Foolproofing devices for ion implanters and vacuum leak detectors

Abstract

A foolproof device for ion implanters and vacuum leak detectors includes: a first locking hole disposed in the robotic arm valve of the vacuum leak detector; a second locking hole disposed in the robotic arm valve of the ion implanter; and a key adapted to engage with the first and second locking holes. The key can be removed from the first locking hole and inserted into the second locking hole to open the robotic arm valve of the ion implanter only when the vacuum leak detector is open, and can be removed from the second locking hole and inserted into the first locking hole to close the robotic arm valve of the vacuum leak detector only when the ion implanter is closed. By implementing this foolproof device, the opening and closing sequence of the robotic arm valves of the ion implanter and vacuum leak detector is standardized, fundamentally eliminating the risk of misoperation due to operator negligence, effectively ensuring the sealing and vacuum status of the equipment, and improving operational safety and reliability.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor devices, and more particularly to a foolproof device for ion implanters and vacuum leak detectors. Background Technology

[0002] In modern industrial production, high-vacuum equipment is widely used in many key areas, such as semiconductor manufacturing, electronic device production, aerospace, and precision materials processing. This equipment typically operates in a vacuum or high-vacuum environment to ensure process precision and high-performance products. A vacuum environment helps reduce or eliminate interference from gas molecules in the process, for example, preventing oxidation and contamination in semiconductor manufacturing and improving the quality and uniformity of thin film deposition. To ensure the normal operation and production efficiency of this equipment, regular maintenance and timely repair in case of malfunctions are essential. In this process, vacuum leak detection serves as an important detection method, aiming to discover and repair any minute leaks that may exist in the equipment, maintaining its high-vacuum state and avoiding production interruptions or product quality degradation due to leaks.

[0003] Ion implanters, as one of the core pieces of equipment in semiconductor manufacturing, function to implant specific ions into silicon wafers or other semiconductor materials to alter the electrical properties of the materials, thereby creating electronic devices with specific functions. Because this process is extremely demanding in terms of environmental conditions, even the slightest leak can introduce impurities or interfere with the accuracy of ion implantation, ultimately affecting the performance of the final product. Therefore, rigorous vacuum leak testing is essential during regular maintenance and troubleshooting of ion implanters. This not only ensures that the equipment quickly returns to optimal operating condition after maintenance but also effectively extends the equipment's lifespan, reduces potential risks caused by leaks, and provides reliable technical support for precision industries such as semiconductor manufacturing.

[0004] Currently, the long-term stability and maintenance efficiency of the equipment still need to be improved. Utility Model Content

[0005] The problem solved by this utility model embodiment is to provide a foolproof device for ion implanters and vacuum leak detectors, which enhances the long-term stability and maintenance efficiency of the equipment, and has significant advantages in improving production efficiency and equipment lifespan.

[0006] To address the aforementioned problems, this utility model provides a foolproof device for an ion implanter and a vacuum leak detector. Both the ion implanter and the vacuum leak detector are equipped with a robotic arm valve, comprising: a first locking hole disposed in the robotic arm valve of the vacuum leak detector; a second locking hole disposed in the robotic arm valve of the ion implanter; and a key adapted to engage with the first and second locking holes. The key can be pulled out from the first locking hole and inserted into the second locking hole to open the robotic arm valve of the ion implanter only when the vacuum leak detector is in the open state, and can be pulled out from the second locking hole and inserted into the first locking hole to close the robotic arm valve of the vacuum leak detector only when the ion implanter is in the closed state.

[0007] Optionally, both the first keyhole and the second keyhole are adapted to the shape of the key, and the key can only be inserted or removed by rotating it at a predetermined angle.

[0008] Optionally, the foolproof device further includes: a first limiting member, spaced apart in the robotic arm valve, and adjacent first limiting members extending in the same direction; the first locking hole and the second locking hole both penetrate adjacent first limiting members, and the extending direction of the first locking hole and the second locking hole is the same as the extending direction of the first limiting member.

[0009] Optionally, the key includes: a rotating component and a second limiting component, the rotating component passing through the second limiting component, the rotating component being adapted to drive the second limiting component to rotate, the rotated first limiting component being located at the bottom of the second limiting component, and the end of the rotated first limiting component being blocked by the second limiting component.

[0010] Optionally, the length of the second limiting member in the extension direction is greater than the distance between adjacent first limiting members.

[0011] Optionally, the rotating component includes a rotating handle and a rotating column in contact with the rotating handle, the rotating column passing through the second limiting member.

