An argon analysis system

Abstract

The utility model provides a kind of argon analysis system, the purpose is to solve the technical problem that argon is diluted after being used as protective gas in prior art, and traditional processing mode is difficult to make recycled gas to reach use standard again.The argon analysis system includes: main pipeline, with the analyzer cabinet body connection in argon factory area;Multiple trace oxygen analyzers, are located on the main pipeline, and are distributed along the laying path of the main pipeline;Recycling pipeline, in communication with the main pipeline;Wherein, CO analyzer, CO2 analyzer, argon nitrogen analyzer, zirconia analyzer, hydrogen analyzer are also provided on the main pipeline.Argon analysis system sets trace oxygen analyzer, CO analyzer, CO2 analyzer, argon nitrogen analyzer, zirconia analyzer and hydrogen analyzer and other instruments on the main pipeline conveying argon, analyzes the composition in argon, then makes sufficient preparation for subsequent processing, so that recycled argon can be utilized again.

Description

Technical Field

[0001] This utility model relates to a gas analysis system, specifically an argon gas analysis system. Background Technology

[0002] As a core material for semiconductor devices and the photovoltaic industry, monocrystalline silicon requires extremely high purity of process gases during its production. In the widely adopted Czochralski method for monocrystalline silicon production, high-purity argon gas is widely used as a key protective gas in the crystal growth furnace due to its excellent chemical inertness. Its main function is to isolate air during the high-temperature melting and crystal pulling processes, preventing the silicon melt and the growing crystal from being contaminated and oxidized by impurities such as oxygen and nitrogen, thereby ensuring the purity, integrity, and electrical properties of the final monocrystalline silicon product.

[0003] However, current processes present significant technical challenges after the use of argon: the used process exhaust inevitably comes into contact with outside air (e.g., during exhaust, collection, or transfer), leading to a significant change in the exhaust gas composition—high-value argon is heavily diluted, while the proportion of air components such as nitrogen and oxygen increases significantly. Traditional recycling methods simply remove the high-content gases like oxygen and nitrogen from the recovered gas, making it difficult for the treated gas to meet usage standards. Utility Model Content

[0004] To address the technical problem that argon gas, used as a protective gas, is heavily diluted after use, and traditional processing methods struggle to bring the recovered gas back to usable standards, this invention provides an argon gas analysis system. By installing instruments such as a trace oxygen analyzer, CO analyzer, CO2 analyzer, argon nitrogen analyzer, zirconium oxide analyzer, and hydrogen analyzer on the main pipeline transporting argon gas, the system analyzes the components in the argon gas, thus preparing sufficient resources for subsequent processing and enabling the recovered argon gas to be reused.

[0005] The technical solution of this utility model is:

[0006] An argon gas analysis system, comprising:

[0007] The main pipeline connects to the analyzer cabinet within the argon gas plant area;

[0008] Multiple trace oxygen analyzers are installed on the main pipeline and distributed along the laying path of the main pipeline;

[0009] The recovery pipeline is connected to the main pipeline;

[0010] The main pipeline is also equipped with a CO analyzer, a CO2 analyzer, an argon-nitrogen analyzer, a zirconium oxide analyzer, and a hydrogen analyzer.

[0011] Optionally, the main pipeline is led out from the argon gas control room, passes through the argon gas plant area and then through the dust removal area, and the recovery pipeline is connected to the end of the main pipeline and is located outside the dust removal area.

[0012] Optionally, the argon gas plant area includes at least a trace oxygen analyzer, a CO analyzer, an argon nitrogen analyzer, and an oxygen analyzer.

[0013] Optionally, the argon gas plant area is equipped with two cabinets, one of which contains a trace oxygen analyzer, a CO analyzer, and an oxygen analyzer, and the other cabinet contains a trace oxygen analyzer, a CO analyzer, and an argon nitrogen analyzer.

[0014] Optionally, at least one trace oxygen analyzer is installed on the section of the main pipeline located within the dust removal zone, at the points where it enters and exits the dust removal zone.

[0015] Optionally, a section of the main pipeline located in the argon gas control room is equipped with a dew point analyzer, a trace oxygen analyzer, an oxygen analyzer, a CO2 analyzer, a CO analyzer, a zirconium oxide analyzer, an argon nitrogen analyzer, and a hydrogen analyzer.

