Double-sided polishing machine anti-falling protection and anti-suction structure

Abstract

The utility model discloses a kind of double-sided grinding and polishing machine anti-falling protection and anti-suction piece structure, with: machine body;Frame, install on machine body;Upper connecting disc, rotation is installed on frame by power mechanism;Upper disc, install on upper connecting disc, upper disc can polish the upper surface of workpiece;Rotary table, rotation is installed on the column of frame;First station, set on rotary table, first station can limit the lifting height of upper disc;Second station, set on rotary table, second station can support upper disc;Driving mechanism, can drive rotary table rotation.First station passes through adjusting nut, can accurately adjust disc lifting height according to workpiece thickness, prevent the occurrence of disc suction piece, second station passes through position control, provide more guarantee for the safety of complete machine use.

Description

Technical Field

[0001] This utility model belongs to the technical field of wafer polishing machines, and in particular relates to a structure for anti-fall protection and anti-suction sheet for a double-sided grinding and polishing machine. Background Technology

[0002] Double-sided grinding / polishing machines are key equipment in the processing of hard and brittle materials such as semiconductors, optical glass, and ceramics. They use the relative movement of two grinding discs to simultaneously perform high-precision grinding and polishing on both surfaces of the workpiece.

[0003] In the process of realizing this utility model, the inventors discovered that the prior art has at least the following problems:

[0004] 1. Risk of accidental fall of the upper plate: During equipment maintenance, cleaning, or loading and unloading, the upper plate needs to be raised to a certain height. If the upper plate lifting drive system malfunctions, the huge upper plate and its counterweight will fall rapidly under the action of gravity, which may not only damage the plate surface but also injure the operators, posing a safety hazard.

[0005] 2. After the grinding and polishing work is completed, during the lifting process of the upper plate, due to the surface tension, the workpiece will be attracted to the upper plate surface and easily carried to a certain height, falling and breaking or becoming inconvenient to pick up and put away.

[0006] CN204772101U - Anti-fall device for cylinder of grinding and polishing machine, discloses an anti-fall device for cylinder of grinding and polishing machine. The anti-fall device includes a central plate, a support column for supporting the central plate, and three anti-fall plates for preventing the grinding machine cylinder from falling. The three anti-fall plates are evenly distributed around the central plate, and the support column is located below the central plate. However, this method cannot solve the above-mentioned technical problems. Utility Model Content

[0007] The technical problem to be solved by this utility model is a double-sided grinding and polishing machine with anti-fall protection and anti-suction plate structure. The first station can adjust the lifting height of the disc according to the thickness of the workpiece by adjusting the nut to prevent the disc from sucking the plate. The second station provides more protection for the safety of the whole machine through position control.

[0008] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: a double-sided grinding and polishing machine anti-fall protection and anti-suction sheet structure, which has the following features:

[0009] Organism;

[0010] The frame is mounted on the machine body;

[0011] The upper connecting plate is rotatably mounted on the frame via a power mechanism;

[0012] An upper plate, mounted on the upper connecting plate, is capable of grinding the upper surface of the workpiece;

[0013] A rotary table is rotatably mounted on the column of the frame;

[0014] The first station is set on the rotary table, and the first station can limit the lifting height of the upper plate;

[0015] The second station is set on the rotary table, and the second station can support the upper plate;

[0016] The drive mechanism is capable of driving the rotary table to rotate.

[0017] The first workstation has a first protrusion, a fixing nut on the first protrusion, and an adjusting screw adapted to the fixing nut. The end of the adjusting screw can limit the lifting height of the upper plate.

[0018] The second workstation has a second protrusion, on which a rubber pad is provided, which can support the upper plate.

[0019] The end of the adjusting screw is also provided with a ball head block, which can block the upper plate.

[0020] The driving mechanism is a gear driving mechanism, which includes meshing driving teeth and active teeth; the driving teeth are fixed on the rotating table, the active teeth are rotatably mounted on the machine body, and a driving motor and a reducer are provided to drive the active teeth to rotate.

[0021] The power mechanism includes a main motor, which is fixedly mounted on the frame, and the main motor's shaft is connected to the upper connecting plate.

