A dual-cylinder driving type transmission valve

Abstract

The utility model discloses a kind of double-cylinder drive type transmission valves, comprising: valve frame, hollow inner space is in valve frame, and the side wall of valve frame has window, window is communicated with hollow inner space, and it is through valve frame;Bottom plate is connected on the bottom of valve frame, and blocks hollow inner space;Valve plate is set in hollow inner space;Main shaft, one end is set in hollow inner space, is connected with valve plate, and main shaft passes out bottom plate, and the other end protrudes hollow inner space;Two cylinders, symmetrically set in the two sides of main shaft, interval is set between cylinder and main shaft, and one end of cylinder is connected with bottom plate;And linkage, it is connected between the other end of main shaft and two cylinders, along with the action of cylinder, linkage linkage main shaft moves position, main shaft drives valve plate to move position together, and valve plate opens or closes window;To overcome the technical problem that uneven stress of main shaft leads to the action of valve is not smooth.

Description

Technical Field

[0001] This utility model relates to the field of valve technology, specifically a dual-cylinder driven transmission valve. Background Technology

[0002] During the processing of wafers, they need to pass through different process chambers in sequence for corresponding processing. During processing, each chamber must be in a closed state. Therefore, a transfer valve is installed on the chamber. After the wafer enters the chamber through the transfer valve, the transfer valve seals the chamber. After the process is completed, the transfer valve opens and the wafer is removed. Pneumatic drives are widely used in semiconductor systems due to their advantages such as high reliability, high safety, low cost, and convenient speed adjustment. Therefore, transmission valves are mostly driven by pneumatic cylinders, which are generally single-cylinder driven or double-cylinder driven depending on the number of pneumatic cylinders. Among them, dual-cylinder drive (dual-cylinder refers to two cylinders) has a greater driving force and better stability than single-cylinder drive. Therefore, dual-cylinder drive is usually used in relatively large transmission valves. However, in the prior art, the two cylinders are located below the valve plate and in the center (that is, close to the spindle). Due to the existence of machining errors, the spindle is subjected to uneven force, which leads to the valve not operating smoothly. Utility Model Content

[0003] In view of the above-mentioned shortcomings in the related technologies, the purpose is to provide a dual-cylinder driven transmission valve to solve the technical problem of uneven spindle force, which leads to the valve's sluggish operation. The technical solution to achieve the objective is: a dual-cylinder driven transmission valve, comprising: A valve frame having a hollow inner space and a window on the side wall of the valve frame communicating with the hollow inner space and penetrating the valve frame; The base plate is connected to the bottom of the valve frame and blocks the hollow inner space; The valve plate is disposed in the hollow inner space; The main shaft has one end set in the hollow inner space and connected to the valve plate, and the main shaft extends out of the bottom plate, while the other end protrudes out of the hollow inner space; Two cylinders are symmetrically arranged on both sides of the main shaft, with a gap between the cylinders and the main shaft, and one end of the cylinder is connected to the base plate; And a linkage component, connected between the other end of the main shaft and the two cylinders, as the cylinders move, the linkage component moves the main shaft, the main shaft moves the valve plate together, and the valve plate opens or closes the window.

[0004] Furthermore: the hollow interior space is a cubic space.

[0005] Furthermore, the window is a rectangular through slot.

[0006] Furthermore: the base plate has through holes and two positioning grooves; The through hole is protruded by the spindle; The positioning grooves are symmetrically arranged on both sides of the through hole and are used to position one end of the cylinder one-to-one.

[0007] Furthermore, the valve plate has a square plate-like structure.

[0008] Furthermore: there is a first distance between the centerline of one cylinder and the centerline of the main shaft, and a second distance between the centerline of the other cylinder and the centerline of the main shaft, wherein the first distance is equal to the second distance.

[0009] Furthermore: the linkage includes two connecting blocks, which are connected one-to-one to the telescopic shaft on the cylinder; And a linkage block, connected between the connecting blocks, and connected to the other end of the main shaft.

[0010] Furthermore, the top of the connecting block has a stepped through hole for insertion into one end of the telescopic shaft.

[0011] Furthermore, the sidewall of the connecting block also has holes, which are spaced apart from the stepped through holes.

[0012] The above technical solution has the following beneficial effects: A dual-cylinder driven transmission valve, compared with related technologies, is provided with a valve frame, a base plate, a valve plate, a main shaft, a cylinder and a linkage component; The valve frame has a hollow inner space, and there is a window on the side wall of the valve frame, which communicates with the hollow inner space and passes through the valve frame; When the cylinder moves, the linkage moves along with the cylinder. The linkage moves the main shaft along the base plate, and the main shaft moves the valve plate. The valve plate moves in the hollow space and opens or closes the window. Because the cylinders are symmetrically arranged on both sides of the main shaft, and the linkage moves the main shaft, the main shaft is subjected to relatively uniform force, and the opening or closing action is relatively smooth. This overcomes the technical problem of uneven spindle force, which leads to unsmooth valve operation, and achieves the technical effect of relatively uniform spindle force and relatively smooth valve operation, thus proving its practicality. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall assembly structure when the base plate is removed. Figure 2 This is a schematic diagram of the base plate structure; Figure 3 This is a schematic diagram of the connecting block structure; In the diagram: 10. Valve frame, 11. Window, 20. Base plate, 20-1. Through hole, 20-2. Positioning groove, 30. Valve plate, 40. Main shaft, 50. Cylinder, 51. Telescopic shaft, 60. Linkage component, 60-1. Connecting block, 60-11. Stepped through hole, 60-12. Hole, 60-2. Linkage block. Detailed Implementation

