A high-efficiency and accurate eutectic machine

Abstract

The utility model provides a kind of efficient and accurate eutectic machine, belong to semiconductor manufacturing technology field.The utility model is directly positioned to the pipe base that the positioning hole is positioned to the top surface of eutectic base of eutectic platform, realizes quick and accurate positioning, simultaneously, feeding system includes the feeding linear driver with pipe base suction nozzle being arranged in the upper of eutectic base and the tray linear driver of placing pipe base tray, and the movement direction of feeding linear driver and tray linear driver is perpendicular to each other, so that pipe base suction nozzle only moves along a direction under the action of feeding linear driver when pipe base is fed, there is no other movement superposition, avoid the problem that accuracy declines caused by movement error superposition, in combination with the direct positioning effect of positioning hole, avoid using finger suction nozzle transfer, operation is simpler, processing efficiency is higher, improve product precision, ensure product quality.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, specifically to a high-efficiency and accurate eutectic machine. Background Technology

[0002] In semiconductor chips, such as lasers and power devices, eutectic bonding requires the use of a eutectic bonding machine to bond the socket, chip, and heat sink together to meet the needs of semiconductor chip manufacturing.

[0003] Currently, existing eutectic wafer machines on the market, such as the one disclosed in patent CN207966940U, have a loading and unloading system, a eutectic stage, a dual wafer stage, a chip pick-and-place control system, and a chip calibration system. The loading system includes a tube holder tray, a nozzle, a cylinder, a slide rail, a linear precision XY slide, and a motor controlling the linear precision XY slide. The eutectic stage includes a conveying device for transporting tube holders from the loading and unloading system to the eutectic stage, a finger nozzle, a eutectic seat, tube holder grippers, gripper cylinders, and a heating rod. The dual wafer stage includes a heat sink tray fixing ring, a chip tray fixing ring, a ejector pin system assembly, and a linear precision XY module. The ejector pin system assembly includes ejector pins, ejector pin caps, and an ejector pin adjustment system. The chip pick-and-place control system includes a heat sink nozzle, a chip nozzle, a motion component, and a camera. In use, the linear precision XY slide moves to the top of the tube holder tray, positions itself on the tube holder within the tray, and the cylinder pushes the suction nozzle downwards along the slide rail until it contacts and holds the tube holder. Then, it rises in the opposite direction and, through the movement of the linear precision XY slide, transports the tube holder to the finger suction nozzle of the eutectic stage, where it is held by the finger suction nozzle. Then, the horizontal cylinder pushes the connecting rod, and the rotating shaft rotates to change the finger suction nozzle from a vertical to a horizontal position. At the same time, the pneumatic slide moves horizontally forward and inserts the tube holder on the finger suction nozzle into the eutectic stage on the eutectic stage. Furthermore, the gripper cylinder moves inwards, causing the tube holder gripper to clamp the tube holder. The eutectic stage uses a heating rod to heat the tube holder. In addition, the linear compact XY module motion uses an image-based positioning system to accurately identify and position the heat sink and chip. A cylinder pushes the guide table along the slide rail, and an idler wheel moves upward along the guide table ramp, pushing the ejector pin cap upward to approach the heat sink or chip. A servo motor rotates, driving a connecting rod to push the ejector pin upward to lift the heat sink or chip, allowing the heat sink nozzle or chip nozzle to pick up the heat sink or chip respectively. At this time, the motion component moves the heat sink on the heat sink nozzle along the X direction to above the lower camera in the automatic calibration component. The servo motor rotates, driving a synchronous wheel to rotate, and the shaft drives the heat sink picked up by the heat sink nozzle to rotate slowly. At the same time, information is collected through the lower camera, and automatic visual recognition and calibration are performed using software. After calibration, the motion component moves the heat sink on the heat sink nozzle along the X direction to directly above the eutectic stage and places the heat sink into the eutectic seat. In addition, the motion component controls the chip nozzle to move along the X direction to a suitable position. The slide moves the chip nozzle downward until it just contacts and picks up the chip. At this time, the motion component moves the chip on the chip nozzle along the X direction to the chip automatic calibration stage in the automatic calibration component and places the chip on the automatic calibration stage. After automatic calibration, the chip is picked up by the chip nozzle again. The motion component then moves the chip on the chip nozzle along the X direction to the eutectic stage and places the chip on the eutectic socket. Finally, the eutectic bonding is completed by heating the eutectic stage. After the bonding is completed, the finished tube socket is returned to the tube socket tray by the loading and unloading system, realizing the fully automated operation from loading to unloading.Although the aforementioned eutectic welding machine can meet the requirements of eutectic welding, its tube holder tray position is fixed relative to the eutectic stage. When loading the tube holder, a linear precision XY slide is needed to drive the tube holder suction nozzle. In this case, the movement of the X axis is based on the movement of the Y axis. That is, when the X axis moves, the Y axis also moves. In addition, the Y axis itself can also move, so the movement of the X axis is superimposed on the movement of the Y axis. Moreover, each loading requires the movement of both the Y and X axes, which leads to the problem of error superposition and poor movement accuracy. Furthermore, during loading, a finger suction nozzle is needed for intermediate rotation. The finger suction nozzle needs to be rotated from a vertical position to a horizontal position to insert the tube holder into the eutectic seat on the eutectic stage. This not only makes the operation complex and cumbersome, but also further reduces the accuracy, affecting processing efficiency and product quality. Summary of the Invention

