Tray and test handler
By incorporating an elastic element on the tray's mounting base, the impact of semiconductor devices on the mounting base during placement is buffered, thus solving the problem of damage to semiconductor devices during picking and placing and improving the safety and reliability of the devices.
Patent Information
- Application Number
- CN202522687297.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-18
- Publication Date
- 2026-11-03
- Estimated Expiration
- 2035-12-18
AI Technical Summary
During semiconductor manufacturing, semiconductor devices are easily damaged by collisions when being picked up and placed on trays.
A tray is designed, comprising a fixed base and an elastic element. The elastic element is located on the side of the fixed base facing away from the slot opening, and plays a buffering role when semiconductor devices are placed in, reducing the impact with the fixed base.
The cushioning effect of the elastic element reduces the risk of damage to semiconductor devices during placement, thereby improving the safety and reliability of the devices.
Smart Images
Figure CN224929568U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor testing technology, and in particular to a material tray and a testing and sorting machine. Background Technology
[0002] In the semiconductor manufacturing and good product management process, semiconductor devices that have undergone specified manufacturing processes must be tested for performance and parameters using a testing instrument. The testing and sorting machine uses a pick-up device to place the semiconductor devices onto a tray, and then transfers the semiconductor devices along with the tray to the testing connector of the testing instrument. The pick-up device uses a vacuum nozzle to suck up the semiconductor devices. When it's time to put the semiconductor devices down, the vacuum nozzle is restored to normal pressure, allowing the semiconductor devices to fall onto the tray under gravity. This process can easily cause the semiconductor devices to collide with the tray, resulting in damage. Utility Model Content
[0003] In view of the problems existing in the background art, the purpose of this application is to provide a material tray and a testing and sorting machine that overcomes or at least partially solves the above problems.
[0004] According to a first aspect of this application, a tray is provided, including a tray body and a fixing base. The tray body includes a first surface and a second surface disposed opposite to each other along a first direction. The tray body is provided with a mounting groove, the opening of which is located on the first surface. The bottom of the mounting groove is provided with a connection window. The opening of the mounting groove is provided with a first limiting portion and a second limiting portion disposed diagonally. The first limiting portion is detachably fixed to the tray body. The fixing base is used to detachably fix to the mounting groove. The fixing base is provided with a receiving groove and an elastic member. The elastic member is located on the side of the fixing base opposite to the opening of the receiving groove. The receiving groove is used to receive a semiconductor device. The bottom of the receiving groove is provided with a test window, which serves as a channel for a test connector to contact the semiconductor device. Wherein, when the fixing base is disposed in the mounting groove, the opening of the receiving groove faces the connection window and communicates with the connection window. The elastic member is located at the end of the fixing base opposite to the connection window. Along the direction from the second surface to the first surface, the elastic member abuts against the first limiting portion and the second limiting portion.
[0005] In one or more of the above optional embodiments, the number of mounting slots is multiple and arranged in a matrix. The multiple mounting slots include several mounting slot groups formed by four mounting slots arranged in a square matrix. In the mounting slot group, the portion of the disc body located at the junction of the four mounting slots is provided with a threaded hole. The disc includes mounting bolts. The mounting bolts are screwed and fixed to the threaded holes along the direction from the first surface to the second surface. Along the first direction, the nut of the mounting bolt at least partially overlaps with each mounting slot in the mounting slot group. The portion of the mounting bolt nut that overlaps with the mounting slot constitutes a first limiting part.
[0006] In one or more of the above optional embodiments, the elastic element includes four elastic bodies, which are respectively disposed at the four corners of the fixed base. Two elastic bodies distributed diagonally are used to abut against the first limiting part and the second limiting part, respectively.
[0007] In one or more of the above optional implementations, Along the direction from the bottom of the receiving groove to the opening of the receiving groove, the four corners of the fixing seat are recessed to form a stepped portion. The stepped portion has a stepped surface arranged in the direction from the opening of the receiving groove to the bottom of the receiving groove, and an elastic body is disposed on a stepped surface.
