PARTITIONING METHOD FOR A WORKPIECE

Abstract

A dividing method for a workpiece (11, 13), in which the workpiece (11), which is divided into a plurality of regions (19) by a plurality of first planned dividing lines (17a) each extending along a first direction and a plurality of second planned dividing lines (17b) each extending along a second direction intersecting the first direction, and has a component formed on one side of a front surface of each of the plurality of regions (19), is divided by a cutting blade (98) from one side of a rear surface (13b) of the workpiece (11) along each of the plurality of first planned dividing lines (17a) and each of the plurality of second planned dividing lines (17b), the dividing method comprising: a first work unit forming step of forming a first work unit in which the workpiece (11) and a first annular frame (21) are joined by adhering a first band (27) having an anisotropy of a strain rate when a predetermined force is applied to the first band (27) to the first annular frame (21) in such a manner as to cover an opening of the first annular frame (21), and adhering the first band (27) to the front surface of the workpiece (11); a holding step of holding one side of the first belt (27) of the first working unit by a holding table and exposing the rear surface (13b) of the workpiece (11) after the first working unit forming step; a dividing step of dividing the workpiece (11) by the cutting blade (98) from the rear surface (13b) side along each of the plurality of first planned dividing lines (17a) and each of the plurality of second planned dividing lines (17b) after the holding step; and a step of determining a third direction in which the strain rate becomes lowest when the predetermined force is applied to the first band (27), wherein in the forming step of the first working unit, the first tape (27) is adhered to the front surface of the workpiece (11) in such a manner that the third direction is not parallel to both the first direction and the second direction.

Description

BACKGROUND OF THE INVENTIONField of the invention

[0001] The present invention relates to a dividing method for a workpiece, in which the workpiece, which is divided into a plurality of regions by a plurality of planned dividing lines extending in a lattice shape and has a component formed on the front surface side of each of the plurality of regions, is divided by a cutting blade along each of the plurality of planned dividing lines from the rear surface side of the workpiece. Description of related technology

[0002] Component chips such as integrated circuits (ICs) and large-scale integration (LSI) circuits are essential components in various types of electronic devices such as mobile phones and personal computers. Such chips are manufactured by dividing a workpiece, for example, on which a large number of components are formed on the front surface, along planned division lines.

[0003] To divide such a workpiece, for example, a cutting device is used that includes a cutting unit with a spindle having a tip portion to which a circular cutting blade is attached, and a holding table that holds the workpiece. In this cutting device, the workpiece is divided into multiple chips by bringing the rotating cutting blade into contact with the workpiece along each of several planned dividing lines extending in a grid pattern.

[0004] However, to divide the workpiece into multiple chips, the cutting blade must be forced to cut into the workpiece in such a way that the rotating cutting blade penetrates the workpiece. Furthermore, in this case, there is a risk that the holding table holding the workpiece will be cut and damaged by the cutting blade.

[0005] Therefore, when the workpiece is divided into multiple chips as described above, a tape is adhered to the workpiece, and the workpiece is often held by the holding table with the tape interposed. This allows the workpiece to be divided into multiple chips in a state where the outer edge of the cutting blade, which penetrates the workpiece, is positioned within the tape. This prevents damage to the holding table.

[0006] Furthermore, in this case, the tape is not split in conjunction with the workpiece splitting. That is, the multiple chips are connected by the tape. This reduces the likelihood of multiple chips being scattered when the workpiece is split into multiple chips. Furthermore, to facilitate the handling of such a workpiece before and after splitting, in many cases the workpiece is split in a working unit state where the workpiece is connected to an annular frame by the tape.

[0007] For example, when dividing a workpiece from the front surface side by a cutting blade, a working unit is formed in which the workpiece and an annular frame are connected by a tape adhered to the back surface of the workpiece (see Japanese Patent Application Laid-Open No. JP H11-330008 A). Furthermore, when dividing a workpiece from the back surface side by a cutting blade, a working unit is formed in which the workpiece and an annular frame are connected by a tape adhered to the front surface of the workpiece (see, for example, Japanese Patent Application Laid-Open No. JP 2020-178064 A).

[0008] Further prior art helpful for understanding the present invention can be found in the following documents:

[0009] US 2020 / 0 335 396 A1 relates to a manufacturing method for chips from a workpiece containing a plurality of planned division lines on a front surface.

[0010] JP 2019-125598 A relates to a wafer dividing method capable of inhibiting faulty chip division and variation in the distance between chips. PRESENTATION OF THE INVENTION

[0011] When components are formed on the front surface side of a workpiece, the front surface of the workpiece often takes on a recessed / protruding shape. Specifically, stacked layers including various insulating films and electrically conductive films are formed in each of several regions defined by several planned parting lines extending in a lattice pattern on the front surface of the workpiece to form the components.

[0012] However, to facilitate dividing the workpiece along each of the plurality of planned dividing lines extending in a lattice pattern, such stacked layers are often not formed in regions corresponding to the plurality of planned dividing lines in the front surface of the workpiece. As a result, the front surface of the workpiece has a recessed / protruding shape (the plurality of regions where the components are formed are protruding portions, and the regions corresponding to the plurality of planned dividing lines are recessed portions).

