Turnover device and test handler

Abstract

The application relates to the technical field of semiconductor testing, and discloses a turnover device and a test sorting machine. The turnover device comprises a bearing assembly, a support, a first driving assembly and a limiting mechanism. The bearing assembly is provided with a sliding channel for accommodating a tray, the sliding channel penetrating through the bearing assembly along a second direction. The support is rotationally connected with the bearing assembly, the first driving assembly is used for driving the bearing assembly to rotate around a rotation axis parallel to a first direction, and the limiting mechanism comprises a second driving assembly, a limiting piece and a third driving assembly. The second driving assembly is arranged on the bearing assembly and is used for driving the third driving assembly to reciprocate along a direction parallel to the second direction. The third driving assembly is used for driving the limiting piece to reciprocate along a direction parallel to a third direction, so that a limiting protrusion of the limiting piece is inserted into or separated from a limiting hole of the tray. The first direction, the second direction and the third direction are perpendicular to each other in pairs. Through the above mode, the embodiment of the application is favorable for the miniaturization design of the test sorting machine as a whole.

Description

Technical Field

[0001] This application relates to the field of semiconductor testing technology, and in particular to a flipping device and a test sorting machine. Background Technology

[0002] In the semiconductor manufacturing and good product management process, semiconductor devices that have undergone specified manufacturing processes must be tested for performance and parameters using a testing instrument. A test sorting machine is used to move the devices under test to the interface position of the testing instrument and electrically connect it. During operation, the test sorting machine needs to flip the tray containing the semiconductor devices and convey them vertically.

[0003] Currently, the test sorting machine uses a separately configured flipping mechanism and a transfer mechanism to achieve the flipping and vertical conveying of the material tray. The specific operation is as follows: after receiving the material tray, the flipping mechanism first locks the tray and then flips it to a vertical position. Next, the receiving part of the transfer mechanism moves towards the flipping mechanism until it engages with the bottom of the tray. At this point, the flipping mechanism unlocks the tray, and finally, the receiving part of the transfer mechanism drives the tray to move vertically downwards. While this design can accomplish basic flipping and conveying tasks, it suffers from a large space requirement, hindering the miniaturization design of the test sorting machine. Utility Model Content

[0004] In view of the problems existing in the background art, the purpose of this application is to provide a flipping device and a test sorting machine that overcomes or at least partially solves the above problems.

[0005] According to a first aspect of this application, a flipping device is provided, comprising a support component, a bracket, a first drive component, and a limiting mechanism. The support component has a sliding channel extending through it along a second direction, and the sliding channel is used to accommodate a tray. The bracket is rotatably connected to the support component. The first drive component is connected to the support component and is used to drive the support component to rotate between a first position and a second position about a rotation axis parallel to the first direction. The limiting mechanism includes a second drive component, a limiting member, and a third drive component. The second drive component is disposed on the support component and connected to the third drive component. The second drive component is used to drive the third drive component to reciprocate along a direction parallel to the second direction. The limiting member is connected to the third drive component and has a limiting protrusion. The third drive component is used to drive the limiting member to reciprocate along a direction parallel to the third direction, so that the limiting protrusion inserts into or disengages from a limiting hole in the tray. The first direction, the second direction, and the third direction are mutually perpendicular.

[0006] In one or more of the above optional embodiments, the supporting component includes a support plate, a first limiting portion, and a second limiting portion. The support plate includes a first surface and a second surface disposed opposite each other along a third direction. The first limiting portion and the second limiting portion are disposed opposite each other on the first surface along a first direction. The first limiting portion has a first groove extending along a second direction and penetrating the first limiting portion. The second limiting portion has a second groove extending along the second direction and penetrating the second limiting portion. The first groove and the second groove are used to accommodate the opposite side edges of the material tray. The first groove and the second groove together define a sliding channel. A second driving component and a third driving component are disposed on the second surface. The support plate has a clearance hole that penetrates the support plate along a third direction. Along the third direction, the limiting component is aligned with the clearance hole.

[0007] In one or more of the above optional embodiments, the limiting mechanism includes a first slide rail, a first slider, a second slide rail and a second slider. The first slide rail and the second slide rail are disposed on the second surface. The first slide rail and the second slide rail extend along the second direction. Along the first direction, the first slide rail and the second slide rail are respectively located on both sides of the clearance hole. The first slider and the second slider are respectively slidably disposed on the first slide rail and the second slide rail. The third drive component is fixed to the first slider and the second slider.

[0008] In one or more of the above optional embodiments, the third drive assembly includes a sliding support, a third drive unit, a third telescopic rod, and a fourth telescopic rod. The sliding support is slidably disposed on the support plate along the second direction and is connected to the second drive assembly. The third drive unit is disposed on the sliding support, and the third telescopic rod is connected to the drive unit. The third drive unit is used to drive the third telescopic rod to reciprocate along a direction parallel to the third direction. The fourth telescopic rod is disposed through the sliding support along the third direction and can move relative to the sliding support in a direction parallel to the third direction. The third and fourth telescopic rods are connected to a limiting member.

