A semiconductor material delivery system

Abstract

The utility model provides a kind of semiconductor material conveying system;The semiconductor material conveying system includes several conveying lines, rotating device, horizontal moving device and protective device;Each conveying line includes at least one section of conveying unit, each conveying unit is connected head to tail to form straight line conveying line;Horizontal moving device is located between every two conveying lines that are parallel and interval arrangement;Rotating device is located at the intersection of every two conveying lines;Protective device is located at the port where horizontal moving device and conveying line butt joint, and the port where rotating device and conveying line butt joint;Protective device includes the blocking mechanism of switchable state, the state of blocking mechanism includes first state and second state.The conveying system can realize the series connection between each work station, avoid the overrunning of semiconductor material on conveying line, improve the safety and stability of semiconductor material conveying;And, the conveying system can make full use of the space in factory area, significantly improve space utilization.

Description

Technical Field

[0001] This utility model belongs to the technical field of semiconductor material transport, and specifically relates to a semiconductor material transport system. Background Technology

[0002] Within semiconductor factories, the storage and transport of wafer cassettes are crucial processes. During the transport of wafer cassettes, different transport paths are often set up to meet varying requirements.

[0003] However, due to space constraints, the wafer loading workstation, wafer output workstation, and other process workstations are not aligned in a straight line. Therefore, it is necessary to connect the wafer cassettes in the loading area, storage area, or output area to the gripper of the robotic arm. Existing processes often use an intermediate gripper mechanism to transfer the wafer cassette position. Setting up an intermediate gripper mechanism occupies a lot of space, and the operation process is cumbersome, affecting the wafer transfer efficiency. Utility Model Content

[0004] To overcome the shortcomings of low efficiency in conveying semiconductor materials to different workstations using existing technologies, this invention provides a semiconductor material conveying system. This system enables series connection between various workstations, avoids overshooting of semiconductor materials on the conveying line, and improves the safety and stability of semiconductor material conveying. Furthermore, this system can make full use of the space within the factory area, significantly improving space utilization.

[0005] The present invention solves the above-mentioned technical problems through the following technical solution:

[0006] This utility model provides a semiconductor material conveying system, which includes several conveying lines, a rotating device, a traversing device, and a protective device. Each conveying line includes at least one conveying unit, and the conveying units are connected end-to-end to form a straight conveying line. The traversing device is located between every two parallel and spaced conveying lines. The rotating device is located at the intersection of every two conveying lines. The protective device is located at the port where the traversing device connects to the conveying line, and at the port where the rotating device connects to the conveying line. The protective device includes a switchable blocking mechanism, the blocking mechanism having a first state and a second state. The first state is a state that can block the movement of the container, and the second state is a state that allows the container to pass smoothly. The container is used to hold semiconductor materials.

[0007] Preferably, the conveying unit includes an active side module, a driven side module, and a connecting module; the active side module includes a driving unit and a plurality of first transmission wheels driven by the driving unit; the driven side module includes a plurality of second transmission wheels; the connecting module includes a connecting shaft and a locking mechanism; the first transmission wheels and the second transmission wheels are sleeved on the connecting shaft and respectively fixed by the locking mechanism; wherein, when the locking mechanism is locked, the connecting shaft is fixed to the first transmission wheels and the second transmission wheels, so that power is transmitted from the first transmission wheels to the second transmission wheels through the connecting shaft under the drive of the driving unit; when the locking mechanism is open, the first transmission wheels and the second transmission wheels can slide along the axial direction of the connecting shaft to realize the quick installation or removal of the first transmission wheels and the second transmission wheels.

[0008] Further preferably, the drive unit includes a drive motor, multiple pulleys, multiple tensioning pulleys, and a transmission belt sleeved on the multiple pulleys. The drive motor is connected to one of the pulleys, and the multiple pulleys are connected to corresponding first transmission pulleys via bearing seats. The tensioning pulleys press against the transmission belt to provide tension. The drive motor can drive the pulleys to rotate and drive the multiple first transmission pulleys to rotate synchronously via the transmission belt. The locking mechanism includes a key, a retaining ring, and a washer for fixing the first and second transmission pulleys, which have slid to the target position, relative to the connecting shaft. The connecting shaft has a first keyway at its end, and a second keyway on the inner shaft of the bearing housing on the side of the first and second transmission wheels. When the first and second keyways are aligned, they cooperate with a third keyway on the inner wall of the first and second transmission wheels to form a receiving cavity. The key is located in the receiving cavity and is used to transmit torque so that the first and second transmission wheels rotate synchronously with the connecting shaft. The connecting shaft has an annular groove on its outer wall near the first keyway. When the locking mechanism is locked, the retaining ring is stuck in the groove, and the gasket abuts against the middle of the retaining ring and the transmission wheel to prevent the transmission wheel from moving axially along the connecting shaft.

[0009] Preferably, the transverse movement device includes a transverse movement unit that can move along a vertical line between the two conveyor lines; the blocking mechanism includes a first blocking mechanism and a second blocking mechanism, wherein the blocking portion of the first blocking mechanism is rotatably disposed at the conveying end of the transverse movement unit, and the blocking portion of the second blocking mechanism is rotatably disposed at the port of the transverse movement device where the conveyor lines are connected; when the first blocking mechanism is away from the second blocking mechanism, both the blocking portions of the first blocking mechanism and the second blocking mechanism are higher than the transverse movement unit and the conveyor lines to block the moving container; when the first blocking mechanism is close to the second blocking mechanism, both the blocking portions of the first blocking mechanism and the second blocking mechanism are lower than the transverse movement unit and the conveyor lines to allow the container to pass smoothly.

[0010] More preferably, the transverse movement device further includes a drive assembly, a transverse track, a frame, and a blocking block; the frame contains the transverse track and the transverse unit, and the second blocking mechanism is located on one side of the frame connected to the conveyor line; the drive assembly is used to drive the movement of the transverse unit; the transverse track is used to provide a movement path for the transverse unit; the blocking block encloses a partially enclosed restrictive space above the transverse unit along the side wall of the transverse movement device to prevent the container on the transverse unit from overshooting during movement.

