Adjustable air pressure type damping buffer mechanism

Abstract

The utility model discloses an adjustable air pressure type damping buffer mechanism has: pivot, mounting plate, fixed mounting is on the pivot, fixed plate, fixed installation pivot, and fixed plate is located below the mounting plate, alignment mechanism, its upper end is installed on the pivot, air bag damping mechanism, fixed installation is on the fixed plate, buffer plate, installs on the second end of alignment mechanism, air bag damping mechanism is located between the buffer plate and fixed plate, upper disc, fixed installation is on the buffer plate, to air pressure damping dispersion its impact force, delays the alignment rotation of the upper disc connected to the alignment mechanism, makes it complete the lift when the lower disc surface simultaneously separates from work piece, prevents its in the instant of rising from the upper disc that is lifted to one side and deviates and forms the pressure injury or breakage, has reduced the risk of work piece damage.

Description

Technical Field

[0001] This utility model belongs to the technical field of grinding and polishing machines, and in particular relates to an adjustable air pressure damping buffer mechanism. Background Technology

[0002] Chemical mechanical polishing (CMP) is a key process for achieving wafer surface planarization in integrated circuit manufacturing. CMP combines surface chemical action with mechanical abrasion to remove micron / nanoscale materials from the wafer surface, achieving nanoscale planarization and enabling subsequent photolithography processes.

[0003] In the process of realizing this utility model, the inventors discovered that the prior art has at least the following problems:

[0004] The main working principle of CMP (Chemical Polishing) is that, under certain pressure and in the presence of polishing slurry, the wafer being polished moves relative to the polishing pad. Through the highly organic combination of the mechanical abrasive action of nano-abrasives and the chemical action of various chemical reagents, the surface of the polished wafer achieves high flatness, low surface roughness, and low defects. In single-sided polishing equipment, during product processing, the main disc rotates, and the main polishing head rotates eccentrically under pressure. Surface polishing is achieved through the highly organic combination of the mechanical abrasive action of nano-abrasives and the chemical action of various chemical reagents. The polishing effect is related to various factors such as material hardness, abrasive particles, polishing slurry, machine disc flatness, and the parallelism between the upper and lower polishing discs. When the upper disc is lifted, its actual center of gravity may not coincide with its centroid. Due to the flexibility of the self-aligning mechanism, the finished workpiece may be offset to one side by the lifted upper disc, resulting in crushing or breakage. Existing machine structures have certain limitations.

[0005] In the process of processing products, single-sided polishing equipment relies on the rotation of the main disc and the eccentric positioning and pressure rotation of the main polishing head. It uses the high organic combination of the mechanical grinding action of nano abrasives and the chemical action of various chemical reagents to polish the surface. Since most workpieces have the characteristics of being hard, brittle and thin, the self-aligning structure required for the upper disc needs to control its self-aligning response speed. When the upper disc is lifted, its actual center of gravity may not coincide with the centroid, which may cause the finished workpiece to be offset to one side by the lifted upper disc, resulting in crushing or breakage.

[0006] CN212553076U - Wafer Grinding Mechanism discloses a wafer grinding mechanism, which is arranged adjacent to the processing spindle. It includes a base, a grinding machine, a first driving device, and a second driving device. The grinding machine is connected to the base through the first driving device and the second driving device. The first driving device is used to drive the grinding machine to move along the axial direction of the processing spindle, but it cannot solve the above-mentioned technical problems. Utility Model Content

[0007] The technical problem to be solved by this utility model is to provide an adjustable pneumatic damping buffer mechanism that uses pneumatic damping to disperse the impact force, delays the self-aligning rotation of the upper plate connected to the self-aligning mechanism, and allows the lower plate to detach from the workpiece simultaneously when it completes lifting and lowering, preventing the upper plate from shifting to one side and causing crushing or breakage at the moment of lifting and lowering, thus reducing the risk of workpiece damage.

[0008] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: an adjustable pneumatic damping buffer mechanism, which has the following features:

[0009] Shaft;

[0010] The mounting plate is fixedly mounted on the rotating shaft;

[0011] A fixing plate is fixedly installed on the rotating shaft, and the fixing plate is located below the mounting plate;

[0012] A self-aligning mechanism, the upper end of which is mounted on the rotating shaft;

[0013] The airbag damping mechanism is fixedly mounted on the fixed plate;

[0014] A buffer plate is installed on the second end of the self-aligning mechanism; the airbag damping mechanism is located between the buffer plate and the fixed plate.

[0015] The upper plate is fixedly installed on the buffer plate.

[0016] The airbag damping mechanism has an air tube on its airbag, with the first end of the air tube connected to the airbag and the second end of the air tube connected to the outside.

[0017] The shaft has a through hole in the middle, and the second end of the air tube is located inside the through hole.

[0018] The mounting plate is provided with an upper protective plate, which surrounds the rotating shaft.

[0019] The upper plate is provided with a lower protective plate, which surrounds the rotating shaft.

