A molecular pump and diffusion pump vacuum pumping system for a coating machine

Abstract

The utility model discloses a kind of molecular pump and diffusion pump vacuum pumping system for coating machine, including control valve device and pump device, control valve device includes valve body assembly and valve core assembly, valve body assembly includes vacuum valve cavity, vacuum valve cavity includes valve core assembly includes valve core piece and driving mechanism, one end of valve core piece and the cavity wall between vacuum valve cavity form first chamber, the other end and the cavity wall between vacuum valve cavity form second chamber, main vacuum port is communicated with first chamber, sub vacuum port is communicated with second chamber;In the initial stage of vacuumizing, the vacuum coating chamber is rapidly vacuumized by second chamber, energy-saving effect is played, vacuumizing time is shortened, production efficiency is improved, and the utility model can realize the control of multiple pump bodies by driving mechanism driving valve core piece, reduce the number of power source, reduce the cost of manufacture, and valve core piece is placed horizontally, reduce the height of the connecting position of connecting load vacuum chamber.

Description

Technical Field

[0001] This utility model relates to the field of vacuum technology for coating, and in particular to a vacuum system for a molecular pump and diffusion pump used in a coating machine. Background Technology

[0002] Currently, multiple molecular pumps or diffusion pumps are generally used to evacuate the vacuum coating chamber of a vacuum coating machine. Each pump is connected to the vacuum chamber via a one-to-one high-vacuum baffle valve, meaning each pump needs to be equipped with a high-vacuum baffle valve. During operation, the corresponding high-vacuum baffle valve is opened according to the required vacuum level, allowing the corresponding pump to evacuate. Setting up multiple high-vacuum baffles increases the equipment cost of the vacuum coating machine, and the current technology is slow in the initial evacuation stage of the vacuum coating chamber. Utility Model Content The purpose of this invention is to provide a vacuum system for a molecular pump and diffusion pump used in a coating machine, so as to solve one or more technical problems existing in the prior art, and at least provide a beneficial option or create conditions.

[0003] The technical solution adopted to solve the above-mentioned technical problems is as follows: This utility model provides a vacuum system for a molecular pump and diffusion pump used in a coating machine, comprising: A control valve device includes a valve body assembly and a valve core assembly. The valve body assembly includes a vacuum valve chamber, which has a main vacuum port and multiple sub-vacuum ports. The valve core assembly includes a valve core component disposed within the vacuum valve chamber and a drive mechanism pulsatingly connected to the valve core component. One end of the valve core component forms a first chamber with the cavity wall of the vacuum valve chamber, and the other end forms a second chamber with the cavity wall of the vacuum valve chamber. The main vacuum port communicates with the first chamber, and the sub-vacuum ports communicate with the second chamber. The drive mechanism is used to drive the valve core component to isolate and connect the first chamber and the second chamber. The pump device includes multiple pump bodies, each of which is connected to multiple sub-vacuum ports.

[0004] The beneficial effects of the molecular pump and diffusion pump vacuum system of this invention are: In use, the main vacuum port is connected to the vacuum coating chamber. When the vacuum coating chamber needs to be evacuated, the pump body is started in advance to pre-evacuate the first chamber. Then, the valve core is controlled to connect the first chamber and the second chamber, so that the vacuum coating chamber, the main vacuum port, the first chamber and the second chamber are connected in sequence. In the initial stage of evacuation, the vacuum coating chamber is quickly evacuated through the second chamber, thereby improving the efficiency of evacuation. Furthermore, this invention can control multiple pump bodies by driving the valve core through the drive mechanism, reducing the number of power sources and thus reducing manufacturing costs.

[0005] As a further improvement to the above technical solution, the vacuum port and the plurality of sub-vacuum ports are spaced apart along the first direction on the cavity wall of the vacuum valve chamber. The driving mechanism drives the valve core to move along the first direction. The valve core has a first position and a second position. When the valve core is in the first position, the first chamber and the second chamber are isolated. When the valve core is in the second position, the first chamber and the second chamber are connected.

[0006] As a further improvement to the above technical solution, the vacuum valve cavity includes a first cavity segment and a second cavity segment connected sequentially along the first direction. A plurality of sub-vacuum ports are disposed in the first cavity segment, and the main vacuum port is disposed in the second cavity segment. The cross-sectional area of ​​the second cavity segment is larger than that of the first cavity segment. When the valve core is in the first position, the valve core is sealed at the port of the first cavity segment near the second cavity segment. When the valve core is in the second position, the valve core is away from the first cavity segment and located in the second cavity segment. A flow gap is formed between the peripheral edge of the valve core and the inner peripheral wall of the second cavity segment, and the flow gap is used to connect the first cavity segment and the second cavity segment.

