A tgv substrate detection device

Abstract

The utility model relates to a kind of TGV substrate detection devices, including pedestal, pedestal track assembly fixedly installed on pedestal, support gantry is fixedly connected with pedestal and is set, substrate pressing mechanism is installed on support gantry and can reciprocate along vertical direction single degree of freedom, rotating chassis mechanism is slidably adjusted and installed on pedestal track assembly and camera assembly is slidably adjusted and installed with support gantry;Substrate is installed on the rotating chassis mechanism and is pressed by the substrate pressing mechanism and is detected by camera assembly;The TGV substrate detection device of the technical solution of the present application, by installing substrate on rotating chassis mechanism, rotating chassis mechanism can be adjusted with small angle rotation, then cooperate with substrate pressing mechanism and press substrate on the surface of rotating chassis mechanism, flatten the warped deformation position of substrate, simultaneously adsorbed on rotating chassis mechanism, and photograph detection is carried out by camera assembly, improve the detection accuracy of substrate, ensure substrate detection quality.

Description

Technical Field

[0001] This utility model relates to the field of substrate testing, specifically to a TGV substrate testing device. Background Technology

[0002] As semiconductor technology advances towards high-density, three-dimensional integration, TGV (Through Glass Via) technology, due to its superior RF performance, high insulation, and thermal stability, has become a crucial alternative to TSV (Through Silicon Via) and is considered a key candidate for next-generation three-dimensional integration technology. Unlike TSV technology, which achieves vertical interconnection through a silicon interposer, TGV technology uses a glass substrate for vertical electrical interconnection to achieve superior packaging performance compared to silicon interposers.

[0003] Achieving high-precision glass via and blind via fabrication is one of the core challenges in the development of TGV technology. Simultaneously, it must meet stringent requirements such as high speed, high precision, low cost, narrow pitch, smooth sidewalls, and good perpendicularity. Currently, commonly used methods include sandblasting, focused discharge machining, plasma etching, laser ablation, electrochemical discharge machining, photosensitive glass, and laser-induced etching. However, TGV fabrication using these methods may result in defects such as uneven aperture, aperture misalignment, rough aperture walls, and microcracks at the aperture edges, affecting packaging reliability. Furthermore, the complex processing after substrate fabrication can easily lead to substrate warping, further amplifying process defects. Therefore, it is necessary to improve existing testing equipment to facilitate the detection of warped substrates.

[0004] Therefore, in order to solve the above problems, a TGV substrate inspection device is needed to solve the aforementioned technical issues. Utility Model Content

[0005] The technical problem to be solved by this utility model is to provide a TGV substrate inspection device. By mounting the substrate on a rotating chassis mechanism, which can be rotated and adjusted at a small angle, and then cooperating with a substrate pressing mechanism to press the substrate onto the surface of the rotating chassis mechanism, the warped and deformed parts of the substrate are flattened and simultaneously adsorbed onto the rotating chassis mechanism. The device is then photographed and inspected by a camera assembly, thereby improving the detection accuracy of the substrate and ensuring the quality of substrate inspection.

[0006] The technical solution of this utility model to solve the above-mentioned technical problems is as follows: A TGV substrate inspection device includes a base, a base track assembly fixedly mounted on the base, a support gantry fixedly connected to the base, a substrate clamping mechanism mounted on the support gantry and capable of reciprocating in a single degree of freedom in the vertical direction, a rotating chassis mechanism slidably mounted on the base track assembly, and a camera assembly slidably mounted in conjunction with the support gantry; the substrate is mounted on the rotating chassis mechanism, clamped by the substrate clamping mechanism, and inspected by the camera assembly.

[0007] Furthermore, the substrate pressing mechanism includes a gantry plate fixedly installed in conjunction with the supporting gantry, a pressing cylinder fixedly installed in conjunction with the gantry plate, a pressure plate assembly fixedly installed in conjunction with the output end of the pressing cylinder, and a guide frame assembly fixedly installed in conjunction with the gantry plate and used for guiding the pressure plate assembly; the pressing cylinder drives the pressure plate assembly to reciprocate in the vertical direction.

[0008] Furthermore, the pressure plate assembly includes a pressure plate fixedly disposed at the output end of the pressure cylinder, multiple outer frame pressure strips fixedly disposed on the lower surface of the pressure plate, and multiple inner pressure strips fixedly disposed on the lower surface of the pressure plate; the multiple outer frame pressure strips together form an outer frame structure, and the multiple inner pressure strips are distributed to form a cross-shaped structure.

