A cleaning device for multi-specification semiconductor components

Abstract

The utility model relates to the field of semiconductor parts cleaning discloses a kind of cleaning device of multi-specification semiconductor parts, including two side plates, two lower clamping strips are fixedly connected between two side plates, the middle part of side plate is equipped with V-shaped guide rail, and the sliding connection of front and rear two V-shaped guide rails has upper clamping strip, the front and rear ends of upper clamping strip are fixedly connected with screw rod, the screw rod is passed through V-shaped guide rail, the outer wall of screw rod is connected with nut for fixing the position of upper clamping strip, the inside of nut is provided with anti-loosening assembly.In the utility model, the distance between upper clamping strip and lower clamping strip is adjusted by sliding upper clamping strip, and the position of screw rod is fixed by rotating nut on screw rod and abutting nut to side plate, and then the position of upper clamping strip is fixed, so that the clamping spacing of flower basket is adjustable, so that more specifications products are suitable, parts maintenance is easy to replace, and compatible with automation equipment.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor component cleaning, and in particular to a cleaning device for multi-specification semiconductor components. Background Technology

[0002] Advanced ceramic components for semiconductor equipment have high cleanliness requirements and must undergo wet cleaning in harsh environments with surfactants, concentrated alkalis, and concentrated acids before they can be used. However, due to the different types of semiconductor equipment, such as diffusion, oxidation, CVD, and annealing equipment, the materials and specifications of advanced ceramic components vary.

[0003] However, current cleaning baskets are generally designed for parts of a specific size. The fixed-strip cleaning baskets can only be used for specific parts within the range of the strip depth. New products of different sizes require the design of baskets with corresponding spacing. For small quantities and multiple types of products, the cleaning cost remains high and time is wasted. In response to this technical problem, this application proposes a cleaning device for multi-specification semiconductor components. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a cleaning device for multi-specification semiconductor components. The device aims to make the clamping distance of the basket adjustable, thereby making it suitable for more product specifications, facilitating parts replacement and maintenance, and ensuring compatibility with automated equipment.

[0005] To achieve the above objectives, the present invention provides the following technical solution: A cleaning device for multi-specification semiconductor components includes two side plates, with two lower clamping strips fixedly connected between the two side plates. A V-shaped guide rail is provided in the middle of the side plates, and an upper clamping strip is slidably connected between the front and rear V-shaped guide rails. Screws are fixedly connected to both ends of the upper clamping strip, and the screws pass through the V-shaped guide rails. Nuts for fixing the position of the upper clamping strips are threaded onto the outer wall of the screws. Anti-loosening components are provided inside the nuts to prevent the nuts from loosening.

[0006] Furthermore, the anti-loosening component includes a rod slidably connected inside the nut, and two limiting plates are fixedly connected to the outer wall of the rod. Both the rod and the limiting plates are inserted into the inside of the screw.

[0007] Furthermore, the nut has a limiting groove inside that matches the limiting plate, and a threaded rod is rotatably connected inside the nut. The outer wall of the threaded rod is threadedly connected to the inside of the insert rod.

[0008] Furthermore, a rotating rod is rotatably connected to one side of the nut via a damping shaft, and one end of the threaded rod is fixedly connected inside the rotating rod.

[0009] Furthermore, hooks are fixedly connected to both the left and right sides of the top side of the side plate, and a counterweight is fixedly connected between the two side plates.

[0010] Furthermore, slide rods are fixedly connected to both the front and rear sides of the upper clip, and the slide rods are slidably connected inside the side plate.

[0011] This utility model has the following beneficial effects: In this invention, the distance between the upper and lower clamping strips is adjusted by sliding the upper clamping strip, and the position of the screw is fixed by rotating the nut onto the screw rod and making the nut abut against the side plate, thereby fixing the position of the upper clamping strip. This makes the clamping distance of the flower basket adjustable, thus making it suitable for more product specifications, easy to replace parts for maintenance, and compatible with automated equipment. Attached Figure Description

[0012] Figure 1 This is a perspective view of a cleaning device for multi-specification semiconductor components proposed in this utility model; Figure 2 This is a bottom view of a cleaning device for multi-specification semiconductor components proposed in this utility model; Figure 3 This is a schematic diagram of the upper clamping strip structure of a cleaning device for multi-specification semiconductor components proposed in this utility model; Figure 4 This is a schematic diagram of the nut structure of a cleaning device for multi-specification semiconductor components proposed in this utility model; Figure 5 This is a schematic diagram of the internal structure of the nut in a cleaning device for multi-specification semiconductor components proposed in this utility model.