[0022] One of the above technical solutions has the following advantages or beneficial effects: the first station can adjust the lifting height of the disc according to the thickness of the workpiece by adjusting the nut, so as to prevent the disc from sucking the piece; the second station provides more protection for the safety of the whole machine through position control. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the anti-fall protection and anti-suction plate structure for the double-sided grinding and polishing machine provided in this embodiment of the utility model;

[0024] Figure 2 for Figure 1 A schematic diagram of the anti-fall protection and anti-suction plate structure for a double-sided grinding and polishing machine;

[0025] Figure 3 for Figure 1 A schematic diagram of the anti-fall protection and anti-suction plate structure of a double-sided grinding and polishing machine;

[0026] Figure 4 for Figure 1 A schematic diagram of the anti-fall protection and anti-suction plate structure of a double-sided grinding and polishing machine;

[0027] Figure 5 for Figure 1 A schematic diagram of the anti-fall protection and anti-suction plate structure of a double-sided grinding and polishing machine;

[0028] Figure 6 for Figure 1 A schematic diagram of the anti-fall protection and anti-suction plate structure of a double-sided grinding and polishing machine;

[0029] The markings in the above figures are as follows: 1. Machine body, 2. Frame, 3. Main motor, 4. Upper connecting plate, 5. Upper plate, 6. Rotary table, 7. First station, 71. First protrusion, 72. Adjusting screw, 73. Fixing nut, 74. Ball head block, 8. Second station, 81. Second protrusion, 82. Rubber pad, 9. Drive motor, 10. Reducer, 11. Active gear, 12. Drive gear. Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0031] Example 1

[0032] See Figures 1-6 A double-sided grinding and polishing machine with anti-fall protection and anti-sucking plate structure includes: a machine body 1; a frame 2 mounted on the machine body 1; an upper connecting plate 4 rotatably mounted on the frame 2 via a power mechanism; an upper plate 5 mounted on the upper connecting plate 4, capable of grinding the upper surface of the workpiece; a rotary table 6 rotatably mounted on the column of the frame 2; a first station 7 set on the rotary table 6, capable of limiting the lifting height of the upper plate 5; a second station 8 set on the rotary table 6, capable of supporting the upper plate 5; and a drive mechanism capable of driving the rotary table 6 to rotate. The first station 7, through an adjusting nut, can precisely adjust the lifting height of the plate according to the workpiece thickness to prevent the plate from sucking in the workpiece. The second station 8, through position control, provides further assurance for the safety of the entire machine.

[0033] The first station 7 has a first protrusion 71, on which a fixing nut 73 is provided, and an adjusting screw 72 adapted to the fixing nut 73 is also provided. The end of the adjusting screw 72 can limit the lifting height of the upper plate 5. The end of the adjusting screw 72 is also provided with a ball head block 74, which can block the upper plate 5. The first station 7, through mechanical limiting, allows the workpiece attracted by surface tension to detach from the surface of the upper plate 5 under the action of the workpiece hole of the planetary wheel and the inflow of clean water. The mechanical limiting can be adjusted according to the specific workpiece thickness.

[0034] The drive mechanism is a gear drive mechanism, which includes meshing drive teeth 12 and driving teeth 11. Drive teeth 12 are fixed on the rotary table 6, and driving teeth 11 are rotatably mounted on the machine body 1. A drive motor 9 and a reducer 10 are provided to drive the driving teeth 11 to rotate. The driving teeth 11 are driven by a servo motor, and the drive teeth 12 are driven by the gear meshing. The rotation of the driving teeth 12 drives the upper part of the machine to rotate.

[0035] The power mechanism includes a main motor 3, which is fixedly mounted on the frame 2. The rotating shaft of the main motor 3 is connected to the upper connecting plate 4, which drives the upper plate 5 to rotate and grind the workpiece.

[0036] Action: The servo motor drives the reducer, which in turn drives the active gear 11, which in turn drives the driven gear. The station position is adjusted by rotation. This structure has two stations. In the first station 7, after processing, the platen rotates to the top of the upper plate 5. Mechanical limit is used to ensure that the platen reaches a certain height when it is lifted. Then, the upper platen 5 releases clean water and rotates at low speed, causing the workpiece that was attracted by surface tension to detach from the surface of the upper platen 5 under the combined action of the planetary wheel workpiece clamp and the force of the flowing clean water. This mechanical limit can be adjusted according to the specific workpiece thickness. In the second station 8, the platen is screwed in when it is fully lifted, adding a layer of protection in case of a sudden drop of the upper platen 5, greatly protecting the safety of the lower workpiece and the operator.

[0037] The first station 7 allows for precise adjustment of the disc lifting height based on the workpiece thickness via an adjusting nut, preventing disc suction. The second station 8 provides greater assurance for the safety of the entire machine through position control.

[0038] With the above structure, the first station 7 can adjust the lifting height of the disc precisely according to the thickness of the workpiece by adjusting the nut, so as to prevent the disc from sucking the piece. The second station 8 provides more protection for the safety of the whole machine through position control.

[0039] Example 2

[0040] In this embodiment, the second station 8 has a second protrusion 81, and a rubber pad 82 is provided on the second protrusion 81. The rubber pad 82 can support the upper plate 5. The second station 8 is screwed in when the plate is fully raised, which ensures an additional layer of protection when the upper plate 5 drops suddenly, protecting the safety of the lower workpiece and the operator.

