A composite filter for high efficiency filtration of semiconductor clean rooms

Abstract

The utility model relates to composite filter technical field, and disclose a kind of composite filter of high efficiency filtration for semiconductor clean room, including main body shell, fixed mechanism is arranged in the main body shell, opening and closing mechanism is arranged in the front side of main body shell, the fixed mechanism includes air intake subassembly, gas sending subassembly, fixed assembly, filter dust component one and filter dust component two, the air intake subassembly is set in main body shell, the gas sending subassembly is set in left side in main body shell.The composite filter of high efficiency filtration for semiconductor clean room, through the fixed mechanism of being set, the filter dust bag and filter core of multiple settings cooperate with each other, the air in the air inlet grating plate is filtered, so that the air in the air outlet grating plate is discharged without dust impurities, ensure the air cleanliness in semiconductor clean room, the filter dust bag and filter core in the device are independently set, can be independently disassembled, convenient for staff to replace it.

Description

Technical Field

[0001] This utility model relates to the field of composite filter technology, specifically a high-efficiency semiconductor cleanroom composite filter. Background Technology

[0002] Semiconductor cleanrooms are the core environment for the production of semiconductor chips and precision electronic devices. Strict control of airborne contaminants such as dust, particles, and harmful gases is essential, as their cleanliness level directly determines product yield and performance precision. The inlet of the composite filter in the semiconductor cleanroom is located in the ceiling, serving as the air supply end connected to a vertical unidirectional flow system. Filtered clean air is then evenly blown downwards. Due to the characteristics of particulate matter and airflow control, dust in the air is distributed "more at the bottom, less at the top": large particles settle due to gravity, while small particles are forcibly guided by airflow, concentrating in the near-ground area, with almost no dust accumulation in the upper part (near the ceiling). Through a closed loop of "upper air supply, lower air return," dust is forced to the ground and discharged, ensuring that the particulate concentration in the core working area meets the standards and satisfies the stringent cleanliness requirements of semiconductor production.

[0003] However, existing cleanroom filters, with their single filtration structure, are insufficient to comprehensively purify impurities of different particle sizes in the air, and trace amounts of pollutants may still remain after filtration. The disassembly and maintenance of filter components are extremely inconvenient, as they are mostly integral designs that cannot independently replace failed parts, which not only increases maintenance costs but also leads to extended downtime for maintenance. Utility Model Content

[0004] The purpose of this invention is to provide a high-efficiency semiconductor cleanroom composite filter to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a high-efficiency semiconductor cleanroom composite filter, comprising a main body shell, a fixing mechanism disposed inside the main body shell, and an opening and closing mechanism disposed on the front side of the main body shell.

[0006] The fixing mechanism includes an air intake component, an air delivery component, a fixing component, a dust filter component one, and a dust filter component two. The air intake component is disposed inside the main body shell, the air delivery component is disposed on the left side inside the main body shell, the fixing component is disposed in front of the air intake component, the dust filter component one is disposed inside the air intake component, and the dust filter component two is disposed inside the air delivery component.

[0007] The opening and closing mechanism includes a closing component and a locking component. The closing component is located on the front side of the main body shell, and the locking component is located inside the closing component.

[0008] Preferably, the air intake assembly includes an air intake pipe disposed at the bottom of the main body shell, the air intake pipe being snapped into the right side of the main body shell, an air intake grille fixedly connected to the right side of the air intake pipe, the air intake grille being fixedly connected to the right side of the main body shell, a vent pipe disposed above the air intake pipe, connecting bends fixedly connected to the left and right sides of the vent pipe, a fixing rod fixedly connected to the rear side of the connecting bends, and the fixing rod being fixedly connected to the rear side of the main body shell.

[0009] Preferably, the air supply assembly includes a top pipe located above the ventilation pipe and fixedly connected to the top interface of the right-side connecting bend. An air outlet pipe is fixedly connected to the left side of the top pipe, located to the left of the ventilation pipe and the inlet pipe. The air outlet pipe is snapped into the bottom of the main body shell, and an air outlet grille is fixedly connected to the bottom of the air outlet pipe.

