A plug-in isolating valve

CN224742940UActive Publication Date: 2026-09-11ZHEJIANG JINGYANG ELECTROMECHANICAL CO LTD
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Patent Information

Application Number
CN202521913676.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-09-05
Publication Date
2026-09-11
Estimated Expiration
2035-09-05

AI Technical Summary

Technical Problem

1、传统旋板式隔离阀通过阀芯旋转实现开合,需预留较大的旋转空间,导致阀体体积庞大,在多腔体密集排列的硅芯炉中,易出现安装空间不足的问题,限制了设备的集成度;

Benefits of technology

1、本实用新型采用横向链条传动与连杆机构协同作用,有效的减小了阀体的体积;

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Abstract

This utility model relates to the field of industrial valve technology, specifically a slide gate type isolation valve, comprising: a valve body, a drive mechanism, and an isolation mechanism; the valve body includes a shell, side plates, and a flange surface extending vertically; the drive mechanism consists of a drive assembly, a drive shaft, a transmission chain, and a driven sprocket, the drive assembly driving the drive shaft to rotate, and power transmission is achieved through chain drive; the isolation mechanism includes an isolation valve core, a drive connecting rod, a valve core connecting rod, a pull ring fixing rod, and a spring, the isolation valve core being connected to the valve core connecting rod via a connecting assembly, and the spring connecting the valve core connecting rod to the pull ring fixing rod. This utility model employs a transverse chain drive in conjunction with the connecting rod mechanism, reducing the volume; it utilizes pressure difference to achieve valve core self-sealing, and with the spring pre-tightening release design, it ensures high sealing performance while avoiding long-term friction and wear between the valve core and the valve body.
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Description

Technical Field

[0001] This utility model relates to the field of industrial valve technology, and specifically to a slide gate isolation valve. Background Technology

[0002] In industrial equipment requiring a vacuum environment, such as multi-core silicon furnaces, cavity isolation valves are key components for achieving communication and isolation between upper and lower cavities. Traditional isolation valves (such as rotary isolation valves) have many limitations in application: 1. Traditional rotary plate isolation valves open and close by rotating the valve core, which requires a large amount of rotation space, resulting in a large valve body size. In silicon core furnaces with densely arranged multi-chamber structures, insufficient installation space can easily occur, limiting the integration of the equipment. 2. The valve core and valve body of the rotary valve are sealed by mechanical contact. Long-term rotation can easily lead to wear on the sealing surface. Especially in a vacuum environment, tiny gaps can cause gas leakage, making it difficult to maintain a high vacuum state in the cavity. Utility Model Content

[0003] This utility model provides a slide gate type isolation valve to solve the problems of the prior art.

[0004] The objective of this utility model can be achieved through the following technical solution: a slide gate type isolation valve, comprising: The valve body includes a housing and side plates disposed at the left and right ends of the housing, and flange surfaces are provided through the upper and lower ends of the housing; The drive mechanism includes a drive assembly, a drive shaft, a transmission chain, and a driven sprocket. The drive assembly is located on the outside of the housing and is connected to the drive shaft for transmission. The drive shaft and the driven sprocket are rotatably mounted on the left and right ends of the housing, respectively. The transmission chain is sleeved between the sprocket of the drive shaft and the driven sprocket and meshes with them. An isolation mechanism includes an isolation valve core, a drive linkage, a valve core linkage, a pull ring fixing rod, a spring, and a limiting wheel. The isolation valve core is disposed at the lower end of the valve core linkage via a connecting assembly. Both ends of the drive linkage are connected to the transmission chain. The valve core linkage is fixedly connected to the drive linkage and has a connecting rod one at its side end. The pull ring fixing rod is disposed on the upper surface of the isolation valve core and has a connecting rod two at its side end. Both ends of the spring are respectively sleeved on the connecting rod one and the connecting rod two and are limited by a limiting member. The limiting wheel is disposed at the end of the housing away from the drive assembly.

[0005] In a further improvement, the connecting assembly includes a lower connecting seat disposed on the upper end of the isolation valve core, an upper connecting seat disposed on the valve core connecting rod, and a rotating connecting rod rotatably disposed between the lower connecting seat and the upper connecting seat.

[0006] In a further improvement, the drive assembly includes a magnetic fluid seal, a reduction gearbox, and a drive motor. The magnetic fluid seal is sleeved on the outside of the drive shaft and fixedly connected to the side end of the housing. The reduction gearbox is disposed on the side end of the magnetic fluid seal and is drivenly connected to the drive shaft. The output end of the drive motor is drivenly connected to the reduction gearbox.

