A processing device of a gas diffusion pipe

Abstract

The utility model provides a kind of processing device of gas diffusion pipeline, it is related to pipeline processing technical field, including fixed plate, at least one set of positioning block oppositely arranged, fixed plate is equipped with calibration reference surface, at least one set of straight slot in preset straightness, and oppositely arranged rotary positioning slot, two rotary positioning slots are separately in the two ends of straight slot, and all are communicated with straight slot, calibration reference surface is configured as calibration fixed plate to preset level, two positioning blocks are respectively inserted in rotary positioning slot, and respectively connected with gas diffusion pipeline two ends, straight slot is used to keep gas diffusion pipeline in preset straightness, positioning block is used to keep gas diffusion pipeline in preset level, when positioning block rotates ninety degrees and reinserts rotary positioning slot, gas diffusion pipeline is still in preset straightness and preset level.The utility model can process micro-hole vertically arranged on gas diffusion pipeline with high precision and high efficiency.

Description

Technical Field

[0001] This utility model relates to the field of pipeline processing technology, and in particular to a processing device for gas diffusion pipelines. Background Technology

[0002] Gas diffusion lines are key components for high-precision gas delivery and diffusion, widely used in semiconductor manufacturing, photovoltaic industry, biopharmaceuticals, and other fields. These lines typically require micron-sized venting holes machined into their walls to achieve uniform gas diffusion. For example, in chemical vapor deposition (CVD) equipment, the processing quality of the micropores in the gas diffusion line (such as pore size, roundness, straightness, and perpendicularity) directly affects the uniformity of gas distribution, and consequently, the rate and uniformity of thin film deposition. Therefore, the processing accuracy and consistency of the micropores are crucial to the process outcome.

[0003] Currently, micro-holes in gas diffusion pipelines are mainly machined using CNC (Computer Numerical Control) vertical machining centers. For micro-holes with a diameter of 0.3 mm or less, multi-directional hole machining is typically achieved by using a pin gauge for assisted clamping combined with manual angle adjustment. Specifically, the operator needs to adjust the rotation angle of the pipe fitting using a pin gauge to complete the machining of micro-holes in different directions step by step.

[0004] However, due to insufficient dynamic stability of the pipe clamping and significant errors in manual adjustment, this method has the following problems when processing vertically arranged microholes: First, it is difficult to ensure perfect alignment when clamping the pipe, and the drilling path is prone to deviation, resulting in poor straightness of the microholes; Second, due to pipe skewing or vibration, the drilling position deviates from the theoretical center, forming elliptical holes or uneven hole diameters, resulting in excessive hole diameter accuracy and roundness; Third, the error is large when manually adjusting the angle with a pin gauge, requiring repeated correction, resulting in low processing efficiency, and it is impossible to guarantee the perpendicularity consistency of multiple sets of microholes. Utility Model Content

[0005] Based on this, the purpose of this utility model is to provide a processing device for gas diffusion pipelines, which aims to solve the problems of large deviation in micro-hole verticality, out-of-tolerance hole diameter roundness, and low processing efficiency in the prior art by optimizing the clamping structure and positioning method, and to provide a reliable technical solution for high-precision and high-efficiency processing of gas diffusion pipelines.

[0006] To achieve the above objectives, this utility model proposes a processing device for a gas diffusion pipeline, comprising a fixed plate, at least one set of opposing positioning blocks, a calibration reference surface, at least one set of straight grooves at a preset straightness, and opposing rotary positioning grooves. Two rotary positioning grooves are located at opposite ends of the straight grooves and are both connected to the straight grooves. The calibration reference surface is configured to calibrate the fixed plate to a preset level. The two positioning blocks are respectively inserted into the rotary positioning grooves, and the two sets of positioning blocks are respectively connected to both ends of the gas diffusion pipeline. When the positioning blocks are fully inserted into the rotary positioning grooves, the straight grooves maintain the gas diffusion pipeline at the preset straightness, and the positioning blocks maintain the gas diffusion pipeline at the preset level. When the positioning blocks are rotated 90 degrees and fully re-inserted into the rotary positioning grooves, the gas diffusion pipeline remains at the preset straightness and the preset level.

[0007] In addition, the gas diffusion pipeline processing apparatus according to the present invention may also have the following additional technical features: Furthermore, the straight groove is provided in multiple sets, and the multiple sets of straight grooves are arranged in parallel.