[0016] Optionally, the main pipeline draws argon gas from multiple connection cabinets in the argon gas control room;

[0017] The first connecting cabinet contains a dew point analyzer, a trace oxygen analyzer, an oxygen analyzer, and a CO2 analyzer; the second connecting cabinet contains a zirconium oxide analyzer, a CO analyzer, and an argon-nitrogen analyzer; and the third connecting cabinet contains a zirconium oxide analyzer and a hydrogen analyzer.

[0018] Optionally, it also includes:

[0019] A safety component is located on the main pipe and near the end where it connects to the recycling pipe.

[0020] Optionally, the safety components include a pressure gauge and a shut-off valve located on the main pipeline.

[0021] Optionally, the safety component further includes a drain pipe and an electronic pressure gauge, the electronic pressure gauge including a pressure sensor on the main pipeline and a solenoid valve on the drain pipe, the drain pipe being located on the main pipeline.

[0022] Compared with the prior art, the beneficial effects of this utility model are:

[0023] By installing instruments such as trace oxygen analyzers, CO analyzers, CO2 analyzers, argon nitrogen analyzers, zirconium oxide analyzers, and hydrogen analyzers on the main pipeline for transporting argon, the components in the argon can be analyzed, thus making sufficient preparations for subsequent processing and enabling the recovered argon to be reused. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the structure of this utility model; Detailed Implementation

[0026] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of this invention. Therefore, the drawings and description are considered exemplary in nature and not restrictive.

[0027] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use, or the orientation or positional relationship commonly understood by those skilled in the art. They are only used to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0028] The following disclosure provides many different embodiments or examples for implementing various structures of this invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of the invention. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, examples of various specific processes and materials are provided in this invention, but those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0029] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0030] Example:

[0031] See Figure 1 This embodiment discloses an argon gas analysis system, including a main pipeline 10 and a recovery pipeline 20, and a trace oxygen analyzer 60, a CO analyzer, a CO2 analyzer, an argon nitrogen analyzer, a zirconium oxide analyzer, and a hydrogen analyzer, all mounted on the main pipeline 10. The main pipeline 10 originates from the argon gas control room 30, passes sequentially through the argon gas production area 40 and the dust removal area 50, and finally connects to the recovery pipeline 20. Within the argon gas production area 40, the recovery pipeline connects to the analyzer cabinet and communicates with the analytical instruments inside the analyzer. The recovery pipeline 20 is located outside the dust removal area 50.

[0032] Specifically, the argon plant area 40 shall include at least one trace oxygen analyzer 60, one CO analyzer, one argon nitrogen analyzer, and one oxygen analyzer. At least one trace oxygen analyzer 60 shall be installed on the section of the main pipeline 10 located within the dust removal area 50 at its entry point into the dust removal area 50 and at its exit point from the dust removal area 50.

[0033] By installing instruments such as a trace oxygen analyzer 60, a CO analyzer, a CO2 analyzer, an argon nitrogen analyzer, a zirconium oxide analyzer, and a hydrogen analyzer on the main pipeline 10 for transporting argon, the components in the argon are analyzed, and sufficient preparations are made for subsequent processing, so that the recovered argon can be reused.

[0034] In one specific embodiment:

[0035] The argon gas plant area 40 is equipped with two cabinets 41, which together form an analyzer cabinet. One cabinet 41 contains a trace oxygen analyzer 60, a CO analyzer, and an oxygen analyzer, while the other cabinet 41 contains a trace oxygen analyzer 60, a CO analyzer, and an argon nitrogen analyzer.

[0036] The main pipeline 10 is equipped with a dew point analyzer, a trace oxygen analyzer 60, an oxygen analyzer, a CO2 analyzer, a CO analyzer, a zirconium oxide analyzer, an argon nitrogen analyzer, and a hydrogen analyzer on one section inside the argon main control room 30.

[0037] The argon main control room 30 contains three connecting cabinets 31, each equipped with multiple analyzers, all connected to the main pipeline 10. Specifically, the first cabinet houses a dew point analyzer, a trace oxygen analyzer 60, an oxygen analyzer, and a CO2 analyzer. The second connecting cabinet 31 contains a zirconium oxide analyzer, a CO analyzer, and an argon nitrogen analyzer. The third connecting cabinet 31 contains a zirconium oxide analyzer and a hydrogen analyzer.

[0038] In this embodiment, multiple identical or different analyzers are set up in different areas, each with a different main function. For example, the dew point analyzer, trace oxygen analyzer 60, oxygen analyzer, CO2 analyzer, CO analyzer, zirconium oxide analyzer, argon nitrogen analyzer, and hydrogen analyzer in the main control room 30 are mainly used to detect the content of various components in the argon gas before the reduction furnace equipment to ensure that the argon gas used for production meets the standards.