[0007] Further improvements include an adjustment mechanism, which includes a fixed plate fixedly disposed on the outside of the housing, a sliding plate slidably disposed on the outside of the fixed plate, an adjustment plate disposed on the outside of the housing, and an adjustment bolt threadedly connected to the adjustment plate. The front end of the adjustment bolt passes through the adjustment plate and abuts against the side end of the sliding plate. The passive sprocket is rotatably disposed on the inside of the sliding plate via a rotating shaft.

[0008] As a further improvement, a collision-resistant limiting plate is provided on the side of the drive linkage near the drive assembly.

[0009] In a further improvement, the drive linkage is provided with limit rollers at both ends, and the housing is provided with limit grooves, with the limit rollers slidably disposed within the limit grooves.

[0010] A further improvement is that a sealing ring is provided on the upper side of the flange face at the lower end of the housing, and the upper end of the sealing ring can abut against the lower surface of the isolation valve core.

[0011] As a further improvement, an observation window is provided on the side of the housing near the drive assembly.

[0012] Compared with the prior art, the present invention has the following beneficial effects: 1. This utility model adopts the synergistic effect of transverse chain drive and linkage mechanism, which effectively reduces the volume of the valve body; 2. This utility model utilizes pressure difference to achieve valve core self-sealing, combined with spring pre-tightening release design, which not only ensures high sealing performance during isolation, but also avoids long-term friction and wear between valve core and valve body. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a schematic diagram of the drive mechanism and isolation mechanism of this utility model; Figure 3 This is a schematic diagram of the isolation mechanism of this utility model; Figure 4 This is an internal structural diagram of the present invention. Figure 5 This is a cross-sectional view of the present invention.

[0014] In the diagram, 1. Valve body; 11. Housing; 111. Flange face; 112. Limiting groove; 12. Side plate; 2. Drive mechanism; 21. Drive assembly; 211. Magnetohydrodynamic seal; 212. Reduction gearbox; 213. Drive motor; 22. Drive shaft; 23. Transmission chain; 24. Passive sprocket; 3. Isolation mechanism; 31. Isolation valve core; 32. Drive connecting rod; 321. Limiting roller; 33. Valve core connecting rod; 331. Connecting rod one; 34. Pull ring fixing rod; 341. Connecting rod two; 35. Spring; 36. Limiting wheel; 4. Connecting assembly; 41. Lower connecting seat; 42. Upper connecting seat; 43. Rotating connecting rod; 5. Adjusting mechanism; 51. Fixing plate; 52. Sliding plate; 53. Adjusting plate; 54. Adjusting bolt; 61. Anti-collision limiting plate; 62. Sealing ring; 63. Observation window. Detailed Implementation

[0015] In the description of this utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0016] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0017] The following is a description of the embodiments and appendices. Figures 1-5 The technical solution of this utility model will be further described below.

[0018] Example 1 A slide gate isolation valve, comprising: Valve body 1, the valve body 1 includes a housing 11 and side plates 12 disposed at the left and right ends of the housing 11, and flange surfaces 111 are provided through the upper and lower ends of the housing 11; The drive mechanism 2 includes a drive assembly 21, a drive shaft 22, a transmission chain 23, and a driven sprocket 24. The drive assembly 21 is located on the outside of the housing 11 and is connected to the drive shaft 22 for transmission. The drive shaft 22 and the driven sprocket 24 are rotatably mounted on the left and right ends of the housing 11, respectively. The transmission chain 23 is sleeved between the sprocket of the drive shaft 22 and the driven sprocket 24 and meshes with them. The isolation mechanism 3 includes an isolation valve core 31, a drive connecting rod 32, a valve core connecting rod 33, a pull ring fixing rod 34, a spring 35, and a limiting wheel 36. The isolation valve core 31 is disposed at the lower end of the valve core connecting rod 33 via a connecting assembly 4. The two ends of the drive connecting rod 32 are connected to the transmission chain 23. The valve core connecting rod 33 is fixedly connected to the drive connecting rod 32 and has a connecting rod 331 on its side. The pull ring fixing rod 34 is disposed on the upper surface of the isolation valve core 31 and has a connecting rod 341 on its side. The two ends of the spring 35 are respectively sleeved on the connecting rod 331 and the connecting rod 341 and are limited by a limiting member. The limiting wheel 36 is disposed at the end of the housing 11 away from the drive assembly 21.

