Anti-blocking device for caustic washing tower

Abstract

The utility model relates to caustic washing tower tail gas treatment technical field, and disclose a kind of for anti-blocking device of caustic washing tower, including caustic washing tower main body, caustic washing tower main body side is connected with spraying chamber, caustic washing tower main body other side is connected with water tank;Several first spray pipes are installed in caustic washing tower main body, and first spray pipe is used to spray lye in caustic washing tower main body, and carry out multiple reactions with unreacted completely tail gas;Communication pipe is communicated between caustic washing tower main body and spraying chamber;The inner wall top of spraying chamber is fixed with baffle, and the setting of baffle prevents that one aspect prevents plugging caused by chemical liquid spraying at first air inlet pipe, guarantees the smooth of tail gas emission;Another aspect makes tail gas and the air of third air inlet pipe enter fully mixed and then from lower to upper and contact reaction with spraying chemical liquid, increases the contact time and contact area of tail gas and chemical liquid, improves reaction efficiency, ensures that harmful substance in tail gas can be more fully treated.

Description

Technical Field

[0001] This utility model relates to the field of alkaline scrubbing tower tail gas treatment technology, specifically an anti-clogging device for alkaline scrubbing towers. Background Technology

[0002] With the increasingly widespread use of semiconductor materials in the semiconductor industry, their production technology is also constantly developing and progressing. Improving product quality is the main development trend, but it also comes with the large-scale production and treatment of waste gas.

[0003] When the equipment produces a large amount of gases such as silanes and hydrochloric acid during operation, these gases are treated through chemical reactions such as acid-base neutralization, hydrolysis, and condensation. When the industrial raw material CH3Cl3Si does not react completely during the product production process and enters the tail gas treatment stage, it undergoes a hydrolysis reaction with water, followed by dehydration and condensation to form a network polymer. Macroscopically, this forms a white, insoluble gel or solid, which accumulates at the gas outlet of the chamber, causing blockage. The tail gas produced during the equipment production process cannot be discharged and treated quickly, the pressure at the front end of the equipment will increase, and the tail gas will not be able to smoothly enter the spray chamber, making the entire tail gas treatment system unable to operate normally. Therefore, an anti-clogging device for the alkali washing tower is proposed. Utility Model Content

[0004] The purpose of this invention is to provide an anti-clogging device for alkali washing towers to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: an anti-clogging device for an alkaline washing tower, comprising an alkaline washing tower body, a spray chamber connected to one side of the alkaline washing tower body, and a water tank connected to the other side of the alkaline washing tower body; The main body of the alkaline washing tower is equipped with several first spray pipes. The first spray pipes are used to spray alkaline solution into the main body of the alkaline washing tower to react with the unreacted tail gas multiple times. A connecting pipe connects the main body of the alkali washing tower and the spray chamber; A baffle is fixed to the top of the inner wall of the spray chamber. A second spray pipe located to the left of the baffle is fixed to the top of the inner wall of the spray chamber. A first air inlet pipe located to the right of the baffle is fixedly inserted into the top of the inner wall of the spray chamber. A second air inlet pipe is sealed inside the first air inlet pipe. A third air inlet pipe located to one side of the second air inlet pipe is inserted into the top of the inner wall of the spray chamber.

[0006] Preferably, the connecting pipe is arc-shaped, and the top of the alkali washing tower body is provided with an exhaust port.

[0007] Preferably, the bottom of the inner wall of the alkali washing tower body is provided with a through hole, and the alkali washing tower body and the water tank are connected through the through hole.

[0008] Preferably, the water tank is provided with a filter screen inside, which is used to filter solid impurities inside the water tank.

[0009] Preferably, the first air intake pipe is used to introduce exhaust gas into the spray chamber, and the second air intake pipe is used to introduce air to purge the solids precipitated in the first air intake pipe.

[0010] Preferably, the third air intake pipe is used to supplement air to dilute the introduced exhaust gas, and a solenoid valve is installed at the air intake end of the second air intake pipe.

[0011] Preferably, the bottom side of the water tank is connected to a second drain pipe, and a valve is installed on the second drain pipe.

[0012] Preferably, the bottom side of the spray chamber is connected to a first drain pipe, and a valve is installed on the first drain pipe.

[0013] Compared with the prior art, the present invention, by adopting the above technical solution, has the following technical effects: First, by introducing air through the second air inlet pipe under the control of the solenoid valve, the solid matter precipitated in the first air inlet pipe can be purged, effectively preventing the first air inlet pipe from being blocked, ensuring that the exhaust gas can smoothly enter the spray chamber, and maintaining the stable operation of the entire exhaust gas treatment system.

