An antenna assembly and MPCVD apparatus

Abstract

The utility model relates to the field of microwave plasma technology, more particularly to an antenna assembly and MPCVD device, the antenna assembly includes antenna body, sealing plate, first pipeline and second pipeline, be provided with the accommodating cavity between antenna body and sealing plate, be provided with the deflector in the accommodating cavity, the deflector divides the accommodating cavity into upper chamber and lower chamber, the second pipeline communicates with upper chamber, the first pipeline communicates with lower chamber, upper chamber communicates with lower chamber, provide a kind of antenna assembly with good heat dissipation performance, the MPCVD device includes the antenna assembly.

Description

Technical Field

[0001] This utility model relates to the field of microwave plasma technology, and more specifically, to an antenna assembly and an MPCVD device. Background Technology

[0002] Microwave plasma chemical vapor deposition (MPCVD) is an advanced method for preparing high-quality diamond films. This method requires a microwave plasma chemical vapor deposition apparatus. In MPCVD, microwaves generated by a microwave generator are introduced into an antenna assembly via a waveguide transmission system, and a mixture of methane and hydrogen gas is introduced. Under the excitation of microwaves, glow discharge is generated in the antenna assembly, which ionizes the molecules of the reactive gas and generates plasma, which is then deposited on the sample to obtain a diamond film.

[0003] Antenna components of existing MPCVD devices (see) Figure 1 Its poor heat dissipation effect seriously affects its performance and restricts its application prospects. Utility Model Content

[0004] The purpose of this invention is to provide an antenna assembly with good heat dissipation performance.

[0005] Another objective of this invention is to provide an MPCVD device that includes the aforementioned antenna assembly.

[0006] The objective of this utility model is achieved through the following technical solution: An antenna assembly includes an antenna body, a cover plate, a first conduit, and a second conduit. A receiving cavity is provided between the antenna body and the cover plate. A flow guide plate is provided inside the receiving cavity, and the flow guide plate divides the receiving cavity into an upper chamber and a lower chamber. The second conduit is connected to the upper chamber, the first conduit is connected to the lower chamber, and the upper chamber is connected to the lower chamber.

[0007] Furthermore, the guide plate is provided with a first protrusion and a second protrusion, which divide the lower chamber into a first chamber and a second chamber. The first pipe is connected to the first chamber. The first protrusion is provided with a first channel, which connects the first chamber and the second chamber. The second protrusion is provided with a second channel, which connects the second chamber and the upper chamber. The first channel and the second channel are perpendicular to each other.

[0008] Furthermore, the first boss is a first annular structure, the second boss is a second annular structure, and the first annular structure and the second annular structure are coaxial.

[0009] Furthermore, the first pipe is provided with a fifth channel, which connects the first pipe to the first chamber, and the fifth channel is perpendicular to the first channel.

[0010] Furthermore, the sealing plate is provided with a third protrusion and a fourth protrusion, which divide the upper chamber into a third chamber and a fourth chamber. The second chamber and the fourth chamber are connected by a second channel. The third protrusion is provided with a third channel, which connects the third chamber to the second pipe. The fourth protrusion is provided with a fourth channel, which connects the fourth chamber to the third chamber. The third channel and the fourth channel are perpendicular to each other.

[0011] Furthermore, the third protrusion is a third annular structure, the fourth protrusion is a fourth annular structure, and the third annular structure and the fourth annular structure are coaxial.

[0012] Furthermore, the second channel and the fourth channel are perpendicular to each other.

[0013] An MPCVD apparatus includes the antenna assembly.

[0014] This utility model has the following advantages: The antenna assembly of this invention has a flow guide plate installed inside its housing cavity. The flow guide plate divides the housing cavity into smaller spaces, increasing the flow rate of the cooling medium and thus accelerating heat dissipation. In addition, the flow guide plate can force the cooling medium to flow only along a predetermined first path within the housing cavity, reducing the probability of local repeated circulation of the cooling medium, the formation of turbulence, or even stagnant water within the housing cavity, thereby improving the heat dissipation effect. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the embodiments will be briefly described below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative effort.

[0016] Figure 1 This is a cross-sectional schematic diagram of an existing antenna assembly; Figure 2 This is a cross-sectional schematic diagram of the antenna assembly of this utility model; Figure 3 for Figure 2 AA section diagram in the image; Figure 4 for Figure 2 BB cross-section diagram in the middle; In the diagram: 1-Antenna body, 2-Sealing plate, 3-First pipe, 4-Second pipe, 5-Baffle plate, 6-First boss, 7-Second boss, 8-First chamber, 9-Second chamber, 10-First channel, 11-Second channel, 12-Third boss, 13-Fourth boss, 14-Third chamber, 15-Fourth chamber, 16-Third channel, 17-Fourth channel, 18-Fifth channel, 19-Gas pipe. Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0018] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0019] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0020] In this invention, unless otherwise expressly specified and limited, "above or below" the first feature may include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on" the first feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the first feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0021] like Figure 1 As shown, in the prior art antenna assembly, after the cooling medium flows into the receiving cavity through the gap between the first pipe 3 and the gas pipe 19, part of it flows out directly from the gap between the first pipe 3 and the second pipe 4, while the other part circulates repeatedly in the receiving cavity, forming turbulence or even stagnant water (the direction indicated by the arrow in the cavity is the flow direction of the cooling medium, the same below), resulting in poor heat dissipation.