[0009] In one or more of the above optional embodiments, the third drive assembly includes a bushing, a sliding support is provided with a receiving hole that passes through the sliding support in a third direction, the bushing is disposed in the receiving hole, and the fourth telescopic rod passes through the bushing.

[0010] In one or more of the above optional embodiments, the first drive assembly includes a mounting base, a first drive unit, a first telescopic rod, and a connecting rod. The first drive unit includes a first end and a second end disposed opposite to each other. The first end is hinged to the mounting base, and the first telescopic rod is disposed at the second end and hinged to the connecting rod. The flipping device includes a first rotating shaft, which is rotatably connected to the bracket. The axis of the first rotating shaft is parallel to a first direction, and the first rotating shaft is fixedly connected to the bearing assembly and the connecting rod. The first telescopic rod can reciprocate relative to the first drive unit in a direction parallel to the direction from the first end to the second end, thereby driving the connecting rod to rotate around the axis of the first rotating shaft, and subsequently driving the bearing assembly to rotate around the axis of the first rotating shaft.

[0011] In one or more of the above optional embodiments, there are two first driving units and two first telescopic rods. One first telescopic rod is located at the second end of a first driving unit. The connecting rod includes a first part, a second part, and a third part connected in sequence. The second part is fixedly connected to the first rotating shaft. One first telescopic rod is hinged to the first part, and the other first telescopic rod is hinged to the third part.

[0012] In one or more of the above optional embodiments, the bracket includes a first side plate and a second side plate arranged opposite to each other, the bearing assembly includes a first rotating seat and a second rotating seat, the first rotating seat is disposed on the side of the first side plate facing the second side plate, the connecting rod is disposed on the side of the first side plate facing away from the second side plate, the first rotating shaft passes through the first side plate, and the two opposite ends of the first rotating shaft are respectively fixedly connected to the first rotating seat and the connecting rod, the second rotating seat is disposed on the side of the second side plate facing the first side plate, the flipping device includes a second rotating shaft, one end of the second rotating shaft is rotatably connected to the second side plate, and the other end of the second rotating shaft is fixedly connected to the second rotating seat, the first rotating seat and the second rotating seat are respectively fixed to the first limiting part and the second limiting part.

[0013] In one or more of the above optional embodiments, the bracket is provided with a third limiting part, which is used to abut against the bearing component in a direction opposite to the rotation direction of the bearing component when the bearing component rotates from the second position to the first position; and / or the bracket is provided with a fourth limiting part, which is used to abut against the bearing component in a direction opposite to the rotation direction of the bearing component when the bearing component rotates from the first position to the second position.

[0014] According to a second aspect of this application, a test sorting machine is provided, including the aforementioned flipping device.

[0015] The beneficial effects of the embodiments of this application are as follows: The flipping device provided in the embodiments of this application, by setting a first chute and a second chute extending along the second direction to accommodate the opposite side edges of the material tray, and by driving a limiting protrusion to insert or disengage from the limiting hole of the material tray through a third driving component integrated in the bearing component, limits or releases the material tray in the second direction, and drives the limiting member through the second driving component to drive the material tray to slide relative to the first chute and the second chute in the second direction, when applied to a sorting and testing machine, the flipping device can simultaneously realize the functions of flipping and linear transfer. Compared with the prior art, which uses independently set flipping and transfer mechanisms to realize the flipping and transfer of the material tray respectively, the second driving component of the flipping device provided in the embodiments of this application can directly drive the third driving component to move, thereby directly driving the material tray to move a preset stroke along the second direction through the limiting member. In this way, the required stroke of the transfer mechanism in the second direction can be reduced, the length dimension of the transfer mechanism in the second direction can be shortened, thereby reducing the overall space occupied by the sorting and testing machine. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the accompanying drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn to scale.

[0017] Figure 1 A perspective view of a flipping device provided in an embodiment of this application; Figure 2 This is a schematic diagram of a tilting device with a material tray in a first position, as provided in an embodiment of this application. Figure 3 A schematic diagram of a tilting device provided in this application embodiment when the supporting component carries a material tray and is in a second position; Figure 4 A schematic diagram of a tilting device provided in this application embodiment when the supporting component carries a material tray and is in a second position; Figure 5 A schematic diagram of a flipping device driving a tray in a second direction to make the tray cooperate with the receiving part of a transfer mechanism, as provided in an embodiment of this application. Figure 6 A perspective view of a flipping device provided in an embodiment of this application; Figure 7 A schematic diagram of a flipping device provided in an embodiment of this application; Figure 8 for Figure 7 Schematic diagram of the cross section at point AA; Figure 9 for Figure 8 A magnified view of a portion of the image; Figure 10 This is a partial exploded view of a flipping device provided in an embodiment of this application; Figure 11 This is a partial exploded view of a flipping device provided in an embodiment of this application. Detailed Implementation

[0018] To facilitate understanding of this application, a more detailed description is provided below with reference to the accompanying drawings and specific embodiments. It should be noted that when an element is described as being "fixed to" another element, it can be directly on the other element, or one or more intermediate elements may exist between them. When an element is described as being "connected" to another element, it can be directly connected to the other element, or one or more intermediate elements may exist between them. The terms "vertical," "horizontal," "left," "right," "inner," "outer," and similar expressions used in this specification are for illustrative purposes only.

