Exposure light source and detection assembly

Abstract

The utility model discloses an exposure light source and detection assembly, including frame, the horizontal sliding installation of power source drive is provided with the sliding seat on the frame, the movable optical assembly is fixedly installed on the sliding seat, the support is still fixedly installed on the sliding seat, is equipped with the multidirectional adjusting mechanism on the support, is equipped with the visual inspection camera of the upstream of movable optical assembly on the multidirectional adjusting mechanism, the fixed seat is still installed on the frame, is equipped with the fixed optical assembly on the fixed seat, is equipped with the light source on the fixed optical assembly, the fixed optical assembly extends to the downstream of movable optical assembly and sets up and links each other. Realized the synchronous movement of detection and optical assembly, and the process linkability is good, not only will not happen work interference, and effectively reduced the space occupancy, in addition, also simplified the process and the structure, improved work efficiency, simultaneously, through the fixed optical assembly and movable optical assembly of split structure, effectively alleviated the weight of movable, and the driving burden is small, improved the versatility of light source use.

Description

Technical Field

[0001] This utility model belongs to the field of wafer exposure technology, and in particular relates to an exposure light source and a detection assembly. Background Technology

[0002] Currently, the light source used in exposure equipment is located directly above the equipment, occupying a large space and being bulky, heavy, and placing a heavy burden on the drive. Furthermore, the light source is a single, integrated structure, resulting in poor versatility. In addition, before the light source can perform the exposure process, it is necessary to check whether the photomask and the wafer are aligned. To avoid interference, the detection-related structures must activate and return to their original positions before the light source can operate and begin exposure. This process and structure are complex and affect work efficiency. Utility Model Content

[0003] This invention provides an exposure light source and a detection assembly to improve versatility and work efficiency.

[0004] To solve the above-mentioned technical problems, the technical solution of this utility model is: an exposure light source and detection assembly, including a base, a slide driven by a power source is horizontally slidably mounted on the base, a movable optical component is fixedly mounted on the slide, a bracket is also fixedly mounted on the slide, a multi-directional adjustment mechanism is provided on the bracket, and a visual inspection camera located upstream of the movable optical component is provided on the multi-directional adjustment mechanism.

[0005] The base is also equipped with a fixed seat, and the fixed seat is provided with a fixed optical component, and the fixed optical component is provided with a light source; the fixed optical component extends downstream of the movable optical component and is connected to it.

[0006] As an improvement, the fixed optical component is adjusted and mounted on the fixed base; the movable optical component is adjusted and mounted on the slide.

[0007] As a further improvement, both the fixed base and the slide are provided with an adjustment assembly consisting of multiple adjusting screws and adjusting nuts distributed around the perimeter, and both the fixed optical component and the movable optical component are mounted on the adjustment assembly.

[0008] As an improvement, the fixed optical component includes a fixed cover, the movable optical component includes a follower cover, and telescopic baffles are provided on both sides of the follower cover. The fixed cover is bent and extended and inserted into the follower cover. Both the fixed cover and the follower cover are provided with mutually cooperating reflectors.

[0009] As a further improvement, a notch is provided on one side of the follower cover, and a sealing plate is provided on the fixing seat at the position corresponding to the notch.

[0010] As a further improvement, the multi-directional adjustment mechanism includes a slide table disposed on the bracket, the slide table being driven by a first driving device and sliding along the Y-axis;

[0011] The slide is equipped with a lifting frame, which moves along the Z-axis and is driven by a second drive device;

[0012] The visual inspection camera is slidably mounted on the lifting frame. The visual inspection camera is driven by a third driving device and slides along the X-axis.

[0013] As a further improvement, a rotary drive mechanism is provided between the lifting frame and the slide.

[0014] As a further improvement, the rotary drive mechanism includes a rotary seat rotatably mounted on the slide table, and the lifting frame is vertically slidably mounted on the rotary seat;

[0015] A slider driven by a fourth driving device is slidably mounted on the slide table, and the slider is provided with a shaft; a swing seat is provided on the rotating seat, and a long groove is provided on the swing seat, and the shaft is located in the long groove.

[0016] After adopting the above technical solution, the effect of this utility model is:

[0017] The exposure light source and inspection assembly includes a base, on which a power source drives a slide block horizontally. A movable optical component is fixedly mounted on the slide block, and a bracket is also fixedly mounted on the slide block. The bracket is equipped with a multi-directional adjustment mechanism, and a vision inspection camera located upstream of the movable optical component is mounted on the multi-directional adjustment mechanism. A fixed base is also mounted on the base, on which a fixed optical component is mounted, and a light source is mounted on the fixed optical component. The fixed optical component extends downstream of the movable optical component and is interconnected. Based on the above structure, during use, the power source drives the slide block and the bracket mounted on the slide block to move synchronously. During the movement, the alignment of the photomask and the wafer is detected through the cooperation of the multi-directional adjustment mechanism and the vision inspection camera. If they are aligned, the slide block will continue to move. Since the movable optical component is mounted on the slide block, it will also move synchronously when the slide block initially moves. After moving into position, the exposure work is performed through the cooperation of the fixed optical component with the light source and the movable optical component.