[0019] like Figures 1-5 As shown, the principle of this utility model is as follows: In use: The isolation valve is connected to the upper and lower chambers. At this time, the lower chamber is filled with protective gas, and the upper chamber is under normal pressure. When in use, the upper chamber is evacuated and then filled with protective gas to make the pressure of the upper and lower chambers similar. At this time, the preload of the spring 35 is transmitted through the connecting rod 331 and the connecting rod 341, pulling the isolation valve core 31 upward away from the inner wall of the housing 11. The control system drives the servo motor 211 to rotate, which drives the drive shaft 22 to rotate through the reducer. The transmission chain 23 drives the drive connecting rod 32 and the valve core connecting rod 33 to move, pulling the isolation valve core 31 to the side away from the flange surface 111. At this time, the spring 35 tightens the isolation valve core 31, and the upper and lower chambers are connected through the hollow channel of the housing 11. Isolation status: When isolation is required, the servo motor 211 rotates in the reverse direction, and the transmission chain 23 pushes the isolation valve core 31 to move to the flange face 111. At this time, the side end of the isolation valve core 31 abuts against the limit wheel 36. Under the action of the limit wheel 36, the spring 35 contracts, and the isolation valve core 31 descends under the action of gravity. The valve core covers the channel section of the housing 11, and then protective gas is filled into the upper cavity, so that a pressure difference is formed between the upper and lower cavities (the pressure in the upper cavity is greater than that in the lower cavity). Under the action of pressure, the isolation valve core 31 is pressed against the sealing surface of the inner wall of the housing 11, realizing the complete isolation of the upper and lower cavities. At this time, the lower cavity is in an isolated state, which facilitates the independent operation of the upper cavity.

[0020] This utility model adopts the synergistic effect of transverse chain drive and linkage mechanism, which effectively reduces the volume of valve body; it uses pressure difference to achieve valve core self-sealing, and with the spring pre-tightening release design, it not only ensures high sealing performance during isolation, but also avoids long-term friction and wear between valve core and valve body.

[0021] As a further preferred embodiment, the connecting assembly 4 includes a lower connecting seat 41 disposed on the upper end of the isolation valve core 31, an upper connecting seat 42 disposed on the valve core connecting rod 33, and a rotating connecting rod 43 rotatably disposed between the lower connecting seat 41 and the upper connecting seat 42.

[0022] Specifically, after assembly, the rotating connecting rod 43 can rotate relative to the lower connecting seat 41 around the horizontal axis, and at the same time rotate relative to the upper connecting seat 42 around the vertical axis, forming a universal joint-type flexible connection structure. The flexible connection structure can buffer the instantaneous impact force under the action of pressure difference, avoid cracks or deformations in the connection part between the valve core connecting rod and the isolation valve core due to rigid stress, and improve the stability of the overall structure.

[0023] As a further preferred embodiment, the drive assembly 21 includes a magnetic fluid seal 211, a reduction gearbox 212, and a drive motor 213. The magnetic fluid seal 211 is sleeved on the outside of the drive shaft 22 and fixedly connected to the side end of the housing 11. The reduction gearbox 212 is disposed on the side end of the magnetic fluid seal 211 and is drivenly connected to the drive shaft 22. The output end of the drive motor 213 is drivenly connected to the reduction gearbox 212.

[0024] Specifically, the drive shaft 22 passes through the magnetohydrodynamic seal 211 and the reduction gearbox 212 in sequence to form a transmission chain of "motor-reduction gearbox-seal-housing", ensuring that the vacuum environment inside the housing 11 is not affected during power transmission.

[0025] As a further preferred embodiment, it also includes an adjustment mechanism 5, which includes a fixed plate 51 fixedly disposed on the outside of the housing 11, a sliding plate 52 slidably disposed on the outside of the fixed plate 51, an adjustment plate 53 disposed on the outside of the housing 11, and an adjustment bolt 54 threadedly connected to the adjustment plate 53. The front end of the adjustment bolt 54 passes through the adjustment plate 53 and abuts against the side end of the sliding plate 52. The passive sprocket 24 is rotatably disposed on the inside of the sliding plate 52 via a rotating shaft.

[0026] Specifically, the distance between the driven sprocket 24 and the driving sprocket can be changed as the sliding plate 52 moves, thereby adjusting the tension of the transmission chain 23.

[0027] As a further preferred embodiment, the drive link 32 is provided with a collision-resistant limiting plate 61 on the side near the drive assembly 21.

[0028] Specifically, the displacement of the drive link 32 is limited by the anti-collision limit plate 61 to prevent the drive link 32 from having a hard collision with the drive assembly 21.

[0029] As a further preferred embodiment, the drive linkage 32 is provided with limit rollers 321 at both ends, and the housing 11 is provided with limit grooves 112 inside, and the limit rollers 321 are slidably disposed in the limit grooves 112.

