A device for rectification purification of trichlorosilane

Abstract

The utility model discloses a device for trichlorosilane rectification purification belongs to trichlorosilane rectification purification technical field, including jar body, the inner middle part and lower part of jar body are provided with respectively for catalyzing and adsorbing the filler box and catalytic bed of trichlorosilane, through setting up the filler box and catalytic bed of setting up in jar body, the filler box of aluminium fluoride provides greater surface area, and the contact between gas and liquid is strengthened, is helpful to improve the mass transfer efficiency in the fractional distillation process, thereby optimizing the separation of trichlorosilane and other chlorosilane, and aluminium fluoride has excellent adsorption performance simultaneously, can effectively remove some trace impurities, such as low boiling point chlorosilane substance, especially those impurities that can affect the separation purity, and the catalytic bed is through promoting certain chemical reaction, help to convert these impurities into less volatile product, make it more easily removed in the rectification process, further improve the purity of trichlorosilane.

Description

Technical Field

[0001] This utility model relates to the field of trichlorosilane distillation and purification technology, specifically to an apparatus for trichlorosilane distillation and purification. Background Technology

[0002] Distillation purification of trichlorosilane is a separation method used to improve the purity of trichlorosilane, primarily achieved through differences in boiling points. Distillation is a physical process that separates components based on their boiling point differences. When a mixture of trichlorosilane and other components is heated, the components with lower boiling points evaporate first and are gradually separated after condensation within the distillation column. Because the boiling point of trichlorosilane differs from that of other substances, separation can be achieved through the processes of evaporation and condensation.

[0003] However, this separation method also has certain limitations. First, distillation mainly relies on the difference in boiling points. Therefore, if the boiling point difference between trichlorosilane and other components is small, the separation efficiency will decrease, and multiple distillations may be required to obtain relatively pure trichlorosilane. Second, without catalysis and adsorption functions, impurities may not be effectively removed, especially some impurities with similar boiling points, which can affect the purity of the final product and lead to incomplete separation.

[0004] Based on this, the present invention designs an apparatus for the distillation and purification of trichlorosilane to solve the above problems. Utility Model Content

[0005] In view of the above-mentioned shortcomings of the existing technology, the present invention provides an apparatus for the distillation and purification of trichlorosilane.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] An apparatus for the distillation and purification of trichlorosilane includes a tank, wherein a packing box and a catalyst bed for adsorbing and catalyzing trichlorosilane are respectively provided in the middle and lower parts of the tank.

[0008] An auxiliary component is provided below the packing box and is designed to prevent the adsorbent material from becoming saturated and affecting the adsorption efficiency.

[0009] The auxiliary component includes a connecting plate disposed inside the tank and located below the packing box, and a vertical rod extending into the packing box is disposed above the connecting plate, and a lever is disposed on the surface of the vertical rod;

[0010] Furthermore, the auxiliary component also includes a vibration motor disposed below the connecting plate, the vibration motor being located at the center of the connecting plate;

[0011] Furthermore, the diameters at both ends of the vertical rod are not the same, and the diameter at the lower end of the vertical rod is smaller than that at the upper end;

[0012] Furthermore, the upper end of the vertical rod is provided with a placement groove, and multiple placement grooves are provided. A counterweight is placed in the placement groove, and a sealing sleeve is fitted on the upper end of the vertical rod.

[0013] Furthermore, the paddles are arranged in a rectangular array of multiple paddles, and the paddles have an inverted flat-topped conical shape when viewed from the front.

[0014] Furthermore, the surface of the paddle is provided with perforations, and multiple perforations are arranged in a circular array;

[0015] Furthermore, the upper end of the vertical rod is not connected to the inner wall of the stuffing box;

[0016] Furthermore, a liquid distributor connected to an external pipeline is provided on the upper inner side of the tank.

[0017] Beneficial effects

[0018] 1. By setting up a packing box and a catalytic bed in the tank, the aluminum fluoride packing box enhances the contact between gas and liquid by providing a larger surface area, which helps to improve the mass transfer efficiency in the fractionation process, thereby optimizing the separation of trichlorosilane from other chlorosilanes. At the same time, aluminum fluoride has excellent adsorption properties, which can effectively remove some trace impurities, such as low-boiling-point chlorosilanes, especially those impurities that may affect the separation purity. The catalytic bed promotes certain chemical reactions to help convert these impurities into less volatile products, making them easier to remove in the distillation process, further improving the purity of trichlorosilane.