[0008] In one or more of the above optional implementations, Along the direction from the second surface to the first surface, the periphery of the first surface is provided with an abutment protrusion, the fixing seat protrudes from the first surface, the abutment protrusion protrudes from the fixing seat, and the abutment protrusion is used to abut against and slide relative to the support structure of the test sorting machine when the test sorting machine transfers the material tray.
[0009] In one or more of the above optional embodiments, a first positioning hole is provided on the portion of the disk body near the edge. The first positioning hole penetrates the disk body along a first direction and is used for the insertion of the positioning pin of the pickup device.
[0010] In one or more of the above optional embodiments, the fixing seat is provided with two second positioning holes. The two second positioning holes penetrate the fixing seat along the groove opening of the receiving groove towards the bottom of the receiving groove. The end of the second positioning hole near the groove opening of the receiving groove is used for the positioning pin of the crimping device to be inserted, and the end of the second positioning hole near the bottom of the receiving groove is used for the positioning pin of the test connector to be inserted.
[0011] In one or more of the above optional embodiments, the disc body includes a first edge, a second edge, a third edge, and a fourth edge. The first edge and the second edge are arranged opposite each other along a second direction, and the third edge and the fourth edge are arranged opposite each other along a third direction, wherein the first direction, the second direction, and the third direction are mutually perpendicular. Two clearance grooves arranged sequentially along the third direction are recessed on the side of the second edge facing away from the first edge. A first guide post is provided in one clearance groove, and a second guide post is provided at the end corner of the disc body away from the second edge. The two first guide posts and the second guide post are respectively used to insert into the threaded grooves of the three conveying screws of the first transfer device of the test sorting machine, and the clearance grooves are used to avoid the conveying screws.
[0012] In one or more of the above optional embodiments, the first edge is provided with a plug hole for the positioning protrusion of the second transfer device of the test sorting machine to be plugged in.
[0013] According to a second aspect of this application, a test sorting machine is provided, including the aforementioned tray.
[0014] The beneficial effects of the embodiments of this application are as follows: The tray provided in the embodiments of this application, by setting an elastic element in the fixed seat, when the fixed seat is detachably fixed to the mounting groove, the elastic element is located on the side of the fixed seat facing away from the groove opening of the receiving groove. When the semiconductor device is placed into the receiving groove from top to bottom through the connecting window, the elastic element can play a buffering role, which helps to reduce the impact between the semiconductor device and the fixed seat, thereby reducing the risk of damage to the semiconductor device. Attached Figure Description
[0015] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the accompanying drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn to scale.
[0016] Figure 1 A schematic diagram of a material tray provided for an embodiment of this application; Figure 2 A schematic diagram of a material tray provided for an embodiment of this application; Figure 3 for Figure 2 Enlarged view of point A in the middle; Figure 4 This is a schematic diagram of a material tray with the first limiting part omitted, provided in an embodiment of this application; Figure 5 for Figure 4 Enlarged view of point B in the middle; Figure 6 A schematic diagram of a test sorting machine provided in an embodiment of this application; Figure 7 A schematic diagram of a first transfer device provided in an embodiment of this application; Figure 8 This is a schematic diagram of a second transfer device provided in an embodiment of this application. Detailed Implementation
[0017] To facilitate understanding of this application, a more detailed description is provided below with reference to the accompanying drawings and specific embodiments. It should be noted that when an element is described as being "fixed to" another element, it can be directly on the other element, or one or more intermediate elements may exist between them. When an element is described as being "connected" to another element, it can be directly connected to the other element, or one or more intermediate elements may exist between them. The terms "vertical," "horizontal," "left," "right," "inner," "outer," and similar expressions used in this specification are for illustrative purposes only.
[0018] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the scope of the application. The term "and / or" as used in this specification includes any and all combinations of one or more of the associated listed items.