[0014] To make the content easier to understand, the following detailed description is provided with reference to specific embodiments and accompanying drawings; A dual-cylinder driven transmission valve solves the technical problem of uneven spindle force leading to sluggish valve operation in related technologies. It can be manufactured and used, achieving the positive effects of relatively uniform spindle force and relatively smooth valve operation. The overall concept is as follows:

[0015] Implementation Method

[0016] like Figure 1 , Figure 2 As shown; a dual-cylinder driven transmission valve, comprising: A valve frame 10 has a hollow inner space, and a window 11 is provided on the side wall of the valve frame 10. The window 11 communicates with the hollow inner space and passes through the valve frame 10. The base plate 20 is connected to the bottom of the valve frame 10 and blocks the hollow inner space; Valve plate 30 is disposed in the hollow inner space; The main shaft 40 has one end set in the hollow inner space and connected to the valve plate 30, and the main shaft 40 extends out of the bottom plate 20, while the other end protrudes out of the hollow inner space; Two cylinders 50 are symmetrically arranged on both sides of the main shaft 40, with a gap between the cylinders 50 and the main shaft 40, and one end of the cylinders 50 is connected to the base plate 20. And a linkage 60, which is connected between the other end of the main shaft 40 and the two cylinders 50. As the cylinders 50 move, the linkage 60 moves the main shaft 40, and the main shaft 40 moves the valve plate 30 together. The valve plate 30 opens or closes the window 11. Specifically, during implementation, the valve frame 10 has a hollow inner space, and the side wall of the valve frame 10 has a window 11, which communicates with the hollow inner space and penetrates the valve frame 10. When cylinder 50 is activated, linkage 60 moves along with it. Linkage 60 moves the main shaft 40 along the base plate 20. The main shaft 40 moves the valve plate 30 along with it. The valve plate 30 moves within the hollow space, opening or closing window 11. Because cylinders 50 are symmetrically arranged on both sides of the main shaft 40, and linkage 60 moves the main shaft 40, the main shaft 40 always moves along a straight line, resulting in relatively uniform force on the main shaft 40 and relatively smooth opening or closing of window 11. Another implementation method: like Figure 1 As shown; in practice, the valve frame 10 has a cuboid shape, a regular shape, which is relatively easy to process and manufacture, and is also relatively aesthetically pleasing. The hollow interior space is a cubic space, which is conducive to the movement of the valve plate 30, and when the valve plate 30 opens the window 11, it is conducive to the wafer passing through the window 11. Window 11 is a rectangular through slot, a regular shape that is relatively easy to process and manufacture, and also facilitates wafer passage; Another implementation method: like Figure 1 , Figure 2 As shown; in practice, the base plate 20 has a through hole 20-1 and two positioning grooves 20-2; The through hole 20-1 is passed through the main shaft 40 and will not affect the movement position of the main shaft 40; The inner wall of the through hole 20-1 has a first seal, for example: the first seal is an O-ring. The O-ring is set in the reserved groove on the inner wall of the through hole 20-1, which holds the spindle 40, ensuring the sealing performance, and will not affect the sliding position of the spindle 40. The positioning grooves 20-2 are symmetrically arranged on both sides of the through hole 20-1, and are used to position one end of the cylinder 50 one-to-one, so that the cylinder 50 is reliably positioned and the positioning accuracy is relatively high. The base plate 20 is a rectangular plate structure, which is connected to the valve frame 10 by bolts, making assembly relatively convenient. Another implementation method: like Figure 1 As shown; in practice, the valve plate 30 is a square plate structure that moves along with the main shaft 40, which is beneficial for opening or closing the window 11; The valve plate 30 is symmetrically provided with second seals on both sides. For example, the second seal is a sealing strip that is stuck in the reserved groove on the valve plate 30. When the valve plate 30 closes the window 11, the second seal surrounds the window 11 and forms a seal between the valve plate 30 and the valve frame 10. Another implementation method: like Figure 1 , Figure 2As shown; in implementation, the main shaft 40 is a stepped shaft, one end of which is connected to the valve plate 30, for example by welding, and the other end is connected to the linkage block 60-2, for example by welding or by screw connection; Another implementation method: like Figure 1 As shown; in practice, cylinder 50 is a commonly used structure in the prior art, used to generate driving force and drive linkage 60 to move. Those skilled in the art can directly and without doubt know how to set cylinder 50 after seeing the disclosed content, without needing to put in creative effort or conduct excessive experiments. There is a first distance between the centerline of one cylinder 50 and the centerline of the main shaft 40, and a second distance between the centerline of the other cylinder 50 and the centerline of the main shaft 40. The first distance is equal to the second distance, so that the main shaft 40 always moves along a straight line, achieving relatively uniform force on the main shaft 40 and relatively smooth opening or closing of the window 11. Another implementation method: like Figure 1 , Figure 3 As shown; in implementation, the linkage 60 includes: two connecting blocks 60-1, which are connected one-to-one to the telescopic shaft 51 on the cylinder 50; and a linkage block 60-2, which is connected between the connecting blocks 60-1 and connected to the other end of the main shaft 40. The connecting block 60-1 has a block structure and a stepped through hole 60-11 on the top. The stepped through hole 60-11 is used to insert into one end of the telescopic shaft 51. The connecting block 60-1 and the telescopic shaft 51 are connected by bolts, which makes assembly relatively convenient and the structure relatively reliable. The side wall of the connecting block 60-1 also has a hole 60-12, which is spaced apart from the stepped through hole 60-11. The hole 60-12 is a round hole, and a pin is provided at the round hole. The linkage block 60-2 is inserted into the pin, so that the linkage block 60-2 and the connecting block 60-1 are connected as a whole. When the connecting block 60-1 is linked by the cylinder 50, the connecting block 60-1 can drive the linkage block 60-2 to move together, thereby driving the spindle 40 to move, so as to achieve relatively uniform force on the spindle 40. The working principle is as follows: When cylinder 50 is activated, linkage 60 moves together with cylinder 50. Linkage 60 drives main shaft 40 to move along base plate 20. Main shaft 40 drives valve plate 30 to move together. Valve plate 30 moves in the hollow space and opens or closes window 11. Since cylinder 50 is symmetrically arranged on both sides of main shaft 40, and linkage 60 drives main shaft 40, the force on main shaft 40 is relatively uniform, and the action of opening or closing window 11 is relatively smooth. In the description, it should be understood that the terms "up", "down", "left", "right", "front", "back", etc., indicate the orientation or positional relationship based on the positional relationship shown in the accompanying drawings, and are only for the convenience or simplification of the description, rather than indicating a specific orientation that must be present; the operation process described in the embodiments is not an absolute usage step, and corresponding adjustments can be made in actual use; Unless otherwise defined, the technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art; the words “first,” “second,” and similar terms used in the specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components, and similarly, the words “a” or “a” and similar terms do not determine a quantity limitation, but rather indicate the presence of at least one, as determined by the content of the embodiments; The above description is only a preferred embodiment, but the scope of protection is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the disclosed technology, based on the technical solution and inventive concept, should be included within the scope of protection.