[0014] Second, the baffle design prevents the liquid medicine from spraying onto the first air intake pipe and causing blockage, ensuring smooth exhaust gas discharge. On the other hand, it allows the exhaust gas to fully mix with the air entering through the third air intake pipe before reacting with the sprayed liquid medicine from bottom to top, increasing the contact time and contact area between the exhaust gas and the liquid medicine, improving reaction efficiency, and ensuring that harmful substances in the exhaust gas can be treated more thoroughly.

[0015] Third, the alkaline solution sprayed through the second spray pipe neutralizes HCl, which can quickly reduce the content of acidic substances in the exhaust gas and effectively remove various harmful substances in the exhaust gas. The first spray pipe sprays alkaline solution into the main body of the alkaline scrubbing tower, which reacts multiple times with the exhaust gas that has not been fully reacted in the upper spray chamber. The multi-stage spraying and reaction method can further remove the residual harmful gases after pre-spraying, achieve deep purification of the exhaust gas, and make the emitted gas more in line with environmental protection standards. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the main structure of this utility model; Figure 2 This is a schematic diagram of the front cross-sectional structure of this utility model; Figure 3 This is a schematic diagram of the structure of the second air intake pipe of this utility model; Figure 4 This is a schematic diagram of the filter screen structure of this utility model.

[0018] Explanation of reference numerals in the attached drawings: 1. Main body of the alkali washing tower; 2. First spray pipe; 3. Exhaust port; 4. Second spray pipe; 5. Baffle; 6. First air inlet pipe; 7. Second air inlet pipe; 8. Third air inlet pipe; 9. Spray chamber; 10. Connecting pipe; 11. Water tank; 12. Filter screen; 13. Solenoid valve; 14. First drain pipe; 15. Second drain pipe; 16. Through hole. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] It should be noted that the structures, proportions, sizes, etc., shown in the accompanying drawings of this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the conditions under which this application can be implemented. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size should still fall within the scope of the technical content disclosed in this application, provided that they do not affect the effects and purposes that this application can produce.

[0021] Example Please see Figure 1-4 This utility model provides a technical solution: an anti-clogging device for an alkaline scrubbing tower, including an alkaline scrubbing tower body 1. The alkaline scrubbing tower body 1 is used to treat the exhaust gas multiple times to obtain gas that meets the standards for emission. A spray chamber 9 is connected to one side of the alkaline scrubbing tower body 1. The spray chamber 9 stores the chemical solution sprayed by the second spray pipe 4 and the product after its initial reaction with the exhaust gas. A water tank 11 is connected to the other side of the alkaline scrubbing tower body 1. The water tank 11 is used to load the liquid after the first spray pipe 2 and the exhaust gas have been neutralized. The main body 1 of the alkali washing tower is equipped with several first spray pipes 2. The first spray pipes 2 are used to spray alkali solution into the main body 1 of the alkali washing tower, and react with the unreacted tail gas in the upper spray chamber 9 multiple times. A connecting pipe 10 connects the main body 1 of the alkali washing tower and the spray chamber 9. The connecting pipe 10 is arc-shaped to prevent the chemical solution sprayed by the second spray pipe 4 from entering the main body 1 of the alkali washing tower due to high pressure, which would affect the reaction effect. The top of the main body 1 of the alkali washing tower is provided with an exhaust port 3. The treated gas will be discharged into the atmosphere after being tested and meeting the standards through this port. A through hole 16 is opened at the bottom of the inner wall of the main body 1 of the alkali washing tower, and the main body 1 of the alkali washing tower and the water tank 11 are connected through the through hole 16.

[0022] A baffle 5 is fixed to the top of the inner wall of the spray chamber 9. The baffle 5 prevents the liquid medicine from being sprayed into the first air inlet pipe 6 and causing blockage. At the same time, it allows the exhaust gas to be fully mixed with the air entering from the third air inlet pipe 8 and then react with the sprayed liquid medicine from bottom to top. A second spray pipe 4 is fixed to the top of the inner wall of the spray chamber 9, located to the left of the baffle 5. The second spray pipe 4 sprays out the liquid medicine and reacts chemically with the exhaust gas. Most of the products and impurities settle inside the spray chamber 9 under the action of gravity. A first air inlet pipe 6 is fixedly inserted into the top of the inner wall of the spray chamber 9, located to the right of the baffle 5. A second air inlet pipe 7 is sealed inside the first air inlet pipe 6. A third air inlet pipe 8 is inserted into the top of the inner wall of the spray chamber 9, located to the side of the second air inlet pipe 7. When the exhaust gas enters the spray chamber 9, water is injected into the spray chamber 9. First, air dilutes the exhaust gas. Then, CH3SiCl3 reacts with water to produce unstable methylsilyltriol and HCl. The methylsilyltriol undergoes dehydration and condensation to form a three-dimensional network polymer, polymethylsilsesquioxane. The HCl neutralizes the alkaline solution sprayed through the second spray pipe 4. A large portion of the HCl comes from the high-temperature decomposition of CH3SiCl3 during the equipment's production process. Most of the exhaust gas is treated by the spray chamber 9. When the gas enters the main body 1 of the alkaline washing tower for secondary alkaline washing, it undergoes multi-stage spraying through the first spray pipe 2 to remove the residual harmful gases after pre-spraying. Finally, after testing and meeting the emission standards, it is discharged through the exhaust port 3.