[0009] Furthermore, the guide frame assembly includes a guide plate fixedly installed with the gantry plate, a guide seat fixedly installed on the pressure plate assembly, a linear bearing fixedly installed on the guide plate, and a slide rod passing through the linear bearing and fixedly installed with the guide seat. The slide rod and the linear bearing form a linear stroke group, and there are multiple linear stroke groups evenly distributed on the guide plate.

[0010] Furthermore, the rotating chassis mechanism includes a chassis that is slidably and adjustablely mounted with the base track assembly, a turntable that is rotatably mounted with the chassis, a turntable drive assembly disposed on the chassis for driving the turntable to rotate, a turntable guide rail assembly disposed between the chassis and the turntable, and a positioning disk assembly fixedly mounted on the turntable; the base plate is mounted on the positioning disk assembly, and the turntable drive assembly drives the turntable to rotate and adjust on the chassis.

[0011] Furthermore, the turntable guide rail assembly consists of multiple sets, which are evenly distributed between the chassis and the turntable. The turntable guide rail assembly includes an arc-shaped guide rail that is fixedly installed to the chassis and an arc-shaped guide block that is fixedly installed to the lower surface of the turntable. A turntable connecting plate is provided between the output end of the turntable drive assembly and the turntable.

[0012] Furthermore, the positioning disk assembly includes a support frame fixedly mounted on the turntable and a carrier plate fixedly mounted on the support frame, wherein the carrier plate has adsorption holes for adsorbing the substrate.

[0013] Furthermore, it also includes a feeding mechanism, which includes a feeding positioning frame fixedly installed with the base, a feeding pusher frame slidably installed with the feeding positioning frame, and a feeding pusher rod fixedly installed on the feeding pusher frame. The feeding pusher rod is a plurality of rods arranged parallel to each other at equal intervals. An elastic pad is fixedly installed in the middle of the feeding pusher rod, and a pusher step is formed at the end of the feeding pusher rod to be positioned and installed with the substrate.

[0014] Furthermore, it also includes a substrate positioning mechanism, which includes a lower base plate fixedly installed with the base, a positioning cylinder fixedly installed on the lower base plate, and a positioning lifting plate fixedly connected to the output end of the positioning cylinder. The positioning lifting plate is equipped with multiple positioning columns for positioning the substrate.

[0015] Furthermore, the camera assembly includes an upper camera group and a lower camera group. A linear guide rail drive module and a vertical mounting bracket module used in conjunction with the linear guide rail drive module are fixedly installed on the supporting gantry. The vertical mounting bracket module is slidably installed in conjunction with the linear guide rail drive module, and the upper camera group is slidably installed in conjunction with the vertical mounting bracket module.

[0016] The beneficial effects of this technical solution are: The TGV substrate inspection device of this technical solution mounts the substrate on a rotating chassis mechanism, which can be rotated and adjusted at a small angle. In conjunction with the substrate pressing mechanism, the substrate is pressed firmly against the surface of the rotating chassis mechanism, flattening the warped or deformed parts of the substrate. At the same time, the substrate is adsorbed onto the rotating chassis mechanism and photographed by a camera component, thereby improving the inspection accuracy of the substrate and ensuring the quality of substrate inspection. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the installation of the substrate positioning mechanism of this utility model; Figure 3 This is a schematic diagram of the installation of the base track assembly of this utility model; Figure 4 This is a schematic diagram of the substrate pressing mechanism of this utility model; Figure 5 This is a bottom view of the substrate pressing mechanism of this utility model; Figure 6 This is an enlarged internal view of part A of this utility model; Figure 7 This is a schematic diagram of the substrate positioning mechanism of this utility model; Figure 8 This is a schematic diagram of the supporting gantry of this utility model; Figure 9 This is a schematic diagram of the positioning disk assembly of this utility model; Figure 10 This is a schematic diagram of the turntable installation of this utility model; Figure 11 This is a schematic diagram of the chassis installation of this utility model; Figure 12 This is a schematic diagram of the camera assembly of this utility model.