[0020] The mounting plate has two layers of upper protective plates, one inside the other, and the lower protective plate is located between the two upper protective plates.

[0021] One of the above technical solutions has the following advantages or beneficial effects: it uses air pressure damping to disperse the impact force, delays the self-aligning rotation of the upper plate connected to the self-aligning mechanism, and allows the lower plate to detach from the workpiece simultaneously when it completes lifting and lowering, preventing the upper plate from shifting to one side and causing crushing or breakage at the moment of lifting and lowering, thus reducing the risk of workpiece damage. Attached Figure Description

[0022] Figure 1This is a schematic diagram of the adjustable pneumatic damping buffer mechanism provided in the embodiments of this utility model;

[0023] Figure 2 for Figure 1 A schematic diagram of the adjustable pneumatic damping buffer mechanism;

[0024] Figure 3 for Figure 1 A schematic diagram of the adjustable pneumatic damping buffer mechanism;

[0025] Figure 4 for Figure 1 A schematic diagram of the adjustable pneumatic damping buffer mechanism;

[0026] Figure 5 for Figure 1 A schematic diagram of the adjustable pneumatic damping buffer mechanism;

[0027] The markings in the above figures are as follows: 1. Rotating shaft, 2. Mounting plate, 3. Fixing plate, 4. Self-aligning mechanism, 5. Airbag damping mechanism, 51. Air tube, 6. Buffer plate, 7. Upper plate, 8. Upper protective plate, 9. Lower protective plate. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0029] Example 1

[0030] See Figures 1-5An adjustable pneumatic damping buffer mechanism 4 comprises: a rotating shaft 1; a mounting plate 2 fixedly mounted on the rotating shaft 1; a fixing plate 3 fixedly mounted on the rotating shaft 1, the fixing plate 3 being located below the mounting plate 2; a self-aligning mechanism 4, the upper end of which is mounted on the rotating shaft 1, the structure of the self-aligning mechanism 4 being a conventional technical means in the field and common knowledge, and will not be described in detail here; an airbag damping mechanism 5 fixedly mounted on the fixing plate 3; a buffer plate 6 mounted on the second end of the self-aligning mechanism 4; the airbag damping mechanism 5 being located between the buffer plate 6 and the fixing plate 3; and an upper plate 7 fixedly mounted on the buffer plate 6. The airbag damping buffer mechanism needs to be installed on the fixed plate 3. The other side of the buffer mechanism needs to contact the buffer plate 6. When the self-aligning mechanism 4 rotates, it drives the buffer plate 6 to hit the buffer mechanism first. The air pressure damping disperses the impact force and slows down the self-aligning rotation of the upper plate 7 connected to the self-aligning mechanism 4. When it completes the lifting and lowering, the lower plate surface is simultaneously separated from the workpiece. This prevents the upper plate 7 from shifting to one side and causing crushing or breakage at the moment of lifting and lowering, thus reducing the risk of workpiece damage.

[0031] The airbag damping mechanism 5 has an air tube 51 on its airbag. The first end of the air tube 51 is connected to the airbag, and the second end of the air tube 51 is connected to the outside, thereby realizing the flow of gas, changing the pressure inside the airbag, and controlling the specific value of the buffer damping. Different damping values ​​can be adjusted when processing workpieces with different hardness and thickness.

[0032] The shaft 1 has a through hole in the middle, and the second end of the air tube 51 is placed in the through hole to facilitate the placement of the air tube 51.

[0033] Action: The pressure inside the airbag is adjusted by the air inlet and outlet to control the specific value of the buffer damping. Different damping values ​​can be adjusted when processing workpieces with different hardness and thickness. During processing, air can be drawn in to contract the pneumatic buffer and release it from contact with the buffer plate 6. At this time, the self-aligning mechanism 4 has the greatest flexibility and the greatest self-aligning speed, which can fully adjust the tilt error caused by the machine assembly itself and increase the yield of products. When the lifting action occurs after processing, air is injected into the pneumatic buffer (airbag) through the air inlet and outlet to reach the set air pressure. At this time, the upper plate 7 is lifted, and its self-aligning rotation speed that is offset to one side is reduced to a level that will not crush or damage the workpiece. After lifting, the pneumatic buffer has completed its work, the airbag is deflated, and the action is completed. The upper plate 7 completes self-aligning under the action of gravity.

[0034] With the above structure, the impact force is dispersed by air pressure damping, which slows down the self-aligning rotation of the upper plate 7 connected to the self-aligning mechanism 4. When the lifting and lowering are completed, the lower plate surface is simultaneously separated from the workpiece, preventing the upper plate 7 from shifting to one side and causing crushing or breakage at the moment of lifting and lowering, thus reducing the risk of workpiece damage.

[0035] Example 2

[0036] In this embodiment, the mounting plate 2 is provided with an upper protective plate 8, which surrounds the rotating shaft 1 and serves a protective function. The upper plate 7 is provided with a lower protective plate 9, which surrounds the rotating shaft 1 and serves a protective function. The mounting plate 2 is provided with two layers of upper protective plates 8, one inside the other, and the lower protective plate 9 is located between the two layers of upper protective plates 8, providing cross-protection.