[0010] Preferably, the fixing component includes a frame that snaps onto the front side of the air intake pipe and the air vent pipe. A handle is fixedly connected to the front side of the frame, and magnetic plates are fixedly connected to the upper and lower sides inside the frame. The magnetic plates are magnetically connected to the air intake pipe and the air vent pipe.

[0011] Preferably, the dust filter assembly includes a frame, which is fixedly connected to the rear side of the insert frame. A seat is snapped onto the outer side of the frame, which is fixedly connected to the air inlet pipe and the air outlet pipe. A mesh plate is fixedly connected to the outer side of the frame, and a dust filter bag is fixedly connected to the inner side of the frame.

[0012] Preferably, the second dust filter assembly includes a filter element disposed within a top pipe. Positioning clamps are provided on both sides of the filter element and are fixedly connected to the top pipe. A closing plate is provided on the front side of the filter element and is snapped into the front side of the top pipe. A hinge is fixedly connected to the bottom of the front side of the closing plate and is fixedly connected to the bottom of the top pipe. Protruding plates are fixedly connected to the top of both sides of the closing plate, and bolts are threaded onto the inner ring of the protruding plates, which are threaded into the front side of the top pipe.

[0013] Preferably, the enclosure includes a panel that is snapped onto the front side of the main body shell, a sealing plate that is fixedly connected to the rear side of the panel and snapped onto the inside of the front side of the main body shell, and a handle that is fixedly connected to the front side of the panel.

[0014] Preferably, the locking assembly includes a slide cylinder slidably connected to the sealing plate, a compression spring fixedly connected to the inner side of the slide cylinder, a locking plate fixedly connected to the outer side of the slide cylinder, the locking plate passing through the sealing plate and locking into the front side of the main body shell, a movable slide rod fixedly connected to the front side of the slide cylinder, the movable slide rod slidably connected to the front side of the insert, and a lever fixedly connected to the front side of the movable slide rod.

[0015] Compared with the prior art, this utility model provides a high-efficiency semiconductor cleanroom composite filter with the following advantages: 1. This high-efficiency composite filter for semiconductor cleanrooms, through a fixed mechanism, uses multiple dust bags and filter elements to filter the air entering the inlet grille, ensuring that the air discharged through the outlet grille is free of dust and impurities, thus guaranteeing the air cleanliness within the semiconductor cleanroom. The dust bags and filter elements inside the device are independently installed and can be easily disassembled and replaced by staff. The operation is simple and convenient for staff to use. Furthermore, the multiple dust bags and filter elements enhance the air filtration efficiency of the device during use.

[0016] 2. This high-efficiency semiconductor cleanroom composite filter, through its opening and closing mechanism, allows operators to easily unlock the main body shell and the panel by simply moving the levers on both sides inward. This facilitates the installation and removal of the panel, as well as the subsequent removal and replacement of the dust bag or filter element inside the main body shell. The operation is simple and convenient for operators to use. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Figure 1 This is a front view of the present utility model; Figure 2 This is a schematic diagram of the opening and closing of this utility model; Figure 3 This is a schematic diagram of part of the structure of this utility model; Figure 4 This is a partial structural cross-sectional view of the present invention; Figure 5 Cross-section of the mounting components and dust filter components Figure 1 ; Figure 6 Cross-section of the mounting components and dust filter components Figure 2 ; Figure 7This is a sectional view of a portion of the dust filter assembly. Figure 8 This is a partial structural diagram of the dust filter assembly; Figure 9 This is a partial structural cross-sectional view of the opening and closing mechanism.