[0007] As a further improvement to the above technical solution, a sealing ring is provided around the periphery of the valve core, and the sealing ring is in sealing contact with the port of the first cavity near the second cavity.

[0008] As a further improvement to the above technical solution, the outer wall of the first cavity section is provided with multiple reinforcing ribs.

[0009] As a further improvement to the above technical solution, the first cavity segment and the second cavity segment are detachably connected.

[0010] As a further improvement to the above technical solution, the diameter of the main vacuum port is larger than the diameter of the sub-vacuum port.

[0011] As a further improvement to the above technical solution, a flange ring is installed at the main vacuum port.

[0012] As a further improvement to the above technical solution, the drive mechanism is installed at one end of the vacuum valve chamber along the first direction.

[0013] As a further improvement to the above technical solution, the driving mechanism includes a linear driving structure, which has a telescopic driving end connected to the valve core.

[0014] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. Attached Figure Description

[0015] The present invention will be further described below with reference to the accompanying drawings and embodiments; Figure 1 This is a cross-sectional view of the valve core component in the first position of one embodiment of the molecular pump and diffusion pump vacuum system provided by this utility model. Figure 2 This is a cross-sectional view of the valve core of the molecular pump and diffusion pump vacuum system provided by this utility model when it is in the second position. Figure 3 This is a schematic diagram of an embodiment of the molecular pump and diffusion pump vacuum system provided by this utility model; Icon labels: Control valve device 100; valve body assembly 110; valve core assembly 120; valve core element 121; sliding seal ring 1211; drive mechanism 122; vacuum valve chamber 130; main vacuum port 131; flange ring 1311; sub-vacuum port 132; first chamber section 133; second chamber section 134; first chamber 140; second chamber 150; flow clearance 160; Pump assembly 200; pump body 210. Detailed Implementation

[0016] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0017] In the description of this utility model, it should be understood that the orientation descriptions, such as up, down, etc., are based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0018] In the description of this utility model, "multiple" refers to two or more. The use of "first" and "second" is for distinguishing technical features only and should not be construed as indicating or implying relative importance, or implicitly indicating the number of technical features or their sequential relationship.

[0019] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0020] The technical solution of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described below are some embodiments of this utility model, not all embodiments.

[0021] Since each molecular pump currently requires a high-vacuum baffle valve for use, and multiple molecular pumps require multiple high-vacuum baffles, setting up multiple high-vacuum baffles increases the equipment cost of the vacuum coating machine. This utility model proposes a vacuum system for molecular pumps and diffusion pumps in a coating machine, which can realize the control function of multiple high-vacuum baffles through a single power source, greatly reducing equipment costs.

[0022] Reference Figures 1 to 3 As shown, the molecular pump and diffusion pump vacuum system of this utility model includes a control valve device 100 and a pump device 200, and the pump device 200 includes multiple pump bodies 210.

[0023] The control valve device 100 includes a valve body assembly 110 and a valve core assembly 120. The valve body assembly 110 includes a vacuum valve chamber 130, which is made of steel plate and has good pressure resistance and can withstand a certain vacuum pressure.

[0024] In this embodiment, the vacuum valve cavity 130 is provided with a main vacuum port 131 and a plurality of sub-vacuum ports 132. The main vacuum port 131 and the plurality of sub-vacuum ports 132 are sequentially spaced along a first direction on the cavity wall of the vacuum valve cavity 130. In this embodiment, the first direction is defined as the left-right direction. It can be understood that the main vacuum port 131 and the plurality of sub-vacuum ports 132 are sequentially spaced from left to right. In some other embodiments, the first direction can be set to other directions, such as the up-down direction or the front-back direction.

[0025] The main vacuum port 131 is used to connect to the vacuum coating chamber, while multiple sub-vacuum ports 132 are respectively connected to the inlets of multiple pump bodies 210. The pump bodies 210 are connected to the vacuum coating chamber through the vacuum valve chamber 130.

