Four-target position liftable co-rotation target material structure

Abstract

The utility model is suitable for target material technical field provides a four target position can lift public self -rotation target material structure, including cavity, high vacuum CF flange, public self -rotation mechanism, Y axis elevating system and four target material backboards, high vacuum CF flange is fixed in the cavity, public self -rotation mechanism passes through high vacuum CF flange with the cavity sealed connection, in the utility model, the rotation servo motor drives the rotation input shaft to drive the big bevel gear to rotate, engages four small bevel gears to make target material backboard autorotation, the revolution servo motor drives the water collection cold hollow magnetic fluid rotation axle through gear set, drives the central shaft seat and target material backboard revolution, and the interval is adjusted with Y axis elevating system, makes target material overall area fully participate in sputtering, completely changes the local idle problem, guarantees production continuity, promotes sputtering precision and equipment stability: nitrogen gas spring offsets target material inclination tendency, ensures horizontal sputtering.

Description

Technical Field

[0001] This utility model belongs to the field of target material technology, and in particular relates to a four-target position liftable rotating target material structure. Background Technology

[0002] In the field of sputtering target technology, the target is a core component of the coating process, and its movement and installation structure directly affect the coating efficiency, target utilization efficiency, and production continuity. In existing technologies, the target can only be fixed in a single sputtering position and cannot rotate, resulting in only a localized area of ​​the target participating in the sputtering reaction, while the remaining areas remain idle and are not effectively utilized. Furthermore, existing equipment lacks a multi-target adaptability design, only allowing the installation of targets of a single material. When production demands involve sputtering processes using different materials, the equipment must be disassembled and the target replaced, which is cumbersome. In addition, existing structures lack sealing components to accommodate dynamic movement, making it easy to disrupt the high-vacuum environment inside the cavity when adjusting the target position. Moreover, the quality characteristics of targets of different materials vary, leading to potential angle tilting after installation, affecting sputtering accuracy and increasing equipment maintenance difficulty.

[0003] The existing technology has the following problems: Low target utilization: The target cannot rotate, and only a local area participates in sputtering, resulting in uneven overall consumption and idle areas that cannot play a role. Poor production continuity: The target material is worn out too quickly in some areas, requiring frequent shutdowns for disassembly and replacement, which interrupts the production process; Insufficient process adaptability: It can only adapt to a single type of target material, and cannot quickly switch sputtering processes for different materials, making it difficult to meet the needs of multi-material composite coating. Insufficient sealing and precision assurance: lack of dynamic sealing structure, which easily leads to vacuum leakage; no angle compensation structure, the tilt of the target material affects sputtering accuracy; Therefore, a four-target-position liftable rotating target structure is needed to solve the above problems. Utility Model Content

[0004] The purpose of this utility model embodiment is to provide a four-target position liftable rotating target structure to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: A four-target position liftable rotating target structure includes a cavity, a high-vacuum CF flange, a rotating mechanism, a Y-axis lifting mechanism, and four target back plates. The high-vacuum CF flange is fixed to the cavity, and the rotating mechanism is sealed to the cavity through the high-vacuum CF flange. The rotation mechanism includes a rotation servo motor, a revolution servo motor, a water-cooled hollow magnetic fluid collector, a rotation magnetic fluid collector, a rotation input shaft, a large bevel gear, four small bevel gears, and a gear set. The gear set includes a driving gear and a driven gear. The rotation servo motor is connected to the rotation input shaft via a coupling. The rotation input shaft passes through the rotation magnetic fluid collector and the water-cooled hollow magnetic fluid collector and is fixed to the large bevel gear. The large bevel gear meshes with the four small bevel gears, and the small bevel gears are fixed to the sealing magnetic fluid collector of the target material back plate. The revolution servo motor is fixed to the driving gear, the driving gear meshes with the driven gear, and the driven gear is sleeved on the rotating shaft of the water-cooled hollow magnetofluid collector. The shaft is connected to the central shaft seat and is equipped with a hollow rotary encoder. The Y-axis lifting mechanism includes a lifting servo motor, a lead screw guide mechanism, a guide rail support mounting base, a ball screw, and a rotation mounting base. The guide rail support mounting base is fixed to the atmospheric side of the cavity, and the lead screw guide mechanism is mounted on it. The rotation mounting base connects the guide rail slider and the ball screw. The lifting servo motor drives the ball screw, and the lead screw guide mechanism is equipped with a photoelectric sensor and a limit sensor. The water-cooled hollow magnetic fluid is connected to the cavity by a corrugated pipe, a nitrogen spring is installed on the outside of the rotation mechanism, an O-ring is provided between the target material back plate and the sealing magnetic fluid, and a cold water channel is opened in the central shaft seat.