[0019] 2. By setting auxiliary components, when trichlorosilane enters the packing box and is adsorbed by aluminum fluoride particles, the vibration motor can make multiple vertical rods vibrate up and down together. The paddles on the surface of the vertical rods can move the aluminum fluoride particles in the packing box and make them continuously creep from bottom to top. This can prevent the adsorption function of aluminum fluoride particles in some areas from becoming saturated and improve the adsorption effect on trichlorosilane. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1This is a three-dimensional view of the main structure of an apparatus for the distillation and purification of trichlorosilane;

[0022] Figure 2 This is a three-dimensional view of the internal structure of an apparatus for the distillation and purification of trichlorosilane;

[0023] Figure 3 A three-dimensional structural view of an auxiliary component of an apparatus for the distillation and purification of trichlorosilane;

[0024] Figure 4 A three-dimensional, exploded view of the vertical rod of an apparatus for the distillation and purification of trichlorosilane;

[0025] Figure 5 A front-view schematic diagram of the vertical rod and lever structure of an apparatus for the distillation and purification of trichlorosilane;

[0026] Figure 6 for Figure 4 A magnified schematic diagram of the structure at point A in the middle.

[0027] The labels in the diagram represent:

[0028] 1. Tank body; 2. Packing box; 3. Catalytic bed; 4. Auxiliary components; 401. Connecting plate; 402. Vibration motor; 403. Vertical rod; 404. Paddle; 405. Perforation; 406. Sealing sleeve; 407. Placement groove; 408. Counterweight. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0030] The present invention will be further described below with reference to the embodiments.

[0031] In some embodiments, please refer to the appendix to the instruction manual. Figure 1-6 An apparatus for the distillation and purification of trichlorosilane includes a tank 1, wherein a packing box 2 and a catalyst bed 3 for catalyzing and adsorbing trichlorosilane are respectively provided in the middle and lower parts of the tank 1.

[0032] Auxiliary component 4 is located below the packing box 2 and can prevent the adsorption material from becoming saturated and affecting the adsorption efficiency.

[0033] In some embodiments, such as Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, in a preferred embodiment of the present utility model, the auxiliary component 4 includes a connecting plate 401 disposed inside the tank body 1 and located below the packing box 2, a vertical rod 403 extending into the packing box 2 is disposed above the connecting plate 401, and a paddle 404 is disposed on the surface of the vertical rod 403.

[0034] First, the particles enter the packing box 2 and come into contact with the aluminum fluoride particles. At this time, the vibration motor 402 is turned on, and the vibration motor 402 transmits the vibration force to the vertical rod 403 through the connecting plate 401. The vertical rod 403 will then vibrate up and down. When the vertical rod 403 vibrates, it can loosen the surrounding aluminum fluoride particles. At the same time, the paddle 404 on the surface of the vertical rod 403 can move up and down with the vertical rod 403. When the paddle 404 moves downward, it will squeeze the aluminum fluoride particles below and disperse them to the surroundings. Some of the particles will pass through the perforation 405 and will not be squeezed downward. When the paddle 404 moves upward, it will push the aluminum fluoride particles above upward. At the same time, the aluminum fluoride particles at its edge will also be abutted and rotated to a certain extent. Because the vibration speed of the paddle 404 is too fast, the aluminum fluoride particles around each vertical rod 403 will slowly creep, which can make the aluminum fluoride particles continuously dispersed and evenly contact the trichlorosilane, effectively improving the adsorption effect of trichlorosilane.

[0035] In this embodiment of the utility model, the auxiliary component 4 also includes a vibration motor 402 disposed below the connecting plate 401. The vibration motor 402 is located at the center of the connecting plate 401. With the vibration motor 402 designed as described above, the connecting plate 401 can evenly distribute the vibration force to the surroundings, so that the vibration frequency of each vertical rod 403 remains consistent.

[0036] In this embodiment of the utility model, the diameters of the two ends of the vertical rod 403 are not the same, and the diameter of the lower end of the vertical rod 403 is smaller than that of the upper end. Through the above design, the swing amplitude of the vertical rod 403 when encountering vibration can be increased, the range of the vertical rod 403 on the aluminum fluoride particles can be increased, and the uniform contact effect between the aluminum fluoride particles and trichlorosilane can be enhanced.

[0037] In this embodiment of the utility model, multiple paddles 404 are arranged in a rectangular array, and the planar shape of the paddles 404 is an inverted flat-topped cone design; by setting the paddles 404, the surrounding aluminum fluoride particles can be dispersed as the vertical rod 403 vibrates up and down.

[0038] In this embodiment of the utility model, the surface of the paddle 404 is provided with perforations 405, and multiple perforations 405 are arranged in a ring array. By providing perforations 405, when the paddle 404 is downward, the aluminum fluoride particles squeezed below can be dispersed to the surrounding area. Some of the particles will pass through the perforations 405 and will not be squeezed downward. When the paddle 404 is upward, it will push the aluminum fluoride particles above upward, achieving the effect of making the aluminum fluoride particles creep upward.