[0019] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the scope of the application. The term "and / or" as used in this specification includes any and all combinations of one or more of the associated listed items.

[0020] Furthermore, the technical features involved in the different embodiments of this application described below can be combined with each other as long as they do not conflict with each other.

[0021] Please see Figures 1-5The flipping device 100 includes a bearing assembly 1, a support 2, a first drive assembly 3, and a limiting mechanism 4. The bearing assembly 1 has a sliding channel T that extends through the bearing assembly 1 along the second direction Y, and the sliding channel is used to accommodate the material tray 200. The support 2 is rotatably connected to the bearing assembly 1, and the first drive assembly 3 is connected to the bearing assembly 1. The first drive assembly 3 is used to drive the bearing assembly 1 to rotate between a first position and a second position about a rotation axis parallel to the first direction X. The limiting mechanism 4 includes a second drive assembly 41, a limiting member 42, and a third drive assembly 43. The second drive assembly 41 is disposed on the bearing assembly 1 and is connected to the third drive assembly 43. The second drive assembly 41 drives the third drive assembly 43 to reciprocate in a direction parallel to the second direction Y. The limiting member 42 is connected to the third drive assembly 43 and has a limiting protrusion 421. The third drive assembly 43 drives the limiting member 42 to reciprocate in a direction parallel to the third direction Z, so that the limiting protrusion 421 inserts into or disengages from the limiting hole 201 of the material tray 200. The first direction X, the second direction Y, and the third direction Z are all perpendicular to each other.

[0022] When applied to a test sorting machine, bracket 2 is used to fix it to the machine body. During operation, initially, the support component 1 is in the first position, as shown... Figure 2 The diagram shows the state of the support component 1 in the first position, with the third direction Z parallel to the direction of gravity. At this time, the opposite ends of the tray 200 are placed in the first slide groove 121 and the second slide groove 131, respectively. The first slide groove 121 and the second slide groove 131 together limit the tray 200 in a direction parallel to the first direction X and in a direction parallel to the third direction Z.

[0023] Subsequently, the third drive assembly 43 drives the limiting member 42 to move, causing the limiting protrusion 421 to insert into the limiting hole 201. At this time, the first drive assembly 3 drives the bearing assembly 1 to rotate from the first position to the second position, as follows. Figure 3 The state of the support component 1 when it is in the second position is shown. The second direction Y is the same as the direction of gravity, and the limiting protrusion 421 limits the material tray 200 in the direction of gravity.

[0024] Finally, the second drive assembly 41 drives the third drive assembly 43 to move along the second direction Y, thereby causing the limiting member 42 to drive the material tray 200 to slide relative to the first slide groove 121 and the second slide groove 131 along the second direction Y to a preset position, such as... Figure 4 The diagram shows the state of the tray 200 when it slides relative to the first chute 121 and the second chute 131 along the second direction Y to a preset position. Exemplarily, in some embodiments, the second drive assembly 41 drives the third drive assembly 43 to move along the second direction Y until one end of the tray 200 protrudes from the support assembly 1 and abuts against the receiving part 301 of the transfer mechanism, such as... Figure 5 As shown. At this time, the third drive component 43 drives the limiting member 42 to move, causing the limiting protrusion 421 to disengage from the limiting hole 201, thereby enabling the receiving part 301 of the transfer mechanism to drive the tray 200 to continue moving along the second direction Y.

[0025] The flipping device 100 provided in this application embodiment, by setting a first groove 121 and a second groove 131 extending along the second direction Y to accommodate the opposite side edges of the material tray 200, and by driving the limiting protrusion 421 into or out of the limiting hole 201 of the material tray 200 through the third driving component 43 integrated in the bearing component 1, limits or releases the material tray 200 in the second direction Y, and drives the limiting member 42 through the second driving component 41 to drive the material tray 200 to slide relative to the first groove 121 and the second groove 131 along the second direction Y. When applied to a sorting and testing machine, the flipping device 100 can simultaneously realize the functions of flipping and linear conveying. Compared to the existing technology that uses independently set flipping and transfer mechanisms to achieve the flipping and transfer of the material tray 200 respectively, the second drive component 41 of the flipping device 100 provided in this application embodiment can directly drive the third drive component 43 to move, thereby directly driving the material tray 200 to move a preset stroke along the second direction Y through the limiting member 42. In this way, the stroke required by the transfer mechanism in the second direction Y can be reduced, and the length of the transfer mechanism in the second direction Y can be shortened, which is beneficial to the miniaturization design of the test sorting machine as a whole.

