High precision industrial thermocouple for semiconductor equipment

Abstract

The utility model provides a kind of high-precision industrial thermocouple for semiconductor equipment, comprising: protective sleeve, with temperature measuring end and the end that goes out;Connecting pipe, end that goes out is inserted into connecting pipe;Heat shrink tube, it is connected in protective sleeve, connecting pipe outside, and cover the joint section of connecting pipe and protective sleeve;Insulating sleeve, one end is inserted into connecting pipe and is butt joint with protective sleeve, another end is connected with plug-in component;Thermocouple wire, one end is fixed in temperature measuring end, another end is in order through end that goes out, connecting pipe, insulating sleeve, and is connected with plug-in component. By adopting whole section thermocouple wire, not using thermocouple compensation wire, the accuracy of thermocouple temperature measurement is guaranteed. By setting insulating sleeve outside thermocouple wire, effectively avoid the interference of external environment to thermocouple wire;And the application is outside the joint section of protective sleeve and connecting pipe by setting heat shrink tube, effectively protect stress concentration position, thereby reduce the risk of brittle fracture here.

Description

Technical Field

[0001] This utility model relates to the field of thermocouple technology, and in particular to a high-precision industrial thermocouple for semiconductor equipment. Background Technology

[0002] In semiconductor manufacturing processes, equipment such as oxidation / diffusion and chemical vapor deposition (CVD) need to operate in high-temperature environments of 800℃ to 1100℃ for extended periods, with stringent requirements for temperature control accuracy. Temperature control accuracy directly affects key process parameters such as the doping concentration of semiconductor wafers and the quality of thin film deposition. Significant temperature fluctuations or measurement errors can lead to wafer scrapping and result in substantial economic losses.

[0003] Currently, existing industrial thermocouples generally employ a sensor solution combining thermocouple wires and compensating leads, which cannot meet the precise temperature measurement requirements of semiconductor equipment. Therefore, it is necessary to further optimize the structure of industrial thermocouples to ensure the accuracy and stability of their measurement of the internal temperature field of semiconductor equipment. Summary of the Invention

[0004] This invention provides a high-precision industrial thermocouple for semiconductor equipment, which solves the problem that existing industrial thermocouples using thermocouple wires combined with compensating wires cannot meet the precise temperature measurement requirements of semiconductor equipment.

[0005] This utility model provides a high-precision industrial thermocouple for semiconductor equipment, comprising: The protective sleeve has a temperature measuring end and an outlet end; A connecting pipe, wherein the protruding end extends into the connecting pipe; Heat shrink tubing is connected to the outside of the protective sleeve and the connecting tube, and covers the joint section between the connecting tube and the protective sleeve; An insulating sleeve, one end of which extends into the connecting tube and connects to the protective sleeve, and the other end of which connects to the plug-in component; The thermocouple wire has one end fixed to the temperature measuring end, and the other end passes through the outlet end, the connecting tube, and the insulating sleeve in sequence, and is connected to the plug-in component.

[0006] In one embodiment of this utility model, the protective sleeve is a ceramic sleeve.

[0007] In one embodiment of the present invention, the protective sleeve is provided with a partition, which is used to divide the protective sleeve into two mounting cavities, and the mounting cavities are used to install the thermocouple wire.

[0008] In one embodiment of this utility model, the insulating sleeve is a flexible insulating sleeve.

[0009] In one embodiment of this utility model, the insulating sleeve is made of polytetrafluoroethylene.

[0010] In one embodiment of this utility model, the protective sleeve, the insulating sleeve, and the connecting pipe are bonded and fixed together by a curing agent inside the connecting pipe.

[0011] In one embodiment of this utility model, the connecting pipe is a stainless steel pipe.

[0012] In one embodiment of this utility model, the index number of the plug-in is consistent with the index number of the thermocouple wire.

[0013] In one embodiment of this utility model, the thermocouple wire and the connector are connected by a set screw.

[0014] In one embodiment of the present invention, the connector is provided with a fixing clip, which is used to clamp the insulating sleeve.

[0015] The beneficial effects of this utility model are as follows: This utility model proposes a high-precision industrial thermocouple for semiconductor equipment. By using a single piece of thermocouple wire without thermocouple compensating wires, the accuracy of thermocouple temperature measurement is ensured. By covering the thermocouple wire with an insulating sleeve, interference from the external environment is effectively avoided. Furthermore, by covering the joint between the protective sleeve and the connecting pipe with heat-shrink tubing, stress concentration points are effectively protected, thereby reducing the risk of breakage at these locations. Attached Figure Description

[0016] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application. It is obvious that the drawings described below are merely some embodiments of this application, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort.

