A feeding device for a single crystal furnace
Patent Information
- Application Number
- CN202522366638.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-07
- Publication Date
- 2026-11-03
- Estimated Expiration
- 2035-11-07
AI Technical Summary
In the process of single crystal manufacturing, it is difficult to accurately control the amount of material when adding materials multiple times, which can lead to a sudden drop in the temperature of the molten pool or insufficient material, affecting the continuity of single crystal growth. In addition, the material adding operation is cumbersome.
A single crystal furnace feeding device was designed, including components such as a quantitative bin, a sliding plate, a heating tube, a ball bearing, a shovel, a sponge, and an anti-stick plate, to achieve quantitative feeding, remove impurities, prevent wear and contamination, and simplify the operation process.
This technology enables multiple quantitative feedings, avoiding the impact of excessive or insufficient material on single crystal growth, reducing pre-feeding operation steps, and improving the purity and growth continuity of single crystal silicon.
Smart Images
Figure CN224930694U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of single crystal furnace feeding technology, specifically a single crystal furnace feeding device. Background Technology
[0002] The single crystal furnace is a core piece of equipment in the semiconductor and photovoltaic industries. Its core consists of a heating system, a heat preservation system, a seed crystal transmission system, and a vacuum control system. It can precisely control parameters such as temperature and pressure to ensure the purity and integrity of single crystal growth.
[0003] The mainstream manufacturing method for single crystals is the Czochralski method, which involves inserting a seed crystal into a single crystal furnace and slowly pulling it upwards to form a single crystal rod. During the manufacturing process, multiple feeding operations are required into the single crystal furnace.
[0004] Currently, when adding materials multiple times into a single crystal furnace, it is necessary to control the amount of silicon crystals added. Too much material can cause a sudden drop in the temperature of the molten pool, while insufficient material can affect the continuity of single crystal growth. Therefore, weighing and other processes are required before adding materials, which is a cumbersome operation.
[0005] Therefore, a single crystal furnace feeding device is proposed to address the above problems. Utility Model Content
[0006] In order to overcome the shortcomings of the prior art, at least one technical problem raised in the background art is solved.
[0007] The technical solution adopted by this utility model to solve its technical problem is as follows: A single crystal furnace feeding device of this utility model includes a single crystal furnace body, a conveying pipe that is connected through the side wall of the single crystal furnace body; a feeding pipe that is connected through the end of the conveying pipe; a feeding port that is fixedly connected to the end of the feeding pipe; a cylinder that is fixedly connected to the side wall of the feeding pipe; a metering bin that is fixedly connected to the output end of the cylinder; the metering bin that is located inside the feeding pipe; a baffle plate that is fixedly connected to the side wall of the metering bin; a slidable connection between the baffle plate and the feeding pipe; a fixed block that is fixedly connected to the bottom of the metering bin; and a sliding plate that is rotatably connected inside the fixed block. Thus, the crystal material in the metering bin is fed into the single crystal furnace multiple times in a metered manner, so that there will be no sudden drop in the temperature of the molten pool due to excessive material or insufficient material affecting the continuity of single crystal growth, and the number of operation steps before feeding is reduced.
[0008] Preferably, the feeding pipe has a groove; multiple grooves are provided; a heating pipe is fixedly connected in the groove; the heating pipe can remove volatile impurities such as moisture adsorbed on the surface of the crystal material in advance, so as to avoid these impurities affecting the purity of single crystal silicon after entering the single crystal furnace with the crystal material. For agglomerated crystal materials, heating can help loosen them.
[0009] Preferably, the bottom of the sliding plate is rotatably connected with ball bearings; multiple ball bearings are arranged; thus, the ball bearings avoid direct contact between the sliding plate and the conveying pipe, reducing wear caused by contact sliding.
[0010] Preferably, a shovel plate is fixedly connected to the side wall of the quantitative bin; multiple shovel plates are provided; the shovel plates are in close contact with the inner wall of the conveying pipe; the shovel plates are inclined; thereby the shovel plates remove the crystal dust remaining on the inner wall of the conveying pipe, reducing the wear caused by dust.
