The radially inward portion of the carrier ring
CN309037031SActive Publication Date: 2024-12-27LAM RES CORP
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Patent Information
- Application Number
- CN202230757795.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Priority Date
- 2022-05-13
- Filing Date
- 2022-11-14
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2037-11-14
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Figure 000009_ABST
Abstract
1. Name of this design product: the radially inward portion of the load-bearing ring. 2. Purpose of the product of this design: The carrying ring is used in semiconductor processing equipment, specifically for supporting a semiconductor substrate (or wafer) during substrate processing. The radially inward portion of the carry ring serves the same purpose as the carry ring as a whole, supporting the semiconductor substrate (or wafer) during substrate processing. 3. The design key point of this appearance design product lies in the shape of the product. 4. The picture or photo that best illustrates the design points: Stereoscopic diagram 1. 5. Other situations that need explanation: The part requiring protection is the solid line part, and the dotted line is the dividing line between the part requiring protection and the part not requiring protection.
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