[0006] In a further technical solution, the four small bevel gears are evenly distributed circumferentially around the axis of the large bevel gear.

[0007] In a further technical solution, the O-ring is embedded in the sealing magnetofluid end face groove of the target material back plate and fits against the central shaft seat.

[0008] In a further technical solution, the photoelectric sensor is used to detect the lifting position of the guide rail slider, and the limit sensor is used to limit the overtravel movement of the Y-axis lifting mechanism.

[0009] In a further technical solution, the extension and retraction direction of the nitrogen spring is consistent with the lifting and lowering direction of the Y-axis lifting mechanism, which is used to counteract the angular tilt of the target material backplate.

[0010] In a further technical solution, the water-cooled hollow magnetic fluid collector has a cooling channel inside, and the cooling channel is connected to an external cooling system.

[0011] In a further technical solution, the driving gear and the driven gear have the same module, and their meshing clearance is adjustable.

[0012] In a further technical solution, the target backplate corresponds one-to-one with the small bevel gear, and their central axes are collinear. Compared with the prior art, the beneficial effects of this utility model are: This invention improves the utilization rate of target materials: the self-rotating servo motor drives the self-rotating input shaft to drive the large bevel gear to rotate, meshing with four small bevel gears to make the target material back plate rotate, and the revolution servo motor drives the water-cooled hollow magnetic fluid rotating shaft through the gear set to drive the central shaft seat and the target material back plate to revolve. In conjunction with the Y-axis lifting mechanism, the spacing is adjusted so that the entire area of ​​the target material can fully participate in sputtering, completely changing the problem of local idleness. This invention ensures continuous production: four target back plates can be used to bind targets of different materials, allowing for quick process switching without disassembly and reducing replacement frequency; the water-cooled hollow magnetic fluid and the cooling water channel of the central bearing work together to dissipate heat, extending the service life of the target, reducing downtime for maintenance, and ensuring continuous production. This utility model enhances process adaptability: it supports the simultaneous installation of four different target materials, and through the coordinated control of the rotation mechanism and the Y-axis lifting mechanism, it can quickly switch sputtering processes to meet the needs of multi-material composite coating, thereby improving process selectivity and production flexibility. This invention improves sputtering accuracy and equipment stability: a nitrogen spring counteracts the target tilting tendency, ensuring horizontal sputtering; a bellows expands and contracts synchronously with the lifting mechanism to achieve dynamic sealing, and a high-vacuum CF flange and O-ring prevent vacuum leakage; photoelectric sensors and limit sensors ensure accurate positioning and equipment safety, reducing the frequency of failures.

[0013] To more clearly illustrate the structural features and effects of this utility model, the following detailed description is provided in conjunction with the accompanying drawings and specific embodiments. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall front view of this utility model; Figure 2 This is a side view of the overall structure of this utility model; Figure 3 This is a structural schematic diagram of the rear cross-section of this utility model; Figure 4 This is a partial three-dimensional structural diagram of the present invention.

[0015] In the diagram: 1. Cavity; 2. High-vacuum CF flange; 3. Rotation servo motor; 4. Revolution servo motor; 5. Lifting servo motor; 6. Water-cooled hollow magnetic fluid collector; 7. Gear set; 71. Driving gear; 72. Driven gear; 8. Hollow rotary encoder; 9. Large bevel gear; 10. Small bevel gear; 11. O-ring seal; 12. Central shaft seat; 13. Cold water channel; 14. Screw guide mechanism; 15. Ball screw; 16. Guide rail slider; 17. Revolution and rotation mounting base; 18. Bellows; 19. Nitrogen spring; 20. Target backplate; 21. Photoelectric sensor; 22. Limit sensor; 23. Guide rail support mounting base; 24. Rotation magnetic fluid collector; 25. Rotation input shaft. Detailed Implementation

[0016] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0017] The specific implementation of this utility model will be described in detail below with reference to specific embodiments.

