A semiconductor industry VOCs integrated treatment device with online monitoring function
Patent Information
- Application Number
- CN202522587186.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-05
- Publication Date
- 2026-11-03
- Estimated Expiration
- 2035-12-05
AI Technical Summary
Existing VOCs waste gas treatment devices generated during semiconductor manufacturing lack real-time online monitoring mechanisms, cannot dynamically adjust process parameters, have poor treatment effects on particulate matter, acidic substances and moisture in the pretreatment unit, are inconvenient to replace and maintain adsorbents, and have low precision in catalytic combustion temperature control, resulting in low treatment efficiency and poor stability.
An integrated VOCs treatment device for the semiconductor industry with online monitoring function was designed. It integrates a pretreatment box, an adsorption box, and a combustion box, and is stably supported by support legs. The filter layer, spray head and drying layer work together to treat the waste gas. The adsorption box adopts a slider and chute structure for easy replacement of adsorbent. The dual combustion bed in the combustion box improves the decomposition efficiency. The temperature sensor monitors in real time. Combined with the online monitoring module and controller, it realizes intelligent operation.
It enables real-time monitoring and visual adjustment of exhaust gas parameters, improves the efficiency and stability of exhaust gas treatment, reduces operating costs, ensures the safety of the device and the convenience of operation and maintenance, and achieves a highly efficient VOCs treatment effect.
Smart Images
Figure CN224925901U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of waste gas treatment technology in the semiconductor industry, specifically an integrated VOCs treatment device for the semiconductor industry with online monitoring function. Background Technology
[0002] The semiconductor manufacturing process generates a large amount of waste gas containing volatile organic compounds (VOCs). If this waste gas is directly released into the atmosphere, it will not only cause serious pollution to the environment, but also harm human health.
[0003] Existing treatment devices often lack real-time online monitoring mechanisms, making it impossible to dynamically track changes in VOCs concentration and adjust process parameters in a timely manner. Furthermore, the pretreatment unit's synergistic treatment effect on particulate matter, acidic substances, and moisture is poor, adsorbent replacement and maintenance are inconvenient, regeneration capacity is insufficient, and temperature control precision in the catalytic combustion process is low, resulting in low overall treatment efficiency and poor compliance stability. Therefore, those skilled in the art have provided an integrated VOCs treatment device for the semiconductor industry with online monitoring capabilities to solve the problems mentioned in the background art. Utility Model Content
[0004] The purpose of this invention is to provide an integrated VOCs treatment device for the semiconductor industry with online monitoring capabilities, in order to solve the problems mentioned in the background art.
[0005] To achieve the above objectives, this utility model provides the following technical solution: An integrated VOCs treatment device for the semiconductor industry with online monitoring capabilities includes a connecting plate. Three sets of support legs are connected to the upper surface of the connecting plate. One set of support legs is connected to a pretreatment box, another set to an adsorption box, and yet another set to a combustion box. A control cabinet is connected to the upper surface of the connecting plate. A storage tank is also connected to the upper surface of the connecting plate. A pump is installed on the inner bottom wall of the storage tank. An injection pipe is connected to the upper surface of the storage tank. The output end of the pump is connected to an infusion pipe, one end of which is connected to the upper surface of the pretreatment box. Equally spaced spray nozzles are connected to the outer surface of the infusion pipe. A desorption fan is mounted on the upper surface of the adsorption box via a mounting plate. The output end of the desorption fan is connected to an air guide pipe, the output end of which is connected to the upper surface of the adsorption box. A first online monitoring module, a second online monitoring module, and a controller are installed on the inner wall of the control cabinet. A touch screen is installed on the front of the control cabinet.
[0006] As a further improvement of this utility model: the left side of the pretreatment box is connected to an air intake pipe, and both the front of the pretreatment box and the combustion box are provided with observation windows.
[0007] As a further improvement of this utility model: the bottom surface of the pretreatment box is connected to a drain pipe, the inner wall of the pretreatment box is connected to a filter layer, and the inner bottom wall of the pretreatment box is connected to two guide plates.
[0008] As a further embodiment of this utility model: the inner wall of the pretreatment box is connected to a drying layer, the upper surface of the pretreatment box is connected to an exhaust pipe, and the output end of the exhaust pipe is connected to the upper surface of the adsorption box.
[0009] As a further improvement of this utility model: the inner wall of the adsorption box is slidably connected to two sets of sliders via a sliding groove, and each of the two sets of sliders is connected to an adsorption drawer on one side that is close to the other, and the interior of each of the two adsorption drawers is filled with adsorbent.