[0012] Optionally, the rotating handle and the rotating column are an integral structure.

[0013] Optionally, the vacuum leak detector is connected to the ion implanter via a bellows.

[0014] Optionally, the material of the bellows may include a vacuum-resistant material.

[0015] Optionally, when the vacuum leak detector is not in use, the vacuum leak detector is in a normally closed state, and the end of the first limiting member is blocked by the second limiting member.

[0016] Compared with the prior art, the technical solution of this utility model embodiment has the following advantages:

[0017] This utility model provides a foolproof device for an ion implanter and a vacuum leak detector. Both the ion implanter and the vacuum leak detector are equipped with a robotic arm valve. A first locking hole is located in the robotic arm valve of the vacuum leak detector, and a second locking hole is located in the robotic arm valve of the ion implanter. A key is adapted to cooperate with the first and second locking holes. The key can be pulled out from the first locking hole and inserted into the second locking hole to open the robotic arm valve of the ion implanter only when the vacuum leak detector is open, and the key can be pulled out from the second locking hole and inserted into the first locking hole to close the robotic arm valve of the vacuum leak detector only when the ion implanter is closed. In other words, by setting up a foolproof device, the opening and closing sequence of the robotic valves of the ion implanter and vacuum leak detector is standardized, fundamentally eliminating the risk of misoperation caused by operator negligence, such as air backflow, effectively ensuring the sealing and vacuum status of the equipment, and improving the safety and reliability of operation. At the same time, its mechanical structure, which does not rely on the operator's experience, reduces the probability of human error, optimizes the equipment maintenance process, and enhances the long-term stability and maintenance efficiency of the equipment, which has significant advantages in improving production efficiency and equipment lifespan. Attached Figure Description

[0018] Figures 1 to 5 This is a schematic diagram of the structure of the foolproof device for ion implanters and vacuum leak detectors according to this utility model. Detailed Implementation

[0019] Currently, ion implanters are high-vacuum devices. When an ion implanter requires regular maintenance or malfunction repair, a vacuum leak detector is needed to check for vacuum leaks. After the ion implanter is evacuated, the vacuum leak detector is connected to the machine via a bellows. The robotic arm valve of the vacuum leak detector is then opened. When the vacuum level displayed by the vacuum leak detector is close to that of the ion implanter, the robotic arm valve is opened again, connecting the machine to the vacuum leak detector. Helium gas is then injected into various parts of the ion implanter. If helium is detected at the vacuum leak detector, it indicates a problem with the ion implanter's seal; if not, it indicates a problem. If helium is detected, the ion implanter is properly sealed. After completing the vacuum test, close the robotic arm valve of the ion implanter, and finally close the robotic arm valve of the vacuum leak detector. Disconnect the external connection pipe. This method is simple and easy to operate, but it has a significant hidden danger. If the robotic arm valve of the ion implanter is not closed before closing the robotic arm valve of the vacuum leak detector, there will be a large pressure difference between the ion implanter and the vacuum leak detector. This will cause air to flow back into the ion implanter, affecting the molecular pump, cold pump, etc. of the ion implanter. In addition, air backflow will also have a significant impact on the degree of particulate contamination at the machine end.

[0020] To address the technical problem, this utility model provides a foolproof device for an ion implanter and a vacuum leak detector. Both the ion implanter and the vacuum leak detector are equipped with a robotic arm valve, comprising: a first locking hole disposed in the robotic arm valve of the vacuum leak detector; a second locking hole disposed in the robotic arm valve of the ion implanter; and a key adapted to engage with the first and second locking holes. The key can be pulled out from the first locking hole and inserted into the second locking hole to open the robotic arm valve of the ion implanter only when the vacuum leak detector is open, and can be pulled out from the second locking hole and inserted into the first locking hole to close the robotic arm valve of the vacuum leak detector only when the ion implanter is closed.