[0018] like Figure 1-4 As shown, this utility model embodiment provides a four-target position liftable rotating target structure, including a cavity 1, a high vacuum CF flange 2, a rotating mechanism, a Y-axis lifting mechanism and four target back plates 20. The high vacuum CF flange 2 is fixed to the cavity 1, and the rotating mechanism is sealed to the cavity 1 through the high vacuum CF flange 2. The rotation mechanism includes a rotation servo motor 3, a revolution servo motor 4, a water-cooled hollow magnetic fluid 6, a rotation magnetic fluid 24, a rotation input shaft 25, a large bevel gear 9, four small bevel gears 10, and a gear set 7. The gear set 7 includes a driving gear 71 and a driven gear 72. The rotation servo motor 3 is connected to the rotation input shaft 25 via a coupling. The rotation input shaft 25 passes through the rotation magnetic fluid 24 and the water-cooled hollow magnetic fluid 6 and is fixed to the large bevel gear 9. The large bevel gear 9 meshes with the four small bevel gears 10. The small bevel gears 10 are fixed to the sealing magnetic fluid of the target back plate 20. The revolution servo motor 4 is fixed to the drive gear 71, the drive gear 71 meshes with the driven gear 72, the driven gear 72 is sleeved on the rotating shaft of the water-cooled hollow magnetic fluid 6, the shaft is connected to the central shaft seat 12 and is equipped with a hollow rotary encoder 8; The Y-axis lifting mechanism includes a lifting servo motor 5, a lead screw guide mechanism 14, a guide rail support mounting base 23, a ball screw 15, and a rotation mounting base 17. The guide rail support mounting base 23 is fixed to the atmospheric side of the cavity 1, and the lead screw guide mechanism 14 is mounted on it. The rotation mounting base 17 connects the guide rail slider 16 and the ball screw 15. The lifting servo motor 5 drives the ball screw 15. The lead screw guide mechanism 14 is equipped with a photoelectric sensor 21 and a limit sensor 22. A corrugated pipe 18 is connected between the water-cooled hollow magnetic fluid 6 and the cavity 1. A nitrogen spring 19 is installed on the outside of the rotation mechanism. An O-ring 11 is provided between the target material back plate 20 and the sealing magnetic fluid. A cold water channel 13 is opened in the central shaft seat 12.

[0019] In this embodiment, the rotation mechanism and the Y-axis lifting mechanism construct a multi-dimensional motion system of "rotation + revolution + lifting". The four target back plates 20 can be adapted to targets of different materials, and the process can be switched without disassembly. The high vacuum CF flange 2, the bellows 18, and the O-ring seal 11 form a multi-seal system to ensure the vacuum stability of the cavity 1. The nitrogen spring 19 works in conjunction with the sensor group to avoid equipment overtravel and target tilting, so as to achieve multi-process adaptation and stable operation.

[0020] Specifically, the four small bevel gears 10 are evenly distributed circumferentially around the axis of the large bevel gear 9.

[0021] In this embodiment, the four small bevel gears 10 are evenly distributed circumferentially to ensure that the power of the large bevel gear 9 is evenly distributed, so that the rotation speed of the four target back plates 20 is consistent, thereby improving the synchronization and stability of the multi-target transmission.

[0022] Specifically, the O-ring 11 is embedded in the sealing magnetofluid end face groove of the target back plate 20 and fits against the central shaft seat 12.

[0023] In this embodiment, the O-ring 11 for sealing water and the sealing magnetofluid for vacuum sealing form a double seal, which enhances the sealing performance of the installation part, prevents the vacuum environment of the cavity 1 from being damaged, and ensures the stability of the sputtering process.

