Novel drying tank cover
By designing a carbon fiber drying tank cover and setting an adjustment structure, the problem of liquid dripping was solved, achieving efficient drying and preventing defects, thus improving silicon wafer quality and equipment lifespan.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- YIBIN YINGFA DERUI TECHNOLOGY CO LTD
- Filing Date
- 2025-09-15
- Publication Date
- 2026-08-04
AI Technical Summary
Existing drying tank covers cannot effectively prevent chemical residue when protecting and sealing the cleaned baskets and silicon wafers. This results in chemical residue dripping onto the silicon wafer surface, causing defects such as watermarks, wafer sticking, or fragmentation, which affect the quality of the silicon wafers and the processing effect.
A novel drying chamber cover was designed, using carbon fiber material and incorporating an adjustment structure, including components such as air ducts, nozzles, and telescopic rods. By optimizing airflow, it ensures that the wet flower basket is aligned with the contact point of the pressure rod, enhancing the drying effect and preventing liquid dripping.
It effectively prevents the solution from dripping onto the silicon wafer surface, avoiding watermarks, wafer sticking, or fragmentation, improving drying efficiency and quality, and preventing nozzle clogging and damage.
Smart Images
Figure CN224593669U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of drying tank covers, and in particular to a novel drying tank cover. Background Technology
[0002] As a crucial component in industrial production, drying tank covers are widely used in drying systems across various industries, including chemical, food, and pharmaceutical. Their primary function is to protect and seal the drying tank, ensuring airflow and temperature control within a reasonable range. This improves drying efficiency, reduces energy consumption, and guarantees the quality of dried materials. However, with increasing demands for production efficiency and environmental protection across industries, traditional drying equipment has gradually revealed shortcomings such as poor sealing performance, low energy efficiency, and complex operation. Therefore, the technology of drying tank covers is constantly being innovated to meet the needs of modern production processes.
[0003] Existing technologies, such as the utility model patent with publication number CN216770007U, disclose a synchronous opening mechanism for drying tank covers. This patent includes a synchronous opening mechanism for drying tank covers, with movable tank covers slidably connected to both sides of the top of the drying tank body. The synchronous opening mechanism body is installed on the front and rear sides of the drying tank body. The drying tank body includes a slide rail, connecting sliders, a drive cylinder, and a synchronous belt. The connecting sliders are slidably connected to the outer surface of the slide rail. The top ends of two sets of connecting sliders are fixedly installed to two sets of movable tank covers, and the bottom ends of the two sets of connecting sliders are fixedly connected to the upper and lower sides of the synchronous belt, respectively. The output end of the drive cylinder is fixedly connected to one set of connecting sliders. This synchronous opening mechanism for drying tank covers reduces the switching stroke, ensures the synchronicity of the opening and closing of the two tank covers, saves costs, and reduces the overall size of the drying tank.
[0004] In the prior art, when using a drying tank cover to protect and seal the cleaned baskets and silicon wafers, the drying tank cover mainly serves to keep warm and prevent dust. It often cannot effectively prevent the residue of the chemical solution on the wet baskets and pressure rods. This residue of chemical solution can easily drip onto the surface of the silicon wafers, causing defects such as watermarks, wafer sticking, or fragmentation, which affects the surface quality of the silicon wafers and the subsequent processing effect. Utility Model Content
[0005] The purpose of this invention is to address the problem in the existing technology where, when using a drying tank cover to protect and seal cleaned baskets and silicon wafers, the cover primarily serves to insulate and prevent dust, often failing to effectively prevent residual chemicals from the wet baskets and pressure rods. These residual chemicals can easily drip onto the silicon wafer surface, causing watermarks, wafer sticking, or fragmentation, thus affecting the surface quality of the silicon wafers and subsequent processing effects. Therefore, a novel drying tank cover is proposed.