[0021] This utility model provides a foolproof device for an ion implanter and a vacuum leak detector. Both the ion implanter and the vacuum leak detector are equipped with robotic valves. A first locking hole is located in the robotic valve of the vacuum leak detector, and a second locking hole is located in the robotic valve of the ion implanter. A key is adapted to engage with both the first and second locking holes. The key can only be pulled out of the first locking hole and inserted into the second locking hole to open the robotic valve of the ion implanter when the vacuum leak detector is open. Conversely, the key can only be pulled out of the second locking hole and inserted into the first locking hole to close the robotic valve of the vacuum leak detector when the ion implanter is closed. In other words, by setting up a foolproof device, the opening and closing sequence of the robotic valves of the ion implanter and the vacuum leak detector is standardized, fundamentally eliminating the risk of misoperation due to operator negligence, such as air backflow, effectively ensuring the sealing and vacuum status of the equipment, and improving the safety and reliability of operation. Meanwhile, its mechanical structure, which does not rely on operator experience, reduces the probability of human error, optimizes equipment maintenance processes, and enhances the long-term stability and maintenance efficiency of the equipment, which has significant advantages in improving production efficiency and equipment lifespan.

[0022] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0023] Figures 1 to 5 This is a schematic diagram of the structure of the foolproof device for ion implanters and vacuum leak detectors according to this utility model.

[0024] refer to Figures 1 to 5The foolproof device for an ion implanter and a vacuum leak detector includes: a first locking hole 101 disposed in the robotic arm valve 120 of the vacuum leak detector 128; a second locking hole 102 disposed in the robotic arm valve 120 of the ion implanter 126; and a key 112 adapted to cooperate with the first locking hole 101 and the second locking hole 102. The key 112 can be pulled out from the first locking hole 101 and inserted into the second locking hole 102 to open the robotic arm valve 120 of the ion implanter 126 only when the vacuum leak detector 128 is in the open state, and the key 112 can be pulled out from the second locking hole 102 and inserted into the first locking hole 101 to close the robotic arm valve 120 of the vacuum leak detector 128 only when the ion implanter 126 is in the closed state.

[0025] It should be noted that the robotic arm valve 120 plays a crucial role in the ion implanter 126 and the vacuum leak detector 128. It serves as a switch to control the vacuum channel between the ion implanter 126 and the vacuum leak detector 128. During vacuum leak testing, the robotic arm valve 120 is opened to connect the equipment for detection. During non-vacuum leak testing, the robotic arm valve 120 is closed to maintain independent vacuum environments for each. At the same time, the robotic arm valve 120 is part of the foolproof device. The foolproof device ensures that after vacuum leak testing is completed, the robotic arm valve 120 of the ion implanter 126 is closed first, followed by the robotic arm valve 120 of the vacuum leak detector 128. This prevents air backflow due to misoperation, protects the equipment from damage, and ensures operational safety.

[0026] It should also be noted that key 112 can only be pulled out from the first lock hole 101 and inserted into the second lock hole 102 to open the robotic arm valve 120 of the ion implanter 126 when the vacuum leak detector 128 is open. Furthermore, key 112 can only be pulled out from the second lock hole 102 and inserted into the first lock hole 101 to close the robotic arm valve 120 of the vacuum leak detector 128 when the ion implanter 126 is closed. By setting up a foolproof device, the opening and closing sequence of the robotic arm valve 120 of the ion implanter 126 and the vacuum leak detector 128 is standardized, fundamentally eliminating the risk of misoperation due to operator negligence, such as air backflow, effectively ensuring the sealing and vacuum status of the equipment, and improving the safety and reliability of operation. At the same time, its mechanical structure, which does not rely on operator experience, reduces the probability of human error, optimizes the equipment maintenance process, and enhances the long-term stability and maintenance efficiency of the equipment, offering significant advantages for improving production efficiency and equipment lifespan.

[0027] In this embodiment, both the ion implanter 126 and the vacuum leak detector 128 are equipped with robotic arm valves 120.

[0028] Specifically, both the ion implanter 126 and the vacuum leak detector 128 are equipped with a robotic arm valve 120, which provides a basic structure for achieving reliable connection and vacuum side leakage control between the ion implanter 126 and the vacuum leak detector 128, ensuring the safety and stability of the vacuum leak detection process.

[0029] In this embodiment, the vacuum leak detector 128 and the ion implanter 126 are connected by a bellows 121.

[0030] It should be noted that the vacuum leak detector 128 and the ion implanter 126 are connected by a bellows 121. The flexibility and vacuum resistance of the bellows 121 not only ensure the tightness of the connection between the two, but also allow for displacement adjustment within a certain range to adapt to minor changes during the vacuum leak detection process and ensure leak detection accuracy.

[0031] As an example, the material of the bellows 121 includes a vacuum-resistant material.

[0032] Specifically, the selection of vacuum-resistant materials ensures the stability and durability of the bellows 121 in a high vacuum environment, prevents leakage risks caused by material failure, and ensures the reliable performance of the vacuum leak detection process.

