Crystal ingot graphite paper cleaning device

Abstract

The utility model embodiment provides crystal ingot graphite paper cleaning device relates to crystal ingot graphite paper cleaning technical field. A kind of crystal ingot graphite paper cleaning device includes cylinder, cover and scraper. Cylinder is used to place silicon carbide crystal ingot, cover is set in cylinder, the end plate of cover is equipped with sliding slot, end plate is opposite to the bottom plate of cylinder, sliding slot is along axial direction and penetrates end plate, sliding slot is helical and by the middle part of end plate extends to the outer periphery of end plate, scraper includes sliding column and tool, sliding column is located in sliding slot and can slide in sliding slot, sliding column is equipped with the mounting hole that penetrates along its own axial direction, one end of tool is connected with sliding column, and tool is inserted into mounting hole to be used for the graphite paper of silicon carbide crystal ingot abuts. Operating personnel in the process of driving sliding column to move, tool will be limited in helical sliding slot, therefore, tool can greatly avoid scratching operating personnel, to improve the safety of cleaning graphite paper on silicon carbide crystal ingot.

Description

Technical Field

[0001] This utility model relates to the field of crystal ingot graphite paper cleaning technology, and more specifically, to a crystal ingot graphite paper cleaning device. Background Technology

[0002] Silicon carbide (SiC), as an emerging core material for third-generation semiconductors, possesses excellent properties such as a wide bandgap, high critical breakdown electric field strength, high electron mobility, and good radiation resistance and chemical stability. This makes it an important substrate wafer material with wide applications and shows promising application prospects in fields such as aerospace devices, new energy vehicles, rail transportation, and home appliances.

[0003] To facilitate subsequent processing of the ingots, the graphite paper on the ingots needs to be cleaned after silicon carbide crystal growth. Currently, the main method for removing the graphite paper from the ingots is to use a handheld blade to scrape it off. However, during the manual scraping process, the blade is not restrained and can easily cut people, posing a safety hazard. Utility Model Content

[0004] The purpose of this utility model is to provide a crystal ingot graphite paper cleaning device, which can limit the cutting tool during the process of hanging out the graphite paper, avoid the cutting tool from easily cutting personnel, and improve the safety when scraping graphite paper.

[0005] The embodiments of this utility model can be implemented as follows: In a first aspect, this utility model provides a crystal ingot graphite paper cleaning device, comprising: The cylindrical body is used to hold silicon carbide ingots; The cover is placed on the cylinder. The end plate of the cover has a groove. The end plate is opposite to the bottom plate of the cylinder. The groove passes through the end plate axially. The groove is spiral and extends from the middle of the end plate to the outer periphery of the end plate. The scraper includes a sliding column and a cutting tool. The sliding column is located in a groove and can slide in the groove. The sliding column has a mounting hole that passes through it along its own axis. One end of the cutting tool is connected to the sliding column and extends into the mounting hole to abut against the graphite paper of the silicon carbide ingot.

[0006] In an optional embodiment, the groove wall is a curved wall, and the outer peripheral wall of the sliding column is a curved wall adapted to the groove wall.

[0007] In an optional embodiment, a mounting seat is provided at the end of the sliding column away from the cylinder. The mounting seat has a mounting slope. In the direction close to the sliding column, the distance between the mounting slope and the mounting hole gradually decreases. One side of the cutter along its own thickness direction is in contact with the mounting slope and is fixedly connected to the mounting slope.

[0008] In an optional embodiment, the end of the tool away from the mounting bevel extends out of the mounting hole, or the end of the tool away from the mounting bevel is flush with the lower end face of the mounting hole.

[0009] In an optional implementation, the tool is detachably connected to the mounting base.

[0010] In an alternative implementation, the tool and the mounting base are connected by threaded fasteners.

[0011] In an optional embodiment, the axis of the mounting hole is parallel to and spaced apart from the axis of the sliding column, and the mounting base is located on the side of the sliding column whose axis is away from the axis of the mounting hole.

[0012] In an optional embodiment, a handle is provided on the outer peripheral wall of the sliding column.

[0013] In an optional embodiment, the cylinder includes a bottom plate and a surrounding plate. The surrounding plate is arranged around the outer periphery of the bottom plate, and a limiting part is protruding on the inner side of the surrounding plate. The limiting part is arranged circumferentially around the surrounding plate and is used to abut against the outer peripheral wall of the silicon carbide ingot.