[0022] like Figures 2 to 4 As shown, the antenna assembly of this utility model includes an antenna body 1, a sealing plate 2, a first conduit 3, and a second conduit 4. A receiving cavity is provided between the antenna body 1 and the sealing plate 2. A flow guide plate 5 is provided inside the receiving cavity, dividing the receiving cavity into an upper chamber and a lower chamber. One end of the second conduit 4 is connected to the sealing plate 2 and communicates with the upper chamber. One end of the first conduit 3 passes through the second conduit 4 and is connected to the antenna body 1 and communicates with the lower chamber. The upper chamber and the lower chamber are interconnected. The flow guide plate 5 divides the receiving cavity into an interconnected upper chamber and a lower chamber. The cooling medium flows into the lower chamber from the gap between the first pipe 3 and the gas pipe 19, and flows out through the upper chamber from the gap between the first pipe 3 and the second pipe 4 (the flow path of the cooling medium is hereinafter referred to as the first path). The guide plate 5 divides the receiving cavity into smaller spaces, which increases the flow rate of the cooling medium and thus accelerates heat dissipation. In addition, the guide plate 5 can force the cooling medium to flow only along the predetermined first path in the receiving cavity, reducing the probability of local repeated circulation of the cooling medium in the receiving cavity, the formation of turbulence or even stagnant water, thereby improving the heat dissipation effect.

[0023] Furthermore, the guide plate 5 is provided with a first protrusion 6 and a second protrusion 7, which divide the lower chamber into a first chamber 8 and a second chamber 9. One end of the first pipe 3 passes through the second pipe 4 and connects to the antenna body 1, communicating with the first chamber 8. The first protrusion 6 is provided with two first channels 10, which are on the same straight line L1 and far apart from each other. The first chamber 8 and the second chamber 9 are connected by the first channels 10. The second protrusion 7 is provided with two second channels 11, which are on the same straight line L2 and far apart from each other. The second chamber 9 and the upper chamber are connected by the second channels 11. The straight lines L1 and L2 are perpendicular to each other, that is, the first channels 10 and the second channels 11 are perpendicular to each other. The cooling medium flows into the first chamber 8 through the gap between the first pipe 3 and the gas pipe 19, then into the second chamber 9 through the first channel 10, then into the upper chamber through the second channel 11, and finally out through the gap between the first pipe 3 and the second pipe 4 (the path of the cooling medium flow, hereinafter referred to as the second path). The first boss 6 and the second boss 7 divide the lower chamber into smaller spaces, increasing the flow rate of the cooling medium and thus accelerating heat dissipation. At the same time, they force the cooling medium to flow along the predetermined second path in the lower chamber, reducing the probability of local repeated circulation of the cooling medium in the lower chamber, the formation of turbulence, or even stagnant water, thereby further improving the heat dissipation effect. The first channel 10 and the second channel 11 are perpendicular to each other, which makes the flow path of the cooling medium in the lower chamber longer, thereby further improving the heat dissipation effect.

[0024] Furthermore, the first protrusion 6 is a first annular structure, and the second protrusion 7 is a second annular structure. The first annular structure and the second annular structure are coaxial. Setting the first protrusion 6 and the second protrusion 7 as coaxial annular structures enables the first chamber 8 and the second chamber 9 to be evenly distributed along the center of the antenna assembly, thereby facilitating uniform heat dissipation and avoiding excessive local temperature differences.

[0025] Furthermore, the first pipe 3 is provided with a fifth channel 18, which connects the first pipe 3 and the first chamber 8. The fifth channel 18 is perpendicular to the first channel 10. Specifically, the end of the first pipe 3 is provided with two holes, which are on the same straight line L5 and far apart from each other. The first pipe 3 and the first chamber 8 are connected through the holes. The straight line L5 is perpendicular to the straight line L1, that is, the fifth channel 18 is perpendicular to the first channel 10. The cooling medium flows into the first chamber 8 through the holes from the gap between the first pipe 3 and the gas pipe 19, then flows into the second chamber 9 through the first channel 10, then into the upper chamber through the second channel 11, and finally flows out from the gap between the first pipe 3 and the second pipe 4. The fifth channel 18 is perpendicular to the first channel 10, which allows the cooling medium to have a longer flow path in the lower chamber, thereby further improving the heat dissipation effect.