[0024] Specifically, the photoelectric sensor 21 is used to detect the lifting position of the guide rail slider 16, and there are two limit sensors 22, namely the upper limit sensor and the lower limit sensor. The limit sensors 22 are used to limit the overtravel of the Y-axis lifting mechanism.

[0025] In this embodiment, the limit sensor 22 prevents the target material from colliding with the cavity 1 or other components, thus protecting the safety of the equipment.

[0026] Specifically, the extension and retraction direction of the nitrogen spring 19 is consistent with the lifting and lowering direction of the Y-axis lifting mechanism, which is used to counteract the angular tilt of the target back plate 20.

[0027] In this embodiment, the nitrogen spring 19 can automatically adjust its elasticity according to the target material's quality characteristics to counteract the tilting trend, ensuring that the target material is always sputtered horizontally, thereby improving the coating uniformity and precision.

[0028] Specifically, the water-cooled hollow magnetic fluid 6 has a cooling channel inside, which is connected to the external cooling system.

[0029] In this embodiment, the cooling channel of the water-cooled hollow magnetic fluid 6 works in conjunction with the external cooling system to quickly remove the working heat of the target material, avoid its own high-temperature failure, extend the equipment life, and ensure the stability of the rotation function.

[0030] Specifically, the driving gear 71 and the driven gear 72 have the same module, and their meshing clearance is adjustable.

[0031] In this embodiment, the gear set 7 transmits power to the revolution servo motor 4 precisely through the meshing of the active gear 71 and the driven gear 72 with the same module, ensuring uniform revolution speed of the target material and improving the consistency of sputtering at multiple targets.

[0032] Specifically, the target backplate 20 corresponds one-to-one with the small bevel gear 10, and their central axes are collinear.

[0033] In this embodiment, the target back plate 20 and the small bevel gear 10 are collinear, so that the power transmission is unbiased and lossless, ensuring that the target rotation speed is synchronized with the small bevel gear 10, thereby improving the power transmission efficiency and stability.

[0034] Working principle and usage process of this utility model: Equipment installation stage: Fix cavity 1 to the working platform, and seal the rotation mechanism to cavity 1 through high vacuum CF flange 2; fix guide rail support mounting base 23 to the atmospheric side of cavity 1, and install screw guide rail mechanism 14, ball screw 15 and rotation mounting base 17 in sequence; fix four targets to target back plate 20 respectively, check the installation status of O-ring seal 11, and connect the cooling channel of water-cooled hollow magnetic fluid 6 to the external cooling system; Power source initialization: Start the self-rotating servo motor 3, the revolution servo motor 4 and the lifting servo motor 5, and set the initial speed and direction; start the hollow rotary encoder 8, photoelectric sensor 21 and limit sensor 22 to ensure that each detection element provides real-time feedback on the equipment status; Target rotation process: The rotation servo motor 3 drives the rotation input shaft 25 to rotate through the coupling, and drives the large bevel gear 9 to rotate through the rotation magnetic fluid 24 and the water-cooled hollow magnetic fluid 6. The large bevel gear 9 rotates and meshes with the four small bevel gears 10 to drive the target back plate 20 and the target rotation; the cooling channel of the water-cooled hollow magnetic fluid 6 is filled with cooling water for heat dissipation. The target material's revolution process: The revolution servo motor 4 drives the drive gear 71 to rotate, meshing with the driven gear 72 to drive the rotating shaft of the water-cooled hollow magnetic fluid 6, which in turn drives the central shaft seat 12 and the target material back plate 20 to revolve; the hollow rotary encoder 8 detects the rotation angle and feeds it back to the control system; The target material Y-axis lifting process: The control system issues a lifting command, the lifting servo motor 5 drives the ball screw 15 to rotate, which drives the rotation mounting base 17 and the rotation mechanism to rise and fall along the guide rail slider 16; the photoelectric sensor 21 positions the height, and the limit sensor 22 prevents overtravel collision; the bellows 18 synchronously expands and contracts to maintain the seal. Stable compensation and heat dissipation process: The nitrogen spring 19 automatically adjusts its elasticity to counteract the tilting tendency of the target material; the cooling water channel 13 of the central bearing 12 is connected to cooling water, forming a dual heat dissipation with the water-cooled hollow magnetic fluid 6 to ensure sputtering stability.

