Connection device for a vacuum apparatus and vacuum apparatus

Abstract

The utility model relates to vacuum equipment technical field especially relates to a connecting device for vacuum equipment and vacuum equipment, the connecting device for vacuum equipment includes fixed part, medium transmission subassembly, sealing assembly and manual operation spare. Wherein, fixed part is configured as with the furnace body fixed connection of vacuum equipment, and the outer thread is provided on the outer circumferential side of fixed part. Part sealing assembly sets up between medium transmission subassembly and fixed part. Manual operation spare is set on medium transmission subassembly and fixed part, and manual operation spare is screwed with the outer thread on fixed part. Such dismounting only needs to rotate manual operation spare, need not any cutting operation, fundamentally eliminates the risk of fire operation, reduces the potential safety hazard. Avoid the generation of metal dust, guarantee vacuum chamber cleanliness. At the same time, the rotation operation can realize the dismounting of sealing assembly and medium transmission subassembly, need not complicated dismounting tool, greatly shortens the dismounting time, improves work efficiency.

Description

Technical Field

[0001] This utility model relates to the field of vacuum equipment technology, and in particular to a connection device for vacuum equipment and a vacuum equipment. Background Technology

[0002] The connection device of a vacuum equipment is a key component ensuring stable operation, and its performance directly affects the equipment's operating efficiency and maintenance costs. The water-cooled plate, as a core temperature control component within the vacuum equipment, needs to be connected to external water or gas systems via the connection device to ensure timely heat dissipation and prevent localized overheating that could negatively impact the coating effect. Simultaneously, during the coating process, sputtered material extensively deposits on the chamber walls and surfaces of the water-cooled plate. With increasing cycle count, the thickening of the deposited layer can compromise vacuum stability and reduce the heat exchange efficiency of the water-cooled plate. Therefore, the connection device must be periodically disassembled for cleaning and maintenance of the water-cooled plate.

[0003] In existing technologies, the connection methods for vacuum equipment connection devices are mostly welding and flange fixing structures. Welded connections require cutting with an angle grinder during disassembly, which is time-consuming and labor-intensive. Furthermore, the cutting process easily generates metal dust, contaminating the vacuum chamber and affecting coating quality and subsequent processes. In addition, there are safety hazards associated with hot work. While flange fixing eliminates the need for cutting, it is cumbersome to assemble and disassemble, reducing work efficiency.

[0004] Therefore, there is an urgent need to design a connection device and vacuum equipment for vacuum equipment to solve the above technical problems. Utility Model Content

[0005] The purpose of this utility model is to provide a connection device and vacuum equipment for vacuum equipment, which can improve the efficiency of disassembly and assembly, avoid contamination of the vacuum chamber, and reduce safety hazards.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] On one hand, this utility model provides a connection device for vacuum equipment, comprising:

[0008] A fastener configured to be fixedly connected to the furnace body of a vacuum device, wherein the fastener has external threads on its outer peripheral side;

[0009] A media transport assembly and a sealing assembly, wherein a portion of the sealing assembly is disposed between the media transport assembly and the fixing member;

[0010] A manual operating component is sleeved on the medium transmission assembly and the fixing component, and the manual operating component is screwed to the external thread on the fixing component.

[0011] As an optional technical solution for a connection device for vacuum equipment, the medium transmission assembly includes a first connector, and the sealing assembly includes a first seal. One side of the first seal abuts against the fixing member, and the first connector abuts against the other side of the first seal. The fixing member has a first channel inside, the first seal has a second channel inside, and the first connector has a third channel inside. The first channel, the second channel, and the third channel are connected in sequence.

[0012] As an optional technical solution for a connection device for vacuum equipment, the first sealing member has an extension on the side facing the fixing member, the extension extends into the first channel, and the second channel is provided inside the extension.

[0013] As an optional technical solution for a connection device for vacuum equipment, the first sealing member is provided with a first sealing groove on the side facing the fixing member, and the sealing assembly further includes a first sealing ring, which is disposed in the first sealing groove and abuts against the end of the fixing member.

[0014] As an optional technical solution for a connection device for vacuum equipment, the first sealing member is provided with a second sealing groove on the side facing the first connector, and the sealing assembly further includes a second sealing ring, which is disposed in the second sealing groove and abuts against the end of the first connector.