[0017] In the attached diagram: Figure 1 A schematic diagram of the structure of a high-precision industrial thermocouple for semiconductor equipment provided in an embodiment of this utility model; Figure 2 for Figure 1 Enlarged schematic diagram of the structure of section A in the middle.

[0018] The attached figures are labeled as follows: 1. Protective sleeve, 101. Separator, 102. Mounting cavity, 2. Connecting pipe, 3. Heat shrink tubing, 4. Insulating sleeve, 5. Connector, 6. Thermocouple wire. Detailed Implementation

[0019] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0020] It should be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of the present invention. The drawings only show the components related to the present invention and are not drawn according to the actual number, shape and size of the components. In actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0021] In the following description, numerous details are explored to provide a more thorough explanation of embodiments of the present invention. However, it will be apparent to those skilled in the art that embodiments of the present invention may be practiced without these specific details. In other embodiments, well-known structures and devices are shown in block diagram form rather than in detail to avoid obscuring embodiments of the present invention.

[0022] Please combine Figures 1 to 2 As shown, this utility model provides a high-precision industrial thermocouple for semiconductor equipment.

[0023] In one exemplary embodiment of this application, it includes: Protective sleeve 1 has a temperature measuring end and an outlet end; Connecting pipe 2, the protruding end extends into connecting pipe 2; Heat shrink tubing 3 is connected to the outside of protective sleeve 1 and connecting tube 2, and covers the joint section between connecting tube 2 and protective sleeve 1; Insulating sleeve 4, one end extends into connecting tube 2 and connects to protective sleeve 1, and the other end is connected to plug fitting 5; Thermocouple wire 6 has one end fixed to the temperature measuring end, and the other end passes through the outlet end, connecting tube 2, insulating sleeve 4 in sequence, and is connected to the plug-in 5.

[0024] In this embodiment, by using a single thermocouple wire 6 without thermocouple compensating wires, the accuracy of thermocouple temperature measurement is ensured. By covering the thermocouple wire 6 with an insulating sleeve 4, interference from the external environment is effectively avoided. Furthermore, by covering the joint between the protective sleeve 1 and the connecting pipe 2 with a heat-shrink tubing 3, stress concentration points are effectively protected, thereby reducing the risk of brittle fracture at these locations.

[0025] In an exemplary embodiment of this application, the protective sleeve 1 is a ceramic sleeve.

[0026] In this embodiment, the protective sleeve 1 made of ceramic material has high-temperature resistance, which can effectively protect the thermocouple wire 6 from high-temperature oxidation and corrosion. Furthermore, the protective sleeve 1 provides rigid support for the delicate thermocouple wire 6, preventing deformation or breakage during installation and use, and ensuring measurement stability.

[0027] In an exemplary embodiment of this application, the protective sleeve 1 is provided with a partition 101 inside, which is used to divide the protective sleeve 1 into two mounting cavities 102, and the mounting cavities 102 are used to install thermocouple wires 6.

[0028] In this embodiment, by providing a partition 101 inside the protective sleeve 1, the inside of the protective sleeve 1 is divided into two mounting cavities 102, and two thermocouple wires 6 are installed therein, so as to avoid direct contact and short circuit between the two thermocouple wires 6; and the provision of the partition 101 can effectively improve the long-term stability of the thermocouple wires 6 in high-temperature environments.

[0029] In an exemplary embodiment of this application, the insulating sleeve 4 is a flexible insulating sleeve 4.

[0030] In this embodiment, the insulating sleeve 4 is a flexible insulating sleeve 4, which allows the insulating sleeve 4 to be bent, thus facilitating installation and maintenance.

[0031] In an exemplary embodiment of this application, the insulating sleeve 4 is made of polytetrafluoroethylene.

[0032] In this embodiment, polytetrafluoroethylene (PTFE) material has excellent high temperature resistance, corrosion resistance and insulation properties, which can be adapted to the high temperature working conditions of thermocouples, effectively isolate thermocouple wire 6 from other components, and avoid short circuits or signal interference; and it is also flexible.

[0033] In an exemplary embodiment of this application, the protective sleeve 1, the insulating sleeve 4, and the connecting pipe 2 are bonded and fixed by a curing agent inside the connecting pipe 2.

[0034] In this embodiment, the connecting tube 2 is filled with a curing agent, which fills the gap between the insulating sleeve 4 and the protective sleeve 1 and wraps the outer circumference of both, thus bonding and fixing them together inside the connecting tube 2 to ensure that the components do not shift relative to each other.

