Motion device and semiconductor manufacturing apparatus

Abstract

The utility model provides a kind of motion device and semiconductor manufacturing equipment, it is related to semiconductor manufacturing field.Wherein, motion device includes rotating assembly and lifting assembly, rotating assembly includes rotating base and the rotating drive part of setting in rotating base;Lifting assembly includes lifting base and lifting drive part, and lifting base is fixedly connected with the driving portion of rotating drive part;Lifting base includes fixedly connected bottom plate and hollow side wall, and the first accommodating space is enclosed by both, and lifting drive part is located in the first accommodating space and is installed in bottom plate;Hollow side wall is additionally provided with heat dissipation air channel, for the heat dissipation of rotating drive part.The motion device, since the hollow side wall of lifting assembly is provided with special heat dissipation air channel, can heat dissipation to rotating drive part, to greatly improve the heat dissipation efficiency of rotating drive part, and then can effectively avoid the situation that equipment parts are deformed by excessive heating of rotating drive part, motion precision reduces etc.

Description

Technical Field

[0001] This utility model relates to the technical field of semiconductor manufacturing, and more specifically, to a motion device and semiconductor manufacturing equipment. Background Technology

[0002] In existing technologies, ZT integrated motion devices, which combine lifting and rotational motion, are relatively compact due to size limitations, resulting in low heat dissipation efficiency and making components susceptible to high temperatures. Thermal simulations and experiments revealed that after prolonged operation, excessive heat generation in the T-axis and Z-axis motors causes material expansion and deformation of components, affecting the device's lifespan and accuracy. The area near the T-axis motor is particularly affected. Furthermore, the non-linear changes in height caused by structural component deformation during operation can render the device unsuitable for its intended operating conditions. Utility Model Content

[0003] The first objective of this invention is to provide a motion device to solve the technical problem of low heat dissipation efficiency in existing ZT integrated motion devices.

[0004] The motion device provided by this utility model includes a rotating component and a lifting component. The rotating component includes a rotating base and a rotating drive component disposed on the rotating base. The lifting component includes a lifting base and a lifting drive component, with the lifting base fixedly connected to the driving part of the rotating drive component. The lifting base includes a fixedly connected base plate and a hollow side panel, which together enclose a first accommodating space. The lifting drive component is located within the first accommodating space and is installed on the base plate. The hollow side panel is also provided with a heat dissipation duct for dissipating heat from the rotating drive component.

[0005] Furthermore, the bottom outer edge of the hollow side panel is provided with a concave step, and the step and the rotating base enclose a second receiving space; the rotating drive component is an arc-shaped motor, including an arc-shaped stator and an arc-shaped mover, the arc-shaped motor is disposed in the second receiving space, and the arc-shaped stator is fixedly connected to the rotating base, and the arc-shaped mover is fixedly connected to the hollow side panel; a heat dissipation groove is provided on the top surface of the step, the arc-shaped mover is attached to the top surface of the step and together with the heat dissipation groove to enclose the heat dissipation channel, and the end of the heat dissipation groove avoids the arc-shaped mover and forms an exhaust port.

[0006] Furthermore, the heat dissipation channel includes a main channel and a plurality of branch channels communicating with the main channel, and the exhaust port is formed at the end of the branch channel away from the main channel.

[0007] Furthermore, the main channel is arc-shaped and coaxial with the rotation axis of the lifting assembly; the branch channel includes a first channel segment, an arc channel segment, and a second channel segment. The first channel segment is connected to the main channel, the arc channel segment is coaxially arranged with the main channel, and one end is connected to the first channel segment and the other end is connected to the second channel segment. The end of the second channel segment forms the exhaust port.

[0008] Furthermore, along the airflow direction, the arc groove segment is located on the outside away from the main channel and extends toward the air inlet of the main channel.

[0009] Furthermore, along the airflow direction, the farther away from the air inlet of the main channel, the larger the exhaust port.

[0010] Furthermore, each of the exhaust ports is positioned opposite to the arc-shaped motor.