[0015] As an optional technical solution for a connection device for vacuum equipment, the sealing assembly further includes a second seal, which is sleeved on the first connector, and the manual operating member squeezes the second seal.

[0016] As an optional technical solution for a connection device for vacuum equipment, the medium transmission assembly further includes a second connector. The outer peripheral side of the end of the first connector away from the first seal is provided with an external thread, and the second connector is provided with an internal thread. The second connector is screwed to the first connector.

[0017] As an optional technical solution for a connection device for vacuum equipment, the second connector has a fourth channel inside, which is connected to the third channel.

[0018] On the other hand, this utility model provides a vacuum device, the vacuum device comprising:

[0019] The furnace body, wherein a vacuum chamber is provided inside the furnace body;

[0020] A water-cooled plate is disposed in the vacuum chamber. The water-cooled plate has an inlet and an outlet for medium flow to control the temperature of the vacuum chamber through medium circulation.

[0021] At least one of the above-described connecting devices for vacuum equipment, wherein the fixing member of the connecting device for vacuum equipment is fixedly connected to the side wall of the furnace body, and the media transmission component of the connecting device for vacuum equipment is connected to the water inlet or the water outlet.

[0022] As an optional technical solution for a vacuum device, the vacuum device further includes a connecting pipe, one end of which is connected to the water inlet or the water outlet, and the other end of which passes through the side wall of the furnace body and is connected to the media transmission component.

[0023] The beneficial effects of this utility model include at least the following:

[0024] This utility model provides a connection device for vacuum equipment, which includes a fixing member, a media transmission assembly, a sealing assembly, and a manual operating component. The fixing member is configured to be fixedly connected to the furnace body of the vacuum equipment, and has external threads on its outer periphery. A portion of the sealing assembly is disposed between the media transmission assembly and the fixing member. The manual operating component is sleeved on the media transmission assembly and the fixing member, and is screwed onto the external threads of the fixing member.

[0025] As described above, the manual operating component and the fixing component are connected by an external thread. Disassembly and assembly only require rotating the manual operating component, eliminating the need for any cutting operations and fundamentally eliminating the risk of hot work and reducing safety hazards. It also avoids the generation of metal dust, ensuring the cleanliness of the vacuum chamber. Traditional welding and flange connections significantly consume maintenance time. The connection device for vacuum equipment in this invention, through the threaded design of the manual operating component and the fixing component, allows for the disassembly and assembly of the sealing component and the media transmission component by rotation, eliminating the need for complex disassembly and assembly tools, greatly shortening disassembly and assembly time, and improving work efficiency.

[0026] This utility model also provides a vacuum device that can improve the maintenance efficiency of the vacuum device, ensure the process quality of coating, reduce safety hazards, and improve safety. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0028] Figure 1 This is a front view of the connection device for vacuum equipment provided in an embodiment of the present invention;

[0029] Figure 2 This is a cross-sectional view of the connection device for vacuum equipment provided in an embodiment of the present invention;

[0030] Figure 3 This is a partial cross-sectional view of the vacuum device provided in this embodiment of the utility model.

[0031] Figure Labels

[0032] 100. Furnace body; 110. Vacuum chamber; 120. Water cooling plate; 130. Connecting pipe;

[0033] 10. Fasteners; 11. First channel;

[0034] 20. Media transmission component; 21. First connector; 22. Third channel; 23. Second connector; 24. Fourth channel;

[0035] 30. Sealing assembly; 31. First seal; 32. Second channel; 33. Extension; 34. First sealing groove; 35. First sealing ring; 36. Second sealing groove; 37. Second sealing ring; 38. Second seal;

[0036] 40. Manual operation components. Detailed Implementation

[0037] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0038] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0039] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0040] In the description of this utility model, it should be noted that the terms "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0041] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0042] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0043] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0044] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0045] This embodiment provides a connection device for vacuum equipment, which can improve the efficiency of disassembly and assembly, avoid contamination of the vacuum chamber, and reduce safety hazards.