[0011] Preferably, the rotating device includes a conveying mechanism, a driving mechanism, and a rotating mechanism; the rotating mechanism is connected to the conveying mechanism and is used to drive the conveying mechanism to rotate; the conveying mechanism includes two parallel sidewalls and a plurality of rotating support elements, each of the rotating support elements being vertically disposed between the two sidewalls to form two conveying ports; by rotating the rotating mechanism, the conveying ports of the conveying mechanism are rotated to a position where they are connected to the conveying line; the blocking mechanism includes a third blocking mechanism and a fourth blocking mechanism, the blocking part of the third blocking mechanism being rotatably disposed at the conveying end of the conveying mechanism, and the blocking part of the fourth blocking mechanism being rotatably disposed at the port of the conveying line; when the third blocking mechanism is away from the fourth blocking mechanism, the blocking parts of both the third and fourth blocking mechanisms are higher than the conveying mechanism and the conveying line to block the moving container; when the third blocking mechanism is close to the fourth blocking mechanism, the blocking parts of both the third and fourth blocking mechanisms are lower than the conveying mechanism and the conveying line to allow the container to pass smoothly.

[0012] More preferably, the conveying mechanism includes a driving section and a non-driving section. The non-driving section includes a first roller located at the two conveying ports. The driving section includes a rotating support element located between the two conveying ports. The rotating support element includes a roller shaft with second rollers at both ends. The roller shaft is directly connected to the driving mechanism. The conveying mechanism includes a transition section located at the apex of the conveying mechanism to reduce the circular area occupied by the conveying mechanism during rotation.

[0013] Preferably, the blocking mechanism includes a base plate, a rotating shaft, a baffle, and a magnetic actuating element; the rotating shaft is rotatably disposed on the base plate or the baffle; the base plate is fixed to one end of the conveyor line, and the baffle is connected to the base plate through the rotating shaft and can switch between a first position and a second position around the rotating shaft; the first position is the blocking position where the baffle is in a vertical state, and the second position is the release position where the baffle is in a horizontal state; the magnetic actuating element is disposed on the baffle; when the transverse moving device docks with the conveyor line, the first protective device installed at the conveying end of the transverse moving device and the second protective device installed at the port of the conveyor line approach each other, and the magnetic actuating elements corresponding to the first protective device and the second protective device generate a repulsive force, driving the baffles of both sides to overcome their own gravity. The device swings from the first position to the second position; when the lateral movement device separates from the conveyor line, the first protective device and the second protective device gradually move away from each other, and their baffles automatically swing back from the second position to the first position under their own gravity; when the rotating device connects to the conveyor line, the third protective device installed at the conveyor end of the rotating device approaches the fourth protective device installed at the port of the conveyor line, and the magnetic force corresponding to the third protective device and the fourth protective device generates a repulsive force, driving the baffles of both sides to overcome their own gravity and swing from the first position to the second position; when the rotating device separates from the conveyor line, the third protective device and the fourth protective device gradually move away from each other, and their baffles automatically swing back from the second position to the first position under their own gravity.

[0014] More preferably, the rotating shaft is fixedly connected to the substrate, and the rotating shaft is rotatably connected to the baffle. The magnetic force action is configured such that when the two protective devices gradually approach each other and reach an effective working distance, the line connecting the respective magnetic force action is coplanar or parallel to the axis of the rotating shaft of the two protective devices, so as to ensure that the repulsive force generates an effective torque that causes the baffle to swing horizontally. The magnetic force action includes a pair of permanent magnets with opposite magnetic properties, respectively disposed on both sides of the rotating shaft. When the baffles of the two protective devices swing from the first position to the second position under the repulsive force of the magnetic force action, an attractive force is generated between the N-polar magnetic force action on one protective device and the S-polar magnetic force action on the other protective device. The protective device also includes a limiting structure for limiting the final angle of the baffle when it swings to the first position under the action of gravity, ensuring that it is in a vertical blocking state. The limiting structure includes a protrusion or pin disposed on the substrate, and the baffle abuts against the protrusion or pin when it swings to the first position.

[0015] Preferably, the semiconductor material delivery system further includes a lifting device, which has a delivery element that can move up and down within the lifting device and can dock with the delivery unit; the port where the lifting device docks with the delivery line is provided with a protective device.

[0016] Compared with the prior art, the present invention has at least the following technical effects:

[0017] 1. The semiconductor material conveying system of this utility model can realize the series connection between various workstations, avoid the overshoot of semiconductor materials on the conveying line, and improve the safety and stability of semiconductor material conveying;

[0018] 2. Compared with the existing mechanical clamping mechanism for conveying materials, the semiconductor material conveying system of this utility model can make full use of the space in the factory area and significantly improve the space utilization rate. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of a conveying system according to an embodiment of this application;

[0020] Figure 2 This is a schematic diagram of the structure of a conveying unit of a conveyor line according to an embodiment of this application;

[0021] Figure 3 This is a schematic diagram of the structure of multiple main drive wheels in a conveying unit according to an embodiment of this application;

[0022] Figure 4a This is a cross-sectional view of the transmission wheel and connecting shaft in a conveying unit according to an embodiment of this application;

[0023] Figure 4b This is an exploded view of the transmission wheel and connecting shaft in a conveying unit according to an embodiment of this application;

[0024] Figure 5a for Figure 4b A partial structural diagram of the drive wheel and end A of the connecting shaft;

[0025] Figure 5b for Figure 4b A partial structural diagram of the drive wheel and the B end of the connecting shaft;

[0026] Figure 6 This is a schematic diagram of the structure of a conveyor line according to an embodiment of this application;

[0027] Figure 7 This is a schematic diagram of the structure of a transverse moving device according to an embodiment of this application;

[0028] Figure 8 This is a schematic diagram showing the connection between the transverse moving device and the conveyor line according to an embodiment of this application;

[0029] Figure 9 This is a schematic diagram of the structure of a rotating device according to an embodiment of this application;

[0030] Figure 10 This is a top view of a rotating device according to an embodiment of this application;

[0031] Figure 11 This is a schematic diagram showing the connection between the rotating device and the conveyor line according to an embodiment of this application;

[0032] Figure 12 This is a schematic diagram of the structure of a protective device according to an embodiment of this application;

[0033] Figure 13 This is a top view of a protective device according to an embodiment of this application;

[0034] Figure 14 This is a schematic diagram of the structure of a lifting device according to an embodiment of this application;

[0035] Figure 15 This is a partial enlarged view of a lifting device according to an embodiment of this application.