[0018] The attached diagram lists the components represented by each number as follows: 1. Base; 2. Feeding mechanism; 21. Feeding pusher; 22. Feeding positioning frame; 23. Feeding push rod; 24. Elastic pad; 25. Push rod step; 3. Support gantry; 31. Vertical arm; 32. Cantilever end; 33. Drive mechanism; 34. Linear track; 35. Vertical mounting frame module; 4. Base track assembly; 41. Transverse guide rail drive module; 42. Transverse guide rail; 5. Rotating chassis mechanism; 51. Angle measuring device; 52. Chassis; 53. Drive stator; 54. Drive rotor; 55. Turntable connecting plate; 56. Turntable; 57. Arc-shaped guide block; 58. Arc-shaped guide rail; 59. Arc-shaped positioning plate; 6. Substrate positioning mechanism; 61. Positioning cylinder; 62. Lower base plate; 63. Lower positioning frame; 64. Positioning lifting plate; 65. Positioning column; 7. Positioning plate assembly; 71. Support frame; 72. Bearing plate; 8. Substrate pressing mechanism; 81. Pressing cylinder; 82. Mast plate; 83. Slide rod; 84. Linear bearing; 85. Guide plate; 86. Guide seat; 87. Pressure plate; 88. Pressure plate outer frame pressure strip; 89. Pressure plate inner pressure strip; 810. Locking bolt; 811. Return spring; 9. Camera assembly; 91. Upper camera group; 92. Lower camera group. Detailed Implementation

[0019] It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0020] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0021] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0022] The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0023] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the installation of the substrate positioning mechanism of this utility model; Figure 3 This is a schematic diagram of the installation of the base track assembly of this utility model; Figure 4 This is a schematic diagram of the substrate pressing mechanism of this utility model; Figure 5 This is a bottom view of the substrate pressing mechanism of this utility model; Figure 6 This is an enlarged internal view of part A of this utility model; Figure 7 This is a schematic diagram of the substrate positioning mechanism of this utility model; Figure 8 This is a schematic diagram of the supporting gantry of this utility model; Figure 9 This is a schematic diagram of the positioning disk assembly 7 of this utility model; Figure 10 This is a schematic diagram of the turntable installation of this utility model; Figure 11 This is a schematic diagram of the chassis installation of this utility model; Figure 12This is a schematic diagram of the camera assembly of this utility model; as shown in the figure, a TGV substrate inspection device includes a base 1, a base track assembly 4 fixedly installed on the base 1, a support gantry 3 fixedly connected to the base, a substrate pressing mechanism 8 installed on the support gantry 3 and capable of reciprocating in a single degree of freedom in the vertical direction, a rotating chassis mechanism 5 slidably installed on the base track assembly 4, and a camera assembly 9 slidably installed in conjunction with the support gantry 3; the substrate is installed on the rotating chassis mechanism 5, pressed by the substrate pressing mechanism 8, and inspected by the camera assembly 9.

[0024] The TGV substrate inspection device of this technical solution involves mounting the substrate on a rotating chassis mechanism 5, which can be rotated and adjusted at small angles. The substrate is then pressed against the surface of the rotating chassis mechanism 5 by a substrate pressing mechanism 8, flattening any warped or deformed parts of the substrate. Simultaneously, the substrate is adsorbed onto the rotating chassis mechanism 5 and inspected by taking pictures through a camera assembly 9, thereby improving the inspection accuracy of the substrate and ensuring the quality of substrate inspection. The lower end of the base 1 is connected to vibration-damping feet, which are installed on the workstation in conjunction with the base 1 to ensure the stability of the overall structure during the installation and inspection process.

[0025] In this embodiment, the substrate pressing mechanism 8 includes a gantry plate 82 fixedly installed in conjunction with the supporting gantry 3, a pressing cylinder 81 fixedly installed in conjunction with the gantry plate 82, a pressure plate assembly fixedly installed in conjunction with the output end of the pressing cylinder 81, and a guide frame assembly fixedly installed in conjunction with the gantry plate 82 and used for guiding the pressure plate assembly; the pressing cylinder 81 drives the pressure plate assembly to reciprocate in the vertical direction.

[0026] The substrate clamping mechanism 8 is installed in conjunction with the cantilever end 32 formed by the protrusion in the middle of the support gantry 3. The gantry plate 82 serves as the force support point of the clamping mechanism and is fixedly installed in conjunction with the cantilever end 32. The clamping cylinder 81 serves as the power input end of the clamping mechanism, and its power output end is directly fixedly installed in conjunction with the pressure plate assembly, so that the clamping cylinder 81 drives the pressure plate assembly in the vertical direction (the vertical direction is...). Figure 1 The reciprocating linear motion of the support gantry 3 (in the height direction) can press the substrate. Of course, the pressure plate assembly is also equipped with a guide frame assembly for its use to ensure the stability of the structure during its reciprocating motion.