[0004] To address the aforementioned problems in existing technologies, this invention aims to provide a highly efficient and accurate eutectic machine. A positioning hole is formed on the top of the eutectic stage's eutectic seat, and a loading / unloading linear actuator with a tube holder suction nozzle is positioned above the eutectic seat. Furthermore, a tube holder tray is mounted on a tray linear actuator, with the loading / unloading linear actuator and the tray linear actuator perpendicular to each other. This ensures that the tube holder suction nozzle moves in only one direction during tube holder loading, preventing the accumulation of errors. Additionally, the positioning hole directly positions the tube holder, eliminating the need for finger rotation of the suction nozzle. This not only simplifies operation and increases processing efficiency but also reduces the impact of motion errors on product accuracy, ensuring product quality.

[0005] The specific technical solution is as follows:

[0006] A high-efficiency and accurate eutectic reactor includes a loading and unloading system, a eutectic stage, a dual wafer stage, a chip pick-and-control system, and a chip calibration system. The loading and unloading system, eutectic stage, dual wafer stage, chip pick-and-control system, and chip calibration system are arranged along one direction on the worktable. This reactor possesses the following characteristics.

[0007] The eutectic stage is installed on the workbench. The eutectic stage includes a eutectic base, a heating rod is installed inside the eutectic base, and a positioning hole is opened on the top surface of the eutectic base.

[0008] The loading and unloading system includes a tube seat tray, a tray linear actuator, a loading and unloading linear actuator, and a tube seat suction nozzle. The tray linear actuator is located next to the eutectic stage and moves in a straight reciprocating motion in one direction. The tube seat tray is mounted on the tray linear actuator. The loading and unloading linear actuator is located above the eutectic stage and is arranged in a direction perpendicular to the movement direction of the tray linear actuator. The tube seat suction nozzle is mounted on the loading and unloading linear actuator.

[0009] The aforementioned efficient and accurate eutectic machine further includes an adjustment structure disposed between the loading / unloading linear drive and the tube seat nozzle. The adjustment structure comprises an adjustment guide rail, an adjustment slider, an adjustment slide block, an adjustment screw, an adjustment screw block, and an adjustment drive. The adjustment guide rail and the adjustment drive are both mounted on the loading / unloading linear drive. The adjustment slider is slidably disposed on the adjustment guide rail. The adjustment slide block is mounted on the adjustment slider. An adjustment screw block is disposed on the adjustment slide block, and the adjustment screw block is threaded onto the adjustment screw. One end of the adjustment screw is poweredly connected to the adjustment drive.

[0010] The aforementioned efficient and accurate eutectic machine includes a tray linear actuator and a loading / unloading linear actuator, both of which include a linear carriage, a sliding seat, a sliding screw block, a sliding lead screw, and a sliding actuator. The sliding seat is slidably mounted on the linear carriage, and the sliding screw block is installed on the sliding seat. The sliding lead screw is arranged parallel to the linear carriage. The sliding actuator is installed at one end or one side of the linear carriage, and the sliding actuator is poweredly connected to one end of the sliding lead screw. The sliding lead screw is also threadedly connected to the sliding screw block. The tube seat tray and the tube seat suction nozzle are respectively installed on the sliding seats of the tray linear actuator and the loading / unloading linear actuator.

