Composite sealing ring

Abstract

1. The name of this design product: composite sealing ring. 2. Purpose of the product with this design: The product with this design is suitable for composite sealing rings of semiconductor manufacturing equipment such as CVD and dry etching equipment. 3. The design key point of this appearance design product lies in the shape. 4. The picture or photo that best illustrates the design points: three-dimensional picture. 5. The rear view is the same as the front view, so the rear view is omitted; the top view is the same as the top view, so the top view is omitted. 6. Other situations that need explanation Other explanations: As shown in the enlarged view of part B, the product of this design is composed of a first component located on the outer circumference and a second component located on the inner circumference.

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