A feeding device for a single crystal furnace

Abstract

The utility model belongs to the single crystal silicon production field, concretely speaking is a kind of feeding device of single crystal furnace, including storage container;The first feed inlet is opened in the top of storage container;The support plate is fixedly connected in the lateral wall of storage container;The first motor is fixedly connected in the bottom of support plate;The rotating shaft is rotatably connected in the top of first motor;The rotating shaft is arranged in support plate interior;The spiral blade is fixedly connected in the lateral wall of rotating shaft;The discharge port is opened in the top of support plate;The second feed inlet is opened in the inner lateral wall of storage container;The second feed inlet is opened in the one side position of support plate;The centralized storage of raw material is realized by storage container, and a certain amount of raw material can be reserved in advance, so that the raw material in the storage container can be continuously added when adding into single crystal furnace, the rotating cooperation of first motor driving rotating shaft and spiral blade is driven, that is, the conveying amount of raw material can be controlled, stable feeding is realized, and the accurate control demand of single crystal furnace to raw material adding amount is satisfied.

Description

Technical Field

[0001] This utility model relates to the field of monocrystalline silicon production, specifically a feeding device for a monocrystalline furnace. Background Technology

[0002] A single crystal furnace is a specialized piece of equipment used to produce single crystal silicon. Its core function is to melt polycrystalline silicon raw materials in a high-temperature, vacuum, or inert gas protected environment, and then grow the molten silicon into a single crystal rod according to a certain crystal structure through processes such as seed crystal pulling and rotation. It is widely used in semiconductor, photovoltaic and other fields and is a key piece of equipment for preparing high-purity single crystal silicon materials.

[0003] When the single crystal furnace is working, high-purity polycrystalline silicon material is first loaded into a quartz crucible, and then heated to melt the silicon material. After the temperature of the molten silicon stabilizes, the seed crystal is immersed in the molten silicon. By precisely controlling the rotation speed of the seed crystal and the crucible and the pulling speed, the single crystal silicon rod is gradually grown along the seed crystal. After the growth is completed, the single crystal silicon rod is cooled and removed, completing one crystal pulling process.

[0004] Most existing single crystal furnaces use vibration feeding, which results in poor uniformity of feeding speed and makes the crystal prone to defects during subsequent growth. Therefore, a feeding device for a single crystal furnace is proposed to address the above problems. Utility Model Content

[0005] In order to overcome the shortcomings of the prior art, at least one technical problem raised in the background art is solved.

[0006] The technical solution adopted by this utility model to solve its technical problem is as follows: A feeding device for a single crystal furnace according to this utility model includes a storage container; a first inlet is opened at the top of the storage container; a support plate is fixedly connected to the side wall of the storage container; a first motor is fixedly connected to the bottom end of the support plate; a rotating shaft is rotatably connected to the top of the first motor; the rotating shaft is disposed inside the support plate; a spiral blade is fixedly connected to the side wall of the rotating shaft; a discharge port is opened at the top of the support plate; a second inlet is opened on the inner side wall of the storage container; the second inlet is located on one side of the support plate; the storage container realizes centralized storage of raw materials, and can pre-store a certain amount of raw materials, so that the raw materials inside the storage container can be continuously added when added to the single crystal furnace. The first motor drives the rotating shaft to drive the spiral blade to rotate, and the operation of the first motor can control the amount of raw materials conveyed, realize stable feeding, meet the precise control requirements of the single crystal furnace for the amount of raw materials added, flexibly control the speed of raw materials entering the single crystal furnace, and ensure that the raw materials are continuously added to the single crystal furnace.

[0007] Preferably, a guide plate is rotatably connected to the side wall of the support plate; a pair of baffles are fixedly connected to the side wall of the guide plate; an electric push rod is hinged to the side wall of the support plate; and a guide plate is hinged to the top of the electric push rod. The guide plate and the baffles work together to guide the raw material to flow to the inlet of the single crystal furnace along a preset path, reducing the deviation when the raw material falls into the single crystal furnace and increasing the smoothness of the raw material entering the single crystal furnace. The electric push rod allows the guide plate to be adapted to the position of the feed inlet of different models of single crystal furnaces, ensuring that the raw material conveying path is accurately aligned with the feed inlet.

[0008] Preferably, a fixing seat is fixedly connected to the side wall of the support plate; a heating plate is fixedly connected to the inner side wall of the fixing seat; the heating plate is located in the middle of the support plate; by preheating the raw material in the middle section of the support plate by the heating plate, the temperature difference between the raw material and the single crystal furnace can be reduced, providing more stable growth conditions for the crystal, which helps to improve the structural integrity and quality of the single crystal.

