The flap of the exhaust port opening and closing unit

Abstract

1. The name of this design product: flap portion of the exhaust port opening and closing unit. 2. Purpose of the product of this design: This product as a whole is an exhaust port opening and closing unit that opens and closes the exhaust port of a wafer cleaning device. The claimed portion is used to directly block the exhaust port. 3. The key design point of this design product lies in the shape of the part shown by the solid line. 4. The picture or photo that best illustrates the design points: Stereoscopic diagram 1. 5. The portion indicated by the solid line is the portion for which protection is required.

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