[0013] Therefore, to adhere a tape to the entire front surface of such a workpiece, the tape must stretch to follow the recessed / protruding shape of the workpiece's front surface. However, such a tape exhibits anisotropy in the tape's stretch rate when a given force is applied to the tape.

[0014] For example, the elongation rate of a tape when a given force is applied in the tensile direction (machine direction (MD)) of the tape during manufacture of the tape is less than that of the tape when the given force is applied in a different direction, such as the direction perpendicular to the tensile direction (transverse direction (TD)).

[0015] Furthermore, in some cases, when the planned parting line extends along a direction perpendicular to a direction where the elongation rate of the tape is low (e.g., the tensile direction), the tape may not adhere to the front surface of the workpiece near the boundary between the planned parting line and the region where the component is formed. Furthermore, there is a concern that the machining quality of dividing the workpiece along this planned parting line may deteriorate if the workpiece is divided from the back surface side by a cutting blade in such a state.

[0016] In view of the above, an object of the present invention is to reduce the proportion of the area where a tape does not adhere to the back surface of a workpiece and to reduce deterioration in machining quality when the workpiece is divided from the front surface side by a cutting blade.

[0017] According to one aspect of the present invention, a dividing method for a workpiece is provided, in which the workpiece, which is divided into a plurality of regions by a plurality of first planned dividing lines each extending along a first direction and a plurality of second planned dividing lines each extending along a second direction intersecting the first direction, and has a component formed on a side of a front surface of each of the plurality of regions, is divided by a cutting blade from a side of a rear surface of the workpiece along each of the plurality of first planned dividing lines and each of the plurality of second planned dividing lines. The dividing method includes: a first working unit forming step of forming a first working unit in which the workpiece and a first annular frame are joined,by adhering a first band having an anisotropy of a strain rate when a predetermined force is applied to the first band to the first annular frame in such a manner as to cover an opening of the first annular frame, and adhering the first band to the front surface of the workpiece, a holding step of holding one side of the first band of the first working unit by a holding table and exposing the rear surface of the workpiece after the first working unit forming step, and a dividing step of dividing the workpiece by the cutting blade from the rear surface side along each of the plurality of first planned dividing lines and each of the plurality of second planned dividing lines after the holding step, and a step of determining a third direction in which the strain rate becomes the lowest,When the predetermined force is applied to the first band, the first band is adhered to the front surface of the workpiece in such a way that the third direction is not parallel to both the first direction and the second direction.

[0018] Moreover, in the present invention, it is preferable that the first direction is orthogonal to the second direction, and that in the first working unit forming step, the first tape is adhered to the front surface of the workpiece in such a manner that an angle formed by a straight line along the third direction and both a straight line along the first direction and a straight line along the second direction is 45 degrees.

[0019] Moreover, in the present invention, it is preferable to adopt the following configuration. The dividing method further includes a second work unit forming step of forming a second work unit in which the workpiece and a second annular frame having an outer edge on which a frame cutout is formed are joined by dividing the first band from the workpiece, after adhering a second band to the second annular frame in such a manner as to cover an opening of the second annular frame, and adhering the second band to the back surface of the workpiece. A notch or an orientation flat for indicating a crystal orientation is formed on an outer edge of the workpiece.In the forming step of the second working unit, the second tape adhered to the second annular frame is adhered to the back surface of the workpiece in such a manner that an angle formed by a direction from a center of the workpiece to the notch or the orientation flat and a direction indicated by the frame cutout is 0°, 90°, 180°, or 270°.

[0020] In the present invention, the first band is adhered to the front surface of the workpiece such that the direction (third direction) in which the strain rate becomes the lowest when the predetermined force is applied to the first band is not parallel to each of the plurality of planned dividing lines extending in a lattice pattern. In this case, each of the plurality of planned dividing lines does not extend along the direction perpendicular to this direction.

[0021] Thereby, the proportion of the area where the first tape does not adhere to the front surface of the workpiece near the boundary between each of the plurality of planned parting lines and the area where the component is formed can be reduced, and deterioration of the machining quality can be suppressed when the workpiece is divided from the back surface side by the cutting blade.

[0022] The above and other objects, features and advantages of the present invention, as well as the modes for carrying them into effect, will best become apparent and the invention itself will be best understood by studying the following description and appended claims, with reference to the attached drawings which illustrate a preferred embodiment of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a flowchart schematically showing an example of a dividing method for a workpiece; Fig. 2 is a perspective view schematically illustrating an example of a tape adhering device used for performing a working unit forming step; Fig. 3A is a perspective view schematically showing an example of a workpiece; Fig. 3B is a perspective view schematically illustrating an example of a ring-shaped frame; Fig. 4 is a partially enlarged perspective view schematically illustrating a support base and a tape adhesion unit; Fig. 5 is a perspective view schematically illustrating the state in which the workpiece and the annular frame are conveyed to the support base; Fig. 6 is a perspective view schematically showing the workpiece and the annular frame whose positions have been adjusted; Fig. 7 is a partially sectioned side view schematically illustrating the state in which a tape is adhered to the workpiece and the annular frame; