Heaters for heating semiconductor wafers and susceptors
CN309051750SActive Publication Date: 2025-01-03NUFLARE TECH INC
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Patent Information
- Application Number
- CN202430310807.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Priority Date
- 2023-12-01
- Filing Date
- 2024-05-24
- Publication Date
- 2025-01-03
- Estimated Expiration
- 2039-05-24
Smart Images
Figure 000008_ABST
Abstract
1. The name of the product of this design: Heater for heating semiconductor wafers and bases. 2. Purpose of the product of this design: This article is a heater used to heat a wafer and a susceptor holding the wafer in a semiconductor manufacturing device, etc. 3. The design key point of this appearance design product lies in the shape. 4. The picture or photo that best illustrates the design points: Stereoscopic diagram 1.
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