[0026] On the other hand, in an embodiment where the second drive assembly 41 can drive the third drive assembly 43 to move along the second direction Y until one end of the tray 200 protrudes from the carrier assembly 1 and abuts against the receiving part 301 of the transfer mechanism, since the tray 200 can protrude from the carrier assembly 1 along the second direction Y and enter the slot 3011 of the receiving part 301, the receiving part 301 does not need to move away from the flipping device 100 to avoid the tray 200 and carrier assembly 1 during the flipping process, and then move toward the flipping device 100 to receive the tray 200, thereby simplifying the operation process of the transfer mechanism and improving the efficiency of collaborative work.

[0027] In some embodiments, the support component 1 includes a support plate 11, a first limiting portion 12 and a second limiting portion 13. The first limiting portion 12 and the second limiting portion 13 are disposed opposite to each other on the support plate 11 along a first direction X. The first limiting portion 12 is provided with a first groove 121 extending along a second direction Y and passing through the first limiting portion 12. The second limiting portion 13 is provided with a second groove 131 extending along the second direction Y and passing through the second limiting portion 13. The first groove 121 and the second groove 131 are used to accommodate the opposite side edges of the tray 200. The first groove 121 and the second groove 131 together define a sliding channel T.

[0028] In some embodiments, the first slide groove 121 extends through the first limiting portion 12 along the second direction Y and forms a first insertion port (not shown) facing the second direction Y on the surface of the first limiting portion 12. The second slide groove 131 extends through the second limiting portion 13 along the second direction Y and forms a second insertion port (not shown) facing the second direction Y on the surface of the second limiting portion 13. The first insertion port and the second insertion port are used for the feed tray 200 to be inserted into the first slide groove 121 and the second slide groove 131 in a direction opposite to the second direction Y, and for the feed tray 200 to slide out of the first slide groove 121 and the second slide groove 131 along the second direction Y.

[0029] In some embodiments, along the second direction Y, a limiting stop 111 is provided at one end of the support plate 11 away from the first and second sockets. The limiting stop 111 is used to limit the material tray 200 in the direction opposite to the second direction Y.

[0030] In some embodiments, the second drive component 41 can drive the third drive component 43 to move between a third position and a fourth position. When the third drive component 43 is in the third position, the tray 200 abuts against the limiting stop 111 in a direction opposite to the second direction Y. When the third drive component 43 is in the fourth position, a portion of the tray 200 extends out of the first slot 121 and the second slot 131 in the second direction Y, and at least a portion of the tray 200 protrudes from the support component 1 in the second direction Y.

[0031] Please see Figure 6 and Figure 7 In some embodiments, the support plate 11 includes a first surface 11a and a second surface 11b disposed opposite each other along a third direction Z. A first limiting part 12 and a second limiting part 13 are disposed on the first surface 11a, and a second driving assembly 41 is disposed on the second surface 11b. The support plate 11 is provided with a clearance hole 112, which penetrates the support plate 11 along a third direction Z. Along the third direction Z, the limiting member 42 is aligned with the clearance hole 112. By disposing the first limiting part 12 and the second limiting part 13, the second driving assembly 41, and the third driving assembly 43 on the first surface 11a and the second surface 11b respectively, and by providing the clearance hole 112 aligned with the limiting member 42 as a channel communicating with the limiting hole 201 of the tray 200, it is beneficial to make the overall structure of the flipping device 100 more compact and reduce the space occupied by the flipping device 100.

[0032] In some embodiments, the second drive assembly 41 includes a second drive section 411 and a second telescopic rod 412. The second telescopic rod 412 is disposed at one end of the second drive section 411 and is connected to the third drive assembly 43. The second drive section 411 is used to drive the second telescopic rod 412 to reciprocate in a direction parallel to the second direction Y, so as to drive the third drive assembly 43 to reciprocate in the second direction Y.

[0033] In some embodiments, the second drive assembly 41 includes a first fixed seat 413 and a second fixed seat 414. The first fixed seat 413 and the second fixed seat 414 are disposed opposite to each other on the second surface 11b along the second direction Y. The second drive part 411 is connected between the first fixed seat 413 and the second fixed seat 414. The second telescopic rod 412 is disposed at the end of the second drive part 411 connected to the first fixed seat 413 and passes through the first fixed seat 413.

[0034] In some embodiments, the second drive unit 411 is a cylinder, and the second telescopic rod 412 is connected to the piston of the cylinder. The cylinder drives the piston to move so as to drive the second telescopic rod 412 to reciprocate in a direction parallel to the second direction Y.

[0035] It is understood that the second drive unit 411 is not limited to a cylinder. For example, in some other embodiments, the second drive unit 411 can also be a motor, and the second telescopic rod 412 and the second drive unit 411 together constitute an electric push rod. In other embodiments, the second drive unit 411 includes a motor, a planetary roller assembly and a nut, the second telescopic rod 412 is a lead screw, the second telescopic rod 412 meshes with the planetary roller assembly and the nut, the motor is connected to the nut, and the motor drives the nut to rotate, thereby driving the second telescopic rod 412 to reciprocate in a direction parallel to the second direction Y through the planetary roller assembly.