[0006] To solve the above technical problems, this utility model provides a novel drying tank cover, comprising: a carbon fiber tank cover, wherein a plurality of fixing blocks are installed on the upper surface of the carbon fiber tank cover, and a common support rod is installed on the inner wall of the plurality of fixing blocks; a plurality of reinforcing ribs are installed on the upper surface of the carbon fiber tank cover, and an adjustment structure is provided on the inner wall of the plurality of reinforcing ribs; the adjustment structure includes a first air duct, the first air duct and the reinforcing ribs are fixedly connected; an air inlet is fixedly connected to one side of the first air duct; a second air duct is fixedly connected to the arc surface of the first air duct; a positioning block is installed on the arc surface of the second air duct, the positioning block and the carbon fiber tank cover are fixedly connected; a fixing sleeve is fixedly connected to the arc surface of the second air duct; a nozzle is slidably connected to the inner wall of the fixing sleeve; and the arc surface of the fixing sleeve is fixedly connected to... The nozzle has two telescopic rods, with a connecting block fixedly connected to the other end of each rod. A spring is fitted onto the arc surface of each telescopic rod, and both ends of the spring are fixedly connected to the connecting block and the fixing sleeve, respectively. An auxiliary block is fixedly connected to one side of the connecting block, and a fixing plate is fixedly connected to one side of the auxiliary block. Several positioning rods are fixedly connected to the arc surface of the nozzle, with two positioning rods forming a group. Each group of positioning rods is slidably connected to the fixing plate. Two limiting blocks are fixedly connected to the arc surface of the nozzle, with an insert block slidably connected to the inner wall of each limiting block. The insert block is fixedly connected to the fixing sleeve, and a fixing rod is fixedly connected to the arc surface of the fixing sleeve. A ball bearing is fixedly connected to the other end of the fixing rod, and a welding block is movably connected to the arc surface of the ball bearing. A screw is threadedly connected to one side of the welding block.
[0007] The effect achieved by the above components is as follows: by setting the adjustment structure, the drying function of the carbon fiber tank cover can be increased, so that it is aligned with the contact position between the wet basket and the pressure rod to blow, which accelerates the air circulation in the tank, increases the drying effect, and avoids the dripping of the chemical residue on the basket onto the silicon wafer, thereby preventing the generation of watermarks, wafer sticking or fragments and other defects.
[0008] Preferably, a connecting frame is fixedly connected to one side of the nozzle, a rotating rod is rotatably connected to the inner wall of the connecting frame, a connecting plate is fixedly connected to the arc surface of the rotating rod, two coil springs are sleeved on the arc surface of the rotating rod, the two ends of the coil springs are fixedly connected to the connecting plate and the connecting frame respectively, a cover plate is fixedly connected to the lower surface of the connecting plate, a connecting block is fixedly connected to one side of the nozzle, and the inner walls of the connecting block and the cover plate are slidably connected to the same fixing frame.
[0009] The effect achieved by the above components is as follows: when the nozzle needs to be protected, first rotate the cover plate to drive the connecting plate to rotate. The connecting plate then drives the rotating rod to rotate inside the connecting frame. While the connecting plate is rotating, it also drives the coil spring to rotate. When the cover plate is in contact with the nozzle, move the fixing frame so that the fixing frame is inserted into the connecting block and the cover plate. At this time, the cover plate is fixed, which effectively prevents the nozzle from being blocked due to dust accumulation during the static process.
[0010] Preferably, a limiting rope is fixedly connected to one side of the fixed frame, and the other end of the limiting rope is fixedly connected to the nozzle.
[0011] The effect achieved by the above components is that the limiting rope can limit the fixed frame and prevent the fixed frame from being lost.
[0012] Preferably, the arc surface of the spring is fitted with a bellows, and the two ends of the bellows are fixedly connected to the connecting block and the fixing sleeve, respectively.
[0013] The effect achieved by the above components is that the bellows can protect the spring and prevent foreign objects from getting stuck in it.
[0014] Preferably, an auxiliary ring is fixedly connected to one side of the connecting block, and the cross-section of the auxiliary ring is circular.
[0015] The effect achieved by the above components is that the auxiliary ring can drive the connecting block to move, thus facilitating the control of the connecting block.
[0016] Preferably, a soft pad, which is a rubber pad, is fixedly connected to the inner wall of the fixing plate.
[0017] The effect achieved by the above components is that the soft pad can prevent the fixing plate from directly contacting the nozzle, thus preventing damage to the nozzle.
