Semiconductor manufacturing pins

CN309928141SActive Publication Date: 2026-04-17NUFLARE TECH INC
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
NUFLARE TECH INC
Filing Date
2025-07-24
Publication Date
2026-04-17

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Abstract

1. Name of the product in this design: Ejector pin for semiconductor manufacturing. 2. Application of this design: Used as a lifting pin in a semiconductor epitaxial manufacturing apparatus to lift wafers and trays. 3. The key design feature of this product is its shape. 4. The image or photograph that best illustrates the design's key points: 3D view 1. 5. Other situations requiring explanation: Other explanation: In the usage status reference diagram, numbers 1 to 3 represent wafer, tray, and this product, respectively.
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