[0027] In this embodiment, the pressure plate assembly includes a pressure plate 87 fixedly disposed at the output end of the pressure cylinder 81, multiple outer frame pressure strips 88 fixedly disposed on the lower surface of the pressure plate, and multiple inner pressure strips 89 fixedly disposed on the lower surface of the pressure plate; the multiple outer frame pressure strips 88 together form an outer frame structure, and the multiple inner pressure strips 89 are distributed to form a cross-shaped structure.

[0028] The pressure plate 87 at the output end of the clamping cylinder 81 is a rectangular plate structure. The middle of the pressure plate 87 is fixedly installed in conjunction with the output end of the clamping cylinder 81, ensuring uniform force on the substrate during the clamping process. The lower surface of the pressure plate 87 is provided with multiple outer frame pressure strips 88 and multiple inner pressure strips 89. There are four outer frame pressure strips 88, which are sequentially connected end-to-end to form a rectangular frame structure. During the pressing process with the substrate, this structure better clamps the perimeter of the substrate, forming a clamping reference surface. The four inner pressure strips 89 in the middle are distributed within the rectangular frame structure in a cross shape. Through the inner pressure strips 89 in the middle, the substrate is more effectively clamped during the clamping process. A compression contact area is formed to make the force more even. The outer frame pressure strip 88 of the pressure plate and the pressure plate 87 are locked together by locking bolts 810. Of course, the outer frame pressure strip 88 of the pressure plate is made of a material with a certain degree of elasticity (such as vulcanized rubber and other elastic materials). A return spring 811 is sleeved on the locking bolt 810. The return spring 811 abuts between the outer frame pressure strip 88 of the pressure plate and the pressure plate 87. Of course, both the outer frame pressure strip 88 and the pressure plate 87 have spring mounting cavities that are designed to accommodate the return spring 811. After the outer frame pressure strip 88 of the pressure plate compresses the substrate, the return spring 811 is used to return the pressure strip 88 to its original position for the next operation. The inner pressure strip 89 of the pressure plate adopts the same setting method as the outer frame pressure strip 88 of the pressure plate, which will not be described in detail here.

[0029] In this embodiment, the guide frame assembly includes a guide plate 85 fixedly installed with the gantry plate 82, a guide seat 86 fixedly installed on the pressure plate assembly, a linear bearing 84 fixedly installed on the guide plate 85, and a slide rod 83 passing through the linear bearing 84 and fixedly installed with the guide seat 86. The slide rod 83 and the linear bearing 84 form a linear stroke group, and there are multiple linear stroke groups, which are evenly distributed on the guide plate 85.

[0030] The guide plate 85 is fixedly installed in conjunction with the gantry plate 82. Of course, the two can be integrally molded. The guide plate 85 serves as the installation point of the entire guide structure. Its upper surface is fixedly installed with linear bearings 84. Correspondingly, the guide plate 85 is also a rectangular plate structure. Four linear bearings 84 are provided and evenly distributed around the guide plate 85. Four guide seats 86 are also provided accordingly. The guide seats 86 correspond one-to-one with the guide plate 85. A sliding rod 83 is installed between the two for cooperation. The three components form a linear stroke group structure. Through the multi-point arrangement of the linear stroke group structure, the pressure plate 87 is ensured to be structurally stable and reliable during the downward and upward processes, so that it can better flatten the substrate.

[0031] In this embodiment, the rotating chassis mechanism 5 includes a chassis 52 that is slidably mounted to the base track assembly 4, a turntable 56 that is rotatably mounted to the chassis 52, a turntable drive assembly disposed on the chassis 52 for driving the turntable 56 to rotate, a turntable guide rail assembly disposed between the chassis 52 and the turntable 56, and a positioning disk assembly 7 fixedly mounted on the turntable; the base plate is mounted on the positioning disk assembly 7, and the turntable drive assembly drives the turntable 56 to rotate and adjust on the chassis 52.