[0013] Legend: 1. Side plate; 2. Hook; 3. Counterweight; 4. Upper locking strip; 5. Lower locking strip; 6. V-shaped guide rail; 7. Nut; 8. Slide rod; 9. Screw; 10. Rotating rod; 11. Insert rod; 12. Limiting plate; 13. Threaded rod. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0015] Reference Figures 1-3This utility model provides an embodiment of a cleaning device for multi-specification semiconductor components, comprising two side plates 1, with two lower clamping strips 5 fixedly connected between the two side plates 1. A V-shaped guide rail 6 is provided in the middle of the side plate 1, and an upper clamping strip 4 is slidably connected between the front and rear V-shaped guide rails 6. The above structure forms a basket for cleaning semiconductor components. Screws 9 are fixedly connected to both ends of the upper clamping strip 4, and the screws 9 pass through the V-shaped guide rails 6. Nuts 7 for fixing the position of the upper clamping strip 4 are threaded onto the outer wall of the screws 9. The distance between the upper clamping strip 4 and the lower clamping strip 5 is adjusted by sliding the upper clamping strip 4, allowing the basket to clamp and fix semiconductor components of different sizes. After adjustment, the nut 7 is rotated onto the screw 9, and the nut 7 abuts against the side plate 1 to fix the position of the screw 9, thereby fixing the position of the upper clamping strip 4. This design makes the basket suitable for cleaning ceramic parts with a diameter of 100-430mm and a thickness of 0-25mm, including materials such as silicon, quartz, alumina, yttrium oxide, silicon carbide, and aluminum nitride. Both the upper clamping strip 4 and the lower clamping strip 5 of this basket have a V-shaped inclined surface structure, increasing the contact area between the product and the cleaning fluid. The lower clamping strip 5 has a wheel structure, which facilitates non-contact rotation of the product in the cleaning fluid, ensuring the quality and effectiveness of the cleaning operation. Hooks 2 are fixedly connected to the left and right sides of the top side of the side plate 1. A counterweight 3 is fixedly connected between the two side plates 1. Sliding rods 8 are fixedly connected to the front and rear sides of the upper clamping strip 4. The sliding rods 8 are slidably connected inside the side plate 1. The upper part of both sides of the flower basket has connecting counterweights 3 to ensure that the flower basket will not tip over in water when light parts are placed or when it is empty, preventing accidental collisions. The upper part of the flower basket has horizontal hooks 2 on both sides, which are compatible with automated hook-type cleaning equipment. The material of the flower basket as a whole and some parts is not limited to Teflon, PP, PVC and other acid and alkali resistant special plastics. It can be reasonably matched according to the work section to achieve the effect of meeting the cleaning function and controlling the cost. The sliding rods 8 are fixedly connected to the front and rear sides of the upper clamping strip 4. The sliding rods 8 are slidably connected inside the side plate 1. The sliding rods 8 make the upper clamping strip 4 slide only on the V-shaped guide rail 6 and cannot rotate.