[0026] Furthermore, the sealing plate 2 is provided with a third protrusion 12 and a fourth protrusion 13, which divide the upper chamber into a third chamber 14 and a fourth chamber 15. The second chamber 9 and the fourth chamber 15 are connected by a second channel 11. The third protrusion 12 is provided with two third channels 16, which are on the same straight line L3 and far apart from each other. The third chamber 14 is connected to the second pipe 4 through the third channel 16. The fourth protrusion 13 is provided with two fourth channels 17, which are on the same straight line L4 and far apart from each other. The fourth chamber 15 is connected to the third chamber 14 through the fourth channel 17. The straight line L3 and the straight line L4 are perpendicular to each other, that is, the third channel 16 and the fourth channel 17 are perpendicular to each other. 7. The cooling medium flows from the second channel 11 into the fourth chamber 15, then through the fourth channel 17 into the third chamber 14, and finally through the third channel 16, exiting from the gap between the first pipe 3 and the second pipe 4 (the path of the cooling medium flow, hereinafter referred to as the third path). The third boss 12 and the fourth boss 13 divide the upper chamber into smaller spaces, increasing the flow rate of the cooling medium, thereby accelerating heat dissipation. At the same time, they force the cooling medium to flow only along the predetermined third path in the upper chamber, reducing the probability of local repeated circulation of the cooling medium in the upper chamber, forming turbulence or even stagnant water, thereby further improving the heat dissipation effect. The third channel 16 and the fourth channel 17 are perpendicular to each other, which makes the flow path of the cooling medium in the upper chamber longer, thereby further improving the heat dissipation effect.

[0027] Furthermore, the third protrusion 12 is a third annular structure, and the fourth protrusion 13 is a fourth annular structure. The third annular structure and the fourth annular structure are coaxial. Setting the third protrusion 12 and the fourth protrusion 13 as coaxial annular structures enables the third chamber 14 and the fourth chamber 15 to be evenly distributed along the center of the antenna assembly, thereby facilitating uniform heat dissipation and avoiding excessive local temperature differences.

[0028] Furthermore, the second channel 11 and the fourth channel 17 are perpendicular to each other, which allows the cooling medium to have a longer flow path between the lower chamber and the upper chamber, thereby further improving the heat dissipation effect.

[0029] An MPCVD apparatus includes the antenna assembly.

[0030] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. An antenna assembly comprising an antenna body (1), a sealing plate (2), a first conduit (3), and a second conduit (4), wherein a receiving cavity is provided between the antenna body (1) and the sealing plate (2), characterized in that: The cavity is provided with a guide plate (5), which divides the cavity into an upper chamber and a lower chamber. The second pipe (4) is connected to the upper chamber, the first pipe (3) is connected to the lower chamber, and the upper chamber is connected to the lower chamber.

2. The antenna assembly according to claim 1, characterized in that: The guide plate (5) is provided with a first protrusion (6) and a second protrusion (7). The first protrusion (6) and the second protrusion (7) divide the lower chamber into a first chamber (8) and a second chamber (9). The first pipe (3) is connected to the first chamber (8). The first protrusion (6) is provided with a first channel (10). The first chamber (8) and the second chamber (9) are connected through the first channel (10). The second protrusion (7) is provided with a second channel (11). The second chamber (9) and the upper chamber are connected through the second channel (11). The first channel (10) and the second channel (11) are perpendicular to each other.

3. The antenna assembly according to claim 2, characterized in that: The first boss (6) is a first ring structure, and the second boss (7) is a second ring structure. The first ring structure and the second ring structure are coaxial.

4. The antenna assembly according to any one of claims 1 to 3, characterized in that: The first pipe (3) is provided with a fifth channel (18), and the first pipe (3) and the first chamber (8) are connected through the fifth channel (18). The fifth channel (18) is perpendicular to the first channel (10).

5. The antenna assembly according to claim 4, characterized in that: The sealing plate (2) is provided with a third protrusion (12) and a fourth protrusion (13). The third protrusion (12) and the fourth protrusion (13) divide the upper chamber into a third chamber (14) and a fourth chamber (15). The second chamber (9) and the fourth chamber (15) are connected by a second channel (11). The third protrusion (12) is provided with a third channel (16). The third chamber (14) is connected to the second pipe (4) through the third channel (16). The fourth protrusion (13) is provided with a fourth channel (17). The fourth chamber (15) and the third chamber (14) are connected by the fourth channel (17). The third channel (16) and the fourth channel (17) are perpendicular to each other.

6. The antenna assembly according to claim 5, characterized in that: The third protrusion (12) is a third ring structure, and the fourth protrusion (13) is a fourth ring structure. The third ring structure and the fourth ring structure are coaxial.

7. The antenna assembly according to claim 6, characterized in that: The second channel (11) and the fourth channel (17) are perpendicular to each other.

8. An MPCVD apparatus, characterized in that: Includes the antenna assembly as described in any one of claims 1 to 7.

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