[0014] In an optional embodiment, the number of limiting parts is four, and the four limiting parts are evenly spaced around the circumference of the surrounding plate.

[0015] The beneficial effects provided by this utility model embodiment include: A silicon carbide ingot graphite paper cleaning device provided by this utility model embodiment includes a cylinder, a cover, and a scraper. The cylinder is used to hold silicon carbide ingots, and the cover is placed on the cylinder. The end plate of the cover has a groove, and the end plate is opposite to the bottom plate of the cylinder. The groove extends axially through the end plate, is spiral-shaped, and extends from the middle of the end plate to its outer periphery. The scraper includes a sliding column and a cutting tool. The sliding column is located within the groove and can slide within it. The sliding column has a mounting hole extending along its own axis. One end of the cutting tool is connected to the sliding column, and the cutting tool extends into the mounting hole to abut against the graphite paper on the silicon carbide ingot. During the operation of the operator moving the sliding column, the cutting tool is confined within the spiral groove, thus greatly preventing the cutting tool from scratching the operator and improving the safety of cleaning graphite paper from silicon carbide ingots. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a top-view exploded view of the ingot graphite paper cleaning device provided in this embodiment; Figure 2 This is a schematic diagram of the scraper provided in this embodiment.

[0018] Icons: 1-Ingot graphite paper cleaning device; 100-Cylinder; 110-Base plate; 120-Enclosure plate; 121-Limiting part; 200-Cover; 210-End plate; 220-Slide groove; 300-Scraper; 310-Sliding column; 311-Mounting base; 312-Mounting inclined surface; 313-Mounting hole; 314-Handle; 320-Cut tool; 2-Silicon carbide ingot. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0021] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0022] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0023] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0024] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0025] The following describes in detail, with reference to the accompanying drawings, the specific structure of a crystal ingot graphite paper cleaning device provided by this utility model and its corresponding technical effects.

[0026] Please refer to Figures 1-2 The present invention provides a silicon carbide ingot graphite paper cleaning device 1, comprising a cylindrical body 100, a cover 200, and a scraper 300. The cylindrical body 100 is used to place silicon carbide ingots 2. The cover 200 covers the cylindrical body 100. The end plate 210 of the cover 200 has a groove 220. The end plate 210 is opposite to the bottom plate 110 of the cylindrical body 100. The groove 220 passes through the end plate 210 axially. The groove 220 is spiral and extends from the middle of the end plate 210 to the outer periphery of the end plate 210. The scraper 300 includes a sliding column 310 and a cutting tool 320. The sliding column 310 is located in the groove 220 and can slide in the groove 220. The sliding column 310 has a mounting hole 313 that passes through it along its own axis. One end of the cutting tool 320 is connected to the sliding column 310 and the cutting tool 320 extends into the mounting hole 313 for the graphite paper of the silicon carbide ingot 2 to abut against it.

[0027] Understandably, when it is necessary to clean the graphite paper on the silicon carbide ingot 2, the silicon carbide ingot 2 can be placed in the cylinder 100 with the graphite paper facing upwards, and the cover 200 can be placed on the cylinder 100. The operator can drive the sliding column 310 to slide in the spiral groove 220, and the scraper 300 can slide from the middle of the spiral groove to the outer periphery. During the sliding process, the blade 320 of the scraper 300 can scrape off most of the graphite paper on the silicon carbide ingot 2.

[0028] As the operator moves the sliding column 310, the cutter 320 is confined within the spiral groove 220. This greatly reduces the risk of the cutter 320 scratching the operator, thus improving the safety of cleaning the graphite paper on the silicon carbide ingot 2.

[0029] In detail, in this embodiment, the groove wall of the slide 220 is a curved wall, and the outer peripheral wall of the sliding column 310 is a curved wall adapted to the groove wall of the slide 220. It can be understood that since both the outer peripheral wall of the sliding column 310 and the groove wall of the slide 220 are curved walls, the fit between the sliding column 310 and the groove wall of the slide 220 can be improved, thereby reducing the dead angles in the process of sliding to scrape off the graphite paper by the cutter 320.

[0030] A mounting base 311 is provided at one end of the sliding column 310 away from the cylinder 100. The mounting base 311 has a mounting inclined surface 312. In the direction close to the sliding column 310, the distance between the mounting inclined surface 312 and the mounting hole 313 gradually decreases. One side of the cutter 320 along its own thickness direction is in contact with the mounting inclined surface 312 and is fixedly connected to the mounting inclined surface 312.