[0009] Preferably, a second motor is fixedly connected to the top of the storage container; a stirring shaft is fixedly connected to the output end of the second motor; by driving the stirring shaft to rotate through the second motor, the raw materials inside the storage container can be stirred, causing the raw materials to loosen and flow towards the second feed inlet, reducing feeding interruptions caused by raw material retention, and ensuring the continuity of feeding to the single crystal furnace.

[0010] Preferably, a pair of first inclined plates are fixedly connected to the bottom end of the storage container; a second inclined plate is fixedly connected to the bottom end of the storage container; the second inclined plate is correspondingly arranged with the first inclined plate; by the cooperation of the pair of first inclined plates and the second inclined plate that are inclined at the bottom of the storage container, the raw material can be guided by gravity to concentrate at the position of the second feed inlet, reducing the accumulation of raw material at the bottom edge of the storage container and reducing the amount of raw material residue in the storage container.

[0011] Preferably, a pair of shielding cloths are fixed to the side wall of the support plate; the shielding cloths are connected to the side walls of a pair of guide plates; by setting the shielding cloths between the side walls of the support plate and the side walls of the guide plates, the raw material leakage is effectively blocked, ensuring that the raw material discharged from the outlet is guided by the guide plates into the single crystal furnace.

[0012] The advantages of this utility model are: 1. The feeding device for a single crystal furnace described in this utility model achieves centralized storage of raw materials through a storage container, which can pre-store a certain amount of raw materials, so that the raw materials in the storage container can be continuously added when they are added into the single crystal furnace. The first motor drives the rotating shaft to rotate the spiral blades. By controlling the operation of the first motor, the amount of raw materials conveyed can be controlled, achieving stable feeding, meeting the single crystal furnace's requirement for precise control of the amount of raw materials added, flexibly controlling the speed at which the raw materials enter the single crystal furnace, and ensuring that the raw materials are continuously added to the single crystal furnace.

[0013] 2. The feeding device for a single crystal furnace described in this utility model guides the raw material to flow to the inlet of the single crystal furnace along a preset path through the cooperation of a guide plate and a baffle, reducing the deviation that occurs when the raw material falls into the single crystal furnace and increasing the smoothness of the raw material entering the single crystal furnace. The electric push rod enables the guide plate to be adapted to the position of the feed port of different models of single crystal furnaces, ensuring that the raw material conveying path is accurately connected with the feed port. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a schematic diagram of the main body of this utility model; Figure 2 This is a schematic diagram of the structure of the helical blade in this utility model; Figure 3 This is a schematic diagram of the guide plate in this utility model; Figure 4 This is a schematic diagram of the structure of the stirring shaft in this utility model; Figure 5 This is a schematic diagram of the structure of the second inclined plate in this utility model.

[0016] In the diagram: 1. Storage container; 11. First feed inlet; 12. Support plate; 13. First motor; 14. Rotating shaft; 15. Spiral blade; 16. Discharge port; 17. Second feed inlet; 2. Guide plate; 21. Baffle; 22. Electric push rod; 3. Fixed base; 31. Heating plate; 4. Second motor; 41. Stirring shaft; 5. First inclined plate; 51. Second inclined plate; 6. Shelter cloth. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0018] Specific implementation examples are given below.

[0019] like Figures 1 to 5As shown in the embodiment of this utility model, a feeding device for a single crystal furnace includes a storage container 1; a first feed port 11 is provided at the top of the storage container 1; a support plate 12 is fixedly connected to the side wall of the storage container 1; a first motor 13 is fixedly connected to the bottom end of the support plate 12; a rotating shaft 14 is rotatably connected to the top of the first motor 13; the rotating shaft 14 is disposed inside the support plate 12; a spiral blade 15 is fixedly connected to the side wall of the rotating shaft 14; a discharge port 16 is provided at the top of the support plate 12; a second feed port 17 is provided on the inner side wall of the storage container 1; the second feed port 17 is located on one side of the support plate 12; during operation, raw materials are added to the top of the first feed port 11, and then the storage container 1 stores the raw materials. After the storage container 1 has stored a certain height of raw materials, it can be moved to the side of the single crystal furnace. When the single crystal furnace needs to be filled... When adding raw materials, the first motor 13 can be started, which will drive the rotating shaft 14 to rotate. The spiral blades 15 will rotate with the rotating shaft 14. The raw materials inside the storage container 1 can be guided from the second feed port 17 to the top of the discharge port 16 by the spiral blades 15. The raw materials discharged from the discharge port 16 can fall into the single crystal furnace to feed the single crystal furnace. The storage container 1 realizes the centralized storage of raw materials, which can reserve a certain amount of raw materials in advance, so that the raw materials inside the storage container 1 can be continuously added when they are added into the single crystal furnace. The first motor 13 drives the rotating shaft 14 to rotate the spiral blades 15 in coordination. By controlling the operation of the first motor 13, the amount of raw materials conveyed can be controlled, and stable feeding can be achieved. This meets the single crystal furnace's requirements for precise control of the amount of raw materials added, flexibly controls the speed at which raw materials enter the single crystal furnace, and ensures that raw materials are continuously added to the single crystal furnace.