[0011] In the aforementioned efficient and accurate eutectic machine, the tube socket tray is a waffle box.

[0012] The aforementioned efficient and accurate eutectic machine further includes a clamp, which comprises a bottom bracket and a support limiting frame. The bottom bracket is fixedly mounted on a tray linear drive, and the support limiting frame is mounted on the bottom bracket. The support limiting frame is provided with several placement positions, and each placement position holds a tube seat tray.

[0013] The aforementioned efficient and accurate eutectic machine has a central clamping hole in the bottom bracket, a support and limiting frame installed in the central clamping hole, and an inwardly protruding retaining edge at the bottom inner edge of the central clamping hole. At the same time, a notch communicating with the central clamping hole is provided on one side of the bottom bracket.

[0014] In the aforementioned efficient and accurate eutectic machine, an adjusting block is provided on the bottom bracket at both ends of the notch. One adjusting block has an adjusting threaded hole, and the other adjusting block has a slot. One end of an adjusting screw is inserted into the slot, and the other end of the adjusting screw is threadedly connected to the adjusting threaded hole.

[0015] The aforementioned efficient and accurate eutectic machine also includes an ion fan, which is mounted on the worktable and located beside the loading and unloading system.

[0016] The aforementioned efficient and accurate eutectic machine further includes a buffer assembly, which is mounted on an adjusting slide of an adjusting structure. A tube nozzle is mounted on the buffer assembly. The buffer assembly includes a telescopic slide, a telescopic spring, and a connecting rod. One end of the telescopic slide is mounted on the adjusting slide, and the tube nozzle is slidably mounted on the telescopic slide. One end of the tube nozzle is connected to one end of the connecting rod, and a telescopic spring is provided between the other end of the connecting rod and the telescopic slide.

[0017] The aforementioned efficient and accurate eutectic machine further includes a front guide assembly and a rear guide assembly, which are respectively disposed at both ends of a telescopic slide. The telescopic slide has a telescopic hole, and a front guide assembly is disposed at both ends of the telescopic slide and at the telescopic hole. Each front guide assembly includes several front guide wheels, which are distributed circumferentially around the tube seat nozzle on the outside of the tube seat nozzle. The rear guide assembly includes a rear guide wheel and two clamping blocks, both of which are fixed on the telescopic slide and are arranged parallel and spaced apart. The rear guide wheel is disposed between the two clamping blocks and is rotatably mounted on a connecting rod.

[0018] The positive effects of the above technical solution are:

[0019] The aforementioned high-efficiency and accurate eutectic machine uses positioning holes on the top surface of the eutectic stage's eutectic seat to directly position the incoming tube sockets, resulting in more accurate and faster positioning. Furthermore, a linear actuator with a tube socket suction nozzle is installed above the eutectic seat. The tube socket tray is mounted on a tray linear actuator, and both the loading / unloading and tray linear actuators reciprocate along straight lines in perpendicular directions. This ensures that during tube socket loading, the tube socket suction nozzle only moves in one direction under the action of the loading / unloading linear actuators, eliminating the problem of cumulative errors. Moreover, direct positioning of the tube sockets using the positioning holes eliminates the need for the finger-operated suction nozzle rotation step found in existing equipment, simplifying operation, improving processing efficiency, further reducing the impact of motion errors on product accuracy, and resulting in better product quality. Attached Figure Description

[0020] Figure 1 This is a structural diagram of an embodiment of a high-efficiency and accurate eutectic machine according to the present invention;

[0021] Figure 2 This is a structural diagram of a preferred embodiment of the eutectic seat of this utility model;

[0022] Figure 3 This is a structural diagram of a tray linear driver with a tube seat tray installed in a preferred embodiment of the present invention;

[0023] Figure 4This is a structural diagram of a linear feeder with a tube seat suction nozzle and an adjustment structure installed in a preferred embodiment of the present invention.