[0035] The circuits, electronic components, and modules involved are all existing technologies, which can be fully implemented by those skilled in the art, and need not be elaborated upon. The content protected by this utility model does not involve any improvement to the software and methods.

[0036] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A four-target-position liftable rotating target structure, comprising a cavity (1), a high-vacuum CF flange (2), a rotating mechanism, a Y-axis lifting mechanism, and four target back plates (20), characterized in that: The high vacuum CF flange (2) is fixed to the cavity (1), and the rotation mechanism is sealed to the cavity (1) through the high vacuum CF flange (2); The rotation mechanism includes a rotation servo motor (3), a revolution servo motor (4), a water-cooled hollow magnetic fluid (6), a rotation magnetic fluid (24), a rotation input shaft (25), a large bevel gear (9), four small bevel gears (10), and a gear set (7). The gear set (7) includes a driving gear (71) and a driven gear (72). The rotation servo motor (3) is connected to the rotation input shaft (25) via a coupling. The rotation input shaft (25) passes through the rotation magnetic fluid (24) and the water-cooled hollow magnetic fluid (6) and is fixed to the large bevel gear (9). The large bevel gear (9) meshes with the four small bevel gears (10). The small bevel gears (10) are fixed to the sealing magnetic fluid of the target back plate (20). The revolution servo motor (4) is fixed to the drive gear (71), the drive gear (71) meshes with the driven gear (72), and the driven gear (72) is sleeved on the rotating shaft of the water-cooled hollow magnetic fluid (6), which is connected to the central shaft seat (12) and equipped with a hollow rotary encoder (8). The Y-axis lifting mechanism includes a lifting servo motor (5), a lead screw guide mechanism (14), a guide rail support mounting base (23), a ball screw (15), and a rotation mounting base (17). The guide rail support mounting base (23) is fixed to the atmospheric side of the cavity (1), and the lead screw guide mechanism (14) is mounted on it. The rotation mounting base (17) connects the guide rail slider (16) and the ball screw (15). The lifting servo motor (5) drives the ball screw (15). The lead screw guide mechanism (14) is equipped with a photoelectric sensor (21) and a limit sensor (22). The water-cooled hollow magnetic fluid (6) is connected to the cavity (1) by a corrugated pipe (18), a nitrogen spring (19) is installed on the outside of the rotation mechanism, an O-ring (11) is provided between the target back plate (20) and the sealing magnetic fluid, and a cold water channel (13) is opened in the central shaft seat (12).

2. The four-target position liftable rotating target structure according to claim 1, characterized in that: The four small bevel gears (10) are evenly distributed circumferentially around the axis of the large bevel gear (9).

3. The four-target position liftable rotating target structure according to claim 1, characterized in that: The O-ring (11) is embedded in the sealing magnetofluid end face groove of the target back plate (20) and fits against the central shaft seat (12).

4. The four-target position liftable rotating target structure according to claim 1, characterized in that: The photoelectric sensor (21) is used to detect the lifting position of the guide rail slider (16), and the limit sensor (22) is used to limit the overtravel of the Y-axis lifting mechanism.

5. The four-target position liftable rotating target structure according to claim 1, characterized in that: The extension and retraction direction of the nitrogen spring (19) is consistent with the lifting and lowering direction of the Y-axis lifting mechanism, which is used to counteract the angular tilt of the target back plate (20).

6. The four-target position liftable rotating target structure according to claim 1, characterized in that: The water-cooled hollow magnetic fluid (6) has a cooling channel inside, which is connected to the external cooling system.

7. The four-target position liftable rotating target structure according to claim 1, characterized in that: The driving gear (71) and the driven gear (72) have the same module, and their meshing gap is adjustable.

8. The four-target position liftable rotating target structure according to claim 1, characterized in that: The target back plate (20) corresponds one-to-one with the small bevel gear (10), and their central axes are collinear.

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