Three-axis motion platform for automated optical inspection machine

CN310129826SActive Publication Date: 2026-08-04长川科技(苏州)有限公司
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Patent Information

Application Number
CN202530769980.0
Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Filing Date
2025-12-26
Publication Date
2026-08-04
Estimated Expiration
2040-12-26

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Abstract

1. Name of the product in this design: Three-axis motion platform of an automatic optical inspection machine. 2. Purpose of this design: To support wafers for three-dimensional (XYZ axis) motion positioning, as well as scanning and maintenance during wafer inspection. 3. The key design feature of this product is its shape. 4. The image or photograph that best illustrates the design's key points: 3D view 1.
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