[0036] Please see Figure 1 , Figure 7 , Figure 8 and Figure 9 In some embodiments, the limiting mechanism 4 includes a first slide rail 44, a first slider 45, a second slide rail 46, and a second slider 47. The first slide rail 44 and the second slide rail 46 are disposed on the second surface 11b. The first slide rail 44 and the second slide rail 46 extend along the second direction Y and along the first direction X. The first slide rail 44 and the second slide rail 46 are respectively located on both sides of the clearance hole 112. The first slider 45 and the second slider 47 are respectively slidably disposed on the first slide rail 44 and the second slide rail 46. The third driving component 43 is fixed to the first slider 45 and the second slider 47.

[0037] In some embodiments, the third drive assembly 43 includes a sliding support 431, a third drive part 432, and a third telescopic rod 433. The sliding support 431 is slidably disposed on the support plate 11 and is connected to the second drive assembly 41. The third drive part 432 is disposed on the sliding support 431 and the third telescopic rod 433 is connected to the third drive part 432. The third drive part 432 is used to drive the third telescopic rod 433 to reciprocate in a direction parallel to the third direction Z. The third telescopic rod 433 is connected to the limiting member 42.

[0038] In some embodiments, along the first direction X, the opposite ends of the sliding support 431 are respectively fixed to the first slider 45 and the second slider 47. In some embodiments, the third drive unit 432 is a cylinder, and the third telescopic rod 433 is connected to the piston of the cylinder. The cylinder drives the piston to move so as to drive the third telescopic rod 433 to reciprocate in a direction parallel to the third direction Z.

[0039] It is understood that the third drive unit 432 is not limited to a cylinder. For example, in some other embodiments, the third drive unit 432 may also be a motor, and the third telescopic rod 433 and the third drive unit 432 together constitute an electric push rod.

[0040] In some embodiments, the third driving assembly 43 includes a fourth telescopic rod 434, which passes through the sliding support 431 along a third direction Z. The fourth telescopic rod 434 is movable relative to the sliding support 431 in a direction parallel to the third direction Z. The fourth telescopic rod 434 is connected to the limiting member 42. By connecting the fourth telescopic rod 434 to the limiting member 42, the fourth telescopic rod 434 and the third telescopic rod 433 jointly drive the limiting member 42 to move, which helps to improve the stability of the limiting member 42 during movement, thereby improving the accuracy of the limiting protrusion 421 of the limiting member 42 inserting into the limiting hole 201.

[0041] In some embodiments, there are two fourth telescopic rods 434, which are disposed opposite each other on both sides of the third telescopic rod 433 along the first direction X.

[0042] In some embodiments, the third drive assembly 43 includes a bushing 435, a sliding support 431 having a receiving hole (not shown), the receiving hole passing through the sliding support 431 along the third direction Z, the bushing 435 being disposed in the receiving hole, and a fourth telescopic rod 434 passing through the bushing 435, the fourth telescopic rod 434 being reciprocating relative to the bushing 435 in a direction parallel to the third direction Z.

[0043] In some embodiments, the bushing 435 includes a fixing part 4351 and a sleeve body 4352, the fixing part 4351 and the sleeve body 4352 are connected, the sleeve body 4352 is disposed in the receiving hole, along the direction from the first surface 11a to the second surface 11b, the fixing part 4351 abuts against the sliding support 431, and the fixing part 4351 is screwed and fixed to the sliding support 431.

[0044] Please see Figure 6 In some embodiments, the limiting member 42 and the sliding support 431 are arranged sequentially along the direction from the first surface 11a to the second surface 11b. The surface of the limiting member 42 facing away from the sliding support 431 is provided with a first flat portion 422, which is perpendicular to the third direction Z. The limiting protrusion 421 protrudes from the first flat portion 422.

[0045] In some embodiments, the number of limiting protrusions 421 is three, and the three limiting members 42 are arranged sequentially along the first direction X.

[0046] Please see Figure 1 , Figure 6 , Figure 10 and Figure 11 In some embodiments, the first drive assembly 3 includes a mounting base 31, a first drive section 32, a first telescopic rod 33, and a connecting rod section 34. The first drive section 32 includes a first end 321 and a second end 322 disposed opposite to each other. The first end 321 is hinged to the mounting base 31. The first telescopic rod 33 is disposed at the second end 322 and is hinged to the connecting rod section 34. The flipping device 100 includes a first rotating shaft 5, which is rotatably connected to the bracket 2. The axis of the first rotating shaft 5 is parallel to the first direction X. The first rotating shaft 5 is fixedly connected to the bearing assembly 1 and the connecting rod section 34. The first telescopic rod 33 can reciprocate relative to the first drive section 32 in a direction parallel to the direction from the first end 321 to the second end 322, thereby driving the connecting rod section 34 to rotate around the axis of the first rotating shaft 5, and thus driving the bearing assembly 1 to rotate around the axis of the first rotating shaft 5.

