A temperature measuring assembly and MPCVD device

Abstract

The utility model relates to the field of microwave plasma technology, more particularly to a kind of temperature measuring assembly and MPCVD device, the temperature measuring assembly includes track, slider and temperature measuring equipment, the slider is provided with clamping groove, the clamping groove is inverted " convex " character, the track is slidably arranged in clamping groove, the temperature measuring equipment is connected with slider, provide a kind of rigidity big temperature measuring assembly that can accurately monitor temperature, will not fall off from track, in the track sliding continuous smooth, the MPCVD device includes the temperature measuring assembly.

Description

Technical Field

[0001] The present utility model relates to the technical field of microwave plasma, and specifically, to a temperature measurement assembly and an MPCVD apparatus. Background Art

[0002] Microwave plasma chemical vapor deposition is an advanced method for preparing high-quality diamond films today. This method requires a microwave plasma chemical vapor deposition apparatus (abbreviated as MPCVD). In MPCVD, microwaves generated by a microwave generator are introduced into a reaction chamber via a waveguide transmission system, and a mixed gas of methane and hydrogen is introduced. Under the excitation of microwaves, glow discharge is generated in the reaction chamber, which ionizes the molecules of the reaction gas to produce plasma, and deposits on the sample to obtain a diamond film.

[0003] The temperature measurement assemblies of MPCVD apparatuses in the prior art have insufficient rigidity, which causes the temperature measurement equipment to shake and thus fail to accurately monitor the temperature. The temperature measurement assembly has a risk of falling off the track, and the sliding of the temperature measurement assembly on the track is discontinuous or even stuck. The above shortcomings restrict its application prospects. Contents of the Utility Model

[0004] An objective of the present utility model is to provide a temperature measurement assembly to solve at least one technical problem in the prior art.

[0005] Another objective of the present utility model is to provide an MPCVD apparatus, which includes the temperature measurement assembly.

[0006] The objectives of the present utility model are achieved through the following technical solutions: A temperature measurement assembly includes a track, a slider, and temperature measurement equipment. The slider is provided with a clamping groove, the clamping groove is in the shape of an inverted "convex", the track is slidably disposed in the clamping groove, and the temperature measurement equipment is connected to the slider.

[0007] Further, the track is annular, and the cross section of the track is in the shape of an inverted "convex".

[0008] Further, the side wall of the clamping groove is arc-shaped, and the arc shape matches the shape of the track.

[0009] Further, rolling elements are disposed between the track and the slider.

[0010] Further, the slider is provided with a locking bolt, and the locking bolt can lock the temperature measurement assembly on the track.

[0011] Further, a floating block is disposed in the clamping groove, and the floating block is arranged between the locking bolt and the track.

[0012] Further, the surface of the floating block close to the track is provided with anti-slip patterns.

[0013] Furthermore, a return spring is provided between the slider and the floating block.

[0014] Furthermore, it also includes a support frame that is connected to the track.

[0015] An MPCVD apparatus includes the temperature measurement component.

[0016] This utility model has the following advantages: The temperature measuring component of this invention features a convex-shaped slot, which increases the rigidity of the slider, preventing the temperature measuring component from wobbling and improving the accuracy of temperature monitoring. Furthermore, the slot opening is located at the lower end of the slider, eliminating the possibility of dust or dirt accumulation that could cause discontinuous sliding or even jamming of the temperature measuring component, thus ensuring continuous sliding. Additionally, the slot opening is smaller than the track size, preventing the temperature measuring component from detaching from the track and ensuring the reliability of the equipment connection. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the embodiments will be briefly described below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative effort.