[0011] Furthermore, the hollow cavity of the hollow sidewall has a square cross-section; the lifting drive is a voice coil motor, the stator of the voice coil motor is fixedly installed on the base plate, the mover of the voice coil motor is fixedly connected to a mover seat, the mover seat has four outward protrusions along the circumference, the cross-section of the mover seat is "+", and the mover seat can rise to the top of the hollow cavity.

[0012] Furthermore, the hollow sidewall is also provided with an air flotation channel, which has multiple air outlets. The multiple air outlets are respectively provided on each sidewall of the hollow cavity. When the air flotation channel is ventilated, an air flotation guide rail is formed between each sidewall of the hollow cavity and the corresponding protrusion of the moving seat.

[0013] The motion device provided by this utility model can produce the following beneficial effects:

[0014] The motion device provided by this utility model allows for the installation of a support platform for holding wafers, etc., on the drive unit of the lifting assembly. During operation, since the lifting assembly is located at the drive end of the rotating assembly, the rotating assembly can drive the entire lifting assembly to rotate, thereby rotating the support platform and wafers, etc., mounted on the drive unit of the lifting assembly. The lifting assembly itself can also drive the lifting of the support platform and wafers, etc., mounted on its drive unit. Furthermore, because the hollow sidewall of the lifting assembly is equipped with dedicated heat dissipation channels, it can dissipate heat from the rotating drive component, greatly improving the heat dissipation efficiency and effectively preventing excessive heat generation in the rotating drive component, which could lead to thermal deformation of equipment components and reduced motion accuracy.

[0015] The second objective of this invention is to provide a semiconductor manufacturing device to solve the technical problem of low heat dissipation efficiency in existing ZT integrated motion devices.

[0016] The semiconductor manufacturing equipment provided by this utility model includes a support platform and the aforementioned motion device, wherein the support platform is disposed on the drive unit of the lifting drive component. This semiconductor manufacturing equipment includes the aforementioned motion device and therefore possesses all the beneficial effects of the aforementioned motion device, so further details are omitted here. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of the motion device provided in an embodiment of the present utility model;

[0019] Figure 2 This is a partial structural diagram of the rotating component of the motion device provided in an embodiment of the present utility model, excluding the rotating grating ruler;

[0020] Figure 3 One of the structural schematic diagrams of the lifting assembly of the motion device provided in the embodiment of this utility model;

[0021] Figure 4 A second schematic diagram of the lifting assembly of the motion device provided in this embodiment of the utility model;

[0022] Figure 5 This is a cross-sectional structural diagram of the motion device provided in an embodiment of the present utility model;

[0023] Figure 6 A schematic diagram of the hollow sidewall of the motion device provided in this embodiment of the utility model;

[0024] Figure 7 A top view of the hollow sidewall of the motion device provided in an embodiment of this utility model;

[0025] Figure 8 This is a bottom view of the hollow sidewall and rotating drive component of the motion device provided in an embodiment of the present invention.

[0026] Explanation of reference numerals in the attached figures:

[0027] 100-Rotating assembly; 110-Rotating base; 120-Arc motor; 121-Arc stator; 122-Arc mover; 130-Arc guide rail; 140-Rotating detection element; 141-Rotating reading head; 142-Rotating grating ruler;

[0028] 200-Lifting assembly;

[0029] 210 - Base Plate;

[0030] 220 - Hollow sidewall; 221 - First accommodating space; 222 - Second accommodating space; 223 - Heat dissipation duct; 224 - Main duct; 225 - Branch duct; 226 - First duct section; 227 - Arc duct section; 228 - Second duct section; 229 - Exhaust port; 230 - Heat dissipation air inlet connector; 231 - Accommodating cavity; 232 - Air flotation duct; 233 - Air outlet; 234 - Air flotation air inlet connector; 235 - Air inlet of the main duct;

[0031] 240 - Voice coil motor; 250 - Mover base; 260 - Gravity balance component; 270 - Lifting detection component. Detailed Implementation

[0032] To make the above-mentioned objectives, features, and advantages of this utility model more apparent and understandable, specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of this utility model and are not intended to limit it.