[0019] Furthermore, the technical features involved in the different embodiments of this application described below can be combined with each other as long as they do not conflict with each other.
[0020] Please see Figure 1 In some embodiments, the tray 100 includes a tray body 1 and a fixing base 2. The tray body 1 includes a first surface 1a and a second surface 1b arranged opposite to each other along a first direction X. The tray body 1 is provided with a mounting groove a1, the opening of which is located on the first surface 1a. The bottom of the mounting groove a1 is provided with a connecting window b. The opening of the mounting groove a1 is provided with a first limiting part 11 and a second limiting part 12 arranged diagonally. The first limiting part 11 is detachably fixed to the tray body 1. The fixing base 2 is used to detachably fix to the mounting groove a1. The fixing base 2 is provided with a receiving groove c and an elastic member. The elastic member is located on the side of the fixing base 2 opposite to the opening of the receiving groove c. The receiving groove c is used to receive a semiconductor device. The bottom of the receiving groove c is provided with a test window d, which serves as a channel for a test connector to contact the semiconductor device. When the fixed base 2 is installed in the mounting groove a1, the opening of the receiving groove c is set facing the connecting window b and is connected to the connecting window b. The elastic element is located at the end of the fixed base 2 facing away from the connecting window b. Along the direction from the second surface 1b to the first surface 1a, the elastic element abuts against the first limiting part 11 and the second limiting part 12.
[0021] In use, the first limiting part 11 is removed from the tray 1. At this time, the fixing seat 2 can be installed into the mounting groove a1 or removed from the mounting groove a1. After the fixing seat 2 is fixed in the mounting groove a1, when the tray 100 is in the state of receiving semiconductor devices, the second surface 1b and the first surface 1a are arranged sequentially along the direction of gravity. The picking device places the semiconductor device from top to bottom through the connecting window b into the receiving groove c on the side opposite to the first surface 1a. The elastic element plays a buffering role during the placement of the semiconductor device.
[0022] The tray 100 provided in this application embodiment has an elastic element provided in the fixing seat 2. When the fixing seat 2 is detachably fixed to the mounting groove a1, the elastic element is located on the side of the fixing seat 2 facing away from the groove opening of the receiving groove c. When the semiconductor device is placed into the receiving groove c from top to bottom through the connecting window b, the elastic element can play a buffering role, which helps to reduce the impact between the semiconductor device and the fixing seat 2, thereby reducing the risk of damage to the semiconductor device.
[0023] In some embodiments, the number of mounting slots a1 is multiple and arranged in a matrix. The multiple mounting slots a1 include several mounting slot groups a formed by four mounting slots a1 arranged in a square matrix. In each mounting slot group a, the portion of the disc body 1 located at the intersection of the four mounting slots a1 is provided with a threaded hole e. The tray 100 includes mounting bolts 3, which are screwed and fixed to the threaded hole e along the direction from the first surface 1a to the second surface 1b. Along the first direction X, the nut of the mounting bolt 3 at least partially overlaps with each mounting slot a1 in the mounting slot group a. The overlapping portion of the nut of the mounting bolt 3 with the mounting slot a1 constitutes a first limiting part 11. That is, the four parts of the nut of one mounting bolt 3 respectively serve as the first limiting part 11 corresponding to the four mounting slots a1 in a mounting slot group a. Using the nut of one mounting bolt 3 as the first limiting part 11 corresponding to the four mounting slots a1 simplifies the structural design of the tray 100 and improves the assembly and disassembly efficiency of the fixing seat 2.
[0024] In some embodiments, the second limiting portion 12 protrudes from the inner wall of the groove opening of the mounting groove a1.
[0025] In some embodiments, the second limiting part 12 is integrally formed with the disc body 1.