[0032] The chassis 52 is slidably installed with the base track assembly 4. The base track assembly 4 includes a transverse guide rail 42 fixedly installed with the base 1 and a transverse guide rail drive module 41. The upper end of the transverse guide rail drive module 41 is fixedly installed with the chassis 52. The transverse guide rail drive module 41 drives the chassis 52 to move linearly back and forth along the transverse guide rail 42 (transverse, i.e., the X direction marked in the figure). Of course, the specific installation and model of the transverse guide rail drive module 41 and the transverse guide rail 42 can be adopted from the existing technology. The turntable 56 can be rotated and adjusted relative to the chassis 52 by the turntable drive assembly. The substrate is installed on the turntable 56. The base track assembly 4 can drive the rotating chassis mechanism 5 to move to the camera component to check whether it is installed in place. If there is a deviation between the installation position and the set position, the installation angle of the turntable 56 can be adjusted by the turntable drive assembly to make the substrate installation more accurate.

[0033] In this embodiment, the turntable guide rail assembly consists of multiple sets, which are evenly distributed between the chassis 52 and the turntable 56. The turntable guide rail assembly includes an arc-shaped guide rail 58 that is fixedly installed to the chassis 52 and an arc-shaped guide block 57 that is fixedly installed to the lower surface of the turntable. A turntable connecting plate 55 is provided between the output end of the turntable drive assembly and the turntable 56.

[0034] The turntable drive assembly includes a drive stator 53 and a drive rotor 54. The drive stator 53 enables the drive rotor 54 to rotate. The two are coupled using an arc-shaped surface structure (the drive stator and drive rotor can be installed and used using existing structures, which will not be described in detail here). Alternatively, a rack and pinion coupling can be used. The drive stator 53 causes the drive rotor 54 to rotate. The drive rotor 54 and the turntable 56 are fixedly connected as one unit by a turntable connecting plate 55, ultimately realizing the rotation adjustment of the turntable 56. Multiple uniformly spaced grooves are formed on the same circumferential direction on the chassis 52. The evenly spaced arc-shaped grooves are used to install the arc-shaped guide rails 58. The corresponding arc-shaped guide blocks 57 are installed on the lower surface of the turntable 56 for sliding cooperation, so that the turntable 56 can be rotated and adjusted stably and reliably. An arc-shaped positioning plate 59 is installed on the side of the turntable 56. An angle sensor is integrated on the arc-shaped positioning plate 59. An angle measuring device 51 is installed on the corresponding chassis 52 to cooperate with the angle sensor 59. The two are used to detect the rotation angle of the turntable 56 (both the angle sensor and the angle measuring device 51 adopt existing technology, which will not be described in detail here).

[0035] In this embodiment, the positioning disk assembly 7 includes a support frame 71 fixedly installed on the turntable 56 and a carrier plate 72 fixedly installed on the support frame 71 (the support frame 71 is a hollow frame structure, and the turntable 56 is also provided with clearance space in the middle. It can be understood that its structure is designed and installed based on the principle of not interfering with each other). The carrier plate 72 is provided with adsorption holes for adsorbing the substrate.

[0036] The turntable 56 has a hollow structure in the middle. The rectangular support frame 71 is detachably fixed to the turntable 56 for easy replacement and maintenance. The support plate 72 is fixedly installed in conjunction with the support frame 71. The support plate 72 has multiple sets of adsorption holes to facilitate adsorption after the substrate is pressed against the support plate 72 (the adsorption holes are connected to the vacuum device to achieve adsorption of the product; the adsorption or vacuum device can be installed and used with existing devices). Subsequent testing is then performed. The support plate 72 also has positioning holes for telescopic use with the positioning column 65 of the substrate positioning mechanism 6. The support plate is made of transparent material to facilitate testing with the camera assembly 9.

[0037] In this embodiment, a feeding mechanism 2 is also included. The feeding mechanism 2 includes a feeding positioning frame 22 fixedly installed with the base 1, a feeding pusher 21 slidably installed with the feeding positioning frame 22, and a feeding pusher 23 fixedly installed on the feeding pusher 21. There are multiple feeding pushers 23 arranged parallel to each other at equal intervals. An elastic pad 24 is fixedly installed in the middle of the feeding pusher 23, and a pusher step 25 is formed at the end of the feeding pusher to be positioned and installed with the substrate.

