frequency bands, achieving synergistic internal and external sound absorption and broad-spectrum noise reduction.

[0017] In this invention, the continuous spiral silencer plate not only provides a sound-absorbing surface, but the spiral guide channel it forms can guide the airflow to flow smoothly and stably downwards and generate centrifugal force, which promotes the airflow to contact the sound-absorbing surface more fully. At the same time, it effectively reduces the pressure loss caused by airflow turbulence, vortex and turning. While achieving efficient noise reduction, it minimizes the impact on the pumping efficiency of the vacuum pump. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the overall structure of an embodiment of the present utility model;

[0020] Figure 2 This is a cross-sectional view of an embodiment of the present utility model;

[0021] Figure 3 This is a schematic diagram of the spiral silencer plate in an embodiment of the present invention;

[0022] Figure 4 This is a front view of the spiral silencer plate in an embodiment of this utility model;

[0023] Figure 5 This is a top view of the spiral silencer plate in an embodiment of this utility model.

[0024] 1-Silencer cabinet; 2-Inlet pipe; 3-Outlet pipe; 4-Silencer cylinder; 5-Spiral silencer plate; 6-First silencer hole; 7-Annular silencer cavity; 8-Second silencer hole. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] like Figure 1-5 As shown, a high-efficiency silencer cabinet for a magnetic levitation vacuum pump includes a silencer cabinet body 1. An inlet pipe 2 and an outlet pipe 3 are symmetrically connected to both ends of the silencer cabinet body 1. A silencer cylinder 4 is coaxially fixed inside the silencer cabinet body 1, with the axis of the silencer cylinder 4 coinciding with the central axis of the inlet pipe 2 and the outlet pipe 3. A spiral silencer plate 5 is coaxially fixed inside the silencer cylinder 4. The spiral silencer plate 5 is composed of a continuous spiral curved surface and extends along the axial direction of the silencer cylinder 4 to form a spiral flow channel. Multiple first silencer holes 6 are arrayed on the airflow contact surface of the spiral silencer plate 5, and its interior is filled with sound-absorbing material. The outer wall of the silencer cylinder 4 and the inner wall of the silencer cabinet body 1 enclose an annular silencer cavity 7, which is filled with sound-absorbing material. Multiple second silencer holes 8 are uniformly opened through the cylinder wall of the silencer cylinder 4, connecting the inner cavity of the silencer cylinder 4 and the annular silencer cavity 7.

[0027] This design allows for several advantages. First, the continuous spiral surface formed by the spiral silencer plate 5 creates a spiral flow channel within the silencer cylinder 4, guiding the airflow to flow smoothly along the axial direction and reducing turbulent noise. At the same time, the sound-absorbing material filled inside the spiral silencer plate 5 and the first silencer hole 6 on the surface can absorb the sound waves generated by airflow friction, achieving simultaneous flow guidance and noise reduction.

[0028] Secondly, the spiral silencing plate 5 and the annular silencing cavity 7 form a double-layer sound absorption structure. The inner layer is the spiral silencing plate 5, and the outer annular silencing cavity 7 is filled with sound-absorbing material. Through the second silencing holes 8 evenly distributed on the wall of the silencing cylinder 4, it effectively absorbs sound waves penetrating the cylinder wall and noise of different frequency bands, achieving synergistic internal and external sound absorption and broad-spectrum noise reduction.

[0029] Furthermore, the continuous spiral silencer plate 5 not only provides a sound-absorbing surface, but the spiral guide channel it forms can guide the airflow to flow smoothly and stably downwards and generate centrifugal force, which promotes the airflow to contact the sound-absorbing surface more fully. At the same time, it effectively reduces the pressure loss caused by airflow turbulence, vortex and turning. While achieving efficient noise reduction, it minimizes the impact on the pumping efficiency of the vacuum pump.

[0030] The spiral silencing plate 5 divides the silencing cylinder 4 into an upper silencing zone, a spiral silencing guide zone, and a lower silencing zone along the airflow direction. The upper silencing zone absorbs the high-frequency vibration noise when the airflow initially enters. The spiral silencing guide zone guides the airflow through a spiral curved surface to generate downward centrifugal force and reduce noise. The lower silencing zone is used to absorb the low-frequency noise remaining after spiral guidance.