[0018] Figure 1 This is a three-dimensional schematic diagram of the temperature measuring component of this utility model; Figure 2 This is a top view of the temperature measuring component of this utility model; Figure 3 for Figure 2 A cross-sectional diagram of AA (temperature measuring device removed) in the image; Figure 4 This is a cross-sectional view of the slider of the temperature measuring component of this utility model; Figure 5 This is a cross-sectional view of the track of the temperature measuring component of this utility model; Figure 6 for Figure 3 Schematic diagram of direction B (excluding top plate, floating block, locking bolt and return spring). Figure 1 ; Figure 7 for Figure 3 Schematic diagram of direction B (excluding top plate, floating block, locking bolt and return spring). Figure 2 ; Figure 8 for Figure 2 A schematic diagram of CC section rotation in the diagram; In the diagram: 1-track, 2-slider, 3-temperature measuring device, 4-slot, 5-top plate, 6-first locking block, 7-second locking block, 8-rolling element, 9-pit, 10-groove, 11-locking bolt, 12-floating block, 13-hole, 14-accommodating hole, 15-bracket. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0020] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0021] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0022] In this invention, unless otherwise expressly specified and limited, "above or below" the first feature may include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on" the first feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the first feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0023] like Figures 1 to 4As shown in the figure, a temperature measuring assembly includes a rail 1, a slider 2 and a temperature measuring device 3. The slider 2 is provided with a clamping groove 4, which is in the shape of an inverted "convex". The rail 1 is slidably arranged in the clamping groove 4, and the temperature measuring device 3 is connected with the slider 2. Specifically, the slider 2 includes a top plate 5, a first clamping block 6 and a second clamping block 7. The first clamping block 6 is L-shaped, the second clamping block 7 is in the shape of a reversed L, the first clamping block 6 and the second clamping block 7 are arranged at intervals and symmetrically, both the first clamping block 6 and the second clamping block 7 are detachably connected with the top plate 5. The top plate 5, the first clamping block 6 and the second clamping block 7 enclose to form the clamping groove 4 with a lower end opening, the clamping groove 4 is in the shape of an inverted "convex", the rail 1 is slidably arranged in the clamping groove 4, the opening size of the clamping groove 4 is smaller than the size of the rail 1, and the temperature measuring device 3 is detachably connected with the slider 2. For the temperature measuring assemblies in the prior art, dust, dirt and the like easily fall into the clamping groove of the rail, resulting in discontinuous sliding or even jamming of the temperature measuring assembly on the rail, the insufficient rigidity of the slider causes the temperature measuring device to shake so that the temperature cannot be accurately monitored, and the unreliable connection between the slider and the rail leads to the risk that the temperature measuring assembly falls off from the rail. In the temperature measuring assembly of the present utility model, the "convex"-shaped clamping groove 4 increases the rigidity of the slider 2, so that the temperature measuring assembly no longer shakes, and the accuracy of temperature monitoring is improved. Moreover, the opening of the clamping groove 4 is arranged at the lower end of the slider 4, there is no possibility that accumulated dust and dirt cause discontinuous sliding or even jamming of the temperature measuring assembly, and the continuity and smoothness of the sliding of the temperature measuring assembly are ensured. In addition, the opening size of the clamping groove 4 is smaller than the size of the rail 1, so that the temperature measuring assembly will not fall off from the rail 1, and the reliability of device connection is guaranteed.

[0024] Further, as shown in Figure 1 , Figure 2 , Figure 3 and Figure 5 , the rail 1 is in the shape of a closed circular ring, that is, the cross section of the rail 1 is in the shape of an inverted "convex", and the cross section of the rail 1 matches the cross section of the clamping groove 4. The rail 1 in the shape of a closed circular ring enables the temperature measuring assembly to monitor temperature at multiple points. The cross section of the rail 1 is "convex"-shaped, which is equivalent to adding reinforcing ribs on both sides of the rail 1, further ensuring the rigidity of the rail 1, preventing the temperature measuring assembly from shaking, and improving the accuracy of temperature monitoring. At the same time, the inverted "convex"-shaped structure is not easy to accumulate dust and dirt, reduces the risk of discontinuous sliding or even jamming of the temperature measuring assembly caused by dust and dirt, and further ensures the continuity and smoothness of the sliding of the temperature measuring assembly.

[0025] Further, as shown in Figure 6 and Figure 7As shown, the side wall of the slot 4 near the track 1 is arc-shaped, and the arc shape matches the shape of the track 1. That is, the card block (i.e., the first card block 6 and the second card block 7) near the track 1 is arc-shaped and matches the arc shape of the track 1. The arc-shaped side wall on the card block (i.e., the first card block 6 and the second card block 7) enables the temperature measuring component to slide more continuously and smoothly on the track 1, and is less likely to fall off the track 1.

[0026] Furthermore, such as Figures 3 to 7 As shown, a rolling element 8 is provided between the track 1 and the slider 2; specifically, the locking blocks (i.e., the first locking block 6 and the second locking block 7) are provided with two spherical recesses 9 near the side wall of the track 1, or / and the track 1 is provided with a groove 10 near the side wall of the locking blocks (i.e., the first locking block 6 and the second locking block 7), the groove 10 is arranged around the circumference of the track 1, and the rolling element 8 is provided between the recesses 9 and the groove 10. The rolling element 8 can roll freely in the recesses 9 without falling off, and the rolling element 8 can be a spherical ball; in order to prevent over-positioning from causing the temperature measuring component to slide on the track 1 to become stuck and discontinuous, the rolling element 8 is usually set to 3 pieces. One rolling element 8 can be placed between the track 1 and the first locking block 6, and the remaining two rolling elements 8 can be placed between the track 1 and the second locking block 7 (see Figure 6 Alternatively, two rolling elements 8 can be placed between the track 1 and the first locking block 6, and the remaining rolling element 8 can be placed between the track 1 and the second locking block 7 (see...). Figure 7 The rolling element 8 enables the temperature measuring component to slide more continuously and smoothly on the track 1.