[0018] In summary, the use of this exposure light source and detection assembly enables synchronous movement of the detection and optical components, resulting in good process integration. It not only avoids work interference but also effectively reduces space occupancy. Furthermore, it simplifies the process and structure, improving work efficiency. At the same time, the separate structure of the fixed and movable optical components effectively reduces the weight of the movable components, minimizes the driving burden, and enhances the versatility of the light source.

[0019] Because the fixed optical component is adjusted and mounted on the fixed base, and the movable optical component is adjusted and mounted on the slide, and both the fixed base and the slide are equipped with an adjustment assembly consisting of multiple adjusting screws and adjusting nuts distributed around the perimeter, and both the fixed optical component and the movable optical component are set on the adjustment assembly, it can not only adjust the matching height of the fixed optical component and the movable optical component as needed, but also adjust the levelness to ensure the exposure effect.

[0020] The fixed optical component includes a fixed housing, and the movable optical component includes a follower housing. Both sides of the follower housing are equipped with telescopic baffles. The fixed housing is bent and extended and inserted into the follower housing. Both the fixed housing and the follower housing are equipped with mutually cooperating reflectors. The telescopic baffles block the connection between the fixed housing and the follower housing, preventing external light from interfering with the light source, while not affecting the reciprocating movement of the movable optical component.

[0021] Because there is a notch on one side of the follower cover, and a sealing plate is provided on the fixed seat corresponding to the notch, the notch and the sealing plate work together to not only provide a shielding function, but also facilitate maintenance and repair.

[0022] The multi-directional adjustment mechanism includes a slide table mounted on a support, which is driven by a first drive device and slides along the Y-axis; a lifting frame is mounted on the slide table, which moves along the Z-axis and is driven by a second drive device; and a vision inspection camera is slidably mounted on the lifting frame, which is driven by a third drive device and slides along the X-axis. Thus, the above structure enables the position adjustment of the vision inspection camera in the X, Y, and Z-axis directions, laying the foundation for alignment inspection of photomasks and wafers at different positions.

[0023] Because a rotary drive mechanism is provided between the lifting frame and the slide, the circumferential adjustment of the visual inspection camera is achieved through the rotary drive mechanism.

[0024] The rotary drive mechanism includes a rotary seat rotatably mounted on a slide table, and a lifting frame vertically slidably mounted on the rotary seat. A slider driven by a fourth drive device is slidably mounted on the slide table, and a shaft is provided on the slider. A swing seat is provided on the rotary seat, and a long groove is provided on the swing seat, with the shaft located in the long groove. Thus, when the vision inspection camera is circumferentially adjusted, the fourth drive device drives the slider and the shaft to move. During the movement, the shaft applies a thrust to the swing seat and causes the swing seat to rotate circumferentially, thereby driving the rotary seat connected to the swing seat to rotate. At the same time, the rotary seat drives the lifting frame and the vision inspection camera to rotate. The structure is simple, and the rotation adjustment is reliable and stable. Attached Figure Description

[0025] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0026] Figure 1 This is a schematic diagram of the structure of this utility model;

[0027] Figure 2 yes Figure 1 A structural diagram from another angle;

[0028] Figure 3 yes Figure 2 Enlarged view of A in the middle;

[0029] Among them, 1-base; 101-power source; 2-slide; 201-support; 202-avoidance hole; 3-movable optical component; 301-follow-up cover; 4-multi-directional adjustment mechanism; 401-slide table; 402-first drive device; 403-lifting frame; 404-second drive device; 405-long slot; 406-third drive device; 407-rotating seat; 408-fourth drive device; 409-slider; 410-shaft; 411-swing seat; 5-visual inspection camera; 6-fixed seat; 601-adjustment assembly; 602-sealing plate; 7-fixed optical component; 701-light source; 702-fixed cover. Detailed Implementation

[0030] The present invention will be further described in detail below through specific embodiments.

[0031] like Figure 1 and Figure 2 As shown, an exposure light source and detection assembly includes a base 1, on which a slide 2 driven by a power source 101 is horizontally slidably mounted via a slide rail. In this embodiment, the power source is a driving component such as a cylinder or hydraulic cylinder hinged to the slide 2 and the base 1. A movable optical component 3 is fixedly mounted on the slide 2. An avoidance hole 202 is provided on the slide 2 corresponding to the working position of the movable optical component 3. A bracket 201 is also fixedly mounted on the slide 2. A multi-directional adjustment mechanism 4 is provided on the bracket 201. A visual inspection camera 5 located upstream of the movable optical component is provided on the multi-directional adjustment mechanism 4. A fixed seat 6 is also mounted on the base 1. A fixed optical component 7 is provided on the fixed seat 6. A light source 701 is provided on the fixed optical component 7. The fixed optical component 7 extends downstream of the movable optical component 3 and is connected to it.