[0024] Figure 5 This is a structural diagram of the clamp in a preferred embodiment of the present invention;

[0025] Figure 6 This is a structural diagram of the buffer component in a preferred embodiment of the present invention.

[0026] In the attached diagram: 1. Workbench; 2. Loading / unloading system; 21. Tube seat tray; 22. Tray linear actuator; 23. Loading / unloading linear actuator; 24. Tube seat nozzle; 25. Adjustment structure; 26. Clamp; 27. Buffer assembly; 261. Bottom bracket; 262. Support limit frame; 271. Telescopic slide; 272. Telescopic spring; 273. Linkage rod; 274. Front guide assembly; 275. Rear guide assembly; 2611. Center clamping hole; 2612. Edge; 2613. Notch; 2614. Adjusting block; 2615. Slot; 2616. Adjusting screw; 2621. Placement position; 2751. Rear guide wheel; 2752. Clamping block; 3. Eutectic stage; 31. Eutectic seat; 32. Heating rod; 311. Positioning hole; 4. Dual wafer stage; 5. Chip pickup and control system; 6. Chip calibration system; 7. Ion fan. Detailed Implementation

[0027] To make the technical means, creative features, objectives, and effects of this utility model easier to understand, the following embodiments are provided in conjunction with the appendix. Figure 1 To be continued Figure 6 The technical solution provided by this utility model is described in detail, but the following content is not intended to limit this utility model.

[0028] Figure 1 This is a structural diagram of an embodiment of a high-efficiency and accurate eutectic machine according to this utility model. Figure 1 As shown, the efficient and accurate eutectic reactor provided in this embodiment includes: a loading / unloading system 2, a eutectic stage 3, a dual-wafer stage 4, a chip pick-and-control system 5, and a chip calibration system 6. Furthermore, the loading / unloading system 2, the eutectic stage 3, the dual-wafer stage 4, the chip pick-and-control system 5, and the chip calibration system 6 are arranged along one direction on the worktable 1. Except for the loading / unloading system 2 and the eutectic stage 3, the dual-wafer stage 4, the chip pick-and-control system 5, and the chip calibration system 6 are the same as or similar to the prior art disclosed in the background section; therefore, their specific structures and modes of motion will not be described in detail here.

[0029] Figure 2 This is a structural diagram of a eutectic seat according to a preferred embodiment of the present invention. Figure 1 and Figure 2As shown, the eutectic stage 3 is mounted on the workbench 1. The eutectic stage 3 includes a eutectic base 31, and a heating rod 32 is installed inside the eutectic base 31. The heating rod 32 heats the eutectic base 31 to meet the requirements of subsequent eutectic welding. In addition, a positioning hole 311 is opened on the top surface of the eutectic base 31, which provides a condition for positioning components such as tubes directly through the positioning hole 311. This allows the tubes to be directly positioned through the positioning hole 311 when they are loaded onto the eutectic base 31, ensuring positioning accuracy. There is no need to use the rotation of the finger nozzle for intermediate loading, which simplifies the operation steps, improves processing efficiency, and also improves accuracy, which is beneficial to the improvement of product quality.