[0033] In this embodiment, the first keyhole 101 is disposed in the robotic arm valve 120 of the vacuum leak detector 128.

[0034] The first keyhole 101 is located in the robotic arm valve 120 of the vacuum leak detector 128, providing a precise positioning and mating interface for the key 112, ensuring that the opening and closing actions of the robotic arm valve 120 of the vacuum leak detector 128 can be effectively controlled.

[0035] In this embodiment, the second keyhole 102 is disposed in the robotic arm valve 120 of the ion implanter 126.

[0036] Specifically, the second keyhole 102 is located in the robotic arm valve 120 of the ion implanter 126 and works in conjunction with the first keyhole 101 to provide a basis for the operation control of the key 112 on the side of the ion implanter 126, ensuring that the opening and closing of the robotic arm valve 120 of the ion implanter 126 is performed in accordance with the predetermined foolproof logic.

[0037] In this embodiment, both the first keyhole 101 and the second keyhole 102 are adapted to the shape of the key 112, and the key 112 can only be inserted or removed by rotating it at a predetermined angle.

[0038] It should be noted that the first keyhole 101 and the second keyhole 102 are both adapted to the shape of the key 112, and the key 112 can only be inserted or pulled out by rotating it at a predetermined angle. In other words, through the dual calibration of shape and angle, it is ensured that the key 112 can only be matched with the first keyhole 101 and the second keyhole 102, which effectively avoids the risk of misoperation and strengthens the foolproof function.

[0039] As an example, the foolproof device also includes: first limiting members 100, spaced apart in the robotic arm valve 120, and adjacent first limiting members 100 extending in the same direction.

[0040] Specifically, the first limiting members 100 are spaced apart in the robotic arm valve 120, and adjacent first limiting members 100 extend in the same direction, providing guidance and limiting for the movement of the key 112, ensuring that the key 112 maintains the correct movement trajectory during operation, and preventing misoperation due to positional deviation.

[0041] In this embodiment, the key 112 is adapted to cooperate with the first keyhole 101 and the second keyhole 102. The key 112 can be pulled out from the first keyhole 101 and inserted into the second keyhole 102 to open the robotic arm valve 120 of the ion implanter 126 only when the vacuum leak detector 128 is in the open state. The key 112 can be pulled out from the second keyhole 102 and inserted into the first keyhole 101 to close the robotic arm valve 120 of the vacuum leak detector 128 only when the ion implanter 126 is in the closed state.

[0042] It should be noted that the key 112, as the core operating component of the entire foolproof device, achieves the forced binding of the opening and closing sequence of the vacuum leak detector 128 and the robotic valve 120 of the ion implanter 126 through its precise cooperation with the lock hole and the limiting component. This effectively avoids risks such as air backflow caused by incorrect operating sequence, ensuring the safe operation of the equipment. At the same time, its mechanical structure, which does not rely on the operator's experience, reduces the probability of human error, optimizes the equipment maintenance process, and enhances the long-term stability and maintenance efficiency of the equipment. It has significant advantages in improving production efficiency and equipment lifespan.

[0043] In this embodiment, the first lock hole 101 and the second lock hole 102 both penetrate the adjacent first limiting member 100, and the extending directions of the first lock hole 101 and the second lock hole 102 are the same as the extending direction of the first limiting member 100.

[0044] Specifically, the first lock hole 101 and the second lock hole 102 both penetrate the adjacent first limiting member 100, and the extension direction of the first lock hole 101 and the second lock hole 102 is the same as the extension direction of the first limiting member 100, ensuring the spatial coordination and consistency between the first lock hole 101 and the second lock hole 102 and the first limiting member 100, so that the first limiting member 100 can limit the key 112 inserted into the first lock hole 101 or the second lock hole 102, and realize the forced binding of the opening and closing sequence of the vacuum leak detector 128 and the robotic valve 120 of the ion implanter 126.

[0045] In this embodiment, the key 112 includes: a rotating component 110 and a second limiting component 111. The rotating component 110 passes through the second limiting component 111 and is adapted to drive the second limiting component 111 to rotate. The first limiting component 100 after rotation is located at the bottom of the second limiting component 111, and the end of the second limiting component 111 after rotation is blocked by the first limiting component 100.

[0046] It should be noted that the cooperative design of the rotating component 110 and the second limiting component 111 enables the key 112 to drive the second limiting component 111 to move during rotation, thereby enabling the first limiting component 100 to block the end of the second limiting component 111, thus physically restricting the key 112 from being pulled out and inserted, and further enhancing the reliability of the foolproof function.