[0018] In the diagram: 1. Fixing mechanism; 11. Intake assembly; 1101. Intake pipe; 1102. Intake grille; 1103. Ventilation pipe; 1104. Connecting bend; 1105. Fixing rod; 12. Air supply assembly; 1201. Top pipe; 1202. Exit pipe; 1203. Exit grille; 13. Fixing assembly; 1301. Frame; 1302. Handle; 1303. Magnetic plate; 14. Dust filter assembly one; 1401. Frame one; 1402. Seat one; 1403. 1. Mesh plate 1; 1404. Dust bag; 15. Dust filter assembly 2; 1501. Filter element; 1502. Positioning clamp; 1503. Closing plate; 1504. Hinge; 1505. Protruding plate; 1506. Bolt; 2. Opening and closing mechanism; 21. Closing assembly; 2101. Insert plate; 2102. Sealing plate; 2103. Handle; 22. Locking assembly; 2201. Slide cylinder; 2202. Compression spring; 2203. Clamping plate; 2204. Moving slide bar; 2205. Toggle lever; 3. Main body shell. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0021] This utility model provides a technical solution: Example 1 Combination Figures 1 to 8 A high-efficiency semiconductor cleanroom composite filter includes a main body shell 3, a fixing mechanism 1 inside the main body shell 3, and an opening and closing mechanism 2 on the front side of the main body shell 3.

[0022] The fixing mechanism 1 includes an air intake assembly 11, an air supply assembly 12, a fixing assembly 13, a dust filter assembly 14 and a dust filter assembly 15. The air intake assembly 11 is disposed inside the main body shell 3, the air supply assembly 12 is disposed on the left side inside the main body shell 3, the fixing assembly 13 is disposed in front of the air intake assembly 11, the dust filter assembly 14 is disposed inside the air intake assembly 11, and the dust filter assembly 15 is disposed inside the air supply assembly 12.

[0023] The intake assembly 11 includes an intake pipe 1101, which is located at the bottom of the main body shell 3. The intake pipe 1101 is snapped into the right side of the main body shell 3. An intake grille 1102 is fixedly connected to the right side of the intake pipe 1101. The intake grille 1102 is fixedly connected to the right side of the main body shell 3. A vent pipe 1103 is provided above the intake pipe 1101. Connecting bends 1104 are fixedly connected to the left and right sides of the vent pipe 1103. A fixing rod 1105 is fixedly connected to the rear side of the connecting bends 1104. The fixing rod 1105 is fixedly connected to the rear side of the main body shell 3. The air supply assembly 12 includes a top pipe 1201. 201 is positioned above the vent pipe 1103. The top pipe 1201 is fixedly connected to the top interface of the right-side connecting bend 1104. An outlet pipe 1202 is fixedly connected to the left side of the top pipe 1201. The outlet pipe 1202 is positioned to the left of the vent pipe 1103 and the inlet pipe 1101. The outlet pipe 1202 is snapped into the bottom of the main body shell 3. An outlet grille 1203 is fixedly connected to the bottom of the outlet pipe 1202. The outlet grille 1203 is fixedly connected to the bottom of the main body shell 3. The fixing component 13 includes a frame 1301, which is snapped into the front side of the inlet pipe 1101 and the vent pipe 1103. A handle 1302 is fixedly connected to the front side. Magnetic suction plates 1303 are fixedly connected to the upper and lower sides inside the frame 1301. The magnetic suction plates 1303 are magnetically connected to the air intake pipe 1101 and the air vent pipe 1103. The first dust filter assembly 14 includes a first frame 1401, which is fixedly connected to the rear side of the frame 1301. A first seat 1402 is snapped onto the outside of the first frame 1401, and the first seat 1402 is fixedly connected inside the air intake pipe 1101 and the air vent pipe 1103. A mesh plate 1403 is fixedly connected to the outside of the first frame 1401, and a dust filter bag 1404 is fixedly connected to the inside of the first frame 1401. The second dust filter assembly 15 includes a filter element 1501. The filter element 1501 is installed inside the top pipe 1201. Positioning clamps 1502 are provided on the left and right sides of the filter element 1501 and are fixedly connected to the top pipe 1201. A closing plate 1503 is provided on the front side of the filter element 1501 and is snapped into the front side of the top pipe 1201. A hinge 1504 is fixedly connected to the bottom of the front side of the closing plate 1503 and is fixedly connected to the bottom of the top pipe 1201. A protruding plate 1505 is fixedly connected to the top of the left and right sides of the closing plate 1503. A bolt 1506 is sleeved on the inner ring of the protruding plate 1505 and is threadedly connected to the front side of the top pipe 1201.