[0037] The adjustable pneumatic damping buffer mechanism 4 comprises: a rotating shaft 1; a mounting plate 2 fixedly mounted on the rotating shaft 1; a fixed plate 3 fixedly mounted on the rotating shaft 1, located below the mounting plate 2; a self-aligning mechanism 4, the upper end of which is mounted on the rotating shaft 1; an airbag damping mechanism 5 fixedly mounted on the fixed plate 3; a buffer plate 6 mounted on the second end of the self-aligning mechanism 4; the airbag damping mechanism 5 located between the buffer plate 6 and the fixed plate 3; and an upper plate 7 fixedly mounted on the buffer plate 6. This airbag damping buffer mechanism needs to be mounted on the fixed plate 3, and the other side of the buffer mechanism needs to contact the buffer plate 6. When the self-aligning mechanism 4 rotates, it causes the buffer plate 6 to first impact the buffer mechanism, using pneumatic damping to disperse the impact force and delay the self-aligning rotation of the upper plate 7 connected to the self-aligning mechanism 4. This ensures that the lower plate surface simultaneously detaches from the workpiece during lifting and lowering, preventing the upper plate 7 from shifting to one side and causing crushing or breakage during the lifting and lowering process, thus reducing the risk of workpiece damage.

[0038] The airbag damping mechanism 5 has an air tube 51 on its airbag. The first end of the air tube 51 is connected to the airbag, and the second end of the air tube 51 is connected to the outside, thereby realizing the flow of gas, changing the pressure inside the airbag, and controlling the specific value of the buffer damping. Different damping values ​​can be adjusted when processing workpieces with different hardness and thickness.

[0039] The shaft 1 has a through hole in the middle, and the second end of the air tube 51 is placed in the through hole to facilitate the placement of the air tube 51.

[0040] Action: The pressure inside the airbag is adjusted by the air inlet and outlet to control the specific value of the buffer damping. Different damping values ​​can be adjusted when processing workpieces with different hardness and thickness. During processing, air can be drawn in to contract the pneumatic buffer and release it from contact with the buffer plate 6. At this time, the self-aligning mechanism 4 has the greatest flexibility and the greatest self-aligning speed, which can fully adjust the tilt error caused by the machine assembly itself and increase the yield of products. When the lifting action occurs after processing, air is injected into the pneumatic buffer (airbag) through the air inlet and outlet to reach the set air pressure. At this time, the upper plate 7 is lifted, and its self-aligning rotation speed that is offset to one side is reduced to a level that will not crush or damage the workpiece. After lifting, the pneumatic buffer has completed its work, the airbag is deflated, and the action is completed. The upper plate 7 completes self-aligning under the action of gravity.

[0041] By adopting the above structure, the impact force is dispersed by air pressure damping, and the self-aligning rotation of the upper plate connected to the self-aligning mechanism is slowed down. When the lifting and lowering are completed, the lower plate surface is simultaneously separated from the workpiece, preventing the upper plate from shifting to one side and causing crushing or breakage at the moment of lifting and lowering, thus reducing the risk of workpiece damage.

[0042] In the description of this utility model, it should be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "other end", "upper", "side", "top", "inner", "front", "center", "both ends", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0043] In this utility model, unless otherwise explicitly specified and limited, the terms "installation", "setting", "connection", "fixing", "screw connection", etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Unless otherwise explicitly limited, those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0044] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An adjustable pneumatic damping buffer mechanism, characterized in that, have: Shaft; The mounting plate is fixedly mounted on the rotating shaft; A fixing plate is fixedly installed on the rotating shaft, and the fixing plate is located below the mounting plate; A self-aligning mechanism, the upper end of which is mounted on the rotating shaft; The airbag damping mechanism is fixedly mounted on the fixed plate; A buffer plate is installed on the second end of the self-aligning mechanism; the airbag damping mechanism is located between the buffer plate and the fixed plate. The upper plate is fixedly installed on the buffer plate.

2. The adjustable pneumatic damping buffer mechanism as described in claim 1, characterized in that, The airbag damping mechanism has an air tube on its airbag, with the first end of the air tube connected to the airbag and the second end of the air tube connected to the outside.

3. The adjustable pneumatic damping buffer mechanism as described in claim 2, characterized in that, The shaft has a through hole in the middle, and the second end of the air tube is located inside the through hole.

4. The adjustable pneumatic damping buffer mechanism as described in claim 3, characterized in that, The mounting plate is provided with an upper protective plate, which surrounds the rotating shaft.

5. The adjustable pneumatic damping buffer mechanism as described in claim 4, characterized in that, The upper plate is provided with a lower protective plate, which surrounds the rotating shaft.

6. The adjustable pneumatic damping buffer mechanism as described in claim 5, characterized in that, The mounting plate has two layers of upper protective plates, one inside the other, and the lower protective plate is located between the two upper protective plates.

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