[0047] In this embodiment, the length of the second limiting member 111 in the extending direction is greater than the distance between adjacent first limiting members 100.

[0048] Specifically, the length of the second limiting member 111 in the extension direction is greater than the distance between adjacent first limiting members 100, ensuring that the first limiting member 100 can fully cover the end of the second limiting member 111, effectively preventing the key from being pulled out under unauthorized conditions, and improving the safety and anti-misoperation capability of the device.

[0049] In this embodiment, the rotating component 110 includes a rotating handle 1101 and a rotating column 1102 that contacts the rotating handle 1101, with the rotating column 1102 passing through the second limiting member 111.

[0050] It should be noted that the combination design of the rotating handle 1101 and the rotating column 1102 provides convenience for the operator, making the key rotation action more effortless and precise. It ensures that the rotational force can be effectively transmitted to the rotating column 1102 through the rotating handle 1101, and the rotating column 1102 drives the second limit member 111 to rotate, thereby achieving precise control of the foolproof function.

[0051] In this embodiment, the rotating handle 1101 and the rotating column 1102 are an integral structure.

[0052] Specifically, the rotating handle 1101 and the rotating column 1102 are integrated structures. The integrated structure improves the overall strength and reliability of the rotating component 110, reduces the risk of functional failure due to loosening or damage of parts, and ensures the stability and durability of the key during long-term use.

[0053] In this embodiment, when the vacuum leak detector 128 is not in use, the vacuum leak detector 128 is in a normally closed state, and the end of the first limiting member 100 is blocked by the second limiting member 111.

[0054] It should be noted that the vacuum leak detector 128 is in a normally closed state, which ensures the sealing of the vacuum leak detector 128 during non-working periods and prevents external impurities from entering. At the same time, the second limiting member 111 blocks the end of the first limiting member 100, which can prevent the key 112 from being pulled out, thereby preventing the robotic arm valve 120 of the ion implanter 126 from being opened.

[0055] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A foolproof device for an ion implanter and a vacuum leak detector, wherein both the ion implanter and the vacuum leak detector are equipped with a robotic arm valve, characterized in that, include: The first keyhole is located in the robotic arm valve of the vacuum leak detector; The second locking hole is located in the robotic arm valve of the ion implanter; A key is adapted to engage with the first keyhole and the second keyhole. The key can be pulled out from the first keyhole and inserted into the second keyhole to open the robotic arm valve of the ion implanter only when the vacuum leak detector is in the open state, and the key can be pulled out from the second keyhole and inserted into the first keyhole to close the robotic arm valve of the vacuum leak detector only when the ion implanter is in the closed state.

2. The foolproof device as described in claim 1, characterized in that, Both the first and second keyholes are adapted to the shape of the key, and the key can only be inserted or removed by rotating it at a predetermined angle.

3. The error-proofing device as described in claim 1, characterized in that, The error-proofing device also includes: The first limiting member is spaced apart in the robot valve, and adjacent first limiting members extend in the same direction; The first lock hole and the second lock hole both penetrate the adjacent first limiting member, and the extending direction of the first lock hole and the second lock hole is the same as the extending direction of the first limiting member.

4. The foolproof device as described in claim 3, characterized in that, The key includes: a rotating component and a second limiting component, the rotating component passing through the second limiting component, the rotating component being adapted to drive the second limiting component to rotate, the first limiting component after rotation being located at the bottom of the second limiting component, and the end of the first limiting component after rotation being blocked by the second limiting component.

5. The error-proofing device as described in claim 4, characterized in that, The length of the second limiting member in the extension direction is greater than the distance between adjacent first limiting members.

6. The foolproof device as described in claim 4, characterized in that, The rotating component includes a rotating handle and a rotating column that contacts the rotating handle, the rotating column passing through the second limiting member.

7. The foolproof device as described in claim 6, characterized in that, The rotating handle and the rotating column are an integral structure.

8. The foolproof device as described in claim 1, characterized in that, The vacuum leak detector is connected to the ion implanter via a bellows.

9. The foolproof device as described in claim 8, characterized in that, The bellows is made of a vacuum-resistant material.

10. The foolproof device as described in claim 4, characterized in that, When the vacuum leak detector is not in use, it is in a normally closed state, and the end of the first limiting member is blocked by the second limiting member.

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