[0031] The radial outer edge of the spiral silencing plate 5 is fixedly connected to and tightly fitted to the inner wall of the silencing cylinder 4.

[0032] The radial outer edge of the spiral silencer plate 5 is tightly fixed to the inner wall of the silencer cylinder 4, which can prevent airflow from escaping from the gaps and ensure that the airflow flows completely along the spiral guide channel, avoiding additional noise caused by airflow leakage; the tight fit can also improve the stability and efficiency of airflow guidance and reduce turbulence; at the same time, the firm connection enhances the overall structural strength, prevents the components from loosening due to airflow impact and causing vibration noise, and allows sound waves to be absorbed more efficiently by the sound-absorbing material between the silencer plate and the cylinder wall, enhancing the silencing effect.

[0033] The spiral silencer plate 5 has at least 2 spiral turns, and the spiral helix angle of the spiral silencer plate 5 is 30° to 60°.

[0034] First, the spiral silencer plate 5 has at least 2 spiral turns, which can significantly extend the flow path of the airflow in the silencer cylinder 4, increase the contact time between the sound-absorbing material and the sound waves, and fully absorb the noise.

[0035] Secondly, the spiral angle of 30° to 60° effectively balances airflow guidance and resistance, which can guide the airflow to descend smoothly in a spiral, reducing turbulence noise, and avoid airflow obstruction or insufficient guidance caused by the angle being too large or too small, ensuring that the silencer can achieve both efficient noise reduction and stable gas transmission performance under different operating conditions.

[0036] In this embodiment, the spiral silencer plate 5 has 2 spiral turns and a spiral helix angle of 45°.

[0037] In addition to this embodiment, the number of spiral turns and the spiral helix angle of the spiral silencing plate 5 can be set according to design requirements.

[0038] The silencer 4 is a cylindrical pipe with both ends open.

[0039] The silencer 4 is designed as a cylindrical pipe with both ends open, which allows the airflow to enter and exit symmetrically and evenly along the central axis, reducing turbulence and noise caused by abrupt changes in cross-section. The regular cylindrical shape facilitates coaxial connection with the air inlet pipe 2 and the air outlet pipe 3, ensuring smooth airflow transition. At the same time, the cylindrical structure is simple to manufacture and has a low cost. The smooth inner wall facilitates the tight fit and installation of the spiral silencer plate 5, which, together with the annular silencer cavity 7, forms a stable and efficient silencer space, ensuring the stable performance of the overall silencer.

[0040] The diameter of the silencer 4 is larger than the diameter of the air intake pipe 2.

[0041] The diameter of the silencer 4 is larger than that of the air inlet pipe 2, which allows the high-speed airflow entering the silencer cabinet to quickly diffuse and slow down, reducing the initial noise caused by airflow collision and friction. At the same time, the expanded space provides ample layout space for components such as the spiral silencer plate 5 and the annular silencer cavity 7, facilitating the full functioning of subsequent sound absorption structures and achieving effective separation and treatment of airflow and sound waves. In addition, this design can also reduce the impact of airflow when entering the silencer 4, laying the foundation for a smooth silencing process in the spiral guide channel and improving the overall silencing efficiency.

[0042] The ratio of the diameter of the muffler 4 to the diameter of the air intake pipe 2 is 1.2:1 to 1.5:1.

[0043] The air inlet pipe 2 and the air outlet pipe 3 are integrally formed with the soundproof cabinet 1.

[0044] This design, with its one-piece molding, enhances structural strength, eliminates seams, reduces the risk of air leakage, and simplifies the manufacturing process.

[0045] The inlet of the air inlet pipe 2 and the outlet of the air outlet pipe 3 are bent into an annular fold.

[0046] This design, with its integrated bending forming a ring-shaped fold, enhances the structural strength of the pipe opening while avoiding welding or splicing, reducing the risk of air leakage and improving airtightness.

[0047] The first silencing hole 6 and the second silencing hole 8 are one of round holes, square holes or elongated holes.

[0048] The sound-absorbing material is fire-retardant sound-absorbing cotton, which has good sound absorption effect and also has the functions of fireproofing, heat preservation and sound insulation.

[0049] Working principle:

[0050] When the airflow generated by the magnetic levitation vacuum pump enters the silencer cabinet 1 through the one-piece inlet pipe 2, the airflow is diffused and slowed down because the diameter of the silencer cylinder 4 is larger than the diameter of the inlet pipe 2, thus initially reducing noise.