[0041] A double-sided grinding and polishing machine includes a fall protection and anti-sucking plate structure, comprising: a machine body 1; a frame 2 mounted on the machine body 1; an upper connecting plate 4 rotatably mounted on the frame 2 via a power mechanism; an upper plate 5 mounted on the upper connecting plate 4, capable of grinding the upper surface of the workpiece; a rotary table 6 rotatably mounted on the column of the frame 2; a first station 7 set on the rotary table 6, capable of limiting the lifting height of the upper plate 5; a second station 8 set on the rotary table 6, capable of supporting the upper plate 5; and a drive mechanism capable of driving the rotary table 6 to rotate. The first station 7, through an adjusting nut, allows for precise adjustment of the plate lifting height according to the workpiece thickness, preventing plate suction. The second station 8, through position control, provides further assurance for the safety of the entire machine.

[0042] The drive mechanism is a gear drive mechanism, which includes meshing drive teeth 12 and driving teeth 11. Drive teeth 12 are fixed on the rotary table 6, and driving teeth 11 are rotatably mounted on the machine body 1. A drive motor 9 and a reducer 10 are provided to drive the driving teeth 11 to rotate. The driving teeth 11 are driven by a servo motor, and the drive teeth 12 are driven by the gear meshing. The rotation of the driving teeth 12 drives the upper part of the machine to rotate.

[0043] The power mechanism includes a main motor 3, which is fixedly mounted on the frame 2. The rotating shaft of the main motor 3 is connected to the upper connecting plate 4, which drives the upper plate 5 to rotate and grind the workpiece.

[0044] Action: The servo motor drives the reducer, which in turn drives the active gear 11, which in turn drives the driven gear. The station position is adjusted by rotation. This structure has two stations. In the first station 7, after processing, the platen rotates to the top of the upper plate 5. Mechanical limit is used to ensure that the platen reaches a certain height when it is lifted. Then, the upper platen 5 releases clean water and rotates at low speed, causing the workpiece that was attracted by surface tension to detach from the surface of the upper platen 5 under the combined action of the planetary wheel workpiece clamp and the force of the flowing clean water. This mechanical limit can be adjusted according to the specific workpiece thickness. In the second station 8, the platen is screwed in when it is fully lifted, adding a layer of protection in case of a sudden drop of the upper platen 5, greatly protecting the safety of the lower workpiece and the operator.

[0045] The first station 7 allows for precise adjustment of the disc lifting height based on the workpiece thickness via an adjusting nut, preventing disc suction. The second station 8 provides greater assurance for the safety of the entire machine through position control.

[0046] With the above structure, the first station can precisely adjust the lifting height of the disc according to the thickness of the workpiece by adjusting the nut, so as to prevent the disc from sucking the piece. The second station provides more protection for the safety of the whole machine through position control.

[0047] In the description of this utility model, it should be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "other end", "upper", "side", "top", "inner", "front", "center", "both ends", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0048] In this utility model, unless otherwise explicitly specified and limited, the terms "installation", "setting", "connection", "fixing", "screw connection", etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Unless otherwise explicitly limited, those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0049] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A fall protection and anti-suction plate structure for a double-sided grinding and polishing machine, characterized in that, have: Organism; The frame is mounted on the machine body; The upper connecting plate is rotatably mounted on the frame via a power mechanism; An upper plate, mounted on the upper connecting plate, is capable of grinding the upper surface of the workpiece; A rotary table is rotatably mounted on the column of the frame; The first station is set on the rotary table, and the first station can limit the lifting height of the upper plate; The second station is set on the rotary table, and the second station can support the upper plate; The drive mechanism is capable of driving the rotary table to rotate.

2. The anti-fall protection and anti-suction sheet structure for a double-sided grinding and polishing machine as described in claim 1, characterized in that, The first workstation has a first protrusion, a fixing nut on the first protrusion, and an adjusting screw adapted to the fixing nut. The end of the adjusting screw can limit the lifting height of the upper plate.

3. The anti-fall protection and anti-suction sheet structure for a double-sided grinding and polishing machine as described in claim 2, characterized in that, The second workstation has a second protrusion, on which a rubber pad is provided, which can support the upper plate.

4. The anti-fall protection and anti-suction sheet structure for a double-sided grinding and polishing machine as described in claim 3, characterized in that, The end of the adjusting screw is also provided with a ball head block, which can block the upper plate.

5. The anti-fall protection and anti-suction sheet structure for a double-sided grinding and polishing machine as described in claim 4, characterized in that, The driving mechanism is a gear driving mechanism, which includes meshing driving teeth and active teeth; the driving teeth are fixed on the rotating table, the active teeth are rotatably mounted on the machine body, and a driving motor and a reducer are provided to drive the active teeth to rotate.

6. The anti-fall protection and anti-suction sheet structure for a double-sided grinding and polishing machine as described in claim 5, characterized in that, The power mechanism includes a main motor, which is fixedly mounted on the frame, and the main motor's shaft is connected to the upper connecting plate.

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