[0018] Compared with related technologies, the novel drying tank cover provided by this utility model has the following beneficial effects:
[0019] This invention provides a novel drying tank cover. By setting an adjustment structure, the drying function of the carbon fiber tank cover can be enhanced, and the airflow at the contact position between the wet basket and the pressure rod can be optimized, thereby accelerating the air circulation in the tank and improving the drying effect. At the same time, it effectively prevents the residual medicine on the basket from dripping onto the silicon wafer surface, avoiding adverse phenomena such as watermarks, wafer sticking, or fragments. Attached Figure Description
[0020] Figure 1 A schematic diagram of the structure of a novel drying tank cover provided by this utility model;
[0021] Figure 2 for Figure 1 The diagram shows the structural schematic of the adjustment structure.
[0022] Figure 3 for Figure 2 A partial structural schematic diagram of the adjustment structure shown;
[0023] Figure 4 for Figure 3 A partial structural diagram of the adjustment structure is shown;
[0024] Figure 5 for Figure 3 Enlarged diagram of point A.
[0025] The diagram is labeled as follows: 1. Support rod; 2. Fixing block; 3. Reinforcing rib; 4. Carbon fiber channel cover; 5. Adjustment structure; 501. First air duct; 502. Air inlet; 503. Second air duct; 504. Positioning block; 505. Fixing sleeve; 506. Nozzle; 507. Telescopic rod; 508. Connecting block; 509. Spring; 510. Auxiliary block; 511. Fixing plate; 512. Positioning rod; 513. Limiting block; 514. Insert block; 515. Welding block; 516. Ball bearing; 517. Fixing rod; 518. Screw; 519. Corrugated pipe; 520. Auxiliary ring; 521. Soft pad; 522. Connecting frame; 523. Rotating rod; 524. Connecting plate; 525. Coil spring; 526. Cover plate; 527. Connecting block; 528. Fixing frame; 529. Limiting rope. Detailed Implementation
[0026] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.
[0027] The specific implementation of this utility model will be described in detail below with reference to specific embodiments.
[0028] Please see Figures 1 to 5 The present invention provides a novel drying tank cover, comprising: a carbon fiber tank cover 4, a plurality of fixing blocks 2 are installed on the upper surface of the carbon fiber tank cover 4, the same support rod 1 is installed on the inner wall of the plurality of fixing blocks 2, a plurality of reinforcing ribs 3 are installed on the upper surface of the carbon fiber tank cover 4, and an adjustment structure 5 is provided on the inner wall of the plurality of reinforcing ribs 3.
[0029] In the embodiments of this utility model, please refer to Figures 2 to 5The adjustment structure 5 includes a first air duct 501, which is fixedly connected to a reinforcing rib 3. An air inlet 502 is fixedly connected to one side of the first air duct 501. A second air duct 503 is fixedly connected to the arc surface of the first air duct 501. A positioning block 504 is installed on the arc surface of the second air duct 503. The positioning block 504 is fixedly connected to a carbon fiber channel cover 4. A fixing sleeve 505 is fixedly connected to the arc surface of the second air duct 503. A nozzle 506 is slidably connected to the inner wall of the fixing sleeve 505. Two telescopic rods 507 are fixedly connected to the arc surface of the fixing sleeve 505. A connecting block 508 is fixedly connected to the other end of each telescopic rod 507. A spring 509 is fitted onto the arc surface of each telescopic rod 507, and both ends of the spring 509 are respectively connected to the connecting block 508. The nozzle 506 is fixedly connected to the fixed sleeve 505. An auxiliary block 510 is fixedly connected to one side of the connecting block 508, and a fixed plate 511 is fixedly connected to one side of the auxiliary block 510. Several positioning rods 512 are fixedly connected to the arc surface of the nozzle 506, with two positioning rods forming a group. Each group of positioning rods 512 is slidably connected to the fixed plate 511. Two limiting blocks 513 are fixedly connected to the arc surface of the nozzle 506. An insert block 514 is slidably connected to the inner wall of the limiting block 513. The insert block 514 is fixedly connected to the fixed sleeve 505. A fixed rod 517 is fixedly connected to the arc surface of the fixed sleeve 505. A ball bearing 516 is fixedly connected to the other end of the fixed rod 517. A welding block 515 is movably connected to the arc surface of the ball bearing 516. A screw 518 is threaded onto one side of the nozzle 506. An adjustment structure 5 can be used to enhance the drying function of the carbon fiber trough cover 4, aligning it with the contact point between the wet basket and the pressure rod to accelerate air circulation within the trough, increasing the drying effect and preventing residual chemicals from dripping onto the silicon wafers, thus preventing watermarks, wafer sticking, or fragmentation. A connecting frame 522 is fixedly connected to one side of the nozzle 506. A rotating rod 523 is rotatably connected to the inner wall of the connecting frame 522. A