A pole set component control system for an ion implanter and an ion implanter

Abstract

The utility model discloses a kind of pole group component control system for ion implanter and ion implanter, control system includes industrial computer and single-path magnetic pole control system;Industrial computer is connected through fiber optic double loop series connection between each single-path magnetic pole control system;Each single-path magnetic pole control system includes ADIO controller, motor drive board, motor assembly, magnetic pole and potentiometer;ADIO controller is used to receive the position analog signal instruction of industrial computer, conversion voltage signal output to motor drive board;Motor drive board is used to control the positive rotation or reverse rotation of motor assembly according to voltage signal;Potentiometer is connected with magnetic pole and motor drive board respectively, for real-time detection the position of magnetic pole, and position analog quantity is fed back to motor drive board and ADIO controller.The utility model has the advantages of reducing cost, reducing volume, control response speed is fast etc..

Description

Technical Field

[0001] This utility model mainly relates to the field of ion implantation technology, specifically to a control system for a magnetic pole assembly component of an ion implanter and an ion implanter. Background Technology

[0002] The magnetic pole assembly, a crucial component for adjusting beam uniformity and dosage in ion implanters, is driven by a motor. The beam pattern passing through it is controlled by changing the distance between the magnetic poles. Since the magnetic pole assembly is driven by a motor and the magnetic poles are heavy with limited installation space, existing magnetic pole assembly control systems mostly use traditional hardware controllers and driver modules to drive servo encoder motors to move the magnetic pole assembly. An ion implanter has several pairs of magnetic pole assemblies, and each pair requires two sets of controllers and driver modules. While this control method can efficiently and accurately control the forward or reverse rotation of the motor to increase or decrease the distance between a pair of magnetic poles, the system cost is high, sacrificing limited space.

[0003] Some models are equipped with multiple sets of unipolar power devices and drive circuits to control the motor to run in a single direction. They also use complex software algorithms as a compensating magnetic pole component control method. Although this method saves system costs to a certain extent, the control circuit board system is bulky and there are problems such as system response delay when switching the motor rotation direction.

[0004] The existing ion implanters have different sizes and weights of magnetic pole components, different systems require different motor component parameters, resulting in poor compatibility of solutions and different control strategies for different models. Furthermore, the magnetic pole components are often in the high potential region, and traditional cables are subject to electromagnetic interference when sending data to the host computer (low potential region), resulting in data packet loss and making it impossible to accurately control the spacing between magnetic pole groups.

[0005] The utility model patent application number CN202511221354.3, entitled "A motor control system and motor control method for an ion implanter," proposes a control system that includes a processor, a resource configuration module, a motor driver, and a motor. Although it improves the stability and efficiency of the motor to a certain extent, the method of sending data from the processor to the motor driver using the DMA method for the magnetic pole assembly in the high potential region is susceptible to electromagnetic interference and data packet loss, making it impossible to accurately control the spacing between the magnetic pole groups.

[0006] The utility model application number CN202220490351.5, entitled "An Adjustment Device for the Motor of an Ion Implanter Radio Frequency Accelerator Resonator," proposes a system that controls the motor by setting up an opto-isolation interface circuit, a stepper motor control signal circuit, a stepper motor drive circuit (using an L298N chip), a freewheeling diode circuit, a high-precision regulated power supply, and a stepper motor operation status display circuit. However, the circuit system is too redundant and inflexible, and a window period of tens of seconds will occur during data storage. It is only applicable to a single model and is not conducive to promotion to other models. Utility Model Content

[0007] To address the technical problems existing in the prior art, this utility model provides a control system for magnetic pole assembly components of an ion implanter and an ion implanter that reduces cost and size.

[0008] To solve the above-mentioned technical problems, the technical solution proposed by this utility model is as follows: A control system for a magnetic pole assembly component of an ion implanter includes an industrial computer and at least one single-channel magnetic pole control system; the industrial computer and each single-channel magnetic pole control system are connected in series via a dual-loop optical fiber connection. Each of the single-channel magnetic pole control systems includes an ADIO controller, a motor drive board, a motor assembly, magnetic poles, and a potentiometer; The ADIO controller is connected to the input terminals of the industrial computer and the motor drive board respectively, and is used to receive the position analog signal command from the industrial computer, convert it into a voltage signal and output it to the motor drive board; The potentiometer is connected to the magnetic pole and the motor drive board respectively, and is used to detect the position of the magnetic pole in real time and feed back the position analog quantity to the motor drive board and the ADIO controller. The output end of the motor drive board is connected to the motor assembly and is used to control the forward or reverse rotation of the motor assembly to drive the magnetic poles to rotate.