[0008] Furthermore, the outlines of both the rotating positioning groove and the positioning block are cubes, and the bottom of the rotating positioning groove is at the preset level.

[0009] Furthermore, the two rotating positioning slots are the same size, and the bottoms of the two rotating positioning slots are horizontally coplanar. The two positioning blocks are the same size and are both the same size as the rotating positioning slots. The two ends of the gas diffusion pipe are coaxially connected to the center of the opposite sides of the two positioning blocks, respectively.

[0010] Furthermore, the gas diffusion pipeline is detachably connected to the positioning block.

[0011] Furthermore, the positioning block includes a first clamping block and a second clamping block arranged symmetrically, the first clamping block and the second clamping block being detachably connected, and when the first clamping block and the second clamping block are closed, they form a clamping hole for clamping the gas diffusion pipeline.

[0012] Furthermore, the rotary positioning groove is provided with an opening on the side opposite to the straight groove.

[0013] Furthermore, the first clamping block and the second clamping block are connected together by fasteners.

[0014] Furthermore, the fixing plate is provided with a threaded hole, and a bolt is threaded into the threaded hole. The bolt is used to press vertically against the circumferential surface of the gas diffusion pipe when the positioning block is fully inserted into the rotating positioning groove.

[0015] Furthermore, the bottom of the fixing plate is provided with a horizontal support surface, which is arranged parallel to the calibration reference surface.

[0016] The beneficial effects of this utility model include at least the following: by cooperating with the calibration reference surface, straight groove, and rotary positioning groove on the fixed plate, the gas diffusion pipeline is ensured to maintain the preset straightness and preset levelness during the processing, avoiding problems such as excessive straightness, diameter accuracy, and roundness of the micro-holes caused by clamping misalignment or vibration, thereby improving the geometric accuracy (such as roundness and perpendicularity) and consistency of the micro-holes; at the same time, the rapid positioning function of the positioning block and straight groove eliminates the tedious steps of traditional needle gauge-assisted adjustment and repeated manual correction, realizing efficient clamping and angle switching of the gas diffusion pipeline, greatly shortening the processing cycle, and making it suitable for mass production. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the processing device for a gas diffusion pipeline in one embodiment of the present invention; Figure 2 for Figure 1 A magnified view of a section at point A in the middle; Figure 3 This is a schematic diagram of the positioning block in one embodiment of the present invention; Figure 4 This is a schematic diagram of the gas diffusion pipeline in one embodiment of the present invention; Explanation of key component symbols: Fixed plate 100, calibration reference surface 110, straight groove 120, rotary positioning groove 130, horizontal support surface 140, positioning block 200, first clamping block 210, second clamping block 220, gas diffusion pipeline 400, threaded hole 600; The following detailed description, in conjunction with the accompanying drawings, will further illustrate this utility model. Detailed Implementation

[0018] To facilitate understanding of this utility model, a more complete description will be given below with reference to the accompanying drawings. Several embodiments of this utility model are shown in the drawings. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this utility model will be more thorough and complete.

[0019] It should be noted that when a component is said to be "fixed to" another component, it can be directly on the other component or there may be an intervening component. When a component is said to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0020] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0021] Please see Figures 1 to 3 This invention provides a processing device for a gas diffusion pipeline, comprising a fixed plate 100 and at least one set of opposing positioning blocks 200. Specifically, the fixed plate 100 is provided with a calibration reference surface 110, at least one set of straight grooves 120 at a preset straightness, and opposing rotary positioning grooves 130. The two rotary positioning grooves 130 are respectively located at the left and right ends of the straight grooves 120, and both rotary positioning grooves 130 are connected to the straight grooves 120. The calibration reference surface 110 is configured to calibrate the fixed plate 100 to a preset level. For example, before use, a level is placed on the calibration reference surface 110, and by observing the level and adjusting the installation level of the fixed plate 100, the level of the calibration reference surface 110 can be kept consistent with the level of the fixed plate 100. The two positioning blocks 200 are respectively inserted into the rotary positioning grooves 130, and the two sets of positioning blocks 200 are respectively connected to both ends of the gas diffusion pipeline 400.