[0010] As a further improvement of this utility model: the bottom surface of the adsorption box is connected to a desorption outlet pipe, and the output end of the desorption outlet pipe is connected to the upper surface of the combustion box.
[0011] As a further improvement of this utility model: two combustion beds are installed on the inner wall of the combustion chamber, and a temperature sensor is installed on the inner wall of the combustion chamber.
[0012] As a further improvement of this utility model: the bottom surface of the combustion chamber is connected to an exhaust pipe, and one-way valves are installed on the outer surface of the exhaust pipe, the outer surface of the intake pipe and the outer surface of the drain pipe.
[0013] Compared with the prior art, the beneficial effects of this utility model are: This integrated VOCs treatment device for the semiconductor industry, featuring online monitoring, integrates core units such as a pretreatment box, adsorption box, combustion box, and control cabinet via a connecting plate. Its compact structure and rational layout significantly save installation space, while support legs ensure stable support and enhance operational safety. The pretreatment box's filter layer, spray heads, and drying layer work together to sequentially filter particulate matter, neutralize acidic substances, and remove moisture from the exhaust gas, providing high-quality intake air for subsequent treatment. The adsorption box employs a drawer-type structure with a sliding block and groove, facilitating adsorbent replacement. Combined with a desorption fan and ductwork, adsorbent regeneration is achieved, extending service life and reducing operating costs. The combustion box features a dual-combustion bed design to improve VOCs decomposition efficiency, while a temperature sensor ensures stable combustion through real-time monitoring. The first and second online monitoring modules are linked with the controller and touchscreen to achieve full-process monitoring of exhaust gas concentration and visualized parameter adjustment. A one-way valve prevents gas-liquid backflow. The entire device achieves integrated and intelligent VOCs treatment, offering convenient operation and maintenance, achieving compliant treatment results, and low energy consumption. Attached Figure Description
[0014] Figure 1A three-dimensional structural diagram of an integrated VOCs treatment device for the semiconductor industry with online monitoring capabilities; Figure 2 This is a rear view of an integrated VOCs treatment device for the semiconductor industry with online monitoring capabilities; Figure 3 This is a cross-sectional view of the adsorption box in an integrated VOCs treatment device for the semiconductor industry with online monitoring capabilities; Figure 4 This is a cross-sectional view of the pretreatment box in an integrated VOCs treatment device for the semiconductor industry with online monitoring capabilities; Figure 5 This is a cross-sectional view of the combustion chamber in an integrated VOCs treatment device for the semiconductor industry with online monitoring capabilities.
[0015] In the diagram: 1. Connecting plate; 2. Support leg; 3. Pretreatment box; 4. Adsorption box; 5. Combustion box; 6. Control cabinet; 7. Storage tank; 8. Infusion pump; 9. Injection pipe; 10. Infusion pipe; 11. Spray head; 12. Desorption fan; 13. Air duct; 14. First online monitoring module; 15. Second online monitoring module; 16. Controller; 17. Touch screen; 18. Air inlet pipe; 19. Observation window; 20. Drain pipe; 21. Filter layer; 22. Guide plate; 23. Drying layer; 24. Exhaust pipe; 25. Slider; 26. Adsorption drawer; 27. Adsorbent; 28. Desorption outlet pipe; 29. Combustion bed; 30. Temperature sensor; 31. Tail gas emission pipe; 32. One-way valve. Detailed Implementation
[0016] Please see Figures 1-5In this embodiment of the present invention, an integrated VOCs treatment device for the semiconductor industry with online monitoring function includes a connecting plate 1. Three sets of support legs 2 are connected to the upper surface of the connecting plate 1. One set of support legs 2 is connected to a pretreatment box 3, another set to an adsorption box 4, and yet another set to a combustion box 5. A control cabinet 6 is connected to the upper surface of the connecting plate 1. A storage tank 7 is connected to the upper surface of the connecting plate 1. A pump 8 is installed on the inner bottom wall of the storage tank 7. An injection pipe 9 is connected to the upper surface of the storage tank 7. The output end of the pump 8 is connected to an injection pipe 10. One end of the injection pipe 10 is connected to the upper surface of the pretreatment box 3, and the outer surface of the injection pipe 10 is connected to equally spaced spray nozzles. The adsorption box 4 has a desorption fan 12 mounted on its upper surface via a mounting plate. The output end of the desorption fan 12 is connected to a duct 13, which in turn connects to the upper surface of the adsorption box 4. The control cabinet 6 has a first online monitoring module 14, a second online monitoring module 15, and a controller 16 mounted on its inner wall. A touch screen 17 is mounted on the front of the control cabinet 6. The pretreatment box 3 provides a closed working space for the pretreatment of waste gas, ensuring the orderly connection of filtration, spraying, and drying processes and preventing waste gas leakage. The adsorption box 4 provides a place for VOCs adsorption and purification. Its internal space design facilitates full contact between waste gas and adsorbent 27, improving adsorption efficiency. The combustion box 5 provides a closed reaction environment for the combustion and decomposition of VOCs, ensuring a safe and stable combustion process and reducing heat loss.