[0036] Explanation of reference numerals in the attached figures:

[0037] Conveyor line 1, conveyor unit 101, drive unit 1001, drive motor 10011, pulley 10012, tensioning pulley 10013, transmission belt 10014, first transmission wheel 1002, second transmission wheel 1003, connecting shaft 1004, groove 10040, first keyway 10041, second keyway 10042, locking mechanism 1005, key 10051, retaining ring 10052, washer 10053, inner shaft of bearing seat on the first transmission wheel side 10061, inner shaft of bearing seat on the second transmission wheel side 10062;

[0038] 2. Horizontal movement device; 201. Horizontal movement unit; 202. Blocking block; 203. Horizontal movement track; 204.

[0039] Rotating device 3, conveying mechanism 301, side wall 3011, roller 3012, first roller 3013, second roller 3014, transition section 3015, driving mechanism 302, driving motor 3021, driving section 3022, non-driving section 3023, rotating mechanism 303;

[0040] Protective device 4, first blocking mechanism 41, second blocking mechanism 42, third blocking mechanism 43, fourth blocking mechanism 44, base plate 401, first screw 4011, second screw 4012, rotating shaft 402, baffle 403, magnetic force action element 404, limiting structure 405;

[0041] Lifting device 5, conveying element 501. Detailed Implementation

[0042] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0043] It should be noted that various aspects of embodiments within the scope of the appended claims are described below. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any particular structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art will understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement the device and / or practice the method. Additionally, this device and / or method can be implemented using structures and / or functionalities other than one or more of the aspects set forth herein.

[0044] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The drawings only show the components related to this application and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0045] Additionally, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that practice can be carried out without these specific details.

[0046] Existing semiconductor material transport technologies typically employ mechanical clamping mechanisms to transfer semiconductor materials. These mechanisms suffer from low transport efficiency, large footprint, and inherent safety and stability risks. Therefore, there is an urgent need for a semiconductor material transport system that offers high space utilization, high transport efficiency, and high safety and stability to address these issues.

[0047] Based on this, embodiments of this application provide a semiconductor material delivery system (or "Conveyor system"). Figure 1 As shown, it includes several conveyor lines 1, a transverse movement device 2, a rotating device 3, and a protective device 4; as Figure 6 As shown, each conveyor line 1 includes at least one conveyor unit 101, and the conveyor units 101 are connected end to end to form a straight conveyor line 1; a transverse moving device 2 is disposed between every two parallel and spaced conveyor lines 1; a rotating device 3 is disposed at the intersection of every two conveyor lines 1; a protective device 4 is disposed at the port where the transverse moving device 2 and the conveyor line 1 are connected, and at the port where the rotating device 3 and the conveyor line 1 are connected; the protective device 4 includes a switchable blocking mechanism, the blocking mechanism having a first state and a second state, the first state being a state that can block the movement of the container, and the second state being a state that allows the container to pass smoothly; the container is used to hold semiconductor materials.

[0048] The semiconductor material can be a wafer, and the container can be a container for holding the wafer, such as a wafer box. This semiconductor material conveying system can realize the automated conveying of semiconductor materials, and each conveying line can be set above the interior of the factory, significantly improving space utilization.

[0049] In some implementations, such as Figure 2 As shown in Figure 5, the conveying unit 101 includes an active side module, a driven side module, and a connecting module. The active side module includes a drive unit 1001 and multiple first transmission wheels 1002 driven by the drive unit 1001. The driven side module includes multiple second transmission wheels 1003. The connecting module includes a connecting shaft 1004 and a locking mechanism 1005. The first transmission wheels 1002 and the second transmission wheels 1003 serve as the active wheel and the driven wheel, respectively, and are both sleeved on the connecting shaft 1004 and fixed by the locking mechanism 1005. When 1005 is locked (i.e., in the locked state), the connecting shaft 1004 is fixed to the first transmission wheel 1002 and the second transmission wheel 1003, so that power is transmitted from the first transmission wheel 1002 to the second transmission wheel 1003 through the connecting shaft 1004 under the drive of the drive unit 1001; when the locking mechanism 1005 is opened (i.e., in the unlocked state), the first transmission wheel 1002 and the second transmission wheel 1003 can slide along the axial direction of the connecting shaft 1004, so as to realize the quick installation or removal of the first transmission wheel 1002 and the second transmission wheel 1003.

[0050] In specific implementation methods, such as Figure 2 and 3 As shown, the drive unit 100 includes a drive motor 10011, multiple pulleys 10012, multiple tension pulleys 10013, and a transmission belt 10014 sleeved on the multiple pulleys 10012. The drive motor 10011 is connected to one of the pulleys 10012. The multiple pulleys 10012 are connected to corresponding first transmission pulleys 1002 through bearing seats. The tension pulleys 10013 press against the transmission belt 10014 to provide tension. The drive motor 10011 can drive the pulleys 10012 to rotate, and drive the multiple first transmission pulleys 1002 to rotate synchronously through the transmission belt 10014. This single-sided drive fundamentally avoids the risks of container twisting, tilting, and falling caused by asynchronous double-sided drive.

[0051] In a preferred embodiment, each of the first drive wheel 1002 and the second drive wheel 1003 can be made of a high-friction coefficient material such as polyurethane. When the locking mechanism 1005 is open, the first drive wheel 1002 and the second drive wheel 1003 can slide axially on the connecting shaft 1004. Therefore, when it is necessary to replace the first drive wheel 1002 or the second drive wheel 1003, simply open the locking mechanism 1005 to slide the worn first drive wheel 1002 or the second drive wheel 1003 out from the end of the connecting shaft 1004, replace it with a new wheel, and then use the locking mechanism 1005 to fix it. This is simple, convenient, and allows for quick replacement.

[0052] In specific implementation methods, such as Figure 5a , 5b As shown, the locking mechanism 1005 includes a key 10051, a retaining ring 10052, and a washer 10053, which are used to fix the first transmission wheel 1002 and the second transmission wheel 1003, which have slid to the target position, relative to the connecting shaft 1004.

[0053] In a preferred embodiment, such as Figure 5a and 5b As shown, the end of the connecting shaft 1004 has a first keyway 10041, and the inner shaft 10061 of the bearing seat on the first transmission wheel side and the inner shaft 10062 of the bearing seat on the second transmission wheel side both have second keyways 10042. When the first keyway 10041 and the second keyway 10042 are aligned, they cooperate with the third keyways on the inner walls of the first transmission wheel 1002 and the second transmission wheel 1003 to form a receiving cavity. The key 10051 is located in the receiving cavity and is used to transmit torque so that the first transmission wheel 1002 and the second transmission wheel 1003 rotate synchronously with the connecting shaft 1004.