[0022] When the positioning block 200 is fully inserted into the rotary positioning groove 130, the dimensions of the straight groove 120 match the dimensions of the gas diffusion pipe 400, ensuring that the gas diffusion pipe 400, which is at a preset straightness, can be inserted into the straight groove 120 and stably clamped within it. Furthermore, due to the limiting effect of the side and bottom walls of the straight groove 120, the gas diffusion pipe 400 can maintain this preset straightness when processing micro-holes. The positioning blocks 200 on the left and right sides of the straight groove 120 fix the gas diffusion pipe 400, ensuring that the gas diffusion pipe 400 is at a preset horizontal level and preventing it from tilting within the straight groove 120. After the current row of micro-holes 410a is processed, when the positioning block 200 is rotated 90 degrees and fully re-inserted into the rotating positioning groove 130, the gas diffusion pipe 400, under the limiting action of the straight groove 120 and the fixing action of the positioning block 200, remains in the preset straightness and preset horizontality. At this time, the row of micro-holes 410b obtained by processing again is perpendicular to the previously processed micro-holes 410a (e.g., Figure 4 (As shown).

[0023] In some alternative embodiments, to improve processing efficiency, such as Figure 1 As shown, multiple sets of straight grooves 120 are provided, and the multiple sets of straight grooves 120 are arranged in parallel. In this embodiment, the fixing plate 100 is provided with multiple sets of parallel straight grooves 120, which can simultaneously clamp gas diffusion pipes 400 of different sizes, improve the versatility and production efficiency of the device, and meet diverse processing needs.

[0024] In some alternative embodiments, such as Figure 2 As shown, both the rotating positioning groove 130 and the positioning block 200 have cubic outlines, and the bottom of the rotating positioning groove 130 is at a preset level. In this embodiment, when the positioning block 200 is rotated 90 degrees clockwise or counterclockwise, the positioning block 200 can still be stably inserted into the rotating positioning groove 130 without displacement. Moreover, since the bottom of the rotating positioning groove 130 is at a preset level, when the positioning blocks 200 on the left and right sides of the straight groove 120 clamp the gas diffusion pipe 400 at the same horizontal height, and the positioning blocks 200 are fully inserted into the rotating positioning groove 130, the gas diffusion pipe 400 will be at a preset straightness and preset level.

[0025] In some optional embodiments, to facilitate aligning the positioning blocks 200 on both sides of the straight groove 120 with the gas diffusion pipe 400 at the same horizontal level, the two rotating positioning grooves 130 are of the same size, and their bottoms are horizontally coplanar. Correspondingly, the two positioning blocks 200 are of the same size and are identical in size to the rotating positioning grooves 130. Simultaneously, both ends of the gas diffusion pipe 400 are coaxially connected to the center of the opposite sides of the two positioning blocks 200. Thus, when the positioning blocks 200 are fully inserted into the rotating positioning grooves 130, the gas diffusion pipe 400 will be at a preset straightness and preset horizontality, requiring no additional alignment or adjustment.

[0026] In some alternative embodiments, to facilitate subsequent use of the gas diffusion line 400, such as Figure 3 As shown, the gas diffusion pipe 400 is detachably connected to the positioning block 200.

[0027] In some alternative embodiments, such as Figure 3 As shown, the positioning block 200 includes a first clamping block 210 and a second clamping block 220 symmetrically arranged. Specifically, the first clamping block 210 and the second clamping block 220 are the same size and symmetrical in shape. For example, the first clamping block 210 and the second clamping block 220 are vertically symmetrical. The first clamping block 210 and the second clamping block 220 are detachably connected. When the first clamping block 210 and the second clamping block 220 are closed, a clamping hole for clamping the gas diffusion pipe 400 is formed between the first clamping block 210 and the second clamping block 220.

[0028] In some alternative embodiments, such as Figure 3 As shown, the first clamping block 210 and the second clamping block 220 are connected together by fasteners. Optionally, aligned threaded holes 600 can be provided on the first clamping block 210 and the second clamping block 220, and bolts can be inserted into the threaded holes 600 for locking.

[0029] In this embodiment, the positioning block 200 adopts a symmetrical clamping block structure, which, together with fasteners, fixes the gas diffusion pipe 400, thus preventing loosening or displacement during the processing.

[0030] In some alternative embodiments, to facilitate the rotation of the positioning block 200, such as Figure 2 As shown, the rotating positioning groove 130 has an opening on the side opposite to the straight groove 120. This arrangement allows the positioning block 200 to be easily lifted upwards from the opening, rotated 90 degrees, and then fully inserted into the rotating positioning groove 130.