[0026] The valve core assembly 120 of this embodiment includes a valve core 121 disposed in a vacuum valve chamber 130 and a drive mechanism 122 pulsatingly connected to the valve core 121. A first chamber 140 is formed between the end of the valve core 121 close to the main vacuum port 131 along a first direction and the cavity wall of the vacuum valve chamber 130. A second chamber 150 is formed between the end of the valve core 121 opposite to the first chamber 140 and the cavity wall of the vacuum valve chamber 130. It can be understood that the second chamber 150 is formed between the right end of the valve core 121 and the vacuum valve chamber 130, and the first chamber 140 is formed between the left end of the valve core 121 and the vacuum valve chamber 130. The main vacuum port 131 is connected to the first chamber 140, and a plurality of sub-vacuum ports 132 are connected to the second chamber 150.

[0027] The drive mechanism 122 is used to drive the valve core 121 to isolate and connect the first chamber 140 and the second chamber 150. When the first chamber 140 and the second chamber 150 are connected, multiple sub-vacuum ports 132 are connected to the main vacuum port 131. When the first chamber 140 and the second chamber 150 are isolated, multiple sub-vacuum ports 132 are disconnected from the main vacuum port 131.

[0028] When it is necessary to evacuate the vacuum coating chamber, the pump body 210 is started in advance to pre-evacuate the second chamber 150. Then, the control valve core 121 connects the first chamber 140 and the second chamber 150, so that the vacuum coating chamber, the main vacuum port 131, the first chamber 140, and the second chamber 150 are connected in sequence. In the initial stage of evacuation, the second chamber 150 is used to quickly evacuate the vacuum coating chamber, thereby improving the efficiency of evacuation. Furthermore, this invention can control multiple pump bodies 210 by driving the valve core 121 through the drive mechanism 122, reducing the number of power sources and thus reducing manufacturing costs.

[0029] It is understandable that before the valve core 121 is opened, the second chamber 150 is in a high vacuum state, which serves as a pre-vacuum storage state, saving energy, shortening the vacuuming time, and improving production efficiency.

[0030] In this embodiment, the first chamber 140 remains connected to the main vacuum port 131 in any operating mode.

[0031] In this embodiment, the driving mechanism 122 is used to drive the valve core 121 to move in the left-right direction. Along the movement path of the valve core 121, the valve core 121 has a second position and a first position spaced apart in the left-right direction, such as... Figure 1 As shown, when the valve core 121 is in the first position, the first chamber 140 and the second chamber 150 are separated, as... Figure 2 As shown, when the valve core 121 is in the second position, the first chamber 140 is connected to the second chamber 150.

[0032] Before starting the coating machine, the vacuum coating chamber needs to be quickly evacuated. The valve core 121 can be pre-controlled to move to the first position. At this time, the second chamber 150 is a sealed chamber. The pump body 210 evacuates the second chamber 150 to store the vacuum energy. Then, the valve core 121 is controlled to move to the first position to connect the second chamber 150 with the main vacuum port 131 to achieve rapid evacuation of the vacuum coating chamber. In this process, the vacuum in the second chamber 150 is mainly transferred to the vacuum coating chamber to rapidly increase the vacuum level inside the vacuum coating chamber.

[0033] like Figures 1 to 3 As shown, the vacuum valve chamber 130 of this embodiment includes a first chamber segment 133 and a second chamber segment 134 connected sequentially in the left-right direction. The first chamber segment 133 and the second chamber segment 134 of this embodiment also extend in the left-right direction. A plurality of sub-vacuum ports 132 are provided on the inner peripheral wall of the first chamber segment 133, and the main vacuum port 131 is provided on the second chamber segment 134. The four edges of the valve core 121 are sealed and abutted against the port of the first chamber segment 133 near the second chamber segment 134.

[0034] In this case, the cross-sectional area of ​​the second cavity segment 134 is larger than the cross-sectional area of ​​the first cavity segment 133, such as... Figure 2 As shown, when the valve core 121 moves to the second chamber 134, a flow gap 160 is formed between the four edges of the valve core 121 and the inner peripheral wall of the second chamber 134. The flow gap 160 is used to connect the first chamber 140 and the second chamber 150, which can improve the efficiency of vacuuming the vacuum coating chamber.

[0035] Among them, the valve core 121 is provided with a sealing ring 1211 around its periphery, and the valve core 121 is sealed and abutted against the first cavity section 133 through the sealing ring 1211.

[0036] Since vacuum energy storage mainly occurs within the first cavity 133 during the startup phase, in order to improve the compressive strength of the first cavity 133, such as... Figure 3 As shown, the outer wall of the first cavity 133 in this embodiment is provided with multiple reinforcing ribs.

