Flow control loop
CN309499969SActive Publication Date: 2025-09-16ASM IP HLDG BV
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Patent Information
- Application Number
- CN202530030445.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Priority Date
- 2024-07-22
- Filing Date
- 2025-01-17
- Publication Date
- 2025-09-16
- Estimated Expiration
- 2040-01-17
Smart Images
Figure 000001_ABST
Abstract
1. The name of this design product: flow control ring. 2. Purpose of this design product: This design product is a flow control ring used to improve the uniformity of gas flow in the reaction chamber. 3. The key point of the design of this product lies in its shape. 4. The picture or photo that best illustrates the design points: Stereoscopic drawing 1.
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