Wafer holding part of wafer holding tool

CN309322618SActive Publication Date: 2025-06-06SCREEN HOLDINGS CO LTD
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Patent Information

Application Number
CN202430594245.6
Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Priority Date
2024-06-27
Filing Date
2024-09-18
Publication Date
2025-06-06
Estimated Expiration
2039-09-18

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Abstract

1. The name of the product of this design: Wafer fixing part of a wafer fixing tool. 2. Purpose of the product of this design: This product as a whole is used to fix or transport wafers in a wafer cleaning device, and the part to be protected is used to fix wafers. 3. The key design point of this design product lies in the shape of the part shown by the solid line. 4. The picture or photo that best illustrates the design points: three-dimensional picture. 5. The left view is symmetrical to the right view, so the left view is omitted. 6. Other matters requiring explanation: The solid line portion is the portion requiring protection, and the dotted line is the dividing line used to distinguish the portion requiring protection from other portions.
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Cited By

  • Substrate holder

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