[0047] In some embodiments, the mounting base 31 includes a base body 311, a first mounting arm 312, a second mounting arm 313, and a first connecting shaft 314. The first mounting arm 312 and the second mounting arm 313 are disposed opposite to each other in a first direction X on the base body 311. The first connecting shaft 314 is connected between the first mounting arm 312 and the second mounting arm 313. The axis of the first connecting shaft 314 is parallel to the axis of the first rotating shaft 5. The first end 321 includes a connecting portion 3211. The connecting portion 3211 is provided with a first connecting hole (not shown). The connecting portion 3211 is disposed between the first mounting arm 312 and the second mounting arm 313. The first connecting shaft 314 passes through the first connecting hole.

[0048] In some embodiments, the end of the first telescopic rod 33 away from the first end 321 is provided with a rod end spherical bearing 331. The rod end spherical bearing 331 includes an inner bearing ring 3311 and an outer bearing ring 3312. The outer peripheral wall of the inner bearing ring 3311 is provided with an outer spherical surface, and the inner wall of the outer bearing ring 3312 is provided with an inner spherical surface. The inner spherical surface is fitted onto the outer spherical surface. The inner bearing ring 3311 can rotate relative to the outer bearing ring 3312. The first drive assembly 3 includes a second connecting shaft 35. The second connecting shaft 35 is fixed to the connecting rod portion 34. The axis of the second connecting shaft 35 is parallel to the axis of the first rotating shaft 5. The second connecting shaft 35 passes through the inner bearing ring 3311.

[0049] In some embodiments, there are two first driving units 32 and two first telescopic rods 33. One first telescopic rod 33 is disposed at the second end 322 of one first driving unit 32. The connecting rod 34 includes a first part 341, a second part 342, and a third part 343 connected in sequence. The second part 342 is fixedly connected to the first rotating shaft 5. One first telescopic rod 33 is hinged to the first part 341, and the other first telescopic rod 33 is hinged to the third part 343. By setting two first driving units 32 to drive two first telescopic rods 33 to drive the connecting rod 34 to rotate, compared with setting only one first driving unit 32 and one first telescopic rod 33, it is possible to meet greater load requirements, reduce the shaking and deviation of the bearing component 1 and the limiting mechanism 4 during rotation, and thus improve the reliability of the flipping device 100.

[0050] Please see Figure 2 , Figure 3 , Figure 6 , Figure 10 and Figure 11 During operation, when one first drive unit 32 drives the first telescopic rod 33 to move along the second end 322 towards the first end 321, the other first drive unit 32 drives the other first telescopic rod 33 to move along the first end 321 towards the second end 322. Conversely, when one first drive unit 32 drives the first telescopic rod 33 to move along the first end 321 towards the second end 322, the other first drive unit 32 drives the other first telescopic rod 33 to move along the second end 322 towards the first end 321. Thus, through the counter-coordinated actions of the two first drive units 32, the connecting rod 34 can rotate relatively smoothly around the axis of the first rotating shaft 5 in two opposite directions, thereby driving the first rotating shaft 5 to rotate the bearing assembly 1 and the limiting mechanism 4 between the first and second positions.

[0051] In some embodiments, two first drive units 32 are arranged side by side along an axis perpendicular to the first rotating shaft 5, and a first part 341, a second part 342 and a third part 343 are arranged sequentially along the arrangement direction of the two first drive units 32.

[0052] In some embodiments, there are two of each of the first mounting arm 312, the second mounting arm 313, and the first connecting shaft 314. The first connecting shaft 314 is connected between the first mounting arm 312 and the second mounting arm 313, and the first connecting shaft 314 passes through a first connecting hole.

[0053] In some embodiments, there are two second connecting shafts 35, which are fixed to the first part 341 and the third part 343 respectively, and one second connecting shaft 35 passes through the bearing inner ring 3311 of a first telescopic rod 33.

[0054] In some embodiments, the two second connecting shafts 35 are detachably fixed to the first portion 341 and the third portion 343, respectively.

[0055] In some embodiments, the first part 341 includes a third mounting arm 3411 and a fourth mounting arm 3412 disposed opposite to each other. The third mounting arm 3411 has a first mounting hole (not shown) and a first bolt hole 3411a, the first bolt hole 3411a communicating with the first mounting hole. The fourth mounting arm 3412 has a second mounting hole (not shown) and a second bolt hole 3412a, the second bolt hole 3412a communicating with the second mounting hole. The two ends of a second connecting shaft 35 are respectively provided in the first mounting hole and the second mounting hole. The portion of the second connecting shaft 35 located in the first mounting hole and the portion located in the second mounting hole are respectively provided with a first threaded hole (not shown) and a second threaded hole (not shown). The first drive assembly 3 includes a first mounting bolt (not shown) and a second mounting bolt (not shown). The first mounting bolt passes through the first bolt hole 3411a and is screwed and fixed to the first threaded hole. The second mounting bolt passes through the second bolt hole 3412a and is screwed and fixed to the second threaded hole. The third part 343 includes a fifth mounting arm 3431 and a sixth mounting arm 3432 disposed opposite to each other. The fifth mounting arm 3431 is provided with a third mounting hole (not shown) and a third bolt hole 3431a, which communicates with the third mounting hole. The sixth mounting arm 3432 is provided with a fourth mounting hole (not shown) and a fourth bolt hole 3432a, which communicates with the fourth mounting hole. The two ends of another second connecting shaft 35 are respectively provided in the third mounting hole and the fourth mounting hole. The portion of the second connecting shaft 35 located in the third mounting hole and the portion located in the fourth mounting hole are respectively provided with a third threaded hole (not shown) and a fourth threaded hole (not shown). The first drive assembly 3 includes a third mounting bolt (not shown) and a fourth mounting bolt (not shown). The third mounting bolt passes through the third bolt hole 3431a and is screwed and fixed to the third threaded hole. The fourth mounting bolt passes through the fourth bolt hole 3432a and is screwed and fixed to the fourth threaded hole.