[0054] In a preferred embodiment, such as Figure 5a , 5b As shown, the connecting shaft 1004 has an annular groove 10040 on the outer wall near the first keyway 10041. When the locking mechanism 1005 is locked, the retaining ring 10052 is stuck in the groove 10040, and the gasket 10053 abuts against the middle of the retaining ring 10052 and the transmission wheel to prevent the transmission wheel from moving axially along the connecting shaft 1004.

[0055] In some implementations, such as Figure 7 and 8 As shown, the transverse movement device 2 includes a transverse movement unit 201, which is capable of moving along the vertical line between the two conveyor lines 1;

[0056] The blocking mechanism (or "protective device 4") includes a first blocking mechanism 41 and a second blocking mechanism 42. The blocking part of the first blocking mechanism 41 is rotatably disposed at the conveying end of the transverse unit 201, and the blocking part of the second blocking mechanism 42 is rotatably disposed at the port of the transverse device 2 connected to the conveyor line 1.

[0057] When the first blocking mechanism 41 moves away from the second blocking mechanism 42, the blocking part of the first blocking mechanism 41 and the blocking part of the second blocking mechanism 42 are both higher than the transverse unit 201 and the conveyor line 1 to block the moving container; wherein, the moving container includes the container moving from the conveyor line 1 to the transverse unit 201 and the container moving from the transverse unit 201 to the conveyor line 1.

[0058] When the first blocking mechanism 41 approaches the second blocking mechanism 42, the blocking parts of the first blocking mechanism 41 and the second blocking mechanism 42 are both lower than the transverse unit 201 and the conveyor line 1, so that the container can pass through smoothly.

[0059] In this application, when the lateral movement unit 201 moves away from the conveyor line 1, that is, the movement direction of the lateral movement unit 201 is away from a conveyor line, the first blocking mechanism 41 moves away from the second blocking mechanism 42. Combined with... Figure 7 Those skilled in the art should understand that when the transverse unit 201 moves away from one conveyor line, the transverse unit 201 will move closer to another conveyor line.

[0060] In this application, when the lateral moving unit 201 approaches the conveyor line 1, that is, when the movement direction of the lateral moving unit 201 is towards a conveyor line, the first blocking mechanism 41 approaches the second blocking mechanism 42. Combined with... Figure 7 Those skilled in the art should understand that when the transverse unit 201 approaches one conveyor line, the transverse unit 201 will move away from another conveyor line.

[0061] In specific implementation methods, such as Figure 7 As shown, the transverse moving device 2 also includes a drive assembly, a transverse moving track 203, a frame 204, and a blocking block 202; the frame 204 is provided with the transverse moving track 203 and the transverse moving unit 201, and the second blocking mechanism 42 is provided on one side of the frame 204 connected to the conveyor line 1; the drive assembly is used to drive the movement of the transverse moving unit 201; the transverse moving track 203 is used to provide a moving path to the transverse moving unit 201; the blocking block 202 encloses a partially enclosed restrictive space above the transverse moving unit 201 along the side wall of the transverse moving device 2, in order to prevent the container on the transverse moving unit 201 from overshooting during the movement.

[0062] In some implementations, such as Figure 9-11As shown, the rotating device 3 includes a conveying mechanism 301, a driving mechanism 302, and a rotating mechanism 303. The rotating mechanism 303 is connected to the conveying mechanism 301 and is used to drive the conveying mechanism 301 to rotate. The conveying mechanism 301 includes two parallel side walls 3011 and several rotating support elements. Each rotating support element is vertically disposed between the two side walls 3011 to form two conveying ports. By rotating the rotating mechanism 303, the conveying ports of the conveying mechanism 301 are rotated to a position where they are connected to the conveyor line 1.

[0063] The blocking mechanism (or "protective device 4") includes a third blocking mechanism 43 and a fourth blocking mechanism 44. The blocking part of the third blocking mechanism 43 is rotatably disposed at the conveying end of the conveying mechanism 301, and the blocking part of the fourth blocking mechanism 44 is rotatably disposed at the port of the conveying line 1.

[0064] When the third blocking mechanism 43 moves away from the fourth blocking mechanism 44, the blocking part of the third blocking mechanism 43 and the blocking part of the fourth blocking mechanism 44 are both higher than the conveying mechanism 301 and the conveying line 1 to block the moving container; the moving container includes the container moving from the conveying line 1 to the conveying mechanism 301, and the container moving from the conveying mechanism 301 to the conveying line 1.

[0065] When the third blocking mechanism 43 approaches the fourth blocking mechanism 44, the blocking parts of both the third blocking mechanism 43 and the fourth blocking mechanism 44 are lower than the conveying mechanism 301 and the conveying line 1, so that the container can pass through smoothly.

[0066] In specific implementation methods, such as Figure 10 As shown, the conveying mechanism 301 includes a driving section 3022 and a non-driving section 3023. The non-driving section 3023 includes a first roller 3013 located at the two conveying ports. The driving section 3022 includes a rotating support element located between the two conveying ports. The rotating support element includes a roller shaft 3012. The two ends of the roller shaft 3012 are provided with second rollers 3014. The roller shaft 3012 is directly connected to the driving mechanism 302.

[0067] The roller shaft on the drive section 3022 is connected to the drive motor 3021, which serves as the power source to convert electrical energy into high-speed, low-torque rotational motion. This motion drives the second roller to rotate, thereby moving the conveyed material. The drive motor 3021 is also equipped with a speed reducer, which reduces the speed and increases the torque to match the output characteristics of the drive motor 3021 with the load requirements. The input of the drive motor 3021 (AC frequency / voltage or pulse signal) is changed by an external control system (such as a frequency converter or servo driver), thereby dynamically adjusting the output speed of the drive motor 3021 to achieve acceleration or deceleration of the entire drive mechanism.

[0068] In specific implementation methods, such as Figure 9 As shown, the conveying mechanism 301 includes a transition section 3015, which is located at the top corner of the conveying mechanism 301 to reduce the circular area occupied by the conveying mechanism 301 during rotation.

[0069] In a specific implementation, the four corners of the conveying mechanism 301 are provided with transition portions 3015.

[0070] In a specific implementation, in the conveying mechanism 301, the inner wall length of the side wall 3011 is greater than the outer wall length of the side wall 3011, forming a rounded corner structure or a sloped structure with a certain curvature.