[0046] like Figures 1-3As shown, the connection device for the vacuum equipment mainly includes a fixing member 10, a media transmission assembly 20, a sealing assembly 30, and a manual operating member 40. The fixing member 10 is configured to be fixedly connected to the furnace body 100 of the vacuum equipment, and external threads are provided on the outer periphery of the fixing member 10. A portion of the sealing assembly 30 is disposed between the media transmission assembly 20 and the fixing member 10. The manual operating member 40 is sleeved on the media transmission assembly 20 and the fixing member 10, and is screwed into the external threads on the fixing member 10.

[0047] Based on the above design, in this embodiment, the manual operating component 40 and the fixing component 10 are connected by an external thread. Disassembly and assembly only require rotating the manual operating component 40, eliminating the need for any cutting operations. This fundamentally eliminates the risk of hot work and prevents the generation of metal dust, ensuring the cleanliness of the vacuum chamber 110. Traditional welding and flange connections significantly consume maintenance time. In this embodiment, the connection device for vacuum equipment, through the threaded connection between the manual operating component 40 and the fixing component 10, allows for the disassembly and assembly of the sealing component 30 and the media transmission component 20 simply by rotating, without the need for complex tools. This significantly shortens disassembly and assembly time and improves work efficiency.

[0048] Furthermore, in this connection device for vacuum equipment, apart from the fixing component 10, the media transmission component 20, the sealing component 30, and the manual operating component 40 can all be quickly disassembled and replaced. For example, when the sealing component 30 ages, only the sealing component 30 needs to be replaced; there is no need to replace the fixing component 10 or the connection device for vacuum equipment, significantly reducing maintenance costs and spare parts consumption. In this embodiment, the sealing component 30 can form a seal during the rotation and compression process of the manual operating component 40, thereby improving sealing performance and reducing or preventing media leakage.

[0049] For example, the fixing member 10 in this embodiment is made of 304 stainless steel. The manual operating member 40 is set as a pendant handle with a scalloped thread. The outer periphery of the pendant handle has 6 scalloped protrusions, which makes it easy for the operator to hold and apply force. The internal thread of the pendant handle matches the external thread of the fixing member 10.

[0050] like Figures 1-2 As shown, the medium transmission assembly 20 includes a first connector 21, and the sealing assembly 30 includes a first seal 31. One side of the first seal 31 abuts against the fixing member 10, and the first connector 21 abuts against the other side of the first seal 31. The fixing member 10 has a first channel 11 inside, the first seal 31 has a second channel 32 inside, and the first connector 21 has a third channel 22 inside. The first channel 11, the second channel 32, and the third channel 22 are connected in sequence.

[0051] During assembly, only the first seal 31 needs to be attached to the fixing member 10 and the first connector 21 needs to be attached to the first seal 31 to complete the initial positioning. Subsequent tightening with the manual operating member 40 will secure it, reducing assembly difficulty. During maintenance, the first seal 31 can be replaced separately by disassembling the first connector 21, without disassembling the entire media transmission assembly 20, improving maintenance convenience.

[0052] Optionally, the first seal 31 is made of polytetrafluoroethylene to ensure sufficient strength and sealing compression.

[0053] In some alternative embodiments, the first seal 31 is provided with an extension 33 on the side facing the fixing member 10, the extension 33 extends into the first channel 11, and a second channel 32 is provided inside the extension 33.

[0054] After the extension 33 extends into the first channel 11, it provides radial positioning for the first seal 31, preventing the first seal 31 from shifting when the manual operating part 40 is tightened. This ensures that the second channel 32 is always coaxially aligned with the first channel 11, and the medium transmission path is stable, preventing a sudden decrease in flow or pressure loss due to component shift.

[0055] like Figure 2 As shown, the first sealing element 31 has a first sealing groove 34 on the side facing the fixing element 10. The sealing assembly 30 also includes a first sealing ring 35, which is disposed within the first sealing groove 34 and abuts against the end of the fixing element 10. The first sealing groove 34 can limit the position of the first sealing ring 35, ensuring that the first sealing ring 35 is always located on the mating end face of the fixing element 10 and the first sealing element 31, thereby improving the sealing performance. At the same time, the first sealing ring 35 can fully fill the tiny gap between the fixing element 10 and the first sealing element 31, significantly improving the sealing effect and preventing media leakage.