[0030] Figure 3 This is a structural diagram of a tray linear driver with a tube seat tray installed in a preferred embodiment of the present invention; Figure 4 This is a structural diagram of a linear feeder driver with a tube seat suction nozzle and an adjustment structure, according to a preferred embodiment of the present invention. Figure 1 , Figure 3 as well as Figure 4As shown, the loading and unloading system 2 includes a tube seat tray 21, a tray linear actuator 22, a loading and unloading linear actuator 23, and a tube seat suction nozzle 24. The tray linear actuator 22 is located beside the eutectic stage 3 and performs linear reciprocating motion in one direction. The tube seat tray 21 is mounted on the tray linear actuator 22, so that the tube seat tray 21 can follow the movement of the tray linear actuator 22. This provides the conditions for moving the tube seat tray 21 to the same movement trajectory as the tube seat suction nozzle 24 during subsequent loading and unloading. It also ensures that the tube seat suction nozzle 24 only needs to move in one direction during the loading and unloading process, avoiding the problem of error accumulation. In addition, the tube seat tray 21 provides a place for tube seats before welding and finished tube seats, which facilitates the loading and unloading of tube seats before welding and the unloading and collection of finished tube seats, thus meeting the loading and unloading requirements. The loading and unloading linear actuator 23 is set above the eutectic stage 3 and arranged in a direction perpendicular to the movement direction of the tray linear actuator 22, so that the movement direction of the loading and unloading linear actuator 23 is perpendicular to the movement direction of the tray linear actuator 22. This provides the conditions for the subsequent driving of the tube seat suction nozzle 24 to reciprocate between the tube seat tray 21 and the eutectic stage 31 to realize the loading and unloading of tube seats. Furthermore, the tube holder suction nozzle 24 is mounted on the loading / unloading linear actuator 23, allowing it to reciprocate linearly in one direction, thereby transferring the tube holder between the tube holder tray 21 and the eutectic seat 31. This satisfies the loading / unloading requirements and ensures that the tube holder suction nozzle 24 only performs linear motion in one direction during loading / unloading. The tube holder is directly positioned through the positioning hole 311, avoiding motion overlap and eliminating the defect of decreased machining accuracy due to error accumulation, thus guaranteeing product quality. It is worth noting that since the tray linear actuator 22, which drives the tube holder tray 21, and the loading / unloading linear actuator 23, which drives the tube holder suction nozzle 24, move independently and without interference, the X-axis movement of the tube holder suction nozzle 24 does not require Y-axis movement to be achieved. This avoids the problem of X-axis movement overlapping with Y-axis movement, eliminates error accumulation, and improves machining accuracy.

[0031] More specifically, an adjustment structure 25 is provided between the loading / unloading linear actuator 23 and the tube seat suction nozzle 24. Before processing begins, the tube seat suction nozzle 24 can be adjusted to align with the positioning hole 311 on the eutectic seat 31. This ensures that the line connecting the tube seat suction nozzle 24 and the positioning hole 311 is parallel to the movement direction of the loading / unloading linear actuator 23. This ensures that the tube seat subsequently gripped by the tube seat suction nozzle 24 can be smoothly and accurately placed into the positioning hole 311, meeting the requirement that only the loading / unloading linear actuator 23 moves in one direction during the loading / unloading process, thus guaranteeing processing accuracy. Furthermore, the adjustment structure 25 includes an adjustment guide rail, an adjustment slider, an adjustment slide block, an adjustment screw, an adjustment screw block, and an adjustment driver. The adjustment guide rail and the adjustment driver are both mounted on the loading and unloading linear driver 23. The adjustment slider is slidably mounted on the adjustment guide rail, and the adjustment slide block is mounted on the adjustment slider. An adjustment screw block is provided on the adjustment slide block, and the adjustment screw block is threaded onto an adjustment screw. One end of the adjustment screw is poweredly connected to the adjustment driver. This allows the adjustment driver to drive the adjustment screw to rotate before processing, which in turn drives the adjustment screw block to move axially. This, in turn, moves the adjustment slide block and guides it through the cooperation of the adjustment slider and the adjustment guide rail. This satisfies the adjustment requirements while ensuring adjustment stability, resulting in a more rational structural design.

[0032] More specifically, both the pallet linear actuator 22 and the loading / unloading linear actuator 23 include a linear carriage, a sliding seat, a sliding screw block, a sliding lead screw, and a sliding actuator. The sliding seat is slidably mounted on the linear carriage, guiding its movement and ensuring more stable motion and machining accuracy. A sliding screw block is installed on the sliding seat, enabling it to drive the sliding seat. Simultaneously, the sliding lead screw is arranged parallel to the linear carriage, with its axial direction aligned with the linear carriage's orientation. The sliding actuator is mounted at one end or side of the linear carriage and is power-connected to one end of the sliding lead screw. The sliding lead screw is also threadedly connected to the sliding screw block, so that when the sliding actuator drives the sliding lead screw to rotate, the sliding screw block moves along the axial direction of the sliding lead screw, thereby moving the sliding seat on the linear carriage. It is worth noting that the tube seat tray 21 and the tube seat suction nozzle 24 are respectively mounted on the sliding seats of the tray linear drive 22 and the loading / unloading linear drive 23, ensuring that the tube seat tray 21 and the tube seat suction nozzle 24 can be driven and reciprocate in a straight line to meet the loading / unloading requirements.