[0056] In some embodiments, the bracket 2 includes a first side plate 21 and a second side plate 22 disposed opposite to each other, the bearing assembly 1 includes a first rotating seat 14 and a second rotating seat 15, the first rotating seat 14 is disposed on the side of the first side plate 21 facing the second side plate 22, the connecting rod portion 34 is disposed on the side of the first side plate 21 facing away from the second side plate 22, the first rotating shaft 5 passes through the first side plate 21, and the two opposite ends of the first rotating shaft 5 are respectively fixedly connected to the first rotating seat 14 and the connecting rod portion 34, the second rotating seat 15 is disposed on the side of the second side plate 22 facing the first side plate 21, the flipping device 100 includes a second rotating shaft (not shown), one end of the second rotating shaft is rotatably connected to the second side plate 22, and the other end of the second rotating shaft is fixedly connected to the second rotating seat 15, the first rotating seat 14 and the second rotating seat 15 are respectively fixed to the first limiting portion 12 and the second limiting portion 13.

[0057] In some embodiments, the flipping device 100 includes a mounting plate 6. Along the direction from the first surface 11a to the second surface 11b, one end of the mounting plate 6 is disposed between the first rotating seat 14 and the first limiting part 12, and the other end of the mounting plate 6 is disposed between the second rotating seat 15 and the second limiting part 13. The bracket 2 includes a fifth mounting bolt (not shown) and a sixth mounting bolt (not shown). Along the direction from the first surface 11a to the second surface 11b, the fifth mounting bolt passes through the first rotating seat 14, the mounting plate 6 and the first limiting part 12 in sequence, and the fifth mounting bolt screws and fixes the first rotating seat 14 to the first limiting part 12. The sixth mounting bolt passes through the second rotating seat 15, the mounting plate 6 and the second limiting part 13 in sequence, and the sixth mounting bolt screws and fixes the second rotating seat 15 to the second limiting part 13.

[0058] Please see Figure 1 , Figure 2 , Figure 3 and Figure 7 In some embodiments, the bracket 2 is provided with a third limiting part 23. When the bearing component 1 rotates from the second position to the first position, the third limiting part 23 is used to abut against the bearing component 1 in a direction opposite to the rotation direction of the bearing component 1.

[0059] In some embodiments, there are two third limiting portions 23, which are respectively disposed on the first side plate 21 and the second side plate 22.

[0060] In some embodiments, the second surface 11b is disposed perpendicular to the third direction Z, and the third limiting portion 23 includes a second planar portion 231, which is parallel to the second surface 11b when the bearing component 1 is rotated from the second position to the first position.

[0061] In some embodiments, the bracket 2 is provided with a fourth limiting part 24. When the bearing component 1 rotates from the first position to the second position, the fourth limiting part 24 is used to abut against the bearing component 1 in a direction opposite to the rotation direction of the bearing component 1.

[0062] In some embodiments, there are two fourth limiting portions 24, which are respectively disposed on the first side plate 21 and the second side plate 22.

[0063] In some embodiments, the first limiting portion 12 includes a third planar portion (not shown) disposed toward a third party in a Z direction, the second limiting portion 13 includes a fourth planar portion (not shown) disposed toward a third party in a Z direction, and the fourth limiting portion 24 includes a fifth planar portion 241. When the bearing assembly 1 rotates from the second position to the first position, the fifth planar portion 241 of one fourth limiting portion 24 abuts against the third planar portion, and the fifth planar portion 241 of the other fourth limiting portion 24 abuts against the fourth planar portion.

[0064] Based on the same inventive concept, this application also provides a test sorting machine, including the flipping device 100 in any of the above embodiments.

[0065] In some embodiments, the test sorting machine includes a tray 200, which has a limiting hole 201 and is used to carry semiconductor devices.

[0066] The above description is merely an embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. A flipping device, characterized in that, include: A support assembly is provided with a sliding channel that extends through the support assembly along a second direction and is used to accommodate a material tray. The bracket is rotatably connected to the load-bearing component; A first driving component is connected to the bearing component, and the first driving component is used to drive the bearing component to rotate between a first position and a second position about a rotation axis parallel to a first direction; The limiting mechanism includes a second driving component, a limiting member, and a third driving component. The second driving component is disposed on the bearing component and connected to the third driving component. The second driving component is used to drive the third driving component to reciprocate in a direction parallel to the second direction. The limiting member is connected to the third driving component and has a limiting protrusion. The third driving component is used to drive the limiting member to reciprocate in a direction parallel to the third direction, so that the limiting protrusion inserts into or disengages from the limiting hole of the material tray. Wherein, the first direction, the second direction, and the third direction are mutually perpendicular to each other.