[0071] When the cross-section of the transition section 3015 is arc-shaped, the transition section has a rounded corner structure.

[0072] The inner wall surface of the side wall 3011 refers to the wall surface facing the center of the conveying mechanism 301, while the outer wall surface refers to the wall surface facing away from the center of the conveying mechanism 301. By providing a transition section 3015 in the conveying mechanism 301, the two ends of its wall surface are prevented from rubbing against the conveyor line 1 during the rotation of the conveying mechanism 301. Designing the transition section as a rounded corner structure with a certain curvature or as a sloped structure can achieve the effect of preventing rubbing.

[0073] In some implementations, such as Figure 12-13As shown, the blocking mechanism includes a base plate 401, a rotating shaft 402, a baffle 403, and a magnetic actuating element 404. The rotating shaft 402 is rotatably mounted on the base plate 401 or the baffle 403. The base plate 401 is fixed to one end of the conveyor line 1 by a first screw 4011 and a second screw 4012. The baffle 403 is connected to the base plate 401 via the rotating shaft 402 and can switch between a first position and a second position around the rotating shaft 402. The first position is the blocking position where the baffle 403 is in a vertical state, and the second position is the release position where the baffle 403 is in a horizontal state. The magnetic actuating element 404 is disposed on the baffle 403. When the transverse moving device 2 docks with the conveyor line 1, the first protective device installed at the conveying end of the transverse moving device 2 approaches the second protective device installed at the port of the conveyor line 1, and the magnetic force corresponding to the first protective device and the second protective device... The actuating element 404 generates a repulsive force, causing the baffles 403 on both sides to swing from the first position to the second position against their own gravity. When the transverse device 2 separates from the conveyor line 1, the first protective device and the second protective device gradually move away from each other, and their baffles 403 automatically swing back from the second position to the first position under their own gravity. When the rotating device 3 connects to the conveyor line 1, the third protective device installed at the conveying end of the rotating device 3 and the fourth protective device installed at the port of the conveyor line 1 approach each other. The magnetic actuating elements 404 corresponding to the third and fourth protective devices generate a repulsive force, causing the baffles 403 on both sides to swing from the first position to the second position against their own gravity. When the rotating device 3 separates from the conveyor line 1, the third protective device and the fourth protective device gradually move away from each other, and their baffles 403 automatically swing back from the second position to the first position under their own gravity.

[0074] In specific implementation methods, such as Figure 13 As shown, the rotating shaft 402 is fixedly connected to the base plate 401, and the rotating shaft 402 is rotatably connected to the baffle 403.

[0075] In other embodiments, the rotary shaft 402 may also be rotatably mounted on the base plate 401 via bearings. The baffle 403 is fixed to the rotary shaft 402 and can rotate with the rotary shaft 402.

[0076] In a specific embodiment, the magnetic actuating element 404 can be a permanent magnet, embedded or fixed on the baffle 403. The permanent magnets on the two protective devices 4 installed at the ends of the two conveyor lines have the same polarity configuration; for example, both use a single N-polarity magnet, or both use a single S-polarity magnet. When the baffles 403 of the two protective devices 4 are in the first position (vertical state), the magnetic actuating elements 404 on the two protective devices 4 are opposite each other to achieve mutual repulsion when approaching. Specifically, the magnetic actuating element 404 is configured such that when the two protective devices 4 gradually approach and reach the effective action distance, the line connecting the respective magnetic actuating elements 404 is coplanar or parallel to the axis of rotation 402 of the two protective devices 4, to ensure that the repulsive force generates an effective torque that causes the baffle 403 to swing horizontally. However, in other embodiments, the line connecting the two magnetic actuating elements 404 may not be coplanar or parallel to the axis of rotation 402 of the two protective devices 4.

[0077] In a specific embodiment, the magnetic actuating element 404 includes a pair of permanent magnets with opposite magnetic properties, such as a combination of an N-polarity magnet and an S-polarity magnet, respectively disposed on both sides of the rotating shaft 402. When the two conveyor lines are connected but have not reached the effective working distance, both protective devices 4 installed at the ends of the conveyor lines are in the first position (vertical state), with the N-polarity magnet and S-polarity magnet on one protective device 4 facing each other. As the two protective devices 4 gradually approach and reach the effective working distance, the baffles 403 of the two protective devices swing from the first position to the second position under the repulsive force of the magnetic actuating element 404. At this point, the N-polarity magnet on one protective device 4 faces the S-polarity magnet on the other protective device, thereby generating an attractive force F'. The attractive force F' helps to resist external disturbances (such as vibrations caused during carrier transport) when the conveyor line 1 is docked, maintaining the baffle 403 in a horizontal and stable state. This prevents accidental reset due to vibration or slight displacement (such as the baffle 403 resetting from a horizontal to a vertical state) from interfering with the passage of the conveyed container, thus improving the reliability of the release state. It should be noted that in practical applications, two N-polar magnets or two S-polar magnets can be used together to increase magnetism. This application does not limit the number and size of the magnetic force-acting components 404, and the specific requirements can be determined according to the actual application.

[0078] In specific implementation methods, such as Figure 12 As shown, the protective device 4 also includes a limiting structure 405, which is used to limit the final angle of the baffle 403 when it swings to the first position under the action of gravity, so as to ensure that it is in a vertical blocking state; the limiting structure 405 includes a protrusion or pin provided on the base plate 401, which abuts against the protrusion or pin when the baffle 403 swings to the first position.

[0079] In some implementations, such as Figure 14 and 15 As shown, the semiconductor material delivery system also includes a lifting device 5, which has a section of delivery element 501 inside. The delivery element 501 can move up and down inside the lifting device 5 and can dock with the delivery unit 101. The port of the lifting device 5 that docks with the delivery line 1 is provided with the aforementioned protective device.

[0080] Example 1

[0081] This embodiment provides a semiconductor material delivery system. For example... Figure 1 As shown, the semiconductor material delivery system includes several delivery lines 1, a transverse movement device 2, a rotating device 3, a protective device 4, and a lifting device 5;

[0082] (1) Conveyor line

[0083] like Figure 6 As shown, each conveyor line 1 includes at least one conveyor unit 101, and each conveyor unit 101 is connected end to end to form a straight conveyor line 1.

