Electrode assembly jig

Abstract

The utility model relates to excimer laser technical field, and disclose electrode assembly frock, including bottom plate, the both sides symmetry of bottom plate top surface are equipped with bolt, the bolt outer circle between adjacent slide sleeve joint has the mounting bracket, the bolt outer circle is located the upper and lower surface of mounting bracket all screw thread installation has the nut, the middle part bottom surface of mounting bracket is fixed and installed through screw and has the top plate, the bottom of bottom plate with the bottom of top plate between symmetry is equipped with electrode curved surface gauge block, the bottom of bottom plate top surface is equipped with electrode A in electrode curved surface gauge block, the bottom of top plate bottom surface is equipped with electrode B in electrode curved surface gauge block, electrode curved surface gauge block is located between electrode A, electrode B, guarantees the symmetry of electrode A, electrode B installation and the spacing consistency and the relative flatness.

Description

Technical Field

[0001] This utility model relates to the field of excimer laser technology, and in particular to electrode assembly fixtures. Background Technology

[0002] In excimer laser systems, electrodes are extremely important components, one of the "hearts" of the discharge pumping system, directly determining the laser's output performance, energy efficiency, stability, and lifetime. Electrodes are typically designed with specific curved surfaces (such as Chang's electrodes, Rogowski profiles, etc.) to generate a uniform electrostatic field along the entire electrode length. A uniform electric field ensures that the discharge occurs uniformly and stably across the entire electrode, forming a large-volume, arc-free glow discharge. The electrode surface design features two symmetrical curves with specific radii of curvature (approximately a portion of an ellipse). Therefore, the symmetry and flatness of the assembly position between the upper and lower electrodes significantly affect the stability and reliability of the electrode discharge. When the upper and lower electrodes are perfectly parallel, aligned, and spaced evenly, the electric field between them is uniform. Under high-voltage pulses, the working gas (such as ArF, KrF, XeCl, etc.) is uniformly ionized, forming a glow discharge spanning the entire electrode area. This allows for efficient and uniform extraction of laser energy, resulting in excellent beam quality (such as spot shape and energy distribution). How to perform installation more precisely, ensuring consistent spacing between electrodes, symmetry of discharge surfaces, and electrode parallelism, are issues that professionals in this industry need to consider and resolve.

[0003] Because the front surface of the processed electrode is an irregular curved surface, the electrode thickness is difficult to measure accurately. Traditional installation methods involve transferring the installation reference point, using the bottom mounting plane or plate of the electrode as a reference for measurement to ensure the spacing, symmetry, and relative parallelism between the electrode discharge surfaces. Furthermore, the accumulated installation tolerances of other electrode-related components make it difficult to guarantee the accuracy of the electrode installation position. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides an electrode assembly fixture, which has the advantages of accurate assembly and avoidance of positional differences caused by cumulative tolerances, thus solving the problems mentioned in the background art.

[0005] This utility model provides the following technical solution: an electrode assembly fixture, including a base plate, bolts symmetrically arranged on both sides of the top surface of the base plate, a mounting bracket slidably sleeved between the outer rings of adjacent bolts, nuts threaded on both the upper and lower surfaces of the outer rings of the bolts on the mounting bracket, a top plate fixedly installed between the bottom surfaces of the middle part of the mounting bracket by screws, an electrode curved surface fixture block symmetrically arranged between the top of the base plate and the bottom of the top plate, an electrode A is arranged on the top surface of the base plate at the bottom of the electrode curved surface fixture block, an electrode B is arranged on the bottom surface of the top plate at the top of the electrode curved surface fixture block, and the electrode curved surface fixture block is located between electrode A and electrode B.

[0006] Through the above structural design, by setting up the electrode curved surface gauge block and the cooperation between electrode A and electrode B, the fixture blocks A and B, through the arc shape in the upper and lower directions, and with the guidance and cooperation of dovetail grooves and wedge blocks, transfer the difficult-to-install and measure parts of electrode A and electrode B to the external assembly fixture. This effectively reduces the difficulty of measurement and calibration, ensures the symmetry, spacing consistency and relative flatness of electrode A and electrode B installation, and reduces the technical requirements for assembly workers.