[0020] like Figure 1 and Figure 3 As shown, a guide plate 2 is rotatably connected to the side wall of the support plate 12; a pair of baffles 21 are fixedly connected to the side wall of the guide plate 2; an electric push rod 22 is hinged to the side wall of the support plate 12; the top of the electric push rod 22 is hinged to the guide plate 2; during operation, when the raw material is discharged from the outlet 16, it can fall on the top of the guide plate 2. The raw material on the top of the guide plate 2 can be guided to the inlet of the single crystal furnace by the guide plate 2, so that the raw material falls into the single crystal furnace smoothly. It can also push the electric push rod 22 to drive the guide plate 2 to rotate on the side wall of the support plate 12. The angle of the guide plate 2 can be adjusted according to the position of the single crystal furnace inlet. The pair of baffles 21 can prevent the raw material from sliding off the sides of the guide plate 2. Through the guidance of the guide plate 2 and the baffles 21, the raw material flows to the single crystal furnace inlet along a preset path, reducing the deviation when the raw material falls into the single crystal furnace and increasing the smoothness of the raw material entering the single crystal furnace. The electric push rod 22 makes the guide plate 2 adapt to the position of the inlet of different models of single crystal furnaces, ensuring that the raw material conveying path is accurately connected to the inlet.

[0021] like Figures 1 to 2As shown, a fixing seat 3 is fixedly connected to the side wall of the support plate 12; a heating plate 31 is fixedly connected to the inner side wall of the fixing seat 3; the heating plate 31 is located in the middle of the support plate 12; during operation, when the spiral blade 15 guides the raw material inside the storage container 1 from the support plate 12 to the discharge port 16, the heating plate 31 can be activated to heat the middle section of the support plate 12, so that the raw material is preheated before entering the single crystal furnace; by preheating the raw material in the middle section of the support plate 12 through the heating plate 31, the temperature difference between the raw material and the single crystal furnace can be reduced, providing more stable growth conditions for the crystal, which helps to improve the structural integrity and quality of the single crystal.

[0022] like Figure 1 and Figure 4 As shown, a second motor 4 is fixedly connected to the top of the storage container 1; a stirring shaft 41 is fixedly connected to the output end of the second motor 4; during operation, when the raw material inside the storage container 1 is stored, due to the large friction, it will clump and stagnate inside the storage container 1 and will not move towards the second feed port 17. At this time, the second motor 4 can be started to drive the stirring shaft 41 to rotate and stir the raw material inside the storage container 1; by driving the stirring shaft 41 to rotate, the raw material inside the storage container 1 can be stirred, causing the raw material to loosen and flow towards the second feed port 17, reducing the interruption of feeding caused by the stagnation of raw material and ensuring the continuity of feeding of the single crystal furnace.

[0023] like Figures 4 to 5 As shown, a pair of first inclined plates 5 are fixedly connected to the bottom end of the storage container 1; a second inclined plate 51 is fixedly connected to the bottom end of the storage container 1; the second inclined plate 51 is correspondingly arranged with the first inclined plate 5; during operation, the pair of first inclined plates 5 at the bottom of the storage container 1 can cause the raw material to move towards the middle when it is at the bottom of the storage container 1, while the second inclined plate 51 can guide the raw material in the middle of the storage container 1 to the second feed inlet 17; through the cooperation of the pair of first inclined plates 5 and the second inclined plate 51 at the bottom of the storage container 1, the raw material can be guided by gravity to concentrate at the position of the second feed inlet 17, reducing the accumulation of raw material at the bottom edge of the storage container 1 and reducing the amount of raw material residue in the storage container 1.