[0037] In this embodiment, the first cavity segment 133 and the second cavity segment 134 are detachably connected to facilitate manufacturing.

[0038] In this embodiment, the diameter of the main vacuum port 131 is larger than the diameter of the sub-vacuum port 132 to improve the vacuuming efficiency.

[0039] like Figure 3 As shown, in this embodiment, the main vacuum port 131 is equipped with a flange ring 1311, and the main vacuum port 131 is connected to the pipeline of the vacuum coating chamber through the flange ring 1311.

[0040] To make the system layout more reasonable, the drive mechanism 122 in this embodiment is installed at one end of the vacuum valve chamber 130 in the left-right direction. Specifically, the drive mechanism 122 is installed at the left end of the vacuum valve chamber 130. It can be understood that the valve core 121 is placed horizontally, which reduces the connection position height of the connection to the load vacuum chamber.

[0041] The drive mechanism 122 includes a linear drive structure, which has a telescopic drive end connected to the valve core 121. The linear drive structure can be an electric rod, a cylinder, a hydraulic cylinder, etc.

[0042] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0043] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. A vacuum system for a molecular pump and diffusion pump used in a coating machine, characterized in that, include: A control valve device includes a valve body assembly and a valve core assembly. The valve body assembly includes a vacuum valve chamber, which has a main vacuum port and multiple sub-vacuum ports. The valve core assembly includes a valve core component disposed within the vacuum valve chamber and a drive mechanism pulsatingly connected to the valve core component. One end of the valve core component forms a first chamber with the cavity wall of the vacuum valve chamber, and the other end forms a second chamber with the cavity wall of the vacuum valve chamber. The main vacuum port communicates with the first chamber, and the sub-vacuum ports communicate with the second chamber. The drive mechanism is used to drive the valve core component to isolate and connect the first chamber and the second chamber. The pump device includes multiple pump bodies, each of which is connected to multiple sub-vacuum ports.

2. The vacuum pumping system for molecular pumps and diffusion pumps according to claim 1, characterized in that: The vacuum port and the plurality of sub-vacuum ports are spaced apart along the first direction on the cavity wall of the vacuum valve chamber. The driving mechanism drives the valve core to move along the first direction. The valve core has a first position and a second position. When the valve core is in the first position, the first chamber and the second chamber are isolated. When the valve core is in the second position, the first chamber and the second chamber are connected.

3. The vacuum pumping system for molecular pumps and diffusion pumps according to claim 2, characterized in that: The vacuum valve chamber includes a first cavity segment and a second cavity segment connected sequentially along the first direction. A plurality of sub-vacuum ports are disposed in the first cavity segment, and the main vacuum port is disposed in the second cavity segment. The cross-sectional area of ​​the second cavity segment is larger than that of the first cavity segment. When the valve core is in the first position, the valve core is sealed at the port of the first cavity segment near the second cavity segment. When the valve core is in the second position, the valve core is away from the first cavity segment and located in the second cavity segment. A flow gap is formed between the four edges of the valve core and the inner peripheral wall of the second cavity segment. The flow gap is used to connect the first cavity segment and the second cavity segment.

4. The vacuum pumping system for molecular pumps and diffusion pumps according to claim 3, characterized in that: The valve core is provided with a sealing ring around its perimeter, and the sealing ring is in sealing contact with the port of the first cavity near the second cavity.

5. The vacuum pumping system for molecular pumps and diffusion pumps according to claim 3, characterized in that: The outer wall of the first cavity section is provided with multiple reinforcing ribs.

6. The vacuum pumping system for molecular pumps and diffusion pumps according to claim 3, characterized in that: The first cavity segment and the second cavity segment are detachably connected.

7. The vacuum pumping system for molecular pumps and diffusion pumps according to claim 1, characterized in that: The diameter of the main vacuum port is larger than the diameter of the sub-vacuum port.

8. The vacuum pumping system for molecular pumps and diffusion pumps according to claim 1, characterized in that: The main vacuum port is equipped with a flange ring.

9. The vacuum pumping system for molecular pumps and diffusion pumps according to claim 2, characterized in that: The drive mechanism is installed at one end of the vacuum valve chamber along the first direction.

10. The vacuum pumping system for molecular pumps and diffusion pumps according to claim 9, characterized in that: The drive mechanism includes a linear drive structure, which has a telescopic drive end connected to the valve core.

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