[0026] In some embodiments, the elastic element includes four elastic bodies 22, which are respectively disposed at the four corners of the fixed base 2. Two elastic bodies 22 are used to abut against the first limiting part 11 and the second limiting part 12, respectively. It is understood that in some other embodiments, the elastic element may include only two elastic bodies 22, which are respectively disposed at opposite ends of the fixed base 2. The two elastic bodies 22 are used to abut against the first limiting part 11 and the second limiting part 12, respectively. The elastic body 22 includes four elastic bodies 22 distributed at the four corners of the fixed base 2, wherein the two diagonally distributed elastic bodies 22 are used to abut against the first limiting part 11 and the second limiting part 12, respectively. Compared to the embodiment where the elastic element includes only two elastic bodies 22, when assembling the fixed base 2, the fixed base 2 can simultaneously adapt to any one of the mounting slots a1 in the mounting slot group a, which is beneficial to improving the assembly flexibility and versatility of the fixed base 2, increasing the assembly efficiency of the material tray 100, and reducing manufacturing costs.
[0027] In some embodiments, the projection of the mounting base 2 in the first direction X is generally square.
[0028] In some embodiments, the four elastic bodies 22 of the elastic element are arranged in a matrix. Specifically, along the second direction Y, the four elastic bodies 22 are arranged in two rows, with two elastic bodies 22 in each row aligned. Along the third direction Z, the four elastic bodies 22 are arranged in two columns, with two elastic bodies 22 in each column aligned.
[0029] In some embodiments, the elastomer 22 is a spring.
[0030] In some embodiments, step portions 24 are recessed at each of the four corners of the fixing base 2 along the direction from the bottom of the receiving groove c to the opening of the receiving groove c. Each step portion 24 has a stepped surface 241 disposed in the direction from the opening of the receiving groove c to the bottom of the receiving groove c, and an elastic body 22 is disposed on a stepped surface 241. By providing the step portions 24, clearance spaces are formed at each of the four corners of the fixing base 2. When the fixing base 2 is installed in the mounting groove a1, the clearance spaces are used to accommodate the first limiting portion 11 and the second limiting portion 12.
[0031] Please see Figure 1 and Figure 6 In some embodiments, along the direction from the second surface 1b to the first surface 1a, the periphery of the first surface 1a is provided with an abutment protrusion 13, the fixing seat 2 protrudes from the first surface 1a, and the abutment protrusion 13 protrudes from the fixing seat 2. The abutment protrusion 13 is used to abut against and slide relative to the support structure of the test sorting machine 1000 when the test sorting machine 1000 transfers the material tray 100.
[0032] When applied to the test sorting machine 1000, the material tray 100 is vertically moved by the lifting device 200 along the vertical direction. Along the first direction X, the pressing component of the lifting device 200 presses the material tray 100 against the support structure, so that the side of the abutment protrusion 13 facing away from the first surface 1a abuts against the support structure. When the lifting device 200 drives the material tray 100 to move along the second direction Y, the abutment protrusion 13 slides relative to the support structure.
[0033] By setting the mounting base 2 to protrude from the first surface 1a and the abutting protrusion 13 to protrude from the mounting base 2, it is convenient to install and remove the mounting base 2 from the mounting slot a1, while reducing the risk of damage caused by the semiconductor device mounted on the mounting base 2 colliding with the components of the test sorting machine 1000 during the transfer of the tray 100.
[0034] Please see Figure 1 and Figure 2 In some embodiments, the portion of the disk body 1 near the edge is provided with a first positioning hole f, the first positioning hole f penetrates the disk body 1 along a first direction X, and the first positioning hole f is used for the insertion of the positioning pin of the pickup device.
[0035] When applied to the test sorting machine 1000, the picking device is located on the side opposite to the first surface 1a. The positioning post of the picking device is inserted into the first positioning hole f along the direction from the second surface 1b to the first surface 1a to align with the tray 100. Then, a vacuum nozzle is used to place or remove semiconductor devices on the tray 100.