[0007] Preferably, the electrode curved surface gauge block includes tooling block A, tooling block B, and locking screws. Tooling block A is in contact with the top surface of electrode A, tooling block B is in contact with the bottom surface of electrode B, and a locking screw is threaded onto one side of tooling block A.

[0008] With the above structural setup, tooling block A and tooling block B are assembled and fitted together through dovetail grooves and wedge blocks. After assembly, the locking screws are tightened to fix the fit between tooling block A and tooling block B.

[0009] Preferably, the tooling block A has a curved groove A at its bottom, the curved groove A is adapted to the shape and size of the top of the electrode A, and a dovetail groove is formed inside the tooling block A and extends through the tooling block A.

[0010] With the above structural setup, tooling block A is restricted by the curved surface groove A and electrode A through curved surface fit, and then the assembly between tooling block A and tooling block B is achieved through the fit between the dovetail groove and the wedge block.

[0011] Preferably, the tooling block B has a curved groove B on its top, the curved groove B is adapted to the bottom of the electrode B in shape and size, and a wedge block is provided on one side of the top of the curved groove B, the wedge block is adapted to the dovetail groove in shape and size, and the tooling block B cooperates with the tooling block A through the wedge block.

[0012] With the above structural setup, tooling block B is constrained by the cooperation between the curved groove B and the electrode B support, and then assembled by the cooperation between the wedge block and the dovetail groove, so that tooling block A and tooling block B can be used together.

[0013] Preferably, the surface of the wedge block is provided with a mating groove, the position of which corresponds to the position of the locking screw.

[0014] With the above structural setup, by twisting the locking screw, the locking screw rotates inside the thread of tooling block A and then abuts against the bottom wall of the mating groove, eliminating the sliding gap between the wedge block and the dovetail groove, thus fixing the position between tooling block B and tooling block A.

[0015] This utility model has the following advantages: 1. This electrode assembly fixture, by setting up electrode curved surface inspection blocks, fixture block A, fixture block B, electrode A, and electrode B, improves the accuracy of installation position. Fixture blocks A and B, through their vertical curvature, combined with the guidance and cooperation of dovetail grooves and wedge blocks, transfer the difficult-to-install and measure parts of electrode A and electrode B to the external assembly fixture, effectively reducing the difficulty of measurement and calibration, ensuring the symmetry, spacing consistency, and relative flatness of electrode A and electrode B installation, reducing the technical requirements for assembly workers, and thus improving the accuracy of installation position. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the internal structure of the base plate and top plate of this utility model; Figure 3 This is a schematic diagram of the electrode curved surface inspection block structure of this utility model; Figure 4 This is a schematic diagram of the electrode curved surface gauge block structure of this utility model from another perspective; Figure 5 This is a schematic diagram of the internal structure of the electrode curved surface gauge block of this utility model.

[0017] In the diagram: 1. Base plate; 11. Bolt; 2. Mounting bracket; 3. Top plate; 4. Electrode curved surface gauge block; 41. Tooling block A; 42. Tooling block B; 43. Locking screw; 44. Curved surface groove A; 45. Dovetail groove; 46. Curved surface groove B; 47. Wedge block; 48. Mating groove; 5. Electrode A; 6. Electrode B. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] Please see Figures 1-2 The electrode assembly fixture includes a base plate 1. Bolts 11 are symmetrically arranged on both sides of the top surface of the base plate 1. A mounting bracket 2 is slidably sleeved between the outer rings of adjacent bolts 11. Nuts are threaded on both the upper and lower surfaces of the outer rings of the bolts 11 and the mounting bracket 2. The fit between the bolts 11 and the nuts fixes the position of the mounting bracket 2. At the same time, the position of the mounting bracket 2 on the outer rings of the bolts 11 can be changed by screwing the nuts. A top plate 3 is fixedly installed between the bottom surfaces of the middle part of the mounting bracket 2 by screws. Electrode curved surface inspection blocks 4 are symmetrically arranged between the top of the base plate 1 and the bottom of the top plate 3. Electrode A5 is arranged on the top surface of the base plate 1 at the bottom of the electrode curved surface inspection block 4. Electrode B6 is arranged on the bottom surface of the top plate 3 at the top of the electrode curved surface inspection block 4. The electrode curved surface inspection block 4 is located between electrodes A5 and B6.