[0011] Preferably, a crossbar is fixedly connected to the side wall of the feeding pipe; a sponge is fixedly connected to the surface of the crossbar; the sponge and the baffle plate are correspondingly arranged; thereby the sponge cleans the surface of the baffle plate, so that the surface of the baffle plate is always clean and tidy, and the baffle plate will not carry stains to contaminate the crystal material when it comes into contact with the outside world.
[0012] Preferably, an anti-sticking plate is fixedly connected to the inner wall of the feeding pipe; multiple anti-sticking plates are provided; thereby the anti-sticking plate prevents crystal dust from remaining on the inner wall of the feeding pipe, thus preventing it from being contaminated.
[0013] The advantages of this utility model are: 1. The single crystal furnace feeding device described in this utility model enables multiple quantitative feedings of crystal material in the quantitative chamber into the single crystal furnace, preventing excessive material from causing a sudden drop in the molten pool temperature or insufficient material from affecting the continuity of single crystal growth, and reducing the number of operation steps before feeding.
[0014] 2. The single crystal furnace feeding device of this utility model can remove volatile impurities such as moisture adsorbed on the surface of the crystal material in advance by means of the heating tube, so as to avoid these impurities affecting the purity of single crystal silicon after entering the single crystal furnace with the crystal material. For agglomerated crystal material, heating can help to loosen it. Attached Figure Description
[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0016] Figure 1 This is a schematic diagram of the main body of this utility model; Figure 2 This is a schematic diagram of the shovel plate in this utility model; Figure 3 This is a schematic diagram of the quantitative storage bin in this utility model; Figure 4 This is a schematic diagram of the ball bearing structure in this utility model; Figure 5 This is a schematic diagram of the heating tube in this utility model.
[0017] In the diagram: 1. Single crystal furnace body; 101. Conveying pipe; 102. Feeding port; 103. Feeding tube; 104. Cylinder; 105. Metering bin; 106. Baffle plate; 107. Fixing block; 108. Sliding plate; 2. Groove; 201. Heating tube; 3. Ball bearing; 4. Shovel plate; 5. Crossbar; 501. Sponge; 6. Anti-stick plate. Detailed Implementation
[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.
[0019] Specific implementation examples are given below.
[0020] like Figures 1 to 5As shown in the embodiment of this utility model, a single crystal furnace feeding device includes a single crystal furnace body 1, a conveying pipe 101 that is connected through the side wall of the single crystal furnace body 1; a feeding pipe 103 that is connected through the end of the conveying pipe 101; a feeding port 102 that is fixedly connected to the end of the feeding pipe 103; a cylinder 104 that is fixedly connected to the side wall of the feeding pipe 103; a metering bin 105 that is fixedly connected to the output end of the cylinder 104; the metering bin 105 that is located inside the feeding pipe 103; the metering bin 105... A baffle plate 106 is fixedly connected to the side wall of the silo 105; the baffle plate 106 is slidably connected to the feeding pipe 103; a fixing block 107 is fixedly connected to the bottom of the quantitative silo 105; a sliding plate 108 is rotatably connected inside the fixing block 107; during operation, when adding material to the single crystal furnace multiple times, the crystal material can first be poured into the feeding port 102, and the crystal material will enter the feeding pipe 103 through the feeding port 102 and then enter the quantitative silo 105. At this time, the cylinder 104 can be activated, and the cylinder 104 will drive... The movable metering chamber 105 moves within the conveying pipe 101, causing the baffle plate 106 to slide within the side wall of the feeding pipe 103. When the metering chamber 105 moves out of the feeding pipe 103, the baffle plate 106 blocks the crystal material from falling. The metering chamber 105 is then pushed into the single crystal furnace by the output end of the cylinder 104. When the sliding plate 108 at the bottom of the metering chamber 105 is not obstructed by the inner wall of the conveying pipe 101, the sliding plate 108 will move against the fixed block 1 under the action of gravity. The cylinder rotates within 07, causing the crystal material to fall from below the metering chamber 105 into the single crystal furnace, completing the feeding process. After feeding, the cylinder 104 is activated to return the metering chamber 105 to its original position, and the crystal material in the feeding pipe 103 falls back into the metering chamber 105. Thus, the crystal material in the metering chamber 105 completes multiple metered feedings into the single crystal furnace, preventing excessive material from causing a sudden drop in the molten pool temperature or insufficient material from affecting the continuity of single crystal growth, and reducing the number of pre-feeding operation steps.