connecting plate 524 is fixedly connected to the arc surface of the rotating rod 523. Two coil springs 525 are sleeved on the arc surface of the rotating rod 523. The two ends of the coil springs 525 are fixedly connected to the connecting plate 524 and the connecting frame 522, respectively. A cover plate 526 is fixedly connected to the lower surface of the connecting plate 524. A connecting block 527 is fixedly connected to one side of the nozzle 506. The connecting block 527 and the inner wall of the cover plate 526 are slidably connected to the same fixing frame 528. When the nozzle 506 needs to be protected, the cover plate 526 is rotated first, causing the connecting plate 524 to rotate. The connecting plate 524 then drives the rotating rod 523 to rotate inside the connecting frame 522. While rotating, the connecting plate 524 also drives the coil spring 525 to rotate. When the cover plate 526 is in contact with the nozzle 506, the fixing frame 528 is moved so that the fixing frame 528 is inserted into the interior of the connecting block 527 and the cover plate 526. At this time, the cover plate 526 is fixed, effectively preventing the nozzle 506 from becoming clogged due to dust accumulation during static placement. A limit rope 529 is fixedly connected to one side of the fixing frame 528.The other end of the limiting rope 529 is fixedly connected to the nozzle 506. The limiting rope 529 can limit the fixed frame 528 to prevent it from being lost. A bellows 519 is fitted onto the arc surface of the spring 509. The two ends of the bellows 519 are fixedly connected to the connecting block 508 and the fixing sleeve 505, respectively. The bellows 519 can protect the spring 509 to prevent foreign objects from getting stuck. An auxiliary ring 520 is fixedly connected to one side of the connecting block 508. The auxiliary ring 520 has a circular cross-section and can move the connecting block 508, achieving convenient control of the connecting block 508. A soft pad 521 is fixedly connected to the inner wall of the fixing plate 511. The soft pad 521 is a rubber pad. The soft pad 521 can prevent the fixing plate 511 from directly contacting the nozzle 506, preventing damage to the nozzle 506.
[0030] The working principle of the novel drying tank cover provided by this utility model is as follows: By setting the adjustment structure 5, the connecting block 508 is first moved with the help of the auxiliary ring 520, so that the connecting block 508 drives the spring 509 and the telescopic rod 507 to stretch. When the connecting block 508 moves, it will drive the auxiliary block 510 to move. The auxiliary block 510 will then drive the fixed plate 511 to move. Next, the nozzle 506 is moved and inserted into the fixed sleeve 505. When the nozzle 506 moves, it will also drive the limiting block 513 to move, so that the limiting block 513 is inserted into the insert block 514. Then, the auxiliary ring 520 is released. When the auxiliary ring 520 is released, due to the action of the spring 509, the auxiliary ring 520 will be released. The connecting block 508 will move, and at the same time, the connecting block 508 will drive the fixing plate 511 to move, so that the fixing plate 511 is inserted into the positioning rod 512. At this time, the nozzle 506 is fixed to the fixing sleeve 505 on the second air duct 503. Then, the nozzle 506 is rotated to drive the fixing rod 517 to rotate. The fixing rod 517 drives the ball 516 to rotate inside the welding block 515. When the nozzle 506 rotates to the appropriate position, the screw 518 inside the welding block 515 is rotated to fix the screw 518 to the ball 516. At the same time, the positioning block 504 can position the second air duct 503. Then, the carbon fiber trough cover 4 is covered on the assembly. Position the device appropriately and connect it to the air inlet 502. Nitrogen gas is then blown into the first duct 501 through the device. The nitrogen then enters the second duct 503 from the first duct 501 until it is sprayed from the nozzle 506, aiming at the contact point between the wet basket and the pressure rod. When protection of the nozzle 506 is required, first rotate the cover plate 526 to rotate the connecting plate 524. The connecting plate 524 then rotates the rotating rod 523 inside the connecting frame 522. Simultaneously, the rotating plate 524 also rotates the coil spring 525. When the cover plate 526 is in contact with the nozzle 506, move the fixing frame 528 to secure it. The fixed frame 528 is inserted into the interior of the connecting block 527 and the cover plate 526. At this time, the cover plate 526 is fixed, which effectively prevents the nozzle 506 from being blocked due to dust accumulation during the static process. The limiting rope 529 can limit the fixed frame 528 to prevent it from being lost. The corrugated pipe 519 can protect the spring 509 to prevent foreign objects from getting stuck in it. The auxiliary ring 520 can drive the connecting block 508 to move, which facilitates the control of the connecting block 508. The soft pad 521 can prevent the fixed plate 511 from directly contacting the nozzle 506, thus preventing damage to the nozzle 506.