[0017] An air inlet pipe 18 is connected to the left side of the pretreatment box 3. Observation windows 19 are provided on the front of both the pretreatment box 3 and the combustion box 5. A drain pipe 20 is connected to the bottom of the pretreatment box 3. A filter layer 21 is connected to the inner wall of the pretreatment box 3. Two guide plates 22 are connected to the bottom inner wall of the pretreatment box 3. A drying layer 23 is connected to the inner wall of the pretreatment box 3. An exhaust pipe 24 is connected to the upper surface of the pretreatment box 3, and the output end of the exhaust pipe 24 is connected to the upper surface of the adsorption box 4. Observation windows 19 are located on the front of the pretreatment box 3 and the combustion box 5, allowing operators to directly observe the internal working conditions. The system allows for timely detection of abnormalities; the drain pipe 20 is used to discharge the waste liquid generated by spraying in the pretreatment tank 3, and together with the guide plate 22, it can quickly drain the waste liquid and avoid the accumulation of liquid in the tank that corrodes the equipment; the filter layer 21 is made of a suitable material, which can effectively intercept particulate impurities in the exhaust gas, prevent the subsequent spray head 11 from being blocked and the adsorbent 27 from being contaminated, and improve the overall treatment efficiency; the guide plate 22 guides the waste liquid to converge into the drain pipe 20, accelerates the discharge speed of the waste liquid, and reduces the residue of waste liquid in the pretreatment tank 3; the drying layer 23 is filled with a high-efficiency desiccant, which can remove the moisture in the exhaust gas after spraying treatment.
[0018] Two sets of sliders 25 are slidably connected to the inner wall of the adsorption box 4 via a sliding groove. Adsorption drawers 26 are connected to the sides of the two sets of sliders 25 that are close to each other. Both adsorption drawers 26 are filled with adsorbent 27. A desorption outlet pipe 28 is connected to the bottom surface of the adsorption box 4. The output end of the desorption outlet pipe 28 is connected to the upper surface of the combustion box 5. Two combustion beds 29 are installed on the inner wall of the combustion box 5. A temperature sensor 30 is installed on the inner wall of the combustion box 5. A tail gas exhaust pipe 31 is connected to the bottom surface of the combustion box 5. The outer surface of the tail gas exhaust pipe 31, the outer surface of the air inlet pipe 18, and the drain pipe 20... One-way valves 32 are installed on the outer surface, and the slider 25 cooperates with the inner wall groove of the adsorption box 4, so that the adsorption drawer 26 can be pulled out flexibly, which greatly simplifies the replacement and maintenance of the adsorbent 27. The adsorption drawer 26 provides loading space for the adsorbent 27. The drawer-type design facilitates batch replacement of the adsorbent 27 and reduces maintenance costs. The adsorbent 27 adopts a high-efficiency adsorption material, which can quickly adsorb VOCs in the exhaust gas and achieve preliminary purification of the exhaust gas. The temperature sensor 30 monitors the temperature inside the combustion box 5 in real time and feeds the data back to the controller 16 to maintain the combustion temperature within a suitable range and ensure combustion safety and efficiency.
[0019] The working principle of this utility model is as follows: First, VOCs waste gas from the semiconductor industry enters the pretreatment box 3 through the inlet pipe 18. The first online monitoring module 14 monitors the waste gas concentration in real time and transmits the data to the controller 16 in the control cabinet 6. The waste gas first passes through the filter layer 21 in the pretreatment box 3 to remove particulate matter. Then, the liquid pump 8 in the storage tank 7 delivers alkaline spray liquid through the liquid delivery pipe 10 to the spray head 11 to spray and neutralize acidic substances in the waste gas. The generated waste liquid is guided by the guide plate 22 and discharged from the drain pipe 20. Finally, the waste gas passes through the drying layer 23 to remove moisture and enters the adsorption box 4 through the exhaust pipe 24. Then, the waste gas is adsorbed and purified by the adsorbent 27 in the adsorption drawer 26 in the adsorption box 4. The adsorption drawer 26 is easy to replace by the sliding block 25 cooperating with the slide groove. When the adsorbent is saturated, the controller 16 starts the desorption fan 12. The hot air flows into the adsorption box 4 through the air guide pipe 13. The high-concentration VOCs waste gas generated by desorption enters the combustion box 5 from the desorption outlet pipe 28. Finally, inside the combustion chamber 5, the temperature sensor 30 monitors the temperature in real time and feeds back the data. The exhaust gas is fully decomposed into harmless gas through two combustion beds 29. The treated exhaust gas is discharged through the exhaust pipe 31. The second online monitoring module 15 monitors the emission concentration. The one-way valves 32 on the inlet pipe 18, the drain pipe 20 and the exhaust pipe 31 prevent backflow. The operator sets parameters and monitors the status through the touch screen 17 to ensure the stable operation of the device.