[0009] As a further improvement to the above technical solution: The motor drive board includes a control chip, a drive chip, a comparator circuit, and a power supply circuit. The input terminal of the control chip is connected to the ADIO controller, and the output terminal is connected to the motor assembly via the driver chip. The input terminal of the comparison circuit is connected to the potentiometer, and the output terminal is connected to the control chip. The power supply circuit is connected to the control chip, the driver chip, and the comparator circuit respectively, and is used to provide the required power.

[0010] An inductor is connected in series between the driver chip and the motor assembly to suppress heat generation during motor operation.

[0011] The control chip is a UC1637, UC2637, or UC3637 that can generate pulse width modulation (PWM) waveforms.

[0012] The driving chip is an H-type full-bridge driver chip L6201, L6202, or L6203 using Bipolar, CMOS, or DMOD technologies.

[0013] The motor assembly includes a reducer and a linkage mechanism for maintaining the current position of the magnetic poles when power is cut off.

[0014] The number of single-path magnetic pole control systems is 12, 24, or 36.

[0015] This utility model also discloses an ion implanter, including the magnetic pole assembly component control system for the ion implanter as described above.

[0016] Compared with the prior art, the advantages of this utility model are: This invention can replace the traditional driver controller mode, improve efficiency and reduce component costs in many applications, and uses fiber optic communication between modules to avoid data loss in high potential areas; the single-channel magnetic pole control system uses fiber optic communication to transmit data to the host computer, which can transmit across potentials and effectively protect the validity of the data.

[0017] This invention's motor drive board converts the required position analog signal into a voltage signal. A comparison amplification circuit compares the voltage signal fed back from the potentiometer, and the comparison result is transmitted to the control chip to generate a pulse width modulation (PWM) waveform, which drives a full-bridge driver to ultimately control the motor's forward and reverse rotation. This ion implanter eliminates the traditional controller-driven encoder motor, saving system costs and overcoming the current bulky control circuit board system's response delay problem when switching motor rotation direction.

[0018] Existing ion implanters vary in the size and weight of their magnetic pole components, require different motor component parameters for different systems, have poor compatibility, and employ different control strategies for different models. This invention can adjust the magnetic pole components and motor parameters according to different models, and by adjusting the control chip to match the PWM waveform frequency, changing the drive current of the drive chip, and adding an inductor, it can flexibly adapt to various models.

[0019] This invention achieves stable and interference-free data transmission in the high and low potential ranges of the ion implanter by employing fiber optic dual-loop serial communication and a modular single-channel magnetic pole control system, effectively overcoming the data packet loss problem caused by electromagnetic interference in traditional cable transmission. The system integrates an ADIO controller, comparator circuit, configurable PWM control chip, and full-bridge driver chip to achieve precise and rapid adjustment of the magnetic pole spacing, while significantly reducing system cost and size. It also solves problems such as response delay, circuit redundancy, and poor compatibility found in traditional solutions. Furthermore, the system can flexibly adjust the control strategy and hardware configuration according to the motor parameters of different ion implanter models, possessing good versatility and scalability, and is suitable for the magnetic pole group control needs of various ion implanter models. Attached Figure Description

[0020] Figure 1 This is a topological diagram of the magnetic pole assembly component control system for the ion implanter of this utility model in an embodiment.

[0021] Figure 2 This is a topology diagram of the single-path magnetic pole control system of this utility model in an embodiment.