[0033] More specifically, the tube socket tray 21 is a waffle box, which is used to place tube sockets before soldering and finished tube sockets. Compared with the existing aluminum trays, it can improve the anti-static effect and reduce the impact of static electricity on semiconductor components. In addition, the regular structure of the waffle box makes it easy to pick up and place and position during the processing. At the same time, its grid structure can also firmly hold the components placed inside, preventing damage caused by vibration and collision during movement.

[0034] Figure 5 This is a structural diagram of the clamp in a preferred embodiment of the present invention. Figure 1 , Figure 3 and Figure 5 As shown, the sliding seat of the pallet linear actuator 22 is also provided with a clamp 26. The clamp 26 stably mounts the tube seat tray 21 onto the sliding seat of the pallet linear actuator 22. The clamp 26 includes a bottom bracket 261 and a support limiting frame 262. The bottom bracket 261 is fixedly mounted on the sliding seat of the pallet linear actuator 22, so that the bottom bracket 261 can move with the pallet linear actuator 22. At the same time, the support limiting frame 262 is mounted on the bottom bracket 261, and the support limiting frame 262 is provided with several placement positions 2621. Each placement position 2621 holds a tube seat tray 21. That is, the support limiting frame 262 provides support and limiting carrier for the installation of multiple tube seat trays 21 on the bottom bracket 261, ensuring that multiple tube seat trays 21 can be driven by the pallet linear actuator 22, meeting the loading and unloading requirements, and also improving the capacity to carry tube seats at one time, avoiding the problem of frequent operation.

[0035] More specifically, the bottom bracket 261 has a central clamping hole 2611, in which the support and limiting bracket 262 is installed. Furthermore, an inwardly protruding retaining edge 2612 is provided at the bottom inner edge of the central clamping hole 2611, providing bottom support for the subsequent installation of the support and limiting bracket 262 on the bottom bracket 261. Simultaneously, a notch 2613 communicating with the central clamping hole 2611 is provided on one side of the bottom bracket 261, allowing the size of the central clamping hole 2611 to be adjusted by changing the size of the notch 2613. This facilitates the installation and removal of the support and limiting bracket 262 within the central clamping hole 2611, meeting different processing requirements and resulting in a more flexible structure.

[0036] More specifically, an adjustment block 2614 is provided on the bottom bracket 261 at both ends of the notch 2613. One adjustment block 2614 has an adjustment threaded hole, and the other adjustment block 2614 has a slot 2615. One end of an adjustment screw 2616 is inserted into the slot 2615, and the other end of the adjustment screw 2616 is threaded to the adjustment threaded hole. That is, the size of the notch 2613 can be adjusted by turning the adjustment screw 2616, thereby adjusting the size of the central clamping hole 2611, making adjustment more convenient. It is worth noting that the adjusting screw 2616 is equipped with retaining rings at both ends of the slot 2615, so that the two ends of the adjusting screw 2616 can abut against the two sides of the corresponding adjusting block 2614 through the two retaining rings respectively. This allows the adjusting screw 2616 to push the corresponding adjusting block 2614 to move through the retaining ring on the corresponding side, regardless of whether the adjusting screw 2616 is turned in the forward or reverse direction, thereby meeting the usage requirements of adjusting the notch 2613 to be larger or smaller. The structural design is more reasonable.

[0037] More specifically, it also includes an ion fan 7, which is set on the workbench 1 and located next to the loading and unloading system 2. The operation of the ion fan 7 can eliminate the influence of static electricity, reduce the interference of static electricity on the eutectic bonding of semiconductor devices, and ensure production quality and equipment operation safety.

[0038] Figure 6 This is a structural diagram of the buffer assembly in a preferred embodiment of the present invention. Figure 1 , Figure 4 as well as Figure 6 As shown, the adjusting slide of the adjusting structure 25 is also equipped with a buffer assembly 27, and the tube seat suction nozzle 24 is installed on the buffer assembly 27. This allows the buffer assembly 27 to prevent excessive compression of the tube seat before welding or the finished tube seat during the loading and unloading operation of the tube seat suction nozzle 24, thus preventing product damage. At this time, the buffer assembly 27 includes a telescopic slide 271, a telescopic spring 272, and a connecting rod 273. One end of the telescopic slide 271 is installed on the adjusting slide, and the tube seat suction nozzle 24 is slidably disposed on the telescopic slide 271. One end of the tube seat suction nozzle 24 is connected to one end of the connecting rod 273, and a telescopic spring 272 is provided between the other end of the connecting rod 273 and the telescopic slide 271. This allows the tube seat suction nozzle 24 to adapt to the expansion and contraction of the telescopic spring 272 when sliding on the telescopic slide 271, achieving soft contact between the tube seat suction nozzle 24 and the tube seat and preventing compression damage.