[0016] Reference Figures 3-5The nut 7 has a sliding connection to a rod 11 inside. Two limiting plates 12 are fixedly connected to the outer wall of the rod 11. Both the rod 11 and the limiting plates 12 are inserted into the screw 9. The nut 7 has a limiting groove matching the limiting plates 12 inside. A threaded rod 13 is rotatably connected inside the nut 7. The outer wall of the threaded rod 13 is threadedly connected to the inside of the rod 11. A rotating rod 10 is rotatably connected to one side of the nut 7 via a damping shaft. One end of the threaded rod 13 is fixedly connected to the inside of the rotating rod 10. Rotating the rotating rod 10 rotates the nut 7 onto the screw 9, ultimately causing the nut 7 to abut against the side wall of the side plate 1. After the nut 7 abuts against the side wall of the side plate 1, continuing to rotate the rotating rod 10 causes the threaded rod 13 to drive the rod 11, along with the limiting plates 12, to slide inside the nut 7, allowing the rod 11 and the limiting plates 12 to insert into the screw 9. However, even if the rod 11... After the 11 and the limiting plate 12 are inserted into the screw 9, a portion of them remains inside the nut 7. This relationship restricts the nut 7 to the screw 9, preventing it from rotating and loosening, thus improving the stability of the upper retaining strip 4. The rotating rod 10 allows workers to rotate the nut 7 without tools such as wrenches, improving operational convenience. During disassembly, rotating the rotating rod 10 in the reverse direction rotates the threaded rod 13, causing it to drive the insert rod 11 and the limiting plate 12 to disengage from the screw 9. Once the insert rod 11 and the limiting plate 12 are completely disengaged from the screw 9, rotating the rotating rod 10 in the reverse direction again causes the threaded rod 13 to stop sliding due to the limiting plate 12 and the limiting groove. Instead, it drives the limiting plate 12 to rotate, causing the limiting plate 12 to rotate through the limiting groove, thereby completing the disassembly of the nut 7.

[0017] Working principle: First, the part to be tested is placed between the two lower clamping strips 5. Then, the upper clamping strip 4 is slid to slide towards the part, and finally clamps the part between the upper clamping strip 4 and the lower clamping strip 5. Then, the nut 7 is placed on the upper screw 9. Then, the rotating rod 10 is rotated to rotate the nut 7 onto the screw 9, and finally, the nut 7 abuts against the side wall of the side plate 1. After the nut 7 abuts against the side wall of the side plate 1, the rotating rod 10 is rotated again, so that the threaded rod 13 drives the insertion rod 11 to slide with the limiting plate 12 inside the nut 7, so that the insertion rod 11 and the limiting plate 12 are inserted into the screw 9. However, even after the insertion rod 11 and the limiting plate 12 are inserted into the screw 9, a part of them is still located inside the nut 7. This relationship restricts the nut 7 to the screw 9, preventing the nut 7 from rotating and loosening, and improving the stability of the upper clamping strip 4.

[0018] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A cleaning device for multi-specification semiconductor components, characterized in that: It includes two side plates (1), and two lower clamping strips (5) are fixedly connected between the two side plates (1). A V-shaped guide rail (6) is provided in the middle of the side plate (1). An upper clamping strip (4) is slidably connected between the front and rear two V-shaped guide rails (6). A screw (9) is fixedly connected to both the front and rear ends of the upper clamping strip (4). The screw (9) passes through the V-shaped guide rail (6). A nut (7) for fixing the position of the upper clamping strip (4) is threaded on the outer wall of the screw (9). An anti-loosening component is provided inside the nut (7) to prevent the nut (7) from loosening.

2. The cleaning apparatus for multi-specification semiconductor components according to claim 1, characterized in that: The anti-loosening component includes a rod (11) that is slidably connected inside the nut (7). Two limiting plates (12) are fixedly connected to the outer wall of the rod (11). The rod (11) and the limiting plates (12) are both inserted into the screw (9).

3. The cleaning apparatus for multi-specification semiconductor components according to claim 2, characterized in that: The nut (7) has a limiting groove inside that matches the limiting plate (12), and a threaded rod (13) is rotatably connected inside the nut (7). The outer wall of the threaded rod (13) is threadedly connected to the inside of the insert rod (11).

4. The cleaning apparatus for multi-specification semiconductor components according to claim 3, characterized in that: One side of the nut (7) is rotatably connected to a rotating rod (10) via a damping shaft, and one end of the threaded rod (13) is fixedly connected inside the rotating rod (10).

5. The cleaning apparatus for multi-specification semiconductor components according to claim 1, characterized in that: Hooks (2) are fixedly connected to the left and right sides of the top side of the side plate (1), and a counterweight (3) is fixedly connected between the two side plates (1).

6. The cleaning apparatus for multi-specification semiconductor components according to claim 1, characterized in that: The upper clip (4) is fixedly connected to slide rods (8) on both the front and rear sides, and the slide rods (8) are slidably connected inside the side plate (1).

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