[0056] Optionally, the first sealing ring 35 is an O-ring and is made of fluororubber.

[0057] like Figure 2 As shown, the first sealing member 31 has a second sealing groove 36 on the side facing the first connecting member 21. The sealing assembly 30 also includes a second sealing ring 37, which is disposed within the second sealing groove 36 and abuts against the end of the first connecting member 21. The second sealing ring 37 seals the gap between the first connecting member 21 and the first sealing member 31, preventing media leakage.

[0058] It is understandable that the dual sealing effect is achieved by setting the first sealing ring 35 and the second sealing ring 37, thereby improving the sealing performance of the connection device of the vacuum equipment.

[0059] The sealing assembly 30 also includes a second seal 38, which is fitted onto the first connector 21. The manual operating member 40 compresses the second seal 38. Since the manual operating member 40 is fitted onto the outside of the first connector 21, there is a gap of 0.1mm-0.2mm between them. This gap could become a path for external dust to enter or for internal media to leak. The second seal 38 fills this gap. When the manual operating member 40 compresses the second seal 38, the second seal 38 deforms, tightly fitting the inner hole of the manual operating member 40 and the outer wall of the first connector 21, completely sealing the gap and preventing dust from entering or media from leaking.

[0060] The second seal 38 is made of the same material as the first seal 31. That is, the second seal 38 is made of polytetrafluoroethylene (PTFE) to ensure sufficient strength and sealing compression.

[0061] like Figures 1-2 As shown, the media transmission assembly 20 also includes a second connector 23. The outer periphery of the end of the first connector 21 away from the first seal 31 is provided with an external thread, and the second connector 23 is provided with an internal thread. The second connector 23 is screwed to the first connector 21. During assembly, the second connector 23 is screwed to the internal thread of the first connector 21 through the external thread, and the end of the second connector 23 away from the first connector 21 is used to connect with the pipeline of an external water or gas system.

[0062] Vacuum equipment has diverse external water or gas system interface specifications. If the first connector 21 is a fixed interface, the entire first connector 21 needs to be replaced for different external systems, which is costly and inefficient. In this embodiment, the second connector 23 serves as an adapter. The second connector 23 with the corresponding internal thread can be replaced according to the interface specifications of the external water or gas system, thus eliminating the need to replace the first connector 21. This significantly improves the adaptability of the connection device used for vacuum equipment to different external water or gas systems and is compatible with the vast majority of water and gas system interfaces on the market.

[0063] Furthermore, the second connector 23 has a fourth channel 24 inside, which is connected to the third channel 22. After assembly, the fourth channel 24 and the third channel 22 are connected to form a continuous medium transmission channel, which facilitates the inflow and outflow of the medium and reduces flow resistance.

[0064] Optionally, in this embodiment, both the first connector 21 and the second connector 23 are made of metal, such as stainless steel.

[0065] like Figure 3As shown, this embodiment also provides a vacuum device, which includes a furnace body 100, a water-cooled plate 120, and at least one of the aforementioned connecting devices for the vacuum device. The furnace body 100 contains a vacuum chamber 110. The water-cooled plate 120 is disposed within the vacuum chamber 110, and has an inlet and an outlet for the flow of a medium (e.g., cooling water) to control the temperature of the vacuum chamber 110 through medium circulation. The fixing member 10 of the connecting device is fixedly connected to the side wall of the furnace body 100, and the medium transmission component 20 of the connecting device communicates with the inlet or outlet.

[0066] Because the vacuum equipment includes the aforementioned connecting device, disassembly and assembly can be completed simply by rotating the manual operating component 40 during maintenance, improving maintenance efficiency. Disassembly and assembly are dust-free, keeping the vacuum chamber 110 clean at all times and ensuring the quality of the coating process. Simultaneously, there is no risk of hot work, reducing safety hazards and ensuring the long-term safe operation of the vacuum equipment.

[0067] For example, the vacuum equipment may be a neodymium iron boron vacuum coating furnace.

[0068] Preferably, the connection device for the vacuum equipment is configured as two, corresponding to the water inlet and water outlet of the water-cooled plate 120 respectively.