[0030] Specifically, the limiting roller 321 is embedded in the limiting groove 112 and rolls with the drive link 32, limiting the swing of the link in the horizontal direction, ensuring that the isolation valve core 31 moves in a straight line, and avoiding misalignment of the sealing surface due to shaking.

[0031] As a further preferred embodiment, a sealing ring 62 is provided on the upper side of the flange face 111 at the lower end of the housing 11, and the upper end of the sealing ring 62 can abut against the lower surface of the isolation valve core 31.

[0032] Specifically, when the isolation valve core 31 moves downward under the action of pressure difference, the lower surface of the valve core fits tightly with the upper end of the sealing ring 62, enhancing the sealing effect.

[0033] As a further preferred embodiment, the housing 11 is provided with an observation window 63 on the side near the drive assembly 21.

[0034] Specifically, by observing the internal status in real time through window 63 and combining the sensor feedback data, the valve core position, chain tension, and sealing effectiveness can be quickly determined.

[0035] The preferred embodiments of this utility model have been described in detail above. It should be understood that those skilled in the art can make numerous modifications and variations based on the concept of this utility model without creative effort. Therefore, all technical solutions that can be obtained by those skilled in the art based on the concept of this utility model through logical analysis, reasoning, or limited experimentation on the basis of existing technology should be within the scope of protection defined by the claims.

Claims

1. A slide gate type isolation valve, characterized in that, include: The valve body includes a housing and side plates disposed at the left and right ends of the housing, and flange surfaces are provided through the upper and lower ends of the housing; The drive mechanism includes a drive assembly, a drive shaft, a transmission chain, and a driven sprocket. The drive assembly is located on the outside of the housing and is connected to the drive shaft for transmission. The drive shaft and the driven sprocket are rotatably mounted on the left and right ends of the housing, respectively. The transmission chain is sleeved between the sprocket of the drive shaft and the driven sprocket and meshes with them. An isolation mechanism includes an isolation valve core, a drive linkage, a valve core linkage, a pull ring fixing rod, a spring, and a limiting wheel. The isolation valve core is disposed at the lower end of the valve core linkage via a connecting assembly. Both ends of the drive linkage are connected to the transmission chain. The valve core linkage is fixedly connected to the drive linkage and has a connecting rod one at its side end. The pull ring fixing rod is disposed on the upper surface of the isolation valve core and has a connecting rod two at its side end. Both ends of the spring are respectively sleeved on the connecting rod one and the connecting rod two and are limited by a limiting member. The limiting wheel is disposed at the end of the housing away from the drive assembly.

2. A slide gate isolation valve according to claim 1, characterized in that, The connecting assembly includes a lower connecting seat disposed on the upper end of the isolation valve core, an upper connecting seat disposed on the valve core connecting rod, and a rotating connecting rod rotatably disposed between the lower connecting seat and the upper connecting seat.

3. A slide gate isolation valve according to claim 1, characterized in that, The drive assembly includes a magnetohydrodynamic seal, a reduction gearbox, and a drive motor. The magnetohydrodynamic seal is sleeved on the outside of the drive shaft and fixedly connected to the side end of the housing. The reduction gearbox is disposed on the side end of the magnetohydrodynamic seal and is drivenly connected to the drive shaft. The output end of the drive motor is drivenly connected to the reduction gearbox.

4. A slide gate isolation valve according to claim 1, characterized in that, It also includes an adjustment mechanism, which includes a fixed plate fixedly disposed on the outside of the housing, a sliding plate slidably disposed on the outside of the fixed plate, an adjustment plate disposed on the outside of the housing, and an adjustment bolt threadedly connected to the adjustment plate. The front end of the adjustment bolt passes through the adjustment plate and abuts against the side end of the sliding plate. The passive sprocket is rotatably disposed on the inside of the sliding plate via a rotating shaft.

5. A slide gate isolation valve according to claim 1, characterized in that, A collision-resistant limiting plate is provided on the side of the drive linkage near the drive assembly.

6. A slide gate isolation valve according to claim 1, characterized in that, The drive linkage is provided with limit rollers at both ends, and the housing is provided with limit grooves. The limit rollers are slidably disposed in the limit grooves.

7. A slide gate isolation valve according to claim 1, characterized in that, A sealing ring is provided on the upper side of the flange face at the lower end of the housing, and the upper end of the sealing ring can abut against the lower surface of the isolation valve core.

8. A slide gate isolation valve according to claim 1, characterized in that, An observation window is provided on the side of the housing near the drive assembly.