[0020] In practical use, this device, by setting up the electrode curved surface inspection block 4 and cooperating with electrodes A5 and B6, allows the tooling blocks A41 and B42 to move the difficult-to-install and measure parts of electrodes A5 and B6 to external assembly tooling through the vertical arc shape, combined with the guidance and cooperation of dovetail groove 45 and wedge block 47. This effectively reduces the difficulty of measurement and calibration, ensures the symmetry, spacing consistency and relative flatness of electrode A5 and B6 installation, and reduces the technical requirements for assembly workers.

[0021] Please see Figures 1-5 The electrode curved surface inspection block 4 includes a tooling block A41, a tooling block B42, and a locking screw 43. Tooling block A41 is in contact with the top surface of electrode A5, and tooling block B42 is in contact with the bottom surface of electrode B6. A locking screw 43 is threaded on one side of tooling block A41.

[0022] Tooling block A41 and tooling block B42 are assembled and fitted together by dovetail groove 45 and wedge block 47. After assembly, locking screw 43 is tightened to fix the fit between tooling block A41 and tooling block B42.

[0023] Please see Figures 1-5 The bottom of the tooling block A41 is provided with a curved groove A44, which is adapted to the shape and size of the top of the electrode A5. The tooling block A41 is provided with a dovetail groove 45, which is opened through the tooling block A41.

[0024] Tooling block A41 is restricted by the curved surface groove A44 and the electrode A5 through curved surface fit. Then, the assembly between tooling block A41 and tooling block B42 is realized through the fit between dovetail groove 45 and wedge block 47.

[0025] Please see Figures 1-5 The tooling block B42 has a curved groove B46 on its top. The curved groove B46 is adapted to the bottom of the electrode B6 in terms of shape and size. A wedge block 47 is provided on one side of the top of the curved groove B46. The wedge block 47 is adapted to the dovetail groove 45 in terms of shape and size. The tooling block B42 cooperates with the tooling block A41 through the wedge block 47.

[0026] Tooling block B42 is restricted by the cooperation between the curved groove B46 and the electrode B6 support, and is then assembled through the cooperation between the wedge block 47 and the dovetail groove 45, so that tooling block A41 and tooling block B42 can be used together.

[0027] Please see Figures 1-5 The wedge block 47 has a mating groove 48 on its surface. The position of the mating groove 48 corresponds to the position of the locking screw 43. By turning the locking screw 43, the locking screw 43 rotates inside the tooling block A41 and then abuts against the bottom wall of the mating groove 48, eliminating the sliding gap between the wedge block 47 and the dovetail groove 45, so that the position between the tooling block B42 and the tooling block A41 is fixed.

[0028] The use of a single set of electrode curved surface gauge blocks 4 can still cause deviations in the symmetry of the curved surfaces along the length of electrodes A5 and B6 due to the fit gap between the straight surfaces extending from the curved surfaces of tooling blocks A41 and B42 and the straight surfaces along the length of electrodes A5 and B6. The use of multiple sets of electrode curved surface gauge blocks 4 can eliminate the influence of the angular deviation of the fit gap. At the far end of the other side of electrodes A5 and B6, another set of electrode curved surface gauge blocks 4 can be used to limit the symmetry of the upper and lower surfaces along the length of electrodes A5 and B6, so that the installation tolerance is limited to the fit gap between the single set of electrode curved surface gauge blocks 4 and electrodes A5 and B6, which is negligible in terms of discharge influence.