[0039] More specifically, it also includes a front guide assembly 274 and a rear guide assembly 275, which are respectively disposed at both ends of the telescopic slide 271 to guide the tube seat nozzle 24 and the connecting rod 273, thereby improving stability during the buffering process. At this time, a telescopic hole is provided on the telescopic slide 271, and a front guide assembly 274 is provided on both ends of the telescopic slide 271 at the telescopic hole. Each front guide assembly 274 includes several front guide wheels, which are distributed circumferentially around the tube seat nozzle 24 on its outer side, confining the tube seat nozzle 24 within the space surrounded by the front guide wheels, thereby guiding the extension and retraction of the tube seat nozzle 24. In addition, the rear guide assembly 275 includes a rear guide wheel 2751 and two clamping blocks 2752. Both clamping blocks 2752 are fixed on the telescopic slide 271. The two clamping blocks 2752 are arranged in parallel and at intervals, so that a guide channel can be formed between the two clamping blocks 2752. The rear guide wheel 2751 is disposed in the guide channel between the two clamping blocks 2752. The rear guide wheel 2751 is rotatably mounted on the connecting rod 273. When the connecting rod 273 moves with the tube seat suction nozzle 24, the end of the connecting rod 273 away from the tube seat suction nozzle 24 can be guided by the rear guide wheel 2751 moving in the guide channel between the two clamping blocks 2752, thereby maintaining the stability of the tube seat suction nozzle 24 during buffering.

[0040] The efficient and accurate eutectic machine provided in this embodiment includes a loading and unloading system 2, a eutectic stage 3, a dual wafer stage 4, a chip pick-and-place control system 5, and a chip calibration system 6. By setting a positioning hole 311 on the top surface of the eutectic seat 31 of the eutectic stage 3, the tube sockets fed in are directly positioned through the positioning hole 311, achieving fast and accurate positioning. At the same time, the loading and unloading system 2 includes a loading and unloading linear driver 23 with a tube socket suction nozzle 24 set above the eutectic seat 31 and a tray linear driver 22 for placing the tube socket tray 21. Furthermore, the movement directions of the loading and unloading linear driver 23 and the tray linear driver 22 are perpendicular to each other, so that when the tube sockets are loaded, the tube socket suction nozzle 24 only moves in one direction under the action of the loading and unloading linear driver 23, without other movements superimposed, avoiding the problem of decreased accuracy caused by the superposition of movement errors. Combined with the direct positioning function of the positioning hole 311, the use of a finger suction nozzle for transfer is avoided, making the operation simpler, the processing efficiency higher, improving product precision, and ensuring product quality.

[0041] The above are merely preferred embodiments of the present utility model and are not intended to limit the implementation methods and protection scope of the present utility model. Those skilled in the art should realize that any equivalent substitutions and obvious changes made based on the description and illustrations of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A high-efficiency and accurate eutectic reactor, comprising a loading and unloading system, a eutectic stage, a dual-wafer stage, a chip pick-and-control system, and a chip calibration system, wherein the loading and unloading system, the eutectic stage, the dual-wafer stage, the chip pick-and-control system, and the chip calibration system are arranged along one direction on the worktable, characterized in that, The eutectic stage is mounted on the workbench. The eutectic stage includes a eutectic seat, a heating rod is disposed inside the eutectic seat, and a positioning hole is formed on the top surface of the eutectic seat. The loading and unloading system includes a tube seat tray, a tray linear actuator, a loading and unloading linear actuator, and a tube seat suction nozzle. The tray linear actuator is located beside the eutectic stage and performs linear reciprocating motion in one direction. The tube seat tray is mounted on the tray linear actuator. The loading and unloading linear actuator is located above the eutectic stage and is arranged perpendicular to the movement direction of the tray linear actuator. The tube seat suction nozzle is mounted on the loading and unloading linear actuator.