[0084] like Figure 2 As shown in Figure 5, the conveying unit 101 includes an active side module, a driven side module, and a connecting module; the active side module includes a drive unit 1001 and multiple first transmission wheels 1002 driven by the drive unit 1001; the driven side module includes multiple second transmission wheels 1003; the connecting module includes a connecting shaft 1004 and a locking mechanism 1005; the first transmission wheels 1002 and the second transmission wheels 1003 are sleeved on the connecting shaft 1004 and are respectively fixed by the locking mechanism 1005; wherein, the lock When the locking mechanism 1005 is locked, the connecting shaft 1004 is fixed to the first transmission wheel 1002 and the second transmission wheel 1003, so that power is transmitted from the first transmission wheel 1002 to the second transmission wheel 1003 through the connecting shaft 1004 under the drive of the drive unit 1001; when the locking mechanism 1005 is opened, the first transmission wheel 1002 and the second transmission wheel 1003 can slide along the axial direction of the connecting shaft 1004, so as to realize the quick installation or removal of the first transmission wheel 1002 and the second transmission wheel 1003.

[0085] The drive unit 100 includes a drive motor 10011, multiple pulleys 10012, multiple tension pulleys 10013, and a transmission belt 10014 sleeved on the multiple pulleys 10012. The drive motor 10011 is connected to one of the pulleys 10012. The multiple pulleys 10012 are connected to the corresponding first transmission pulleys 1002 through bearing seats. The tension pulleys 10013 press against the transmission belt 10014 to provide tension. The drive motor 10011 can drive the pulleys 10012 to rotate and drive the multiple first transmission pulleys 1002 to rotate synchronously through the transmission belt 10014.

[0086] The locking mechanism 1005 includes a key 10051, a retaining ring 10052, and a washer 10053, which are used to fix the first transmission wheel 1002 and the second transmission wheel 1003, which have slid to the target position, relative to the connecting shaft 1004.

[0087] The end of the connecting shaft 1004 has a first keyway 10041, and the inner shaft 10061 of the bearing seat on the first transmission wheel side and the inner shaft 10062 of the bearing seat on the second transmission wheel side both have second keyways 10042. When the first keyway 10041 and the second keyway 10042 are aligned, they cooperate with the third keyways on the inner walls of the first transmission wheel 1002 and the second transmission wheel 1003 to form a receiving cavity. The key 10051 is located in the receiving cavity and is used to transmit torque so that the first transmission wheel 1002 and the second transmission wheel 1003 rotate synchronously with the connecting shaft 1004.

[0088] The connecting shaft 1004 has an annular groove 10040 on the outer wall near the first keyway 10041. When the locking mechanism 1005 is locked, the retaining ring 10052 is stuck in the groove 10040, and the gasket 10053 abuts against the middle of the retaining ring 10052 and the transmission wheel to prevent the transmission wheel from moving axially along the connecting shaft 1004.

[0089] (2) Transverse movement device

[0090] like Figures 7-8 As shown, the transverse movement device 2 is located between every two parallel and spaced conveyor lines 1;

[0091] The transverse transfer device 2 includes a transverse transfer unit 201, which is capable of moving along a vertical line between the two conveyor lines 1;

[0092] The blocking mechanism includes a first blocking mechanism 41 and a second blocking mechanism 42. The blocking part of the first blocking mechanism 41 is rotatably disposed at the conveying end of the transverse unit 201, and the blocking part of the second blocking mechanism 42 is rotatably disposed at the port of the transverse device 2 connected to the conveyor line 1.

[0093] When the first blocking mechanism 41 moves away from the second blocking mechanism 42, the blocking part of the first blocking mechanism 41 and the blocking part of the second blocking mechanism 42 are both higher than the transverse unit 201 and the conveyor line 1 to block the moving container.

[0094] When the first blocking mechanism 41 approaches the second blocking mechanism 42, the blocking parts of the first blocking mechanism 41 and the blocking parts of the second blocking mechanism 42 are both lower than the transverse unit 201 and the conveyor line 1, so that the container can pass through smoothly.

[0095] The transverse movement device 2 also includes a drive assembly, a transverse track 203, a frame 204, and a stop block 202;

[0096] The frame 204 is provided with a transverse track 203 and a transverse unit 201. The second blocking mechanism 42 is located on one side of the frame 204 connected to the conveyor line 1. The driving assembly is used to drive the movement of the transverse unit 201. The transverse track 203 is used to provide a movement path to the transverse unit 201. The blocking block 202 encloses a partially enclosed restrictive space above the transverse unit 201 along the side wall of the transverse device 1 to prevent the container on the transverse unit 201 from overshooting during the movement.

[0097] (3) Rotating device

[0098] like Figure 9-11 As shown, the rotating device 3 is located at the intersection of each pair of conveyor lines 1; the rotating device 3 includes a conveying mechanism 301, a driving mechanism 302, and a rotating mechanism 303; the rotating mechanism 303 is connected to the conveying mechanism 301 and is used to drive the conveying mechanism 301 to rotate; the conveying mechanism 301 includes two parallel side walls 3011 and several rotating support elements, each rotating support element is vertically arranged between the two side walls 3011 to form two conveying ports; by rotating the rotating mechanism 303, the conveying ports of the conveying mechanism 301 are rotated to the position where they are connected to the conveyor line 1;

[0099] The blocking mechanisms include a third blocking mechanism 43 and a fourth blocking mechanism 44. The blocking part of the third blocking mechanism 43 is rotatably disposed at the conveying end of the conveying mechanism 301, and the blocking part of the fourth blocking mechanism 44 is rotatably disposed at the port of the conveying line 1.

[0100] When the third blocking mechanism 43 moves away from the fourth blocking mechanism 44, the blocking parts of the third blocking mechanism 43 and the fourth blocking mechanism 44 are both higher than the conveying mechanism 301 and the conveying line 1 to block the moving container.

[0101] When the third blocking mechanism 43 approaches the fourth blocking mechanism 44, the blocking parts of both the third blocking mechanism 43 and the fourth blocking mechanism 44 are lower than the conveying mechanism 301 and the conveying line 1, so that the container can pass through smoothly.

[0102] The conveying mechanism 301 includes a driving section 3022 and a non-driving section 3023. The non-driving section 3023 includes a first roller 3013 located at two conveying ports. The driving section 3022 includes a rotating support element located between the two conveying ports. The rotating support element includes a roller shaft 3012. The roller shaft 3012 has second rollers 3014 at both ends. The roller shaft 3012 is directly connected to the driving mechanism 302.