[0023] A filter screen 12 is installed inside the water tank 11. The filter screen 12 is used to filter solid impurities inside the water tank 11. The first air inlet pipe 6 is used to pass the exhaust gas generated during the production process into the inside of the spray chamber 9. The second air inlet pipe 7 is used to pass air in to purge the solid matter precipitated from the first air inlet pipe 6, so as to prevent the first air inlet pipe 6 from being blocked.

[0024] The third air intake pipe 8 is used to supplement air or nitrogen to dilute the introduced exhaust gas and reduce the concentration of toxic gases. The second air intake pipe 7 is equipped with a solenoid valve 13 at the air intake end. The solenoid valve 13 is used to control the air flow in the second air intake pipe 7. When the equipment is in production, it is opened. The bottom side of the water tank 11 is connected to the second drain pipe 15, and a valve is installed on the second drain pipe 15. The bottom side of the spray chamber 9 is connected to the first drain pipe 14, and a valve is installed on the first drain pipe 14.

[0025] Working principle: The exhaust gas generated during the production process enters the spray chamber 9 through the first air inlet pipe 6; at the same time, air is introduced into the second air inlet pipe 7 under the control of the solenoid valve 13 to purge the solids precipitated in the first air inlet pipe 6 and prevent the first air inlet pipe 6 from being blocked; the third air inlet pipe 8 replenishes air to dilute the introduced exhaust gas and reduce the concentration of toxic gases.

[0026] Water is pre-filled inside the spray chamber 9. After the exhaust gas enters, the air dilutes it. Then, CH3SiCl3 in the exhaust gas undergoes a hydrolysis reaction with water to generate unstable methylsilyltriol and HCl. The methylsilyltriol undergoes dehydration and condensation to form a three-dimensional network polymer, polymethylsilsesquioxane. A large portion of the HCl comes from the high-temperature decomposition of CH3SiCl3 during the equipment's production process. The second spray pipe 4 sprays alkaline solution, and HCl reacts with the alkaline solution. Most of the products and impurities settle inside the spray chamber 9 under gravity. The baffle 5 prevents the solution from spraying onto the first air inlet pipe 6 and causing blockage. At the same time, it ensures that the exhaust gas is fully mixed with the air entering through the third air inlet pipe 8 and reacts with the sprayed solution from bottom to top. Most of the exhaust gas is then treated by the spray chamber 9.

[0027] After preliminary treatment in spray chamber 9, the gas enters the alkaline washing tower body 1 through arc-shaped connecting pipe 10. Arc-shaped connecting pipe 10 can prevent the chemical solution sprayed by the second spray pipe 4 from entering the alkaline washing tower body 1 due to high pressure, thus affecting the reaction effect. Several first spray pipes 2 are installed inside the alkaline washing tower body 1. The first spray pipes 2 spray alkaline solution into the alkaline washing tower body 1, and react with the unreacted tail gas in the upper spray chamber 9 multiple times to remove the residual harmful gas after pre-spraying.

[0028] The bottom of the inner wall of the alkali washing tower body 1 is provided with a through hole 16. The alkali washing tower body 1 and the water tank 11 are connected through the through hole 16. The liquid after the reaction between the alkali solution sprayed by the first spray pipe 2 and the tail gas flows into the water tank 11 through the through hole 16. A filter screen 12 is provided inside the water tank 11. The filter screen 12 is used to filter solid impurities inside the water tank 11. A second drain pipe 15 is connected to one side of the bottom of the water tank 11. A valve is installed on the second drain pipe 15. The discharge of liquid in the water tank 11 can be controlled by the valve. A first drain pipe 14 is connected to one side of the bottom of the spray chamber 9. A valve is installed on the first drain pipe 14. The discharge of liquid in the spray chamber 9 can be controlled by the valve.