[0020] The above description is merely a preferred embodiment of this utility model, but the scope of protection of this utility model is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the technical scope disclosed in this utility model, based on the technical solution and inventive concept of this utility model, should be included within the scope of protection of this utility model. It is obvious to those skilled in the art that this utility model is not limited to the details of the above exemplary embodiments, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and thus all variations falling within the meaning and scope of equivalent elements of the claims are intended to be included within this utility model. No reference numerals in the claims should be construed as limiting the scope of the claims.
Claims
1. An integrated VOCs treatment device for the semiconductor industry with online monitoring function, characterized in that, The system includes a connecting plate (1), on the upper surface of which are connected three sets of support legs (2). One set of support legs (2) is connected to a pretreatment box (3), another set is connected to an adsorption box (4), and yet another set is connected to a combustion box (5). A control cabinet (6) is connected to the upper surface of the connecting plate (1). A storage tank (7) is connected to the upper surface of the connecting plate (1). An infusion pump (8) is installed on the inner bottom wall of the storage tank (7). An injection pipe (9) is connected to the upper surface of the storage tank (7). The output end of the infusion pump (8) is connected to… An infusion tube (10) is connected to the upper surface of the pretreatment box (3). Spray heads (11) arranged at equal intervals are connected to the outer surface of the infusion tube (10). A desorption fan (12) is installed on the upper surface of the adsorption box (4) through a mounting plate. The output end of the desorption fan (12) is connected to a guide pipe (13). The output end of the guide pipe (13) is connected to the upper surface of the adsorption box (4). A first online monitoring module (14), a second online monitoring module (15), and a controller (16) are respectively installed on the inner wall of the control cabinet (6). A touch screen (17) is installed on the front of the control cabinet (6).
2. The integrated VOCs treatment device for the semiconductor industry with online monitoring function according to claim 1, characterized in that, The left side of the pretreatment box (3) is connected to the air intake pipe (18), and the front of both the pretreatment box (3) and the combustion box (5) are provided with observation windows (19).
3. The integrated VOCs treatment device for the semiconductor industry with online monitoring function according to claim 1, characterized in that, The bottom surface of the pretreatment tank (3) is connected to a drain pipe (20), the inner wall of the pretreatment tank (3) is connected to a filter layer (21), and the inner bottom wall of the pretreatment tank (3) is connected to two guide plates (22).
4. The integrated VOCs treatment device for the semiconductor industry with online monitoring function according to claim 1, characterized in that, The inner wall of the pretreatment box (3) is connected to a drying layer (23), and the upper surface of the pretreatment box (3) is connected to an exhaust pipe (24). The output end of the exhaust pipe (24) is connected to the upper surface of the adsorption box (4).
5. The integrated VOCs treatment device for the semiconductor industry with online monitoring function according to claim 1, characterized in that, The inner wall of the adsorption box (4) is slidably connected to two sets of sliders (25) via a sliding groove. Adsorption drawers (26) are connected to the sides of the two sets of sliders (25) that are close to each other. The interior of the two adsorption drawers (26) is filled with adsorbent (27).
6. The integrated VOCs treatment device for the semiconductor industry with online monitoring function according to claim 1, characterized in that, The bottom surface of the adsorption box (4) is connected to a desorption outlet pipe (28), and the output end of the desorption outlet pipe (28) is connected to the upper surface of the combustion box (5).
7. The integrated VOCs treatment device for the semiconductor industry with online monitoring function according to claim 1, characterized in that, The inner wall of the combustion chamber (5) is equipped with two combustion beds (29) and a temperature sensor (30) is installed on the inner wall of the combustion chamber (5).
8. The integrated VOCs treatment device for the semiconductor industry with online monitoring function according to claim 1, characterized in that, The bottom surface of the combustion chamber (5) is connected to the exhaust pipe (31), and the outer surface of the exhaust pipe (31), the outer surface of the air inlet pipe (18) and the outer surface of the drain pipe (20) are all equipped with one-way valves (32).