[0036] In some embodiments, along the first direction X, the first positioning hole f is partially aligned with the abutment protrusion 13, and the first positioning hole f penetrates the disk body 1 and the abutment protrusion 13.
[0037] Please see Figure 1 , Figure 3 and Figure 5 In some embodiments, the fixing base 2 is provided with two second positioning holes g. The two second positioning holes g penetrate the fixing base 2 along the groove opening of the receiving groove c toward the bottom of the receiving groove c. The end of the second positioning hole g near the groove opening of the receiving groove c is used for the positioning pin of the crimping device to be inserted, and the end of the second positioning hole g near the bottom of the receiving groove c is used for the positioning pin of the test connector to be inserted.
[0038] When applied to the test sorting machine 1000, when the tray 100 containing semiconductor devices is moved to the test position, the test connector of the tester is located on the side facing away from the second surface 1b, and the crimping device is located on the side facing away from the first surface 1a. The crimping device approaches the tray 100 along the direction from the second surface 1b to the first surface 1a. The two positioning pins of the crimping device are respectively inserted into the end of the two second positioning holes g near the opening of the receiving groove c to align with the semiconductor device located on the fixed base 2. The crimping device is further connected to the semiconductor device in the receiving groove c through the connecting window b to supply power to the semiconductor device. The test connector approaches the tray 100 along the direction from the first surface 1a to the second surface 1b. The two positioning pins of the test connector are respectively inserted into the end of the two second positioning holes g near the bottom of the receiving groove c to align with the semiconductor device located on the fixed base 2. The test connector is further approached by the tray 100 and contacts the semiconductor device located in the receiving groove c through the test window d.
[0039] Please see Figure 1 , Figure 2 , Figure 4 , Figure 7 and Figure 8 In some embodiments, the disk body 1 includes a first edge 14, a second edge 15, a third edge 16 and a fourth edge 17. The first edge 14 and the second edge 15 are arranged opposite each other along a second direction Y, and the third edge 16 and the fourth edge 17 are arranged opposite each other along a third direction Z. The first direction X, the second direction Y and the third direction Z are perpendicular to each other.
[0040] In some embodiments, both the third edge 16 and the fourth edge 17 are provided with a plurality of first positioning holes f arranged sequentially along the second direction Y.
[0041] In some embodiments, the second edge 15 is recessed on the side facing away from the first edge 14 and has two clearance grooves h arranged sequentially along the third direction Z. A first guide post 18 is provided in one clearance groove h, and a second guide post 19 is provided at the end corner of the disc body 1 away from the second edge 15. The two first guide posts 18 and the second guide post 19 are used to be inserted into the threaded grooves 3011 of the three conveying screws 301 of the first transfer device 300, respectively. The clearance groove h is used to avoid the conveying screws 301. Figure 7 The diagram illustrates the first transfer device 300, in which the three transfer screws 301 of the first transfer device 300 rotate synchronously in the same direction, driving the material tray 100 to move in a direction parallel to the first direction X.
[0042] In some embodiments, the first edge 14 is provided with a plug hole i, which is used for the positioning protrusion 401 of the second transfer device 400 of the test sorting machine 1000 to be plugged in. Figure 8 The positioning protrusion 401 of the second transfer device 400 of the test sorting machine 1000 is shown. The positioning protrusion 401 is used to insert into the insertion hole i in the direction opposite to the first direction X. Then the second transfer device 400 can drive the positioning protrusion 401 to move in the third direction Z, so as to drive the material tray 100 to move in the third direction Z.
[0043] Based on the same inventive concept, this application also provides a test sorting machine 1000, including the material tray 100 in any of the above embodiments.
[0044] The above description is merely an embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.