[0031] The circuits and controls involved in this utility model are all existing technologies, and will not be described in detail here.
[0032] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.
Claims
1. A novel drying tank cover, characterized in that, include: A carbon fiber channel cover (4) has several fixing blocks (2) installed on its upper surface. The inner walls of the fixing blocks (2) are fitted with the same support rod (1). Several reinforcing ribs (3) are installed on the upper surface of the carbon fiber channel cover (4). The inner walls of the reinforcing ribs (3) are provided with an adjustment structure (5). The adjustment structure (5) includes a first air duct (501). The first air duct (501) and the reinforcing ribs (3) are fixedly connected. An air inlet (502) is fixedly connected to one side of the first air duct (501). A second air duct (503) is fixedly connected to the arc surface of the duct (501). A positioning block (504) is installed on the arc surface of the second air duct (503). The positioning block (504) is fixedly connected to the carbon fiber channel cover (4). A fixing sleeve (505) is fixedly connected to the arc surface of the second air duct (503). A nozzle (506) is slidably connected to the inner wall of the fixing sleeve (505). Two telescopic rods (507) are fixedly connected to the arc surface of the fixing sleeve (505). A connecting block (508) is fixedly connected to the other end of the telescopic rods (507). The telescopic rod (507) has a spring (509) fitted on its arc surface. The two ends of the spring (509) are fixedly connected to the connecting block (508) and the fixing sleeve (505), respectively. An auxiliary block (510) is fixedly connected to one side of the connecting block (508), and a fixing plate (511) is fixedly connected to one side of the auxiliary block (510). The nozzle (506) has several positioning rods (512) fixedly connected to its arc surface. The positioning rods (512) are arranged in pairs. A pair of positioning rods (512) and the fixing plate (511) slide together. The nozzle (506) is connected to two limiting blocks (513) on its arc surface. The inner wall of the limiting block (513) is slidably connected to an insert block (514). The insert block (514) is fixedly connected to a fixing sleeve (505). The arc surface of the fixing sleeve (505) is fixedly connected to a fixing rod (517). The other end of the fixing rod (517) is fixedly connected to a ball bearing (516). The arc surface of the ball bearing (516) is movably connected to a welding block (515). One side of the welding block (515) is threadedly connected to a screw (518).
2. The novel drying tank cover according to claim 1, characterized in that, A connecting frame (522) is fixedly connected to one side of the nozzle (506). A rotating rod (523) is rotatably connected to the inner wall of the connecting frame (522). A connecting plate (524) is fixedly connected to the arc surface of the rotating rod (523). Two coil springs (525) are sleeved on the arc surface of the rotating rod (523). The two ends of the coil springs (525) are fixedly connected to the connecting plate (524) and the connecting frame (522) respectively. A cover plate (526) is fixedly connected to the lower surface of the connecting plate (524). A connecting block (527) is fixedly connected to one side of the nozzle (506). The inner walls of the connecting block (527) and the cover plate (526) are slidably connected to the same fixed frame (528).
3. The novel drying tank cover according to claim 2, characterized in that, A limiting rope (529) is fixedly connected to one side of the fixed frame (528), and the other end of the limiting rope (529) is fixedly connected to the nozzle (506).
4. The novel drying tank cover according to claim 1, characterized in that, The spring (509) has a bellows (519) sleeved on its arc surface, and the two ends of the bellows (519) are fixedly connected to the connecting block (508) and the fixing sleeve (505) respectively.
5. A novel drying tank cover according to claim 1, characterized in that, An auxiliary ring (520) is fixedly connected to one side of the connecting block (508), and the cross-section of the auxiliary ring (520) is circular.
6. A novel drying tank cover according to claim 1, characterized in that, The inner wall of the fixing plate (511) is fixedly connected with a soft pad (521), which is a rubber pad.