[0035] In one exemplary embodiment of this application, the connecting pipe 2 is a stainless steel pipe.

[0036] In this embodiment, the stainless steel connecting pipe 2 has the advantages of corrosion resistance, high temperature resistance and high mechanical strength, which can meet the high temperature working conditions of the thermocouple and improve its service life.

[0037] In an exemplary embodiment of this application, the index number of the connector 5 is consistent with the index number of the thermocouple wire 6.

[0038] In this embodiment, the connector 5 and the thermocouple wire 6 are made of conductive material with the same index number, which can effectively avoid signal distortion or measurement error.

[0039] For example, the thermocouple wire 6 adopts the S / R / B type noble metal thermocouple wire 6, and the connector 5 adopts the S / R / B type, which is completely consistent with the corresponding paired thermocouple wire 6; wherein: S type (platinum-rhodium 10 - platinum): the positive electrode is a platinum-rhodium alloy containing 10% rhodium, the negative electrode is pure platinum, and the type is marked "S"; R type (platinum-rhodium 13 - platinum): the positive electrode is a platinum-rhodium alloy containing 13% rhodium, the negative electrode is pure platinum, and the type is marked "R"; B type (platinum-rhodium 30 - platinum-rhodium 6): the positive electrode is a platinum-rhodium alloy containing 30% rhodium, the negative electrode is a platinum-rhodium alloy containing 6% rhodium, and the type is marked "B".

[0040] In one exemplary embodiment of this application, the thermocouple wire 6 is connected to the connector 5 by a set screw.

[0041] In an exemplary embodiment of this application, the connector 5 is provided with a fixing clip for clamping the insulating sleeve 4.

[0042] In this embodiment, the connector is equipped with a fixing clip to clamp the flexible insulating sleeve 4, preventing the thermocouple wire 6 from being exposed to the environment if it falls off.

[0043] The working principle is that by using a single piece of thermocouple wire 6 without using thermocouple compensating wires, the accuracy of thermocouple temperature measurement is ensured. By covering the outside of the thermocouple wire 6 with an insulating sleeve 4, interference from the external environment on the thermocouple wire 6 is effectively avoided; furthermore, by covering the outside of the joint section between the protective sleeve 1 and the connecting pipe 2 with a heat shrink tubing 3, the stress concentration points are effectively protected, thereby reducing the risk of brittle fracture at this location.

[0044] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A high-precision industrial thermocouple for semiconductor equipment, comprising: The protective sleeve has a temperature measuring end and an outlet end; A connecting pipe, wherein the protruding end extends into the connecting pipe; Heat shrink tubing is connected to the outside of the protective sleeve and the connecting tube, and covers the joint section between the connecting tube and the protective sleeve; An insulating sleeve, one end of which extends into the connecting tube and connects to the protective sleeve, and the other end of which connects to the plug-in component; The thermocouple wire has one end fixed to the temperature measuring end, and the other end passes through the outlet end, the connecting tube, and the insulating sleeve in sequence, and is connected to the plug-in component.

2. The high-precision industrial thermocouple for semiconductor equipment according to claim 1, characterized in that: The protective sleeve is a ceramic sleeve.

3. The high-precision industrial thermocouple for semiconductor equipment according to claim 1, characterized in that: The protective sleeve has a partition inside, which is used to divide the protective sleeve into two mounting cavities, and the mounting cavities are used to install the thermocouple wire.

4. The high-precision industrial thermocouple for semiconductor equipment according to claim 1, characterized in that: The insulating sleeve is a flexible insulating sleeve.

5. The high-precision industrial thermocouple for semiconductor equipment according to claim 4, characterized in that: The insulating sleeve is made of polytetrafluoroethylene.

6. The high-precision industrial thermocouple for semiconductor equipment according to claim 1, characterized in that: Located inside the connecting pipe, the protective sleeve, the insulating sleeve, and the connecting pipe are bonded and fixed by a curing agent.

7. The high-precision industrial thermocouple for semiconductor equipment according to claim 1, characterized in that: The connecting pipe is made of stainless steel.

8. The high-precision industrial thermocouple for semiconductor equipment according to claim 1, characterized in that: The index number of the connector is the same as the index number of the thermocouple wire.

9. The high-precision industrial thermocouple for semiconductor equipment according to claim 1, characterized in that: The thermocouple wire is connected to the connector by a set screw.

10. The high-precision industrial thermocouple for semiconductor equipment according to claim 1, characterized in that: The connector is provided with a fixing clip, which is used to clamp the insulating sleeve.

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