[0031] The angled blade acts like a shovel, making it easier to insert into the tiny gaps between the graphite paper and the crystal ingot, achieving a "pry-peel" effect rather than forcefully scraping. Furthermore, the angle helps convert some of the vertical pressure into horizontal peeling force, reducing direct frictional damage to the crystal ingot surface.

[0032] Furthermore, one side of the cutter 320 is attached to the mounting slope 312, thereby ensuring that the cutter 320 is set at an angle, thereby increasing the service life of the cutter 320 and making it less likely to be damaged during the process of scraping graphite paper.

[0033] Optionally, in some embodiments, the end of the tool 320 away from the mounting bevel 312 extends out of the mounting hole 313. It should be noted that this end of the tool 320 may slightly extend out of the mounting hole 313, which can be adjusted according to the thickness of the graphite paper. It should also be noted that the length of the tool 320 extending out of the mounting hole 313 should not be too great to avoid damaging the surface of the silicon carbide ingot 2. Alternatively, the end of the tool 320 away from the mounting bevel 312 may be flush with the lower end face of the mounting hole 313.

[0034] Understandably, the tool 320 is mostly located inside the mounting hole 313, with only the exposed portion abutting against the graphite paper of the silicon carbide ingot 2. The mounting hole 313 can protect the tool 320 from being bumped or damaged when not in operation or during movement.

[0035] In order to facilitate the replacement of the cutting tool 320, in this embodiment, the cutting tool 320 is detachably connected to the mounting base 311, thereby making it convenient for operators to replace the damaged cutting tool 320 or to replace it with a different type of cutting tool 320.

[0036] Of course, in some other embodiments, the blade 320 in the scraper 300 can also be non-detachably connected to the mounting base 311, for example, the blade 320 is welded to the mounting base 311.

[0037] In detail, in this embodiment, the cutting tool 320 and the mounting base 311 can be connected by threaded fasteners. It is understood that the connection between the cutting tool 320 and the mounting base 311 by threaded fasteners can ensure the connection strength between the cutting tool 320 and the mounting base 311, and can also facilitate the operator to replace the cutting tool 320.

[0038] Of course, in some other alternative embodiments, the tool 320 can also be connected to the mounting base 311 by other connecting components such as pins.

[0039] Optionally, the axis of the mounting hole 313 is parallel to and spaced apart from the axis of the sliding column 310. That is, the mounting hole 313 is eccentrically set on the sliding column 310, and the mounting seat 311 is located on the side of the axis of the sliding column 310 away from the axis of the mounting hole 313. This ensures that the mounting seat 311 has a large installation area, which facilitates the installation of the mounting seat 311. It should be noted that the mounting seat 311 on the sliding column 310 can be integrally formed with the sliding column 310.

[0040] To facilitate the movement of the sliding column 310 within the chute 220 by operators, a handle 314 is provided on the outer peripheral wall of the sliding column 310. The number of handles 314 can be one or more.

[0041] In this embodiment, "multiple" can be understood as two or more. In this embodiment, there are two handles 314, which are arranged at intervals along the circumference of the sliding column 310.

[0042] Optionally, the cylindrical body 100 in this embodiment includes a bottom plate 110 and a surrounding plate 120. The surrounding plate 120 is arranged around the outer periphery of the bottom plate 110. A limiting part 121 is protruding on the inner side of the surrounding plate 120. The limiting part 121 is arranged circumferentially around the surrounding plate 120 and is used to abut against the outer peripheral wall of the silicon carbide ingot 2.

[0043] Understandably, by setting the limiting part 121, the silicon carbide ingot 2 can be stably installed inside the cylinder 100, preventing the silicon carbide ingot 2 from easily shaking inside the cylinder 100 and affecting the graphite paper removal efficiency on the silicon carbide ingot 2.

[0044] Understandably, the limiting part 121 can be made of a flexible material to prevent the limiting part 121 from damaging the outer wall of the silicon carbide ingot 2 when it comes into contact with the silicon carbide ingot 2.

[0045] In this embodiment, there are four limiting parts 121, which are evenly spaced around the circumference of the surrounding plate 120. This arrangement ensures that the force on the outer wall of the silicon carbide ingot 2 is relatively uniform, preventing the silicon carbide ingot 2 from easily shaking inside the cylinder 100.