[0033] This embodiment provides a motion device, such as Figures 1 to 5 As shown, the motion device includes a rotating assembly 100 and a lifting assembly 200. The rotating assembly 100 includes a rotating base 110 and a rotating drive component disposed on the rotating base 110. The lifting assembly 200 includes a lifting base and a lifting drive component, with the lifting base fixedly connected to the driving part of the rotating drive component. The lifting base includes a fixedly connected base plate 210 and a hollow side panel 220, which together enclose a first accommodating space 221. The lifting drive component is located within the first accommodating space 221 and is mounted on the base plate 210. The hollow side panel 220 is also provided with a heat dissipation duct for heat dissipation of the rotating drive component.

[0034] The motion device provided in this embodiment allows for the installation of a support platform for carrying wafers, etc., on the drive section of the lifting assembly 200. During operation, since the lifting assembly 200 is located at the drive end of the rotating assembly 100, the rotating assembly 100 can drive the entire lifting assembly 200 to rotate, thereby rotating the support platform mounted on the drive section of the lifting assembly 200 and the wafers, etc., on it. The lifting assembly 200 itself can drive the lifting of the support platform mounted on its drive section and the wafers, etc. Furthermore, since the hollow sidewall 220 of the lifting assembly 200 is provided with a dedicated heat dissipation channel, it can dissipate heat from the rotating drive component, thereby greatly improving the heat dissipation efficiency of the rotating drive component. This effectively avoids excessive heat generation in the rotating drive component, which could lead to thermal deformation of equipment parts and reduced motion accuracy. Moreover, simulation and experiments can be used to ensure that the temperature rise of parts is within a reasonable range during continuous operation of the equipment, thereby reducing thermal expansion deformation of parts, improving accuracy and lifespan, and meeting operating conditions.

[0035] Specifically, in this embodiment, as Figure 5 As shown, and in combination Figures 6 to 8 As shown, the bottom outer edge of the hollow side panel 220 is provided with a concave step, and the step and the rotating base 110 enclose a second receiving space 222; the rotating drive component is an arc-shaped motor 120, including an arc-shaped stator 121 and an arc-shaped mover 122. The arc-shaped motor 120 is disposed in the second receiving space 222, and the arc-shaped stator 121 is fixedly connected to the rotating base 110, and the arc-shaped mover 122 is fixedly connected to the hollow side panel 220; a heat dissipation groove 223 is provided on the top surface of the step, and the arc-shaped mover 122 is attached to the top surface of the step and encloses the heat dissipation groove 223 to form a heat dissipation channel. The end of the heat dissipation groove 223 avoids the arc-shaped mover 122 and forms an exhaust port 229. In this configuration, the rotary drive component is firstly located within the second accommodating space 222 formed by the recess in the hollow side circumference 220, making the entire device compact. Furthermore, the heat dissipation groove 223 is directly attached to the arc-shaped mover 122, allowing the heat dissipation gas to directly cool the arc-shaped mover 122 and ensuring the heat dissipation area, thereby ensuring the heat dissipation efficiency of the rotary drive component arc motor 120.

[0036] like Figure 3 As shown, and in combination Figures 5 to 8 As shown, in this embodiment, the air inlet of the heat dissipation duct is provided with a heat dissipation air inlet connector 230. During operation, the cooling and heat dissipation gas enters the heat dissipation duct from the heat dissipation air inlet connector 230, exchanges heat with the arc-shaped mover 122, and finally exits the heat dissipation duct from the exhaust port 229.

[0037] It should be noted that in other embodiments of this application, the rotary drive is not limited to the arc motor 120, but can also be other forms, such as a rotary motor, as long as it can drive the lifting assembly 200 to achieve the required rotational movement. In this case, the heat dissipation groove 223 can be arranged opposite to the drive part of the rotary motor to cool and dissipate heat.