[0031] In some alternative embodiments, such as Figure 2As shown, the fixed plate 100 is provided with a threaded hole 600, and a bolt is threaded into the threaded hole 600. When the bolt is tightened until the front end of the bolt is perpendicularly pressed against the circumferential surface of the gas diffusion pipe 400, under the action of friction, the gas diffusion pipe 400 in the straight groove 120 is difficult to move in the vertical direction when processing micro-holes, thereby improving the processing accuracy and avoiding the problem of forming elliptical holes or uneven hole diameters due to the drilling position deviating from the theoretical center.

[0032] In some alternative embodiments, such as Figure 1 As shown, the bottom of the fixing plate 100 is provided with a horizontal support surface 140, which is parallel to the calibration reference surface 110. In this embodiment, the levelness of the fixing plate 100 on the worktable can be easily adjusted by adjusting the installation position of the horizontal support surface 140 on the worktable.

[0033] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0034] The above-described embodiments are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of protection of this utility model. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the scope of protection of this utility model. Therefore, the scope of protection of this utility model should be determined by the appended claims.

Claims

1. A processing apparatus for a gas diffusion pipeline, characterized in that, The processing apparatus for the gas diffusion pipeline includes: A fixed plate is provided with a calibration reference surface, at least one set of straight grooves with a preset straightness, and two oppositely arranged rotary positioning grooves. The two rotary positioning grooves are respectively located at both ends of the straight grooves and are both connected to the straight grooves. The calibration reference surface is configured to calibrate the fixed plate to a preset level. At least one set of positioning blocks arranged opposite each other, two of the positioning blocks are respectively inserted into the rotary positioning groove, and the two sets of positioning blocks are respectively connected to both ends of the gas diffusion pipeline; When the positioning block is fully inserted into the rotating positioning groove, the straight groove is used to keep the gas diffusion pipeline in the preset straightness, and the positioning block is used to keep the gas diffusion pipeline in the preset horizontality. When the positioning block is rotated 90 degrees and fully inserted back into the rotating positioning groove, the gas diffusion pipeline is still in the preset straightness and the preset horizontality.

2. The processing apparatus for the gas diffusion pipeline according to claim 1, characterized in that, The straight groove is provided in multiple sets, and the multiple sets of straight grooves are arranged in parallel.

3. The processing apparatus for the gas diffusion pipeline according to claim 2, characterized in that, Both the rotating positioning groove and the positioning block have cube-shaped outlines, and the bottom of the rotating positioning groove is at the preset level.

4. The processing apparatus for the gas diffusion pipeline according to claim 3, characterized in that, The two rotating positioning slots are the same size, and the bottoms of the two rotating positioning slots are horizontally coplanar. The two positioning blocks are the same size and are both the same size as the rotating positioning slots. The two ends of the gas diffusion pipe are coaxially connected to the center of the opposite side of the two positioning blocks, respectively.

5. The processing apparatus for a gas diffusion pipeline according to claim 4, characterized in that, The gas diffusion pipeline is detachably connected to the positioning block.

6. The processing apparatus for a gas diffusion pipeline according to claim 5, characterized in that, The positioning block includes a first clamping block and a second clamping block arranged symmetrically. The first clamping block and the second clamping block are detachably connected. When the first clamping block and the second clamping block are closed, they form a clamping hole for clamping the gas diffusion pipeline.

7. The processing apparatus for a gas diffusion pipeline according to claim 1, characterized in that, The rotary positioning groove has an opening on the side opposite to the straight groove.

8. The processing apparatus for a gas diffusion pipeline according to claim 6, characterized in that, The first clamping block and the second clamping block are connected together by fasteners.

9. The processing apparatus for a gas diffusion pipeline according to any one of claims 1 to 8, characterized in that, The fixing plate is provided with a threaded hole, and a bolt is threaded into the threaded hole. The bolt is used to press vertically against the circumferential surface of the gas diffusion pipeline when the positioning block is fully inserted into the rotating positioning groove.

10. The processing apparatus for a gas diffusion pipeline according to any one of claims 1 to 8, characterized in that, The bottom of the fixing plate is provided with a horizontal support surface, which is set parallel to the calibration reference surface.

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