[0046] In summary, the silicon carbide ingot graphite paper cleaning device 1 provided by this utility model embodiment includes a cylindrical body 100, a cover body 200, and a scraper 300. The cylindrical body 100 is used to place the silicon carbide ingot 2. The cover body 200 covers the cylindrical body 100. The end plate 210 of the cover body 200 has a sliding groove 220. The end plate 210 is opposite to the bottom plate 110 of the cylindrical body 100. The sliding groove 220 penetrates the end plate 210 axially. The sliding groove 220 is spiral and extends from the middle of the end plate 210 to the outer periphery of the end plate 210. The scraper 300 includes a sliding column 310 and a cutting tool 320. The sliding column 310 is located in the sliding groove 220 and can slide in the sliding groove 220. The sliding column 310 has a mounting hole 313 that penetrates along its own axis. One end of the cutting tool 320 is connected to the sliding column 310, and the cutting tool 320 extends into the mounting hole 313 for the graphite paper of the silicon carbide ingot 2 to abut against it. As the operator moves the sliding column 310, the cutter 320 is confined within the spiral groove 220. This greatly reduces the risk of the cutter 320 scratching the operator, thus improving the safety of cleaning the graphite paper on the silicon carbide ingot 2.

[0047] The above description is only a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A crystal ingot graphite paper cleaning device, characterized in that, include: A cylindrical body (100) is used to hold a silicon carbide ingot (2). A cover (200) is provided on the cylinder (100). The end plate (210) of the cover (200) is provided with a groove (220). The end plate (210) is opposite to the bottom plate (110) of the cylinder (100). The groove (220) passes through the end plate (210) axially. The groove (220) is spiral and extends from the middle of the end plate (210) to the outer periphery of the end plate (210). The scraper (300) includes a sliding column (310) and a cutting tool (320). The sliding column (310) is located in the groove (220) and can slide in the groove (220). The sliding column (310) has a mounting hole (313) that passes through itself along its own axis. One end of the cutting tool (320) is connected to the sliding column (310), and the cutting tool (320) extends into the mounting hole (313) to abut against the graphite paper of the silicon carbide ingot (2).

2. The crystal ingot graphite paper cleaning device according to claim 1, characterized in that: The groove (220) has a curved wall, and the outer peripheral wall of the sliding column (310) is a curved wall that is adapted to the groove (220).

3. The crystal ingot graphite paper cleaning device according to claim 1, characterized in that: A mounting base (311) is provided at one end of the sliding column (310) away from the cylinder (100). The mounting base (311) has a mounting inclined surface (312). In the direction close to the sliding column (310), the distance between the mounting inclined surface (312) and the mounting hole (313) gradually decreases. One side of the cutter (320) along its own thickness direction is in contact with the mounting inclined surface (312) and is fixedly connected to the mounting inclined surface (312).

4. The crystal ingot graphite paper cleaning device according to claim 3, characterized in that: The end of the cutting tool (320) away from the mounting slope (312) extends out of the mounting hole (313), or the end of the cutting tool (320) away from the mounting slope (312) is flush with the lower end face of the mounting hole (313).

5. The crystal ingot graphite paper cleaning device according to claim 3, characterized in that: The cutting tool (320) is detachably connected to the mounting base (311).

6. The crystal ingot graphite paper cleaning device according to claim 5, characterized in that: The cutting tool (320) is connected to the mounting base (311) by threaded fasteners.

7. The crystal ingot graphite paper cleaning device according to claim 3, characterized in that: The axis of the mounting hole (313) is parallel to and spaced apart from the axis of the sliding column (310), and the mounting base (311) is located on the side of the axis of the sliding column (310) away from the axis of the mounting hole (313).

8. The crystal ingot graphite paper cleaning device according to claim 1, characterized in that: The outer peripheral wall of the sliding column (310) is provided with a handle (314).

9. The crystal ingot graphite paper cleaning device according to claim 1, characterized in that: The cylindrical body (100) includes a bottom plate (110) and a surrounding plate (120). The surrounding plate (120) is arranged around the outer periphery of the bottom plate (110). A limiting part (121) is protruding on the inner side of the surrounding plate (120). The limiting part (121) is arranged circumferentially around the surrounding plate (120). The limiting part (121) is used to abut against the outer peripheral wall of the silicon carbide ingot (2).

10. The crystal ingot graphite paper cleaning device according to claim 9, characterized in that: The number of the limiting parts (121) is four, and the four limiting parts (121) are evenly spaced around the perimeter of the enclosure (120).

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