[0038] Specifically, in this embodiment, as Figure 7 As shown, the heat dissipation duct 223 includes a main duct 224 and multiple branch ducts 225 connected to the main duct 224. The ends of the branch ducts 225 away from the main duct 224 form exhaust ports 229. In this configuration, by setting the main duct 224 and multiple branch ducts 225, the area through which the cooling gas flows can be effectively expanded, and the contact area between the cooling gas and the arc-shaped mover 122 can be increased, thereby improving the cooling efficiency of the arc-shaped mover 122.

[0039] Continue as Figure 7 As shown, in this embodiment, the main channel 224 is arc-shaped and coaxial with the rotation axis of the lifting assembly 200; the branch channel 225 includes a first channel segment 226, an arc-shaped channel segment 227, and a second channel segment 228. The first channel segment 226 is connected to the main channel 224, and the arc-shaped channel segment 227 is coaxially arranged with the main channel 224, with one end connected to the first channel segment 226 and the other end connected to the second channel segment 228. The end of the second channel segment 228 forms an exhaust port 229. In this configuration, the arc-shaped channel segments 227 of both the main channel 224 and the branch channel 225 are coaxially arranged with the arc-shaped mover 122, which can better extend the gas flow path, expand the contact area between the gas and the arc-shaped mover 122, and the gas flow path is not too tortuous, so that the gas can flow smoothly, thereby ensuring cooling and heat dissipation efficiency.

[0040] More specifically, in this embodiment, continuing as follows Figure 7 As shown, along the airflow direction, the arc groove segment 227 is located on the outer side away from the main groove 224 and extends towards the air inlet 235 of the main groove 224. In this configuration, the cooling and heat dissipation gas flows back after entering each branch groove 225 from the main groove 224. After passing through the first groove segment 226 and encountering the resistance of the groove wall of the first groove segment 226, the flow velocity can be appropriately slowed down, thereby appropriately increasing the heat exchange time with the arc-shaped mover 122, and thus improving the cooling and heat dissipation effect. In addition, the arc groove segment 227 is located on the outer side of the main groove 224, which facilitates the discharge of the cooling and heat dissipation gas, and also facilitates the setting of the exhaust port 229. Of course, in other embodiments of this application, the arc groove segment 227 can also be located on the inner side of the main groove 224; and, in other embodiments of this application, the arc groove segment 227, whether located on the outer side or the inner side of the main groove 224, can also extend towards the end of the main groove 224.

[0041] Continue as Figure 7 As shown, in this embodiment, along the airflow direction, the further away from the air inlet of the main channel 224, the larger the exhaust port 229. The farther away from the air inlet of the main channel 224, the slower the gas flow velocity. Increasing the exhaust port 229 increases the exhaust volume, thereby ensuring the gas flow rate of the corresponding branch channel 225. This helps ensure consistent exhaust volume at each exhaust port 229, thus guaranteeing uniform heat exchange. Specifically, fluid simulation and experimental verification can maximize heat dissipation efficiency while maintaining structural dimensions. Furthermore, the ventilation pressure can be reasonably set to prevent air vibration.

[0042] Specifically, in this embodiment, each exhaust port 229 is positioned opposite to the arc-shaped motor 120. In this way, the gas discharged from each exhaust port 229 can continue to cool and dissipate heat from the arc-shaped motor 120.

[0043] In this embodiment, as Figure 2 As shown, and in combination Figure 1 and Figure 5 As shown, an arc-shaped guide rail 130 is also provided in the second accommodating space 222. The arc-shaped guide rail 130 is coaxially arranged with the rotation axis of the lifting assembly 200, and the fixed guide rail of the arc-shaped guide rail 130 is fixedly installed on the rotating base 110, while the movable guide rail is fixedly installed on the hollow side panel 220. The arc-shaped guide rail 130 supports the lifting assembly 200 and guides its rotational movement, which helps to improve the stability and accuracy of the rotational movement.