[0032] Preferably, the fixed optical component 7 is adjusted and installed on the fixed base 6, and the movable optical component 3 is adjusted and installed on the slide 2. Specifically, the fixed base 6 and the slide 2 are each provided with an adjustment assembly 601 consisting of multiple adjusting screws and adjusting nuts distributed around the perimeter (in this scheme, they are located near the four corners). The fixed optical component 7 and the movable optical component 3 are both set on the adjustment assembly 601.

[0033] The fixed optical component 7 includes a fixed cover 702, and the movable optical component 3 includes a follower cover 301. The follower cover 301 has telescopic baffles (not shown in the figure) on both sides. The fixed cover 702 is bent and extended and inserted into the follower cover 301. The fixed cover 702 and the follower cover 301 are each provided with a reflector (not shown in the figure) that cooperates with each other and is arranged at an angle.

[0034] The follower cover 301 has a notch on one side (not shown in the figure), and a sealing plate 602 is provided on the fixing seat 6 at the position corresponding to the notch.

[0035] The multi-directional adjustment mechanism 4 includes a slide 401 mounted on a bracket 201, which is driven by a first drive device 402 and slides along the Y-axis; a lifting frame 403 is slidably mounted on the slide 401, which moves along the Z-axis and is driven by a second drive device 404; a visual inspection camera 5 is slidably mounted on the lifting frame 403, which is driven by a third drive device 406 and slides along the X-axis. Preferably, a rotary drive mechanism is provided between the lifting frame 403 and the slide table 401. This rotary drive mechanism includes a rotary seat 407 rotatably mounted on the slide table 401, with the lifting frame 403 vertically slidably mounted on the rotary seat 407. A slider 409 driven by a fourth drive device 408 is slidably mounted on the slide table 401, and a shaft 410 is provided on the slider 409. A swing seat 411 is provided on the rotary seat 407, and an elongated groove 405 is provided on the swing seat 411. One end of the elongated groove 405 passes through the swing seat 411, and the shaft 410 is located within the elongated groove 405 (see [reference]). Figure 3 In this scheme, the first drive device 402, the second drive device 404, the third drive device 406 and the fourth drive device 408 all include a lead screw and a lead screw nut that cooperate with each other, wherein the lead screw is driven by a power source of a motor and a reducer.

[0036] The above-described embodiments are merely preferred embodiments of the present utility model and are not intended to limit the scope of the present utility model. Any modifications and alterations to the technical solution of the present utility model without departing from its design spirit shall fall within the protection scope defined by the claims of the present utility model.

Claims

1. An exposure light source and detection assembly, comprising a base, characterized in that: A power source-driven slide is horizontally slidably mounted on the base. A movable optical component is fixedly mounted on the slide. A bracket is also fixedly mounted on the slide. A multi-directional adjustment mechanism is provided on the bracket. A visual inspection camera located upstream of the movable optical component is provided on the multi-directional adjustment mechanism. The base is also equipped with a fixed seat, and the fixed seat is provided with a fixed optical component, and the fixed optical component is provided with a light source; the fixed optical component extends downstream of the movable optical component and is connected to it.

2. The exposure light source and detection assembly as described in claim 1, characterized in that: The fixed optical component is adjusted and mounted on the fixed base; the movable optical component is adjusted and mounted on the slide.

3. The exposure light source and detection assembly as described in claim 2, characterized in that: Both the fixed base and the sliding base are provided with an adjustment assembly consisting of multiple adjusting screws and adjusting nuts distributed around the perimeter. The fixed optical component and the movable optical component are both mounted on the adjustment assembly.

4. The exposure light source and detection assembly as described in claim 1, characterized in that: The fixed optical component includes a fixed cover, and the movable optical component includes a follower cover. The follower cover has telescopic baffles on both sides. The fixed cover is bent and extended and inserted into the follower cover. Both the fixed cover and the follower cover have mutually cooperating reflectors.

5. The exposure light source and detection assembly as described in claim 4, characterized in that: The follower cover has a notch on one side, and a sealing plate is provided on the fixing seat at the position corresponding to the notch.

6. The exposure light source and detection assembly as described in any one of claims 1 to 5, characterized in that: The multi-directional adjustment mechanism includes a slide table disposed on the bracket, the slide table being driven by a first driving device and sliding along the Y-axis; The slide is equipped with a lifting frame, which moves along the Z-axis and is driven by a second drive device; The visual inspection camera is slidably mounted on the lifting frame. The visual inspection camera is driven by a third driving device and slides along the X-axis.

7. The exposure light source and detection assembly as described in claim 6, characterized in that: A rotary drive mechanism is provided between the lifting frame and the slide.

8. The exposure light source and detection assembly as described in claim 7, characterized in that: The rotary drive mechanism includes a rotary seat rotatably mounted on the slide table, and the lifting frame is vertically slidably mounted on the rotary seat; A slider driven by a fourth driving device is slidably mounted on the slide table, and the slider is provided with a shaft; a swing seat is provided on the rotating seat, and a long groove is provided on the swing seat, and the shaft is located in the long groove.

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