[0024] like Figure 1 and Figure 3 As shown, a pair of shielding cloths 6 are fixed to the side wall of the support plate 12; the shielding cloths 6 are connected to the side walls of a pair of guide plates 2; during operation, when the electric push rod 22 pushes the guide plate 2 to adjust the angle, there will be a gap between the guide plate 2 and the support plate 12, causing the raw material to leak out from the gap. At this time, the shielding cloths 6 can block the raw material; by setting the shielding cloths 6 between the side wall of the support plate 12 and the side wall of the guide plate 2, the leakage of raw material is effectively blocked, ensuring that the raw material discharged from the discharge port 16 is guided by the guide plate 2 into the single crystal furnace.

[0025] Working principle: Raw material is added to the top of the first feed port 11, and then the storage container 1 stores the raw material. After the storage container 1 has stored a certain height of raw material, it can be moved to the side of the single crystal furnace. When raw material needs to be added inside the single crystal furnace, the first motor 13 can be started. The first motor 13 will drive the rotating shaft 14 to rotate, and the spiral blade 15 will rotate with the rotating shaft 14. The raw material inside the storage container 1 can be guided from the second feed port 17 to the top of the discharge port 16 by the spiral blade 15. The raw material discharged from the discharge port 16 can fall into the single crystal furnace to feed the single crystal furnace. When the raw material is discharged from the discharge port 16, it can fall on the top of the guide plate 2. The raw material on the top of the guide plate 2 can be guided by the guide plate 2 to the entrance of the single crystal furnace, so that the raw material falls into the single crystal furnace smoothly. The electric push rod 22 can also be pushed to drive the guide plate 2 to rotate on the side wall of the support plate 12. The angle of the guide plate 2 can be adjusted according to the position of the single crystal furnace feed port. A pair of baffles 21 can... To prevent raw materials from sliding down from both sides of the guide plate 2, the spiral blades 15 guide the raw materials inside the storage container 1 from the support plate 12 to the discharge port 16. At this time, the heating plate 31 can be activated to heat the middle section of the support plate 12, so that the raw materials are preheated when they enter the single crystal furnace. When the raw materials inside the storage container 1 are stored, due to the large friction, they will clump and remain inside the storage container 1 and will not move to the second feed port 17. At this time, the second motor 4 can be activated to drive the stirring shaft 41 to rotate and stir the raw materials inside the storage container 1. A pair of first inclined plates 5 are set at the bottom of the storage container 1 so that the raw materials can move from the bottom of the storage container 1 to the middle. The second inclined plate 51 can guide the raw materials in the middle of the storage container 1 to the second feed port 17. When the electric push rod 22 pushes the guide plate 2 to adjust the angle, there will be a gap between the guide plate 2 and the support plate 12, which will cause the raw materials to leak out from the gap. At this time, the shielding cloth 6 can block the raw materials.

[0026] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A feeding device for a single crystal furnace, characterized in that: The storage container (1) includes a storage container (1); a first feed port (11) is provided at the top of the storage container (1); a support plate (12) is fixedly connected to the side wall of the storage container (1); a first motor (13) is fixedly connected to the bottom of the support plate (12); a rotating shaft (14) is rotatably connected to the top of the first motor (13); the rotating shaft (14) is located inside the support plate (12); a spiral blade (15) is fixedly connected to the side wall of the rotating shaft (14); a discharge port (16) is provided at the top of the support plate (12); a second feed port (17) is provided on the inner side wall of the storage container (1); the second feed port (17) is located on one side of the support plate (12).

2. The feeding device for a single crystal furnace according to claim 1, characterized in that: The side wall of the support plate (12) is rotatably connected to a guide plate (2); a pair of baffles (21) are fixed to the side wall of the guide plate (2); an electric push rod (22) is hinged to the side wall of the support plate (12); and the top of the electric push rod (22) is hinged to the guide plate (2).

3. The feeding device for a single crystal furnace according to claim 2, characterized in that: A fixing seat (3) is fixedly connected to the side wall of the support plate (12); a heating plate (31) is fixedly connected to the inner side wall of the fixing seat (3); the heating plate (31) is located in the middle of the support plate (12).

4. The feeding device for a single crystal furnace according to claim 3, characterized in that: The storage container (1) is fixedly connected to a second motor (4) at its top; the output end of the second motor (4) is fixedly connected to a stirring shaft (41).

5. The feeding device for a single crystal furnace according to claim 4, characterized in that: The storage container (1) has a pair of first inclined plates (5) fixedly connected to its bottom end; the storage container (1) has a second inclined plate (51) fixedly connected to its bottom end; the second inclined plate (51) is arranged correspondingly to the first inclined plate (5).

6. The feeding device for a single crystal furnace according to claim 5, characterized in that: A pair of shielding cloths (6) are fixed to the side wall of the support plate (12); the shielding cloths (6) are connected to the side wall of a pair of guide plates (2).

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