[0021] like Figure 2 and Figure 5 As shown, a groove 2 is provided inside the feeding pipe 103; multiple grooves 2 are provided; a heating pipe 201 is fixedly connected inside the groove 2; during operation, the feeding pipe 103 is heated by the heating pipe 201, so that the wet crystal material is dried by the heating pipe 201 inside the feeding pipe 103; thus, the heating pipe 201 can remove volatile impurities such as moisture adsorbed on the surface of the crystal material in advance, so as to avoid these impurities from affecting the purity of single crystal silicon after entering the single crystal furnace with the crystal material. For agglomerated crystal material, heating can help to loosen it.
[0022] like Figure 4As shown, a ball bearing 3 is rotatably connected to the bottom of the sliding plate 108; multiple balls bearing 3 are arranged; during operation, when the starting cylinder 104 drives the metering chamber 105 to move, the balls bearing 3 at the bottom of the sliding plate 108 will contact the inner wall of the conveying pipe 101 and rotate on it. The balls bearing 3 can prevent the sliding plate 108 from contacting the inner wall of the conveying pipe 101, thereby preventing wear between the sliding plate 108 and the inner wall of the conveying pipe 101; thus, the balls bearing 3 avoid direct contact between the sliding plate 108 and the conveying pipe 101, reducing the wear caused by contact sliding.
[0023] like Figures 2 to 4 As shown, a shovel plate 4 is fixedly connected to the side wall of the metering chamber 105; multiple shovel plates 4 are provided; the shovel plates 4 are in close contact with the inner wall of the conveying pipe 101; the shovel plates 4 are inclined; during operation, when the cylinder 104 drives the metering chamber 105 to move, the shovel plates 4 on the side wall of the metering chamber 105 will come into contact with the inner wall of the conveying pipe 101, thereby removing the dust remaining on the inner wall of the conveying pipe 101 due to repeated feeding and contact with the crystal material, ensuring the cleanliness of the inner wall of the conveying pipe 101; thus, the shovel plates 4 remove the crystal material dust remaining on the inner wall of the conveying pipe 101, reducing the wear caused by dust.
[0024] like Figure 1 As shown, a crossbar 5 is fixedly connected to the side wall of the feeding pipe 103; a sponge 501 is fixedly connected to the surface of the crossbar 5; the sponge 501 and the baffle plate 106 are correspondingly arranged; during operation, the metering chamber 105 drives the baffle plate 106 to move, and the surface of the baffle plate 106 will come into contact with the crystal material, resulting in residual crystal material dust on the surface of the baffle plate 106. When the metering chamber 105 is restored, the baffle plate 106 will also move, and the sponge 501 on the side wall of the feeding pipe 103 will come into contact with the surface of the baffle plate 106 to clean the baffle plate 106; thus, the sponge 501 cleans the surface of the baffle plate 106, keeping the surface of the baffle plate 106 clean and tidy, and the baffle plate 106 will not carry dirt to contaminate the crystal material when it comes into contact with the outside world.
[0025] like Figure 2 and Figure 5 As shown, an anti-sticking plate 6 is fixedly connected to the inner wall of the feeding pipe 103; multiple anti-sticking plates 6 are provided; during operation, when the crystal material is poured into the feeding pipe 103 from the feeding port 102, the anti-sticking plate 6 on the inner wall of the feeding pipe 103 will isolate the crystal material from direct contact between the crystal material and the single crystal furnace body 1 on the inner wall of the feeding pipe 103, thereby preventing crystal material dust from remaining on the inner wall of the feeding pipe 103 and being unable to be removed; thus, the anti-sticking plate 6 prevents crystal material dust from remaining on the inner wall of the feeding pipe 103 and causing contamination.