2. The efficient and accurate eutectic machine according to claim 1, characterized in that, It also includes an adjustment structure, which is disposed between the loading / unloading linear actuator and the tube seat nozzle. The adjustment structure includes an adjustment guide rail, an adjustment slider, an adjustment slide block, an adjustment screw, an adjustment screw block, and an adjustment actuator. The adjustment guide rail and the adjustment actuator are both mounted on the loading / unloading linear actuator. The adjustment slider is slidably disposed on the adjustment guide rail. The adjustment slide block is mounted on the adjustment slider. The adjustment slide block is provided with an adjustment screw block, which is threaded onto the adjustment screw. One end of the adjustment screw is poweredly connected to the adjustment actuator.

3. The efficient and accurate eutectic machine according to claim 1, characterized in that, Both the pallet linear actuator and the loading / unloading linear actuator include a linear carriage, a sliding seat, a sliding screw block, a sliding lead screw, and a sliding actuator. The sliding seat is slidably disposed on the linear carriage, and the sliding screw block is installed on the sliding seat. The sliding lead screw is arranged parallel to the linear carriage. The sliding actuator is installed at one end or one side of the linear carriage, and the sliding actuator is poweredly connected to one end of the sliding lead screw. The sliding lead screw is also threadedly connected to the sliding screw block. The tube seat pallet and the tube seat suction nozzle are respectively installed on the sliding seats of the pallet linear actuator and the loading / unloading linear actuator.

4. The efficient and accurate eutectic machine according to claim 1, characterized in that, The tube seat tray is a waffle box.

5. The efficient and accurate eutectic machine according to claim 4, characterized in that, It also includes a clamp, which includes a bottom bracket and a support limiting frame. The bottom bracket is fixedly installed on the tray linear drive, and the support limiting frame is installed on the bottom bracket. Furthermore, the support limiting frame is provided with several placement positions, and each placement position holds one of the tube seat trays.

6. The efficient and accurate eutectic machine according to claim 5, characterized in that, The bottom bracket has a central clamping hole, the support limiting frame is installed in the central clamping hole, and an inwardly protruding stop is provided at the bottom inner edge of the central clamping hole. At the same time, a notch communicating with the central clamping hole is provided on one side of the bottom bracket.

7. The efficient and accurate eutectic machine according to claim 6, characterized in that, Adjustment blocks are respectively provided on the bottom bracket at both ends of the notch. One adjustment block has an adjustment threaded hole, and the other adjustment block has a slot. One end of an adjustment screw is inserted into the slot, and the other end of the adjustment screw is threadedly connected to the adjustment threaded hole.

8. The efficient and accurate eutectic machine according to claim 1, characterized in that, It also includes an ion fan, which is set on the workbench and located next to the loading and unloading system.

9. The efficient and accurate eutectic machine according to claim 2, characterized in that, It also includes a buffer assembly, which is disposed on the adjusting slide of the adjusting structure. The tube seat suction nozzle is mounted on the buffer assembly. The buffer assembly includes a telescopic slide, a telescopic spring, and a connecting rod. One end of the telescopic slide is mounted on the adjusting slide, and the tube seat suction nozzle is slidably disposed on the telescopic slide. One end of the tube seat suction nozzle is connected to one end of the connecting rod, and the telescopic spring is disposed between the other end of the connecting rod and the telescopic slide.

10. The efficient and accurate eutectic machine according to claim 9, characterized in that, It also includes a front guide assembly and a rear guide assembly, which are respectively disposed at both ends of the telescopic carriage. The telescopic carriage has a telescopic hole, and the front guide assembly is disposed at both ends of the telescopic carriage and at the telescopic hole. Each front guide assembly includes a plurality of front guide wheels, which are distributed circumferentially around the outside of the tube seat suction nozzle. The rear guide assembly includes a rear guide wheel and two clamping blocks, both of which are fixed on the telescopic carriage and are arranged parallel and spaced apart. The rear guide wheel is disposed between the two clamping blocks and is rotatably mounted on the connecting rod.

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