base

CN309554346SActive Publication Date: 2025-10-21NUFLARE TECH INC
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Patent Information

Application Number
CN202430508140.4
Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Priority Date
2024-02-13
Filing Date
2024-08-12
Publication Date
2025-10-21
Estimated Expiration
2039-08-12

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Abstract

1. Name of the designed product: base. 2. Use of the designed product: to constitute a part of a base unit used for holding a wafer in a semiconductor manufacturing device and the like, to become a pedestal for the wafer. 3. Design points of the designed product: in shape. 4. Picture or photograph best indicating the design points: perspective view 1. 5. Other circumstances needing to be explained Other explanation: In the use state reference drawing, a is a wafer, b is a base, c is a heater, and d is a ring.
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