Claims

1. A dual-cylinder driven transmission valve, characterized in that, include: A valve frame having a hollow inner space and a window on the side wall of the valve frame communicating with the hollow inner space and penetrating the valve frame; The base plate is connected to the bottom of the valve frame and blocks the hollow inner space; The valve plate is disposed in the hollow interior space; The main shaft has one end set in the hollow inner space and connected to the valve plate, and the main shaft extends out of the bottom plate, while the other end protrudes out of the hollow inner space; Two cylinders are symmetrically arranged on both sides of the main shaft, with a gap between the cylinders and the main shaft, and one end of the cylinder is connected to the base plate; And a linkage component, connected between the other end of the main shaft and the two cylinders, as the cylinders move, the linkage component moves the main shaft, the main shaft moves the valve plate together, and the valve plate opens or closes the window.

2. The dual-cylinder driven transmission valve according to claim 1, characterized in that: The hollow interior space is a cubic space.

3. The dual-cylinder driven transmission valve according to claim 1, characterized in that: The window is a rectangular through slot.

4. The dual-cylinder driven transmission valve according to claim 1, characterized in that: The base plate has through holes and two positioning grooves; The through hole is protruded by the spindle; The positioning grooves are symmetrically arranged on both sides of the through hole and are used to position one end of the cylinder one-to-one.

5. A dual-cylinder driven transmission valve according to claim 1, characterized in that: The valve plate has a square plate-like structure.

6. A dual-cylinder driven transmission valve according to claim 1, characterized in that: The centerline of one cylinder has a first distance from the centerline of the main shaft, and the centerline of the other cylinder has a second distance from the centerline of the main shaft, wherein the first distance is equal to the second distance.

7. A dual-cylinder driven transmission valve according to claim 1, characterized in that: The linkage component includes: two connecting blocks, which are connected one-to-one to the telescopic shaft on the cylinder; And a linkage block, connected between the connecting blocks, and connected to the other end of the main shaft.

8. A dual-cylinder driven transmission valve according to claim 7, characterized in that: The top of the connecting block has a stepped through hole for insertion into one end of the telescopic shaft.

9. A dual-cylinder driven transmission valve according to claim 8, characterized in that: The sidewall of the connecting block also has holes, which are spaced apart from the stepped through holes.

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