[0022] Legend: 1. Industrial computer; 2. Single-channel magnetic pole control system; 21. ADIO controller; 22. Motor drive board; 221. Control chip; 222. Driver chip; 223. Inductor; 224. Comparator circuit; 225. Power supply circuit; 23. Potentiometer; 24. Motor assembly; 25. Magnetic pole. Detailed Implementation

[0023] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0024] like Figure 1 As shown, the magnetic pole assembly component control system for an ion implanter provided in this embodiment includes an industrial control computer 1 and at least one single-channel magnetic pole control system 2; wherein the number of single-channel magnetic pole control systems 2 (hereinafter referred to as subsystems) can be changed according to the actual process requirements of the ion implanter; the industrial control computer 1 and each subsystem are connected in series via a double-loop optical fiber, such as... Figure 1 As shown. The entire system uses fiber optic communication, which can cross various voltage levels across the entire machine, minimizing data loss. like Figure 2 As shown, each single-channel magnetic pole control system 2 includes an ADIO controller 21, a motor drive board 22, a motor assembly 24, a magnetic pole 25, and a potentiometer 23. ADIO controller 21 is connected to the input terminals of industrial computer 1 and motor drive board 22 respectively, and is used to receive position analog signal commands from industrial computer 1, convert them into voltage signals and output them to motor drive board 22; Potentiometer 23 is connected to magnetic pole 25 and motor drive board 22 respectively, and is used to detect the position of magnetic pole 25 in real time and feed back the position analog quantity to motor drive board 22 and ADIO controller 21. The output end of the motor drive board 22 is connected to the motor assembly 24 and is used to control the forward or reverse rotation of the motor assembly 24 to drive the magnetic pole 25 to rotate. Specifically, when the position of the magnetic pole 25 detected by the potentiometer 23 reaches the preset position, the motor assembly 24 is controlled to stop running.

[0025] Specifically, the motor drive board 22 includes a control chip 221, a drive chip 222, a comparator circuit 224, and a power supply circuit 225; The input terminal of the control chip 221 is connected to the ADIO controller 21, and the output terminal is connected to the motor assembly 24 via the driver chip 222; The input terminal of the comparator circuit 224 is connected to the potentiometer 23, and the output terminal is connected to the control chip 221; The power supply circuit 225 is connected to the control chip 221, the driver chip 222 and the comparator circuit 224 respectively, and is used to provide the required power.

[0026] During operation, all single-channel magnetic pole control systems 2 (such as 12, 24 or 36, etc.) are connected in series through a fiber optic dual loop. The industrial computer 1 sends position analog signal commands to the ADIO controllers 21 of all subsystems. The single-channel ADIO controller 21 sends the received voltage signal to the motor drive board 22. The motor drive board 22 controls the motor assembly 24 to rotate forward and backward, thereby driving the magnetic poles 25 to move closer to the target position. During this process, potentiometer 23 monitors the position of magnetic pole 25 in real time and feeds back the analog position value to ADIO controller 21 in the form of voltage; at the same time, the analog position value of potentiometer 23 is compared with the set position of ADIO controller 21 through a comparison amplifier circuit; if the target position is reached, control chip 221 stops outputting, and at this time the reducer and linkage mechanism in motor assembly 24 maintain the current position of magnetic pole 25.

[0027] The control chip 221 in the motor drive board 22 can be selected from UC1637, UC2637 or UC3637, which can generate pulse width modulation (PWM) waveforms, depending on the actual load. The driver chip 222 adopts the H full-bridge driver chip L6201, L6202 or L6203 with bipolar, CMOS and DMOD technologies. The inductor 223 can be adjusted according to the motor parameters in the motor assembly 24, which can solve the problem of motor heating caused by the PWM signal of the control chip 221.

[0028] This invention can replace the traditional driver controller mode, improve efficiency and reduce component costs in many applications, and uses fiber optic communication between modules to avoid data loss in high potential areas; the single-channel magnetic pole control system 2 uses fiber optic communication to transmit data to the host computer, which can transmit across potentials and effectively protect the validity of the data.

[0029] The motor drive board 22 of this invention converts the required position analog signal into a voltage signal. It then compares the voltage signal fed back from the potentiometer 23 with the signal through a comparison amplification circuit. The comparison result is transmitted to the control chip 221 to generate a pulse width modulation (PWM) waveform, which drives the full-bridge driver to ultimately control the forward and reverse rotation of the motor. This ion implanter eliminates the need for a traditional controller-driven motor with an encoder, saving system costs and overcoming the current bulky control circuit board system's response delay problem when switching motor rotation direction.

[0030] Existing ion implanters have varying sizes and weights of the magnetic pole 25 components across different models, requiring different parameters for the motor assembly 24 in different systems, resulting in poor compatibility and different control strategies for different models. This invention can adjust the magnetic pole assembly and motor parameters according to different models, and by adjusting the control chip 221 to match the PWM waveform frequency, changing the drive current of the drive chip 222, and adding an inductor 223, it can flexibly adapt to various models.