[0026] Working principle: During multiple feeding operations within the single crystal furnace, the crystal material is first poured into the feeding port 102. The crystal material then flows through the feeding port 102 into the feeding pipe 103 and subsequently into the metering bin 105. At this point, the cylinder 104 is activated, causing the metering bin 105 to move within the conveying pipe 101. The metering bin 105 then causes the baffle plate 106 to slide within the side wall of the feeding pipe 103. When the metering bin 105 moves out of the feeding pipe 103, the baffle plate 106 blocks the crystal material from falling. The metering bin 105 is then pushed into the single crystal furnace by the output of the cylinder 104. When the sliding plate 108 at the bottom is not obstructed by the inner wall of the conveying pipe 101, the sliding plate 108 will rotate within the fixed block 107 under the action of gravity, so that the crystal material will fall from below the metering bin 105 into the single crystal furnace, completing the feeding. After the feeding is completed, the starting cylinder 104 drives the metering bin 105 back to its original position, and the crystal material in the feeding pipe 103 will fall back into the metering bin 105. The feeding pipe 103 is heated by the heating pipe 201, so that the wet crystal material is dried by the heating pipe 201 in the feeding pipe 103. When the starting cylinder 104 drives the metering bin 105 into the furnace, the crystal material will fall back into the furnace. During movement, the ball bearings 3 at the bottom of the sliding plate 108 contact and rotate on the inner wall of the conveying pipe 101. The ball bearings 3 prevent the sliding plate 108 from contacting the inner wall of the conveying pipe 101, thus preventing wear between the sliding plate 108 and the inner wall of the conveying pipe 101. When the cylinder 104 moves the metering bin 105, the shovel plate 4 on the side wall of the metering bin 105 contacts the inner wall of the conveying pipe 101, removing dust residue accumulated from repeated feeding and contact with the crystal material, ensuring the cleanliness of the inner wall of the conveying pipe 101. As the metering bin 105 moves, the baffle plate 106... As the feed tube moves, the surface of the baffle plate 106 comes into contact with the crystal material, resulting in residual crystal material dust on the surface of the baffle plate 106. When the quantitative chamber 105 is restored, the baffle plate 106 will also move, and the sponge 501 on the side wall of the feed tube 103 will come into contact with the surface of the baffle plate 106 to clean the baffle plate 106. When the crystal material is poured into the feed tube 103 from the feed port 102, the anti-stick plate 6 on the inner wall of the feed tube 103 will prevent the crystal material from directly contacting the single crystal furnace body 1 on the inner wall of the feed tube 103, thereby preventing crystal material dust from remaining on the inner wall of the feed tube 103 and being unable to be removed.
[0027] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.
Claims
1. A single crystal furnace feeding device, comprising a single crystal furnace body (1), characterized in that: The single crystal furnace body (1) has a conveying pipe (101) that is connected through the side wall; the end of the conveying pipe (101) is connected through the feeding pipe (103); the end of the feeding pipe (103) is fixedly connected to the feeding port (102); the side wall of the feeding pipe (103) is fixedly connected to the cylinder (104); the output end of the cylinder (104) is fixedly connected to the metering chamber (105); the metering chamber (105) is located inside the feeding pipe (103); the side wall of the metering chamber (105) is fixedly connected to the baffle plate (106); the baffle plate (106) and the feeding pipe (103) are slidably connected; the bottom of the metering chamber (105) is fixedly connected to the fixing block (107); a sliding plate (108) is rotatably connected inside the fixing block (107).
2. The single crystal furnace feeding device according to claim 1, characterized in that: The feeding pipe (103) has a groove (2) inside; there are multiple grooves (2); a heating pipe (201) is fixedly connected inside the groove (2).
3. The single crystal furnace feeding device according to claim 2, characterized in that: The bottom of the sliding plate (108) is rotatably connected to a ball bearing (3); there are multiple balls bearing (3).
4. The single crystal furnace feeding device according to claim 3, characterized in that: The quantitative bin (105) is fixedly connected to a shovel plate (4) on its side wall; multiple shovel plates (4) are provided; the shovel plate (4) is in close contact with the inner wall of the conveying pipe (101); the shovel plate (4) is set at an angle.
5. The single crystal furnace feeding device according to claim 4, characterized in that: A crossbar (5) is fixedly connected to the side wall of the feeding pipe (103); a sponge (501) is fixedly connected to the surface of the crossbar (5); the sponge (501) and the baffle plate (106) are arranged correspondingly.
6. The single crystal furnace feeding device according to claim 5, characterized in that: The inner wall of the feeding pipe (103) is fixed with an anti-stick plate (6); there are multiple anti-stick plates (6).