[0069] like Figure 3 As shown, the vacuum equipment also includes a connecting pipe 130. One end of the connecting pipe 130 is connected to a water inlet or outlet, and the other end of the connecting pipe 130 passes through the side wall of the furnace body 100 and is connected to the media transmission assembly 20. The connecting pipe 130 is made of stainless steel. One end of the connecting pipe 130 is connected to the water inlet or outlet of the water-cooled plate 120, and the other end passes through a preset hole in the side wall of the furnace body 100 and extends into the third channel 22 of the first connector 21.

[0070] Obviously, the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments. Many other equivalent embodiments may be included without departing from the concept of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

[0071] Note that in the description of this specification, the references to terms such as "some embodiments," "other embodiments," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

Claims

1. Connection device for a vacuum apparatus, characterized in that include: A fastener (10) is configured to be fixedly connected to the furnace body (100) of the vacuum equipment, and the fastener (10) has an external thread on its outer peripheral side; A medium transport assembly (20) and a sealing assembly (30), wherein a portion of the sealing assembly (30) is disposed between the medium transport assembly (20) and the fastener (10); A manual operating component (40) is sleeved on the medium transmission assembly (20) and the fixing component (10), and the manual operating component (40) is screwed to the external thread on the fixing component (10).

2. The connection device for a vacuum apparatus according to claim 1, characterized in that The medium transmission assembly (20) includes a first connector (21), and the sealing assembly (30) includes a first seal (31). One side of the first seal (31) abuts against the fixing member (10), and the first connector (21) abuts against the other side of the first seal (31). The fixing member (10) has a first channel (11) inside, the first seal (31) has a second channel (32) inside, and the first connector (21) has a third channel (22) inside. The first channel (11), the second channel (32), and the third channel (22) are connected in sequence.

3. The connection device for a vacuum apparatus according to claim 2, characterized in that The first sealing member (31) has an extension (33) on the side facing the fixing member (10), the extension (33) extends into the first channel (11), and the second channel (32) is provided inside the extension (33).

4. The connection device for a vacuum apparatus according to claim 3, characterized in that The first sealing member (31) has a first sealing groove (34) on the side facing the fixing member (10). The sealing assembly (30) also includes a first sealing ring (35), which is disposed in the first sealing groove (34) and abuts against the end of the fixing member (10).

5. The connection device for vacuum equipment according to claim 2, characterized in that, The first sealing member (31) has a second sealing groove (36) on the side facing the first connector (21). The sealing assembly (30) also includes a second sealing ring (37), which is disposed in the second sealing groove (36) and abuts against the end of the first connector (21).

6. The connection device for vacuum equipment according to claim 2, characterized in that, The sealing assembly (30) further includes a second seal (38), which is fitted onto the first connector (21), and the manual operating member (40) squeezes the second seal (38).

7. The connection device for vacuum equipment according to claim 2, characterized in that, The medium transmission assembly (20) further includes a second connector (23). The outer peripheral side of the end of the first connector (21) away from the first seal (31) is provided with an external thread, and the second connector (23) is provided with an internal thread. The second connector (23) is screwed to the first connector (21).

8. The connection device for a vacuum apparatus according to claim 7, characterized in that The second connector (23) has a fourth channel (24) inside, which is connected to the third channel (22).

9. Vacuum apparatus characterized in that The vacuum device includes: A furnace body (100) is provided with a vacuum chamber (110) inside the furnace body (100); A water-cooled plate (120) is disposed in the vacuum chamber (110). The water-cooled plate (120) is provided with an inlet and an outlet for medium flow, so as to control the temperature of the vacuum chamber (110) through medium circulation. At least one connection device for a vacuum device as described in any one of claims 1-8, wherein the fixing member (10) of the connection device for the vacuum device is fixedly connected to the side wall of the furnace body (100), and the media transmission component (20) of the connection device for the vacuum device is in communication with the water inlet or the water outlet.

10. The vacuum apparatus of claim 9, wherein, The vacuum device also includes a connecting pipe (130), one end of which is connected to the water inlet or the water outlet, and the other end of which passes through the side wall of the furnace body (100) and is connected to the medium transmission assembly (20).

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