[0039] In this embodiment of the utility model, the upper end of the vertical rod 403 is not connected to the inner wall of the stuffing box 2;

[0040] In some embodiments, such as Figure 4 and Figure 6 As shown, in a preferred embodiment of the present utility model, the upper end of the vertical rod 403 is provided with a placement groove 407, and multiple placement grooves 407 are provided. A counterweight 408 is provided in the placement groove 407, and a sealing sleeve 406 is fitted on the upper end of the vertical rod 403.

[0041] When personnel adsorb trichlorosilane containing different amounts of impurities, the sealing sleeve 406 can be opened and an appropriate amount of counterweight 408 can be removed, so that the center of gravity of the upper end of the vertical rod 403 is shifted. In this way, when the vertical rod 403 is vibrated, the swing amplitude will be increased due to the difference in center, which will improve the dispersion rate of aluminum fluoride particles and also achieve a better adsorption effect.

[0042] In this embodiment of the utility model, a liquid distributor connected to an external pipeline is provided on the upper inner side of the tank body 1.

[0043] It should be noted that the above-mentioned liquid distributor is a relatively mature product in the existing technology. Its function is to inject trichlorosilane before distillation into tank 1 through pipeline for catalysis and adsorption, thereby reducing the methyl and ethyl chlorosilanes in trichlorosilane.

[0044] After the trichlorosilane is adsorbed, it will pass through the packing box 2 and fall into the catalyst bed 3. At this time, the personnel will add a catalyst to the catalyst bed 3. The catalyst can react with the trichlorosilane to promote the reaction of certain impurities with the trichlorosilane, forming heavier compounds, reducing the content of methyl and ethyl chlorosilanes in the vapor, thereby improving the purity of trichlorosilane during the distillation process.

[0045] After catalytic and adsorption treatment, the purified trichlorosilane is injected into the bottom or feed point of the distillation column via pipeline, either in liquid or gaseous form. A heating device is typically installed at the bottom of the distillation column to heat the trichlorosilane, causing it to evaporate into gas and rise to different trays or packing sections within the column. Temperature gradient and pressure control within the distillation column are crucial. At higher temperatures at the bottom, trichlorosilane evaporates first into the gas phase, while heavier impurities remain at the bottom. As the gas rises, lighter components are condensed and collected at the top, while impurities are gradually removed and discharged from the bottom. The operation of the distillation column precisely controls the reflux ratio, temperature, and pressure according to the purity requirements of the target product, ensuring high-purity trichlorosilane is obtained from the top. Ultimately, this distillation process effectively separates high-purity trichlorosilane for subsequent use or processing.

[0046] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions will not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. An apparatus for the distillation and purification of trichlorosilane, comprising a tank (1), characterized in that: The inner middle and lower parts of the tank (1) are respectively provided with a packing box (2) and a catalyst bed (3) for adsorbing and catalyzing trichlorosilane; An auxiliary component (4) is provided below the packing box (2) and is designed to prevent the adsorption material from becoming saturated and affecting the adsorption efficiency. The auxiliary component (4) includes a connecting plate (401) disposed inside the tank (1) and located below the packing box (2). A vertical rod (403) extending into the packing box (2) is disposed above the connecting plate (401), and a paddle (404) is disposed on the surface of the vertical rod (403).

2. The apparatus for distillation purification of trichlorosilane according to claim 1, characterized in that, The auxiliary component (4) also includes a vibration motor (402) disposed below the connecting plate (401), the vibration motor (402) being located at the center of the connecting plate (401).

3. The apparatus for distillation and purification of trichlorosilane according to claim 1, characterized in that, The diameters at both ends of the vertical rod (403) are not the same, and the diameter of the lower end of the vertical rod (403) is smaller than that of the upper end.

4. The apparatus for distillation and purification of trichlorosilane according to claim 1, characterized in that, The upper end of the vertical rod (403) is provided with a placement groove (407), and multiple placement grooves (407) are provided. A counterweight (408) is provided in the placement groove (407), and a sealing sleeve (406) is fitted on the upper end of the vertical rod (403).

5. The apparatus for distillation and purification of trichlorosilane according to claim 1, characterized in that, The paddles (404) are arranged in a rectangular array of multiple paddles, and the paddles (404) have an inverted flat-topped conical shape when viewed from the front.

6. The apparatus for distillation and purification of trichlorosilane according to claim 1, characterized in that, The surface of the lever (404) is provided with perforations (405), and the perforations (405) are arranged in a ring array.

7. The apparatus for distillation and purification of trichlorosilane according to claim 1, characterized in that, The upper end of the vertical rod (403) is not connected to the inner wall of the stuffing box (2).

8. The apparatus for distillation and purification of trichlorosilane according to claim 1, characterized in that, A liquid distributor connected to an external pipeline is provided on the upper inner side of the tank (1).

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