Condensing lens for wafer heating

Abstract

1. Name of the design product: condensing lens for wafer heating. 2. Use of the design product: the product of design 1, design 2 is used as a condensing lens for wafer heating. 3. Design points of the design product: in shape. 4. Picture or photograph best indicating the design points: design 1 perspective view 1. 5. Design 1 is designated as the basic design. 6. Other matters to be stated: the present article is a condensing lens for improving the heating efficiency of a wafer by making the sub-shading directional in a heater for heating a wafer. The present article is used as shown in the "use state reference diagram" by being disposed between a base on which a wafer is placed and a heater wire. The present article is transparent as a whole. Perspective view 2 is a view in which the whole is shown as an opaque body. In design 1, the rear view, the right view, and the left view are the same as the front view, and therefore the rear view, the right view, and the left view are omitted. In design 2, the rear view is shown symmetrically with the front view, and the left view is shown symmetrically with the right view, and therefore the rear view and the left view are omitted.

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