[0039] The trace oxygen analyzer 60, CO analyzer, argon nitrogen analyzer, and oxygen analyzer in two cabinets 41 inside the argon gas plant are used to detect the content of oxygen components in the argon gas after use.

[0040] The multiple trace oxygen analyzers 60 in the dust removal area 50 are mainly used to analyze whether there are changes in the components of argon gas after it is transported through the main pipeline 10. If there are changes, the trace oxygen analyzers 60 will detect that the oxygen content in the argon gas will also change.

[0041] In another specific embodiment:

[0042] The argon analysis system also includes a safety component 70, which is installed on the main pipeline 10 and near the end where the main pipeline 10 connects to the recovery pipeline 20. The safety component 70 ensures that the gas pressure in the main pipeline 10 and the recovery pipeline 20 remains within a safe range.

[0043] Safety component 70 includes a pressure gauge 71 and a shut-off valve 72 installed on the main pipeline 10. The pressure gauge 71 detects the air pressure value on the main pipeline 10, and the shut-off valve 72 controls the air pressure in the main pipeline 10.

[0044] The safety component 70 also includes a drain pipe 73 and an electronic pressure gauge 74. The electronic pressure gauge 74 includes a pressure sensor installed on the main pipeline 10 and a solenoid valve 75 installed on the drain pipe 73, which is located on the main pipeline 10. The electronic pressure gauge 74 automatically detects the pressure value in the main pipeline 10 and activates the solenoid valve 75 to automatically release pressure from the drain pipe 73.

[0045] The embodiments described above merely illustrate specific implementations of this utility model, and while the descriptions are detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model.

Claims

1. An argon gas analysis system, characterized in that, include: The main pipeline connects to the analyzer cabinet within the argon gas plant area; Multiple trace oxygen analyzers are installed on the main pipeline and distributed along the laying path of the main pipeline; The recovery pipeline is connected to the main pipeline; The main pipeline is also equipped with a CO analyzer, a CO2 analyzer, an argon-nitrogen analyzer, a zirconium oxide analyzer, and a hydrogen analyzer.

2. The argon gas analysis system according to claim 1, characterized in that, The main pipeline is led out from the argon gas control room, passes through the argon gas plant area and then through the dust removal area. The recovery pipeline is connected to the end of the main pipeline and is located outside the dust removal area.

3. The argon gas analysis system according to claim 2, characterized in that, The argon gas plant area is equipped with at least a trace oxygen analyzer, a CO analyzer, an argon nitrogen analyzer, and an oxygen analyzer.

4. The argon gas analysis system according to claim 3, characterized in that, The argon gas plant area is equipped with two cabinets. One cabinet contains a trace oxygen analyzer, a CO analyzer, and an oxygen analyzer, while the other cabinet contains a trace oxygen analyzer, a CO analyzer, and an argon nitrogen analyzer.

5. The argon gas analysis system according to claim 2, characterized in that, At least one trace oxygen analyzer is installed on the section of the main pipeline located within the dust removal zone, at the points where it enters and exits the dust removal zone.

6. The argon gas analysis system according to claim 2, characterized in that, The main pipeline is equipped with a dew point analyzer, a trace oxygen analyzer, an oxygen analyzer, a CO2 analyzer, a CO analyzer, a zirconium oxide analyzer, an argon nitrogen analyzer, and a hydrogen analyzer on one section located in the argon main control room.

7. The argon gas analysis system according to claim 6, characterized in that, The main pipeline draws argon gas from multiple connecting cabinets in the argon gas control room; The first connecting cabinet contains a dew point analyzer, a trace oxygen analyzer, an oxygen analyzer, and a CO2 analyzer; the second connecting cabinet contains a zirconium oxide analyzer, a CO analyzer, and an argon-nitrogen analyzer; and the third connecting cabinet contains a zirconium oxide analyzer and a hydrogen analyzer.

8. The argon gas analysis system according to any one of claims 1-7, characterized in that, Also includes: A safety component is located on the main pipe and near the end where it connects to the recycling pipe.

9. The argon gas analysis system according to claim 8, characterized in that, The safety components include a pressure gauge and a shut-off valve located on the main pipeline.

10. The argon gas analysis system according to claim 9, characterized in that, The safety components also include a drain pipe and an electronic pressure gauge. The electronic pressure gauge includes a pressure sensor installed on the main pipeline and a solenoid valve installed on the drain pipe, which is located on the main pipeline.

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