[0103] The conveying mechanism 301 includes a transition section 3015, which is located at the top corner of the conveying mechanism 301 to reduce the circular area occupied by the conveying mechanism 301 during rotation.

[0104] (4) Protective devices

[0105] like Figure 12-13 As shown, the protective device 4 includes a base plate 401, a rotating shaft 402, a baffle 403, and a magnetic actuating element 404. The rotating shaft 402 is rotatably mounted on the base plate 401 or the baffle 403. The base plate 401 is fixed to one end of the conveyor line 1, the transverse device 2, or the rotating device 3. The baffle 403 is connected to the base plate 401 via the rotating shaft 402 and can switch between a first position and a second position around the rotating shaft 402. The first position is the blocking position where the baffle 403 is in a vertical state, and the second position is the release position where the baffle 403 is in a horizontal state. The magnetic actuating element 404 is disposed on the baffle 403. When the transverse device 2 is connected to the conveyor line 1, the first protective device installed at the conveying end of the transverse device 2 approaches the second protective device installed at the port of the conveyor line 1, and the corresponding magnetic actuating elements of the first and second protective devices interact. The repulsive force generated by component 404 drives the baffles 403 on both sides to swing from the first position to the second position against their own gravity. When the transverse device 2 separates from the conveyor line 1, the first and second protective devices gradually move away from each other, and their baffles 403 automatically swing back from the second position to the first position under their own gravity. When the rotating device 3 connects to the conveyor line 1, the third protective device installed at the conveying end of the rotating device 3 and the fourth protective device installed at the port of the conveyor line 1 approach each other. The magnetic force component 404 corresponding to the third and fourth protective devices generates a repulsive force, driving the baffles 403 on both sides to swing from the first position to the second position against their own gravity. When the rotating device 3 separates from the conveyor line 1, the third and fourth protective devices gradually move away from each other, and their baffles 403 automatically swing back from the second position to the first position under their own gravity.

[0106] The rotating shaft 402 is fixedly connected to the base plate 401, and the rotating shaft 402 is rotatably connected to the baffle 403.

[0107] The magnetic force actuating element 404 is configured such that when the two protective devices gradually approach each other and reach the effective working distance, the line connecting the respective magnetic force actuating elements 404 is coplanar or parallel with the axis of rotation 402 of the two protective devices, so as to ensure that the repulsive force generates an effective torque that causes the baffle 403 to swing in the horizontal direction.

[0108] The magnetic force action 404 includes a pair of permanent magnets with opposite magnetic properties, which are respectively disposed on both sides of the rotating shaft 402; when the baffles 403 of the two protective devices swing from the first position to the second position under the repulsive force of the magnetic force action, an attractive force is generated between the N-polar magnetic force action 404 on one protective device and the S-polar magnetic force action 404 on the other protective device.

[0109] The protective device also includes a limiting structure 405, which limits the final angle of the baffle 403 when it swings to the first position under the action of gravity, ensuring that it is in a vertical blocking state; the limiting structure 405 includes a protrusion or pin provided on the base plate 401, which abuts against the protrusion or pin when the baffle 403 swings to the first position.

[0110] (5) Lifting device

[0111] like Figure 14 and 15 As shown, the semiconductor material delivery system also includes a lifting device 5, which has a section of delivery element 501 inside. The delivery element 501 can move up and down inside the lifting device 5 and can dock with the delivery unit 101. The port of the lifting device 5 that docks with the delivery line 1 is provided with the aforementioned protective device.

[0112] The semiconductor material transport system of this embodiment can realize the series connection between various workstations, avoid the overshoot of semiconductor materials on the transport line, and improve the safety and stability of semiconductor material transport; in addition, the semiconductor material transport system can make full use of the space in the factory area, significantly improving the space utilization rate.

[0113] It is worth noting that, in Figures 1 to 15 In the provided embodiments, similar elements may be referred to by different terms or different reference numerals (e.g., first roller 3013 and first transmission wheel 1002, second transmission wheel 1003; drive motor 10011 and drive motor 3021), but their positions and functions are similar. The details of each embodiment can be implemented in conjunction with each other without conflict.

[0114] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A semiconductor material delivery system, characterized in that, It includes several conveyor lines, rotating devices, traversing devices, and protective devices; Each of the conveyor lines includes at least one conveyor unit, and the conveyor units are connected end to end to form a straight conveyor line; The transverse movement device is located between every two parallel and spaced-apart conveyor lines; The rotating device is located at the intersection of each pair of conveyor lines; The protective device is located at the port where the traversing device connects to the conveyor line, and at the port where the rotating device connects to the conveyor line; the protective device includes a switchable blocking mechanism, the blocking mechanism having a first state and a second state, the first state being a state that can block the movement of the container, and the second state being a state that allows the container to pass smoothly; the container is used to store semiconductor materials.

2. The semiconductor material delivery system as described in claim 1, characterized in that, The conveying unit includes an active side module, a passive side module, and a connection module; The active side module includes a drive unit and a plurality of first transmission wheels driven by the drive unit; The driven side module includes multiple second transmission wheels; The connection module includes a connection shaft and a locking mechanism; The first transmission wheel and the second transmission wheel are sleeved on the connecting shaft and are respectively fixed by the locking mechanism; When the locking mechanism is locked, the connecting shaft is fixed to the first transmission wheel and the second transmission wheel, so that power is transmitted from the first transmission wheel to the second transmission wheel through the connecting shaft under the drive of the drive unit; when the locking mechanism is opened, the first transmission wheel and the second transmission wheel can slide along the axial direction of the connecting shaft, so as to realize the quick installation or removal of the first transmission wheel and the second transmission wheel.

3. The semiconductor material delivery system as described in claim 2, characterized in that, The drive unit includes a drive motor, multiple pulleys, multiple tensioning pulleys, and a transmission belt sleeved on the multiple pulleys. The drive motor is connected to one of the pulleys, and the multiple pulleys are connected to corresponding first transmission pulleys through bearing seats. The tensioning pulleys press against the transmission belt to provide tension. The drive motor can drive the pulleys to rotate and drive the multiple first transmission pulleys to rotate synchronously through the transmission belt. The locking mechanism includes a key, a retaining ring, and a washer, used to fix the first transmission wheel and the second transmission wheel, which have slid to the target position, relative to the connecting shaft; The end of the connecting shaft has a first keyway, and the inner shaft of the bearing seat on the side of the first and second transmission wheels has a second keyway. When the first keyway and the second keyway are aligned, they cooperate with the third keyway on the inner wall of the first and second transmission wheels to form a receiving cavity. The key is located in the receiving cavity and is used to transmit torque so that the first and second transmission wheels rotate synchronously with the connecting shaft. The connecting shaft has an annular groove on the outer wall near the first keyway. When the locking mechanism is locked, the retaining ring is stuck in the groove, and the gasket abuts between the retaining ring and the transmission wheel to prevent the transmission wheel from moving axially along the connecting shaft.