[0044] More specifically, in this embodiment, continuing as follows Figure 2 As shown, there are two sets of arc-shaped guide rails 130, which are respectively set at both ends of the arc-shaped motor 120. In this way, the two sets of arc-shaped guide rails 130 not only provide more balanced support and guidance for the lifting component 200, but also make the support load at both ends of the arc-shaped motor 120 more balanced, which helps to ensure the stable output of the arc-shaped motor 120.

[0045] like Figure 2 and Figure 5 As shown, a rotation detection element 140 is also provided in the second accommodating space 222 for detecting displacement or angle of rotational movement. Specifically, in this embodiment, the rotation detection element 140 is a grating detection assembly, wherein the rotating reading head 141 is fixedly installed on the rotating base 110, and the rotating grating ruler 142 is fixedly installed on the vertical surface of the step. Of course, in other embodiments of this application, the rotation detection element 140 is not limited to a grating detection assembly, but can also be other detection devices in the prior art, which can be set as needed.

[0046] Specifically, in this embodiment, as Figure 4 As shown, and in combination Figure 5As shown, the hollow cavity of the hollow sidewall 220 has a square cross-section. The lifting drive is a voice coil motor 240. The stator of the voice coil motor 240 is fixedly mounted on the base plate 210, and the mover of the voice coil motor 240 is fixedly connected to a mover seat 250. The mover seat 250 has four outward protrusions along the circumference, and its cross-section is shaped like a cross. The mover seat 250 can rise above the hollow cavity. In this configuration, by setting the mover seat 250, the support platform can be installed on the top surface of the mover seat 250 during use. Thus, the contact area between the mover seat 250 and the support platform is relatively large, which helps to improve the stability of the movement of the support platform and the wafers it supports.

[0047] In addition, such as Figure 1 and Figure 4 As shown, the hollow cavity of the moving base 250 and the hollow side wall 220 encloses four receiving cavities 231. One of the receiving cavities 231 is equipped with a lifting detection element 270 for detecting lifting displacement. More specifically, in this embodiment, the lifting detection element 270 is a grating detection assembly, wherein the grating ruler is fixedly installed on the moving base 250, and the corresponding reading head is installed on the inner wall of the hollow cavity.

[0048] In this embodiment, as Figure 4 As shown, a gravity balancing component 260 is also provided between the moving base 250 and the base plate 210. Specifically, it can be a magnetic spring, used to balance and compensate for the gravity of the moving base 250, etc. Specifically, there can be multiple gravity balancing components 260, and the multiple gravity balancing components 260 are symmetrically arranged to improve the lifting stability and movement accuracy of the moving base 250, etc.

[0049] In this embodiment, as Figure 5 and Figure 6 As shown, the hollow sidewall 220 is also provided with an air flotation channel 232, which has multiple air outlets 233. These outlets 233 are respectively located on each sidewall of the hollow cavity. When the air flotation channel 232 is ventilated, an air flotation guide rail is formed between each sidewall of the hollow cavity and the corresponding protrusion of the moving seat 250. With this configuration, when the air flotation channel 232 is ventilated, an air film is formed between each sidewall of the hollow cavity and the corresponding protrusion of the moving seat 250, which can greatly reduce the resistance during the lifting and lowering of the moving seat 250, thus improving its lifting stability and motion accuracy.

[0050] like Figure 1 As shown, in this embodiment, the air inlet of the air flotation channel 232 is provided with an air flotation inlet connector 234. During operation, gas enters the air flotation channel 232 from the air flotation inlet connector 234 and is finally discharged from each outlet 233.

[0051] This utility model also provides a semiconductor manufacturing apparatus, which includes a support platform and the aforementioned motion device. The support platform is disposed on the drive unit of the lifting drive component. This semiconductor manufacturing apparatus includes the aforementioned motion device and therefore possesses all the beneficial effects of the aforementioned motion device, so it will not be described in detail here. Specifically, this semiconductor manufacturing apparatus can be applied to wafer inspection in the semiconductor manufacturing process, but it is not limited thereto.