[0027] Furthermore, such as Figures 1 to 3 As shown, the slider 2 is provided with a locking bolt 11; specifically, the top plate 5 is provided with a threaded hole communicating with the slot 4, and the locking bolt 11 is threadedly connected in the threaded hole. When the locking bolt 11 is tightened, the end of the locking bolt 11 can abut against the track 1, thereby locking the temperature measuring component on the track 1.

[0028] Furthermore, such as Figure 3 and Figure 4As shown, a floating block 12 is provided in the slot 4, and the floating block 12 is positioned between the locking bolt 11 and the track 1. Specifically, a hole 13 is provided on the side of the top plate 5 near the track 1, and the floating block 12 is movably positioned in the hole 13. The upper surface of the floating block 12 can abut against the locking bolt 11, and the lower surface of the floating block 12 can abut against the track 1. When the locking bolt 11 is tightened, the floating block 12 can be pressed onto the track 1. Through the friction between the floating block 12 and the track 1, the temperature measuring component can be locked onto the track 1. When the locking bolt 11 is loosened, the temperature measuring component can slide freely on the track 1, thereby facilitating the movement of the temperature measuring component. Compared to the locking bolt 11, the contact surface between the floating block 12 and the track 1 is larger, which not only increases the friction but also prevents the track 1 from deforming and collapsing due to compression, thus extending the service life of the equipment.

[0029] Furthermore, the floating block 12 has an anti-slip pattern (not shown in the figure) on the side near the track 1. When the locking bolt 11 is tightened, the friction between the floating block 12 and the track 1 increases due to the anti-slip pattern, thereby enabling the temperature measuring component to be locked onto the track 1 more reliably, increasing the reliability of the locking.

[0030] Furthermore, such as Figure 3 As shown, a return spring is provided between the slider 2 and the floating block 12; specifically, a receiving hole 14 is provided on the inner wall of the hole 13 away from the track 1, and a return spring is provided in the receiving hole 14; when the locking bolt 11 is loosened, the return spring can be partially or even completely retracted into the receiving hole 14, and the tension of the return spring can disengage the floating block 12 from the track 1, thereby facilitating the continuous free movement of the temperature measuring component on the track 1.

[0031] Furthermore, such as Figure 1 , Figure 2 and Figure 8 As shown, it also includes a bracket 15, which is detachably connected to the track 1. Specifically, the track 1 is provided with stepped holes, the bracket 15 is L-shaped, and the upper end of the bracket 15 is provided with a threaded hole. By passing a screw through the stepped hole and screwing it into the threaded hole, the bracket 15 can be detachably connected to the track 1. The lower end of the bracket 15 is provided with a connecting hole, and the bracket 15 is evenly distributed along the circumference of the track 1. It should be noted that the floating block 12 can also prevent the locking bolt 11 from getting stuck in the stepped hole of the track 1, which would make operation inconvenient.

[0032] An MPCVD apparatus includes the temperature sensing component, which is detachably connected to the MPCVD apparatus via the connection hole, and is used to monitor the temperature inside the reaction chamber of the MPCVD apparatus.

[0033] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A temperature measuring assembly, comprising a track (1), a slider (2), and a temperature measuring device (3), characterized in that: The sliding block (2) is provided with a clamping groove (4), the clamping groove (4) is in an inverted "convex" shape, the rail (1) is slidably arranged in the clamping groove (4), and the temperature measuring device (3) is connected with the sliding block (2).

2. The temperature measuring component according to claim 1, characterized in that: The rail (1) is annular, and the cross section of the rail (1) is in an inverted "convex" shape.

3. The temperature measuring component according to claim 2, characterized in that: The side wall of the clamping groove (4) is arc-shaped, and the arc shape matches the shape of the rail (1).

4. The temperature measuring component according to claim 3, characterized in that: A rolling element (8) is arranged between the rail (1) and the sliding block (2).

5. The temperature measuring component according to claim 4, characterized in that: The sliding block (2) is provided with a locking bolt (11), and the locking bolt (11) can lock the temperature measuring assembly on the rail (1).

6. The temperature measuring component according to any one of claims 1 to 5, characterized in that: A floating block (12) is arranged in the clamping groove (4), and the floating block (12) is arranged between the locking bolt (11) and the rail (1).

7. The temperature measuring component according to claim 6, characterized in that: The side of the floating block (12) close to the rail (1) is provided with anti-slip patterns.

8. The temperature measuring component according to claim 7, characterized in that: A return spring is arranged between the sliding block (2) and the floating block (12).

9. The temperature measuring component according to claim 8, characterized in that: A support (15) is further included, and the support (15) is connected with the rail (1).

10. An MPCVD apparatus, characterized in that: The temperature measuring assembly according to any one of claims 1 to 9 is included.

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