Body of deposition ring for substrate processing chamber

Abstract

1. Name of the designed product: body of deposition ring for substrate processing chamber. 2. Use of the designed product: the designed product is used as a deposition ring for substrate processing chamber. 3. Design points of the designed product: in shape. 4. Picture or photograph best indicating the design points: design 1 perspective view 1. 5. Design 1 is designated as the base design. 6. Other circumstances requiring explanation Other explanation: the dotted line in the figure represents the environment not required for protection, and does not constitute part of the claimed design.

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