[0038] The feeding positioning frame 22 serves as the mounting base for the feeding mechanism. The feeding positioning frame 22 is fixedly connected to the base 1. A slide rail structure is provided between the feeding push frame 21 and the feeding positioning frame 22 to facilitate their sliding and installation. The feeding push frame 21 has an overall "L" shape. Multiple feeding push rods 23 are fixedly connected to the upper end of the feeding push frame 21. The feeding push rods 23 are arranged parallel to each other at equal intervals to support and place the substrate. The end of the feeding push rod 23 forms a push rod step 25, and an elastic pad 24 is installed in the middle. When the substrate is fed (the substrate can be fed by a robot or manually transferred to the feeding push rod 23), the substrate can be installed through the two mounting points: the push rod step 25 and the elastic pad 24 in the middle of the feeding push frame 21. This reduces the contact area with the feeding push frame 21 while ensuring the stability of the substrate installation. Of course, the feeding push frame 21 can be used in conjunction with an automatic feeding device (such as an electric telescopic rod) to achieve automated feeding.

[0039] In this embodiment, a substrate positioning mechanism 6 is also included. The substrate positioning mechanism 6 includes a lower base plate 62 fixedly installed with the base 1, a positioning cylinder 61 fixedly installed on the lower base plate 62, and a positioning lifting plate 64 fixedly connected to the output end of the positioning cylinder 61. Multiple positioning columns 65 for positioning the substrate are installed on the positioning lifting plate.

[0040] The lower base plate 62 is fixedly installed with the base 1, serving as the mounting base point for the substrate positioning mechanism 6. The positioning cylinder 61 is fixedly installed with the lower base plate 62, and the output end of the positioning cylinder 61 is fixedly installed with the rectangular positioning lifting plate 64, providing power for the lifting of the positioning lifting plate 64. Multiple positioning columns 65 are installed on the upper surface of the positioning lifting plate 64, which are used in conjunction with the positioning holes on the bearing plate 72. That is, the positioning cylinder 61 drives the positioning lifting plate 64 to rise vertically, and the positioning columns 65 extend out of the bearing plate 72 after passing through the corresponding positioning holes to support the substrate. After the substrate is installed on the positioning columns 65, the positioning lifting plate 64 begins to descend under the driving action of the positioning cylinder 61 until the substrate is placed on the upper surface of the bearing plate 72, completing the substrate positioning and placement work. Of course, a lower positioning frame 63 and a lower linear slide bar bearing structure are also provided to improve the stability of the positioning lifting plate 64 during operation. The installation and structure of the lower linear slide bar bearing structure are the same as the installation direction at the guide plate 85, which will not be described in detail here.

[0041] In this embodiment, the camera assembly 9 includes an upper camera group 91 and a lower camera group 92. A linear guide rail drive module and a vertical mounting frame module used in conjunction with the linear guide rail drive module are fixedly installed on the supporting gantry 3. The vertical mounting frame module is slidably installed in conjunction with the linear guide rail drive module, and the upper camera group 91 is slidably installed in conjunction with the vertical mounting frame module.

[0042] The two upright arms 31 of the supporting gantry 3 are fixedly installed with the two sides of the base 1. One side of the supporting gantry has a cantilever end 32, and the other side is provided with a linear guide drive module. The linear guide drive module includes a linear rail 34 fixedly installed on the supporting gantry and a drive mechanism 33. The vertical mounting frame module 35 can be slidably installed on the linear rail 34. The drive mechanism 33 can drive the vertical mounting frame module 35 to reciprocate (i.e., along the Y direction). The upper camera group 91 is slidably installed on the vertical mounting frame module 35. The two modules can be used to adjust the two directions of the upper camera group 91 (Y direction and Z direction). The lower camera group 92 adopts the same setting. The two camera groups work together to meet the all-round detection of the substrate. Of course, the linear guide drive module and the vertical mounting frame module 35 can adopt the existing structure, which will not be described in detail here.

[0043] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0044] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

[0045] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A TGV substrate testing device, characterized in that: It includes a base (1), a base track assembly (4) fixedly installed on the base (1), a support frame (3) fixedly connected to the base, a base plate clamping mechanism (8) installed on the support frame (3) and capable of reciprocating in a single degree of freedom in the vertical direction, a rotating chassis mechanism (5) slidably installed on the base track assembly (4), and a camera assembly (9) slidably installed on the support frame (3); the base plate is installed on the rotating chassis mechanism (5), clamped by the base plate clamping mechanism (8), and detected by the camera assembly (9).