[0024] Furthermore, the multiple dust bags 1404 and filter elements 1501 work together to filter the air entering the air inlet grille 1102, ensuring that the air discharged through the air outlet grille 1203 is free of dust and impurities, thus guaranteeing the air cleanliness within the semiconductor cleanroom. The dust bags 1404 and filter elements 1501 inside this device are independently installed and can be disassembled and replaced by staff, making operation simple and convenient. At the same time, the multiple dust bags 1404 and filter elements 1501 improve the air filtration effect during use.

[0025] Example 2 See Figure 1 , Figure 2 and Figure 9 Furthermore, based on Embodiment 1, the opening and closing mechanism 2 includes a closing component 21 and a locking component 22. The closing component 21 is disposed on the front side of the main body shell 3, and the locking component 22 is disposed inside the closing component 21.

[0026] The closure component 21 includes a panel 2101, which is snapped onto the front side of the main body shell 3. A sealing plate 2102 is fixedly connected to the rear side of the panel 2101 and snapped into the front side of the main body shell 3. A handle 2103 is fixedly connected to the front side of the panel 2101. The locking component 22 includes a slide cylinder 2201, which is slidably connected to the sealing plate 2102. A compression spring 2202 is fixedly connected to the inner side of the slide cylinder 2201. A locking plate 2203 is fixedly connected to the outer side of the slide cylinder 2201 and passes through the sealing plate 2102 to snap into the front side of the main body shell 3. A movable slide rod 2204 is fixedly connected to the front side of the slide cylinder 2201 and slidably connected to the front side of the panel 2101. A lever 2205 is fixedly connected to the front side of the movable slide rod 2204.

[0027] Furthermore, staff only need to move the levers 2205 on both sides inward to move the locking plate 2203 inward to release the lock between the main body shell 3 and the insert plate 2101, which makes it easy for staff to disassemble and assemble the insert plate 2101, and to disassemble and replace the dust bag 1404 or filter element 1501 inside the main body shell 3. The operation is simple and easy for staff to use.

[0028] In actual operation, when this device is in use, if it is necessary to disassemble the dust bag 1404 or the filter element 1501, the operator first moves the levers 2205 on both sides inward. The inward movement of the levers 2205 drives the locking plate 2203 inward through the sliding rod 2204 and the sliding cylinder 2201. The locking plate 2203 moves inward and retracts into the sealing plate 2102, disconnecting it from the main body shell 3. Then the operator can hold the handle 2103 and move the insert 2101 forward, thus completing the disassembly of the insert 2101. Then, the staff directly pulls the handle 1302 forward. The handle 1302 moves forward and drives the dust bag 1404 forward through the frame 1301 and the clip frame 1401. At this time, the disassembly of the dust bag 1404 is completed. Then, the worker rotates the bolts 1506 on both sides of the closing plate 1503. The bolts 1506 rotate and move forward inside the top pipe 1201. The bolts 1506 move forward and disconnect from the top pipe 1201 and the protruding plate 1505. Then, the worker can flip the closing plate 1503 downward to open and close it. Then, the worker can move the filter element 1501 forward to complete the disassembly of the filter element 1501.

[0029] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

Claims

1. A high-efficiency semiconductor cleanroom composite filter, comprising a main body housing (3), characterized in that: A fixing mechanism (1) is provided inside the main body shell (3), and an opening and closing mechanism (2) is provided on the front side of the main body shell (3). The fixing mechanism (1) includes an air intake assembly (11), an air supply assembly (12), a fixing assembly (13), a dust filter assembly one (14), and a dust filter assembly two (15). The air intake assembly (11) is located inside the main body shell (3), the air supply assembly (12) is located on the left side inside the main body shell (3), the fixing assembly (13) is located in front of the air intake assembly (11), the dust filter assembly one (14) is located inside the air intake assembly (11), and the dust filter assembly two (15) is located inside the air supply assembly (12). The opening and closing mechanism (2) includes a closing component (21) and a locking component (22). The closing component (21) is located on the front side of the main body shell (3), and the locking component (22) is located inside the closing component (21).