[0052] In summary, this embodiment provides a motion device and a semiconductor manufacturing equipment including the motion device. Without changing the size of the structure, by reasonably adding heat dissipation channels and exhaust ports 229, the heat dissipation efficiency is greatly improved, the impact of heat generation during long-term operation of the device is reduced, the accuracy of the equipment during long-term operation is guaranteed, and the operating conditions of semiconductor manufacturing equipment can be met.

[0053] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0054] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A motion device, characterized in that, It includes a rotating assembly (100) and a lifting assembly (200), wherein the rotating assembly (100) includes a rotating base (110) and a rotating drive member disposed on the rotating base (110); The lifting assembly (200) includes a lifting base and a lifting drive component. The lifting base is fixedly connected to the drive part of the rotary drive component. The lifting base includes a fixedly connected base plate (210) and a hollow side wall (220), which together enclose a first accommodating space (221). The lifting drive component is located in the first accommodating space (221) and installed on the base plate (210). The hollow side wall (220) is also provided with a heat dissipation duct for heat dissipation of the rotary drive component.

2. The motion device according to claim 1, characterized in that, The bottom outer edge of the hollow side panel (220) is provided with a concave step, and the step and the rotating base (110) enclose a second receiving space (222); The rotary drive component is an arc-shaped motor (120), including an arc-shaped stator (121) and an arc-shaped mover (122). The arc-shaped motor (120) is disposed in the second accommodating space (222), and the arc-shaped stator (121) is fixedly connected to the rotating base (110), and the arc-shaped mover (122) is fixedly connected to the hollow sidewall (220). The top surface of the step is provided with a heat dissipation groove (223). The arc-shaped mover (122) is attached to the top surface of the step and surrounds the heat dissipation channel with the heat dissipation groove (223). The end of the heat dissipation groove (223) avoids the arc-shaped mover (122) and forms an exhaust port (229).

3. The motion device according to claim 2, characterized in that, The heat dissipation duct (223) includes a main duct (224) and a plurality of branch ducts (225) communicating with the main duct (224). The exhaust port (229) is formed at the end of the branch duct (225) away from the main duct (224).

4. The motion device according to claim 3, characterized in that, The main channel (224) is arc-shaped and coaxial with the rotation axis of the lifting assembly (200); the branch channel (225) includes a first channel segment (226), an arc channel segment (227) and a second channel segment (228). The first channel segment (226) is connected to the main channel (224). The arc channel segment (227) is coaxially arranged with the main channel (224), and one end is connected to the first channel segment (226) and the other end is connected to the second channel segment (228). The end of the second channel segment (228) forms the exhaust port (229).

5. The motion device according to claim 4, characterized in that, Along the airflow direction, the arc groove segment (227) is located on the outside away from the main channel (224) and extends toward the air inlet (235) of the main channel (224).

6. The motion device according to claim 5, characterized in that, Along the airflow direction, the farther away from the air inlet end of the main channel (224), the larger the exhaust port (229) becomes.

7. The motion device according to claim 6, characterized in that, Each of the exhaust ports (229) is arranged opposite to the arc-shaped motor (120).

8. The motion device according to any one of claims 1-7, characterized in that, The hollow cavity of the hollow sidewall (220) has a square cross-section; the lifting drive is a voice coil motor (240), the stator of the voice coil motor (240) is fixedly installed on the base plate (210), the mover of the voice coil motor (240) is fixedly connected to a mover seat (250), the mover seat (250) has four outward protrusions along the circumference, the cross-section of the mover seat (250) is "+", and the mover seat (250) can rise to the top of the hollow cavity.

9. The motion device according to claim 8, characterized in that, The hollow sidewall (220) is also provided with an air flotation channel (232), which has multiple air outlets (233). The multiple air outlets (233) are respectively provided on each sidewall of the hollow cavity. When the air flotation channel (232) is ventilated, an air flotation guide rail is formed between each sidewall of the hollow cavity and the corresponding protrusion of the moving seat (250).

10. A semiconductor manufacturing apparatus, characterized in that, It includes a support platform and a motion device as described in any one of claims 1-9, wherein the support platform is disposed on the drive unit of the lifting drive member.

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