Claims
1. A material tray, characterized in that, include: The disc body includes a first surface and a second surface arranged opposite to each other along a first direction. The disc body is provided with a mounting groove. The opening of the mounting groove is located on the first surface. The bottom of the mounting groove is provided with a connecting window. The opening of the mounting groove is provided with a first limiting part and a second limiting part arranged diagonally. The first limiting part is detachably fixed to the disc body. A mounting base is provided for detachable fixing to the mounting groove. The mounting base is provided with a receiving groove and an elastic element. The elastic element is located on the side of the mounting base opposite to the opening of the receiving groove. The receiving groove is used to receive a semiconductor device. The bottom of the receiving groove is provided with a test window, which serves as a channel for the test connector to contact the semiconductor device. When the fixed seat is placed in the mounting groove, the opening of the receiving groove faces the connection window and communicates with the connection window. The elastic member is located at the end of the fixed seat facing away from the connection window, along the direction from the second surface to the first surface, and the elastic member abuts against the first limiting part and the second limiting part.
2. The material tray according to claim 1, characterized in that, The number of mounting slots is multiple and arranged in a matrix. The multiple mounting slots include several mounting slot groups formed by four mounting slots arranged in a square matrix. In the mounting slot group, the portion of the disc body located at the intersection of the four mounting slots is provided with a threaded hole. The material disc includes a mounting bolt. The mounting bolt is screwed and fixed to the threaded hole along the direction from the first surface to the second surface. Along the first direction, the nut of the mounting bolt at least partially overlaps with each mounting slot in the mounting slot group. The portion of the mounting bolt nut that overlaps with the mounting slot constitutes the first limiting part.
3. The material tray according to claim 2, characterized in that, The elastic element includes four elastic bodies, which are respectively disposed at the four corners of the fixed base. Two of the elastic bodies, which are diagonally distributed, are used to abut against the first limiting part and the second limiting part, respectively.
4. The material tray according to claim 3, characterized in that, Along the direction from the bottom of the receiving groove to the opening of the receiving groove, each of the four corners of the fixing seat is recessed to form a stepped portion. The stepped portion has a stepped surface arranged in the direction from the opening of the receiving groove to the bottom of the receiving groove, and an elastic body is disposed on one of the stepped surfaces.
5. The material tray according to claim 1, characterized in that, Along the direction from the second surface toward the first surface, the periphery of the first surface is provided with an abutment protrusion, the fixing seat protrudes from the first surface, the abutment protrusion protrudes from the fixing seat, and the abutment protrusion is used to abut against and slide relative to the support structure of the test sorting machine when the test sorting machine moves the material tray.
6. The material tray according to claim 5, characterized in that, The disk body is provided with a first positioning hole near the edge. The first positioning hole penetrates the disk body along the first direction and is used for the insertion of the positioning pin of the pickup device.
7. The material tray according to claim 1, characterized in that, The fixing base is provided with two second positioning holes. The two second positioning holes penetrate the fixing base along the groove opening of the receiving groove towards the bottom of the receiving groove. The end of the second positioning hole near the groove opening of the receiving groove is used for the insertion of the positioning pin of the crimping device, and the end of the second positioning hole near the bottom of the receiving groove is used for the insertion of the positioning pin of the test connector.
8. The material tray according to claim 1, characterized in that, The disk body includes a first edge, a second edge, a third edge, and a fourth edge. The first edge and the second edge are arranged opposite each other along a second direction, and the third edge and the fourth edge are arranged opposite each other along a third direction. The first direction, the second direction, and the third direction are perpendicular to each other. The second edge has two recessed clearance grooves arranged sequentially along the third direction on the side opposite to the first edge. A first guide post is provided in one of the clearance grooves. A second guide post is provided at the end corner of the disc body away from the second edge. The two first guide posts and the second guide post are used to be inserted into the threaded grooves of the three conveying screws of the first transfer device of the test sorting machine, respectively. The clearance groove is used to avoid the conveying screws.
9. The material tray according to claim 8, characterized in that, The first edge is provided with a plug hole, which is used for the positioning protrusion of the second transfer device of the test sorting machine to be plugged in.
10. A testing and sorting machine, characterized in that, Includes the tray as described in any one of claims 1-9.