2. The flipping device according to claim 1, characterized in that, The supporting component includes a support plate, a first limiting part, and a second limiting part. The support plate includes a first surface and a second surface that are disposed opposite to each other along the third direction. The first limiting part and the second limiting part are disposed opposite to each other on the first surface along the first direction. The first limiting part is provided with a first groove that extends along the second direction and passes through the first limiting part. The second limiting part is provided with a second groove that extends along the second direction and passes through the second limiting part. The first groove and the second groove are used to accommodate the opposite side edges of the material tray. The first groove and the second groove together define the sliding channel. The second driving component and the third driving component are disposed on the second surface. The support plate is provided with a clearance hole, which penetrates the support plate along the third direction. Along the third direction, the limiting member is aligned with the clearance hole.

3. The flipping device according to claim 2, characterized in that, The limiting mechanism includes a first slide rail, a first slider, a second slide rail, and a second slider. The first slide rail and the second slide rail are disposed on the second surface. The first slide rail and the second slide rail both extend along the second direction. Along the first direction, the first slide rail and the second slide rail are respectively located on both sides of the clearance hole. The first slider and the second slider are respectively slidably disposed on the first slide rail and the second slide rail. The third driving component is fixed to the first slider and the second slider.

4. The flipping device according to claim 2, characterized in that, The third driving assembly includes a sliding support, a third driving part, a third telescopic rod, and a fourth telescopic rod. The sliding support is slidably disposed on the support plate along the second direction and is connected to the second driving assembly. The third driving part is disposed on the sliding support, and the third telescopic rod is connected to the driving part. The third driving part is used to drive the third telescopic rod to reciprocate along a direction parallel to the third direction. The fourth telescopic rod passes through the sliding support along the third direction and is capable of moving relative to the sliding support in a direction parallel to the third direction. The third telescopic rod and the fourth telescopic rod are connected to the limiting member.

5. The flipping device according to claim 4, characterized in that, The third drive assembly includes a bushing, the sliding support has a receiving hole that extends through the sliding support along the third direction, the bushing is disposed in the receiving hole, and the fourth telescopic rod passes through the bushing.

6. The flipping device according to claim 2, characterized in that, The first drive assembly includes a mounting base, a first drive unit, a first telescopic rod, and a connecting rod unit. The first drive unit includes a first end and a second end disposed opposite to each other. The first end is hinged to the mounting base. The first telescopic rod is disposed at the second end and is hinged to the connecting rod unit. The flipping device includes a first rotating shaft. The first rotating shaft is rotatably connected to the bracket. The axis of the first rotating shaft is parallel to the first direction. The first rotating shaft is fixedly connected to the bearing assembly and the connecting rod unit respectively. The first telescopic rod is capable of reciprocating relative to the first driving part in a direction parallel to the first end toward the second end, thereby driving the connecting rod part to rotate around the axis of the first rotating shaft, and then driving the bearing assembly to rotate around the axis of the first rotating shaft through the first rotating shaft.

7. The flipping device according to claim 6, characterized in that, There are two of each of the first driving unit and the first telescopic rod. One of the first telescopic rods is located at the second end of the first driving unit. The connecting rod includes a first part, a second part and a third part connected in sequence. The second part is fixedly connected to the first rotating shaft. One of the first telescopic rods is hinged to the first part and the other of the first telescopic rods is hinged to the third part.

8. The flipping device according to claim 6, characterized in that, The bracket includes a first side plate and a second side plate arranged opposite to each other. The bearing assembly includes a first rotating seat and a second rotating seat. The first rotating seat is located on the side of the first side plate facing the second side plate. The connecting rod is located on the side of the first side plate facing away from the second side plate. The first rotating shaft passes through the first side plate. The two opposite ends of the first rotating shaft are fixedly connected to the first rotating seat and the connecting rod, respectively. The second rotating seat is located on the side of the second side plate facing the first side plate. The flipping device includes a second rotating shaft. One end of the second rotating shaft is rotatably connected to the second side plate, and the other end of the second rotating shaft is fixedly connected to the second rotating seat. The first rotating seat and the second rotating seat are fixed to the first limiting part and the second limiting part, respectively.

9. The flipping device according to any one of claims 1-8, characterized in that, The bracket is provided with a third limiting part. When the bearing assembly rotates from the second position to the first position, the third limiting part is used to abut against the bearing assembly in a direction opposite to the rotation direction of the bearing assembly; and / or The bracket is provided with a fourth limiting part. When the bearing component rotates from the first position to the second position, the fourth limiting part is used to abut against the bearing component in a direction opposite to the rotation direction of the bearing component.

10. A testing and sorting machine, characterized in that, Includes the flipping device as described in any one of claims 1-9.

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