[0029] Working Principle: Before using the assembly fixture, fixture blocks A41 and B42 are initially secured by dovetail grooves 45 and wedge blocks 47 on their mating surfaces, with side locking screws 43 in place. The initial dimensions are measured using a micrometer to verify the initial position data, confirming that these dimensions were constrained during overall machining. Then, the side locking screws 43 are loosened. At this point, the dovetail grooves 45 and wedge blocks 47 guide fixture blocks A41 and B42 to slide. In the sliding direction of fixture blocks A41 and B42, the mating surfaces of the wedge blocks 47 and dovetail grooves 45 are secured by equal-height blocks and gap plates. This reserved adjustment gap ensures that the assembly fixture can be smoothly removed from the gap between the upper and lower electrodes after electrode installation. The relative distance between fixture blocks A41 and B42 is then checked and adjusted to the required dimensional position. Afterwards, tighten the side locking screw 43. At this time, the two inclined surfaces of the wedge block 47 and the dovetail groove 45 are wedge-tightened by the lateral force, eliminating the sliding gap reserved at the joint of tooling block A41 and tooling block B42 through the dovetail groove 45 and the wedge block 47. The side locking screw 43 locks the inclined surfaces on both sides of the wedge block 47 to slide in the center, wedging the connection between tooling block A41 and tooling block B42. The inclined surfaces also restrict the degrees of freedom of tooling block A41 and tooling block B42 in the X and Y directions. The sliding in the Z direction is overcome by the friction provided by the locking screw 43 between the inclined surfaces. After adjusting with the micrometer and the gap block, and after the required size gap of the assembly tooling is achieved, it is placed in the installation space of electrode A5 and electrode B6 between the bottom plate 1 and the top plate 3. The nuts on the upper and lower parts of the mounting bracket 2 installed on the outer ring of the locking bolt 11 are now restricted in terms of electrode spacing and relative flatness.

Claims

1. An electrode assembly fixture, including a base plate (1), characterized in that: Bolts (11) are symmetrically arranged on both sides of the top surface of the base plate (1). A mounting bracket (2) is slidably sleeved between the outer rings of adjacent bolts (11). Nuts are threaded on both the upper and lower surfaces of the outer rings of the bolts (11) and the mounting bracket (2). A top plate (3) is fixedly installed between the bottom surfaces of the middle part of the mounting bracket (2) by screws. An electrode curved surface gauge block (4) is symmetrically arranged between the top of the base plate (1) and the bottom of the top plate (3). An electrode A (5) is arranged on the top surface of the base plate (1) at the bottom of the electrode curved surface gauge block (4). An electrode B (6) is arranged on the bottom surface of the top plate (3) at the top of the electrode curved surface gauge block (4). The electrode curved surface gauge block (4) is located between the electrode A (5) and the electrode B (6).

2. The electrode assembly fixture according to claim 1, characterized in that: The electrode curved surface gauge block (4) includes tooling block A (41), tooling block B (42), and locking screw (43). Tooling block A (41) is in contact with the top surface of electrode A (5), and tooling block B (42) is in contact with the bottom surface of electrode B (6). A locking screw (43) is threaded on one side of tooling block A (41).

3. The electrode assembly fixture according to claim 2, characterized in that: The tooling block A (41) has a curved groove A (44) at the bottom. The curved groove A (44) is adapted to the shape and size of the top of the electrode A (5). The tooling block A (41) has a dovetail groove (45) inside and is opened through the tooling block A (41).

4. The electrode assembly fixture according to claim 3, characterized in that: The tooling block B (42) has a curved groove B (46) on its top. The curved groove B (46) is adapted to the bottom of the electrode B (6) in terms of shape and size. A wedge block (47) is provided on one side of the top of the curved groove B (46). The wedge block (47) is adapted to the dovetail groove (45) in terms of shape and size. The tooling block B (42) cooperates with the tooling block A (41) through the wedge block (47).

5. The electrode assembly fixture according to claim 4, characterized in that: The wedge block (47) has a mating groove (48) on its surface, and the position of the mating groove (48) corresponds to the position of the locking screw (43).

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