[0031] This utility model embodiment also provides an ion implanter, including the magnetic pole assembly component control system for an ion implanter as described above, which also has the advantages described in the control system above.

[0032] This invention achieves stable and interference-free data transmission in the high and low potential ranges of the ion implanter by employing fiber optic dual-loop serial communication and a modular single-channel magnetic pole control system 2, effectively overcoming the data packet loss problem caused by electromagnetic interference in traditional cable transmission. The system integrates an ADIO controller 21, a comparator circuit 224, a configurable PWM control chip 221, and a full-bridge driver chip 222, enabling precise and rapid adjustment of the magnetic pole spacing 25. This significantly reduces system cost and size, and solves problems such as response delay, circuit redundancy, and poor compatibility found in traditional solutions. Furthermore, the system can flexibly adjust the control strategy and hardware configuration according to the motor parameters of different ion implanter models, exhibiting good versatility and scalability, and is suitable for the magnetic pole group control needs of various ion implanter models.

[0033] The above are merely preferred embodiments of this utility model. The protection scope of this utility model is not limited to the above embodiments. All technical solutions falling within the scope of this utility model's concept are within its protection scope. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principle of this utility model should be considered within its protection scope.

Claims

1. A control system for a magnetic pole assembly component of an ion implanter, characterized in that, It includes an industrial control computer (1) and at least one single-channel magnetic pole control system (2); the industrial control computer (1) and each single-channel magnetic pole control system (2) are connected in series via a double-loop optical fiber. Each of the single-channel magnetic pole control systems (2) includes an ADIO controller (21), a motor drive board (22), a motor assembly (24), a magnetic pole (25), and a potentiometer (23); The ADIO controller (21) is connected to the input terminals of the industrial computer (1) and the motor drive board (22) respectively, and is used to receive the position analog signal command from the industrial computer (1), convert it into a voltage signal and output it to the motor drive board (22); The potentiometer (23) is connected to the magnetic pole (25) and the motor drive board (22) respectively, and is used to detect the position of the magnetic pole (25) in real time and feed back the position analog quantity to the motor drive board (22) and the ADIO controller (21); The output end of the motor drive board (22) is connected to the motor assembly (24) and is used to control the forward or reverse rotation of the motor assembly (24) to drive the magnetic pole (25) to rotate.

2. The control system for the magnetic pole assembly of an ion implanter according to claim 1, characterized in that, The motor drive board (22) includes a control chip (221), a drive chip (222), a comparator circuit (224), and a power supply circuit (225); The input terminal of the control chip (221) is connected to the ADIO controller (21), and the output terminal is connected to the motor assembly (24) via the driver chip (222). The input terminal of the comparator circuit (224) is connected to the potentiometer (23), and the output terminal is connected to the control chip (221); The power supply circuit (225) is connected to the control chip (221), the driver chip (222) and the comparator circuit (224) respectively, and is used to provide the required power.

3. The control system for the magnetic pole assembly components of an ion implanter according to claim 2, characterized in that, An inductor (223) is connected in series between the drive chip (222) and the motor assembly (24) to suppress the heat generated during motor operation.

4. The magnetic pole assembly control system for an ion implanter according to claim 2 or 3, characterized in that, The control chip (221) is a UC1637, UC2637 or UC3637 that can generate pulse width modulation (PWM) waveforms.

5. The magnetic pole assembly control system for an ion implanter according to claim 2 or 3, characterized in that, The driver chip (222) adopts the H full-bridge driver chip L6201, L6202 or L6203 with Bipolar, CMOS or DMOD technology.

6. The magnetic pole assembly control system for an ion implanter according to claim 1, 2, or 3, characterized in that, The motor assembly (24) includes a reducer and a linkage mechanism for maintaining the current position of the magnetic poles (25) when power is cut off.

7. The magnetic pole assembly control system for an ion implanter according to claim 1, 2, or 3, characterized in that, The number of the single-path magnetic pole control system (2) is 12, 24 or 36.

8. An ion implanter, characterized in that, Includes the magnetic pole assembly component control system for an ion implanter as described in any one of claims 1-7.

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