[0029] After the gas undergoes secondary alkaline washing treatment in the main body 1 of the alkaline washing tower, and is tested to meet emission standards, it is discharged into the atmosphere through the exhaust port 3 at the top of the main body 1 of the alkaline washing tower.

[0030] In summary, by introducing air through the second air intake pipe 7 under the control of the solenoid valve 13, the solid matter precipitated in the first air intake pipe 6 can be purged, effectively preventing the first air intake pipe 6 from being blocked, ensuring that the exhaust gas can smoothly enter the spray chamber 9, and maintaining the stable operation of the entire exhaust gas treatment system.

[0031] The baffle 5 is designed to prevent the liquid medicine from spraying onto the first air intake pipe 6 and causing blockage, thus ensuring smooth exhaust gas discharge. On the other hand, it allows the exhaust gas to mix fully with the air entering through the third air intake pipe 8 and then react with the sprayed liquid medicine from bottom to top, increasing the contact time and contact area between the exhaust gas and the liquid medicine, improving reaction efficiency, and ensuring that harmful substances in the exhaust gas can be treated more fully.

[0032] The alkaline solution sprayed from the second spray pipe 4 neutralizes HCl, which can quickly reduce the content of acidic substances in the exhaust gas and effectively remove various harmful substances in the exhaust gas. The first spray pipe 2 sprays alkaline solution into the main body 1 of the alkaline scrubbing tower, which reacts multiple times with the exhaust gas that has not been fully reacted in the upper spray chamber 9. The multi-stage spraying and reaction method can further remove the residual harmful gases after pre-spraying, achieve deep purification of the exhaust gas, and make the emitted gas more in line with environmental protection standards.

[0033] Those skilled in the art will understand that the features described in the various embodiments and / or claims of this utility model can be combined or combined in various ways, even if such combinations or combinations are not explicitly described in this utility model. In particular, the features described in the various embodiments and / or claims of this utility model can be combined or combined in various ways without departing from the spirit and teachings of this utility model. All such combinations and / or combinations fall within the scope of this utility model.

Claims

1. An anti-clogging device for an alkali washing tower, comprising an alkali washing tower body (1), characterized in that, A spray chamber (9) is connected to one side of the main body (1) of the alkali washing tower, and a water tank (11) is connected to the other side of the main body (1). The alkaline washing tower body (1) is equipped with several first spray pipes (2). The first spray pipes (2) are used to spray alkaline solution into the alkaline washing tower body (1) and react with the unreacted tail gas multiple times. A connecting pipe (10) connects the main body (1) of the alkali washing tower and the spray chamber (9). A baffle (5) is fixed to the top of the inner wall of the spray chamber (9). A second spray pipe (4) located to the left of the baffle (5) is fixed to the top of the inner wall of the spray chamber (9). A first air inlet pipe (6) located to the right of the baffle (5) is fixedly inserted into the top of the inner wall of the spray chamber (9). A second air inlet pipe (7) is sealed inside the first air inlet pipe (6). A third air inlet pipe (8) located to the side of the second air inlet pipe (7) is inserted into the top of the inner wall of the spray chamber (9).

2. The anti-clogging device for an alkali washing tower according to claim 1, characterized in that, The connecting pipe (10) is arc-shaped, and the top of the alkali washing tower body (1) is provided with an exhaust port (3).

3. The anti-clogging device for an alkali washing tower according to claim 1, characterized in that, The bottom of the inner wall of the alkaline washing tower body (1) is provided with a through hole (16), and the alkaline washing tower body (1) and the water tank (11) are connected through the through hole (16).

4. The anti-clogging device for an alkali washing tower according to claim 1, characterized in that, A filter screen (12) is provided inside the water tank (11), and the filter screen (12) is used to filter solid impurities inside the water tank (11).

5. The anti-clogging device for an alkali washing tower according to claim 1, characterized in that, The first air inlet pipe (6) is used to pass the exhaust gas into the inside of the spray chamber (9), and the second air inlet pipe (7) is used to pass air in to purge the solid matter precipitated from the first air inlet pipe (6).

6. The anti-clogging device for an alkali washing tower according to claim 1, characterized in that, The third air intake pipe (8) is used to supplement air to dilute the exhaust gas, and the second air intake pipe (7) is equipped with a solenoid valve (13) at the air intake end.

7. The anti-clogging device for an alkali washing tower according to claim 1, characterized in that, The bottom side of the water tank (11) is connected to a second drain pipe (15), and a valve is installed on the second drain pipe (15).

8. The anti-clogging device for an alkali washing tower according to claim 1, characterized in that, The bottom side of the spray chamber (9) is connected to a first drain pipe (14), and a valve is installed on the first drain pipe (14).

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