2. The TGV substrate testing device according to claim 1, characterized in that: The substrate pressing mechanism (8) includes a gantry plate (82) fixedly installed in conjunction with the supporting gantry (3), a pressing cylinder (81) fixedly installed in conjunction with the gantry plate (82), a pressure plate assembly fixedly installed in conjunction with the output end of the pressing cylinder (81), and a guide frame assembly fixedly installed in conjunction with the gantry plate (82) and used for guiding the pressure plate assembly; the pressing cylinder (81) drives the pressure plate assembly to reciprocate in the vertical direction.

3. The TGV substrate testing device according to claim 2, characterized in that: The pressure plate assembly includes a pressure plate (87) fixedly disposed at the output end of the pressure cylinder (81), multiple outer frame pressure strips (88) fixedly disposed on the lower surface of the pressure plate, and multiple inner pressure strips (89) fixedly disposed on the lower surface of the pressure plate; the multiple outer frame pressure strips (88) together form an outer frame structure, and the multiple inner pressure strips (89) are distributed in a cross shape within the outer frame structure.

4. The TGV substrate testing device according to claim 2, characterized in that: The guide frame assembly includes a guide plate (85) fixedly installed with the gantry plate (82), a guide seat (86) fixedly installed on the pressure plate assembly, a linear bearing (84) fixedly installed on the guide plate (85), and a slide rod (83) passing through the linear bearing (84) and fixedly installed with the guide seat (86). The slide rod (83) and the linear bearing (84) form a linear stroke group. There are multiple linear stroke groups, and the multiple linear stroke groups are evenly distributed on the guide plate (85).

5. The TGV substrate testing device according to claim 1, characterized in that: The rotating chassis mechanism (5) includes a chassis (52) that is slidably mounted to the base track assembly (4), a turntable (56) that is rotatably mounted to the chassis (52), a turntable drive assembly that is mounted on the chassis (52) to drive the turntable (56) to rotate, a turntable guide rail assembly that is mounted between the chassis (52) and the turntable (56), and a positioning disk assembly (7) that is fixedly mounted on the turntable; the base plate is mounted on the positioning disk assembly (7), and the turntable drive assembly drives the turntable (56) to rotate and adjust on the chassis (52).

6. The TGV substrate testing device according to claim 5, characterized in that: The turntable guide rail assembly consists of multiple sets, which are evenly distributed between the chassis (52) and the turntable (56). The turntable guide rail assembly includes an arc-shaped guide rail (58) fixedly installed with the chassis (52) and an arc-shaped guide block (57) fixedly installed with the lower surface of the turntable. The arc-shaped guide block (57) is slidably installed with the turntable. A turntable connecting plate (55) is provided between the output end of the turntable drive assembly and the turntable (56).

7. The TGV substrate testing device according to claim 6, characterized in that: The positioning disk assembly (7) includes a support frame (71) fixedly installed on the turntable (56) and a carrier plate (72) fixedly installed on the support frame (71). The carrier plate (72) has adsorption holes for adsorbing the substrate.

8. The TGV substrate testing device according to claim 1, characterized in that: It also includes a feeding mechanism (2), which includes a feeding positioning frame (22) fixedly installed with the base (1), a feeding pusher installed slidably with the feeding positioning frame (22), and a feeding pusher (23) fixedly installed on the feeding pusher (21). The feeding pusher (23) consists of multiple feeding pushers (23) arranged parallel to each other at equal intervals. An elastic pad (24) is fixedly installed in the middle of the feeding pusher (23), and a pusher step (25) is formed at the end of the feeding pusher to be positioned and installed with the base plate.

9. The TGV substrate testing device according to claim 1, characterized in that: It also includes a substrate positioning mechanism (6), which includes a lower base plate (62) fixedly installed with the base (1), a positioning cylinder (61) fixedly installed on the lower base plate (62), and a positioning lifting plate (64) fixedly connected to the output end of the positioning cylinder (61). Multiple positioning columns (65) for positioning the substrate are fixedly installed on the positioning lifting plate (64).

10. The TGV substrate inspection device according to claim 1, characterized in that: The camera assembly (9) includes an upper camera group (91) and a lower camera group (92). A linear guide rail drive module and a vertical mounting frame module used in conjunction with the linear guide rail drive module are fixedly installed on the support frame (3). The vertical mounting frame module is slidably installed in conjunction with the linear guide rail drive module. The upper camera group (91) is slidably installed in conjunction with the vertical mounting frame module.

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