[0051] After entering the silencer 4, the upper silencer zone first absorbs the initial high-frequency vibration noise of the airflow; then the airflow spirals down along the spiral guide channel, generating downward centrifugal force, guiding the airflow to flow smoothly and reducing turbulent noise. At the same time, the sound-absorbing material inside the spiral silencer plate 5 and the first silencer hole 6 further absorb the sound waves.

[0052] After being guided by a spiral, the remaining low-frequency noise enters the lower silencing zone for processing, and then some of the sound waves are transmitted to the annular silencing cavity 7 through the second silencing hole 8 on the wall of the silencing cylinder 4.

[0053] Finally, the airflow, after undergoing multiple noise reduction processes, is discharged through the one-piece molded air outlet pipe 3. Throughout the process, the cylindrical silencer 4 with its two ends connected and the one-piece molded pipe structure ensure stable airflow transmission and the structural strength and sealing of the silencer cabinet.

[0054] For those skilled in the art, any changes, modifications, substitutions, and variations made to the implementation methods without departing from the principles and spirit of this utility model, based on the teachings of this utility model, still fall within the protection scope of this utility model.

Claims

1. A cabinet type silencer for the outlet of a magnetic suspension turbo vacuum pump, comprising a silencer cabinet (1), a gas inlet pipe (2) and a gas outlet pipe (3) symmetrically connected to both ends of the silencer cabinet (1), characterized in that: A muffler cylinder (4) is coaxially fixed inside the muffler cabinet (1). The axis of the muffler cylinder (4) coincides with the central axis of the air inlet pipe (2) and the air outlet pipe (3). A spiral muffler plate (5) is coaxially fixed inside the muffler cylinder (4). The spiral muffler plate (5) is composed of a continuous spiral curved surface and extends along the axial direction of the muffler cylinder (4) to form a spiral flow channel. Multiple first muffler holes (6) are arrayed on the airflow contact surface of the spiral muffler plate (5) and are filled with sound-absorbing material. An annular muffler cavity (7) is formed by the outer wall of the muffler cylinder (4) and the inner wall of the muffler cabinet (1). The annular muffler cavity (7) is filled with sound-absorbing material. Multiple second muffler holes (8) are uniformly opened through the wall of the muffler cylinder (4) to connect the inner cavity of the muffler cylinder (4) and the annular muffler cavity (7).

2. A cabinet silencer for the outlet of a magnetic suspension turbo-vacuum pump according to claim 1, characterized in that: The spiral silencing plate (5) divides the inner cavity of the silencing cylinder (4) into an upper silencing zone, a spiral silencing guide zone and a lower silencing zone along the airflow direction. The upper silencing zone is located on the airflow inlet side and is used to absorb high-frequency vibration noise. The spiral silencing guide zone guides the airflow through a spiral curved surface to generate downward centrifugal force and reduce noise. The lower silencing zone is located on the airflow outlet side and is used to absorb low-frequency noise.

3. A cabinet silencer for the outlet of a magnetic suspension turbo-vacuum pump according to claim 2, characterized in that: The radial outer edge of the spiral silencing plate (5) is fixedly connected to and tightly fitted to the inner wall of the silencing cylinder (4).

4. A cabinet silencer for the outlet of a magnetic suspension turbo-vacuum pump according to claim 3, characterized in that: The spiral silencer (5) has at least 2 spiral turns and its spiral angle ranges from 30° to 60°.

5. A cabinet silencer for the outlet of a magnetic suspension turbo-vacuum pump according to claim 4, characterized in that: The silencer (4) is a cylindrical pipe with both ends connected, and the diameter of the silencer (4) is larger than the diameter of the air inlet pipe (2).

6. A cabinet silencer for the outlet of a magnetic suspension turbo-vacuum pump according to claim 5, characterized in that: The ratio of the diameter of the muffler (4) to the diameter of the air intake pipe (2) is 1.2:1 to 1.5:

1.

7. A cabinet silencer for the outlet of a magnetic suspension turbo-vacuum pump according to claim 6, characterized in that: The air inlet pipe (2) and air outlet pipe (3) are integrally formed with the silencer cabinet (1).

Images