2. The high-efficiency semiconductor cleanroom composite filter according to claim 1, characterized in that: The air intake assembly (11) includes an air intake pipe (1101), which is located at the bottom of the main body shell (3). The air intake pipe (1101) is snapped into the right side of the main body shell (3). An air intake grille (1102) is fixedly connected to the right side of the air intake pipe (1101). The air intake grille (1102) is fixedly connected to the right side of the main body shell (3). A ventilation pipe (1103) is provided above the air intake pipe (1101). Connecting bends (1104) are fixedly connected to the left and right sides of the ventilation pipe (1103). A fixing rod (1105) is fixedly connected to the rear side of the connecting bend (1104). The fixing rod (1105) is fixedly connected to the rear side of the main body shell (3).

3. The high-efficiency semiconductor cleanroom composite filter according to claim 1, characterized in that: The air supply assembly (12) includes a top pipe (1201), which is located above the ventilation pipe (1103). The top pipe (1201) is fixedly connected to the top interface of the right connecting bend (1104). An air outlet pipe (1202) is fixedly connected to the left side of the top pipe (1201). The air outlet pipe (1202) is located to the left of the ventilation pipe (1103) and the air inlet pipe (1101). The air outlet pipe (1202) is snapped into the bottom of the main body shell (3). An air outlet grille (1203) is fixedly connected to the bottom of the air outlet pipe (1202). The air outlet grille (1203) is fixedly connected to the bottom of the main body shell (3).

4. The high-efficiency semiconductor cleanroom composite filter according to claim 1, characterized in that: The fixing component (13) includes a frame (1301), which is snapped onto the front side of the air intake pipe (1101) and the air vent pipe (1103). A handle (1302) is fixedly connected to the front side of the frame (1301). Magnetic plates (1303) are fixedly connected to the upper and lower sides inside the frame (1301). The magnetic plates (1303) are magnetically connected to the air intake pipe (1101) and the air vent pipe (1103).

5. A high-efficiency semiconductor cleanroom composite filter according to claim 1, characterized in that: The dust filter assembly (14) includes a frame (1401), which is fixedly connected to the rear side of the frame (1301). A seat (1402) is snapped onto the outside of the frame (1401). The seat (1402) is fixedly connected to the air inlet pipe (1101) and the air outlet pipe (1103). A mesh plate (1403) is fixedly connected to the outside of the frame (1401). A dust filter bag (1404) is fixedly connected to the inside of the frame (1401).

6. The high-efficiency semiconductor cleanroom composite filter according to claim 1, characterized in that: The second dust filter assembly (15) includes a filter element (1501), which is disposed in the top pipe (1201). Positioning clamps (1502) are provided on the left and right sides of the filter element (1501). The positioning clamps (1502) are fixedly connected to the top pipe (1201). A closing plate (1503) is provided on the front side of the filter element (1501). The closing plate (1503) is snapped into the front side of the top pipe (1201). A hinge (1504) is fixedly connected to the bottom of the front side of the closing plate (1503). The hinge (1504) is fixedly connected to the bottom of the top pipe (1201). A protruding plate (1505) is fixedly connected to the top of the left and right sides of the closing plate (1503). A bolt (1506) is sleeved on the inner ring of the protruding plate (1505). The bolt (1506) is threadedly connected to the front side of the top pipe (1201).

7. A high-efficiency semiconductor cleanroom composite filter according to claim 1, characterized in that: The enclosure component (21) includes a panel (2101) which is snapped onto the front side of the main body shell (3). A sealing plate (2102) is fixedly connected to the rear side of the panel (2101) and snapped onto the inside of the front side of the main body shell (3). A handle (2103) is fixedly connected to the front side of the panel (2101).

8. A high-efficiency semiconductor cleanroom composite filter according to claim 1, characterized in that: The locking assembly (22) includes a slide cylinder (2201), which is slidably connected to the sealing plate (2102). A compression spring (2202) is fixedly connected to the inner side of the slide cylinder (2201), and a locking plate (2203) is fixedly connected to the outer side of the slide cylinder (2201). The locking plate (2203) passes through the sealing plate (2102) and is locked to the front side of the main body shell (3). A movable slide rod (2204) is fixedly connected to the front side of the slide cylinder (2201), and the movable slide rod (2204) is slidably connected to the front side of the insert (2101). A lever (2205) is fixedly connected to the front side of the movable slide rod (2204).

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