4. The semiconductor material delivery system as described in claim 1, characterized in that, The transverse movement device includes a transverse movement unit that is capable of moving along a vertical line between the two conveyor lines; The blocking mechanism includes a first blocking mechanism and a second blocking mechanism. The blocking part of the first blocking mechanism is rotatably disposed at the conveying end of the transverse unit, and the blocking part of the second blocking mechanism is rotatably disposed at the port of the transverse device connected to the conveyor line. When the first blocking mechanism moves away from the second blocking mechanism, the blocking parts of both the first blocking mechanism and the second blocking mechanism are higher than the transverse unit and the conveyor line to block the moving container. When the first blocking mechanism approaches the second blocking mechanism, the blocking parts of both the first blocking mechanism and the second blocking mechanism are lower than the transverse unit and the conveyor line, so that the container can pass through smoothly.

5. The semiconductor material delivery system as described in claim 4, characterized in that, The traverse device also includes a drive assembly, a traverse track, a frame, and a blocking block; The frame is provided with the transverse track and the transverse unit, and the second blocking mechanism is located on one side of the frame connected to the conveyor line; The driving component is used to drive the movement of the lateral unit; The traverse track is used to provide a movement path for the traverse unit; The blocking block creates a partially enclosed restrictive space above the lateral moving unit along the side wall of the lateral moving device to prevent the container on the lateral moving unit from overshooting during movement.

6. The semiconductor material delivery system as claimed in claim 1, characterized in that, The rotating device includes a conveying mechanism, a driving mechanism, and a rotating mechanism; The rotating mechanism is connected to the conveying mechanism and is used to drive the conveying mechanism to rotate; The conveying mechanism includes two parallel side walls and several rotating support elements. Each rotating support element is vertically disposed between the two side walls to form two conveying ports. By rotating the rotating mechanism, the conveying ports of the conveying mechanism are rotated to a position where they are connected to the conveying line. The blocking mechanism includes a third blocking mechanism and a fourth blocking mechanism. The blocking part of the third blocking mechanism is rotatably disposed at the conveying end of the conveying mechanism, and the blocking part of the fourth blocking mechanism is rotatably disposed at the port of the conveying line. When the third blocking mechanism moves away from the fourth blocking mechanism, the blocking parts of both the third and fourth blocking mechanisms are higher than the conveying mechanism and the conveying line to block the moving container. When the third blocking mechanism approaches the fourth blocking mechanism, the blocking parts of both the third and fourth blocking mechanisms are lower than the conveying mechanism and the conveying line, so that the container can pass through smoothly.

7. The semiconductor material delivery system as described in claim 6, characterized in that, The conveying mechanism includes a driving section and a non-driving section. The non-driving section includes a first roller located at the two conveying ports. The driving section includes a rotating support element located between the two conveying ports. The rotating support element includes a roller shaft with second rollers at both ends. The roller shaft is directly connected to the driving mechanism. The conveying mechanism includes a transition section located at the apex of the conveying mechanism to reduce the circular area occupied by the conveying mechanism during rotation.

8. The semiconductor material delivery system as claimed in claim 1, characterized in that, The blocking mechanism includes a base plate, a rotating shaft, a baffle, and a magnetic actuating element; The rotating shaft is rotatably disposed on the base plate or the baffle; The substrate is fixed to one end of the conveyor line, and the baffle is connected to the substrate through the rotating shaft and can be switched between a first position and a second position around the rotating shaft; the first position is the blocking position in which the baffle is in a vertical state, and the second position is the releasing position in which the baffle is in a horizontal state. The magnetic force-acting component is disposed on the baffle; When the transverse device docks with the conveyor line, the first protective device installed at the conveying end of the transverse device approaches the second protective device installed at the port of the conveyor line. The magnetic force corresponding to the first protective device and the second protective device generates a repulsive force, driving the baffles on both sides to swing from the first position to the second position against their own gravity. When the transverse device separates from the conveyor line, the first protective device and the second protective device gradually move away from each other, and their baffles automatically swing back from the second position to the first position under their own gravity. When the rotating device is connected to the conveyor line, the third protective device installed at the conveying end of the rotating device approaches the fourth protective device installed at the port of the conveyor line. The magnetic force corresponding to the third protective device and the fourth protective device generates a repulsive force, driving the baffles on both sides to swing from the first position to the second position against their own gravity. When the rotating device separates from the conveyor line, the third protective device and the fourth protective device gradually move away from each other, and their baffles automatically swing back from the second position to the first position under their own gravity.

9. The semiconductor material delivery system as described in claim 8, characterized in that, The rotating shaft is fixedly connected to the base plate, and the rotating shaft is rotatably connected to the baffle. The magnetic force action element is positioned such that when the two protective devices gradually approach each other and reach an effective action distance, the line connecting their respective magnetic force action elements is coplanar or parallel to the axis of rotation of the two protective devices, so as to ensure that the repulsive force generates an effective torque that causes the baffle to swing in the horizontal direction. The magnetic force-acting component includes a pair of permanent magnets with opposite magnetic properties, respectively disposed on both sides of the rotating shaft; When the baffles of the two protective devices swing from the first position to the second position under the repulsive force of the magnetic force, an attractive force is generated between the N-polar magnetic force on one protective device and the S-polar magnetic force on the other protective device. The protective device also includes a limiting structure for limiting the final angle of the baffle when it swings to the first position under the action of gravity, so as to ensure that it is in a vertical blocking state; the limiting structure includes a protrusion or pin provided on the base plate, and the baffle abuts against the protrusion or pin when it swings to the first position.

10. The semiconductor material delivery system according to any one of claims 1-9, characterized in that, The semiconductor material delivery system also includes a lifting device, which has a delivery element inside. The delivery element can move up and down inside the lifting device and can dock with the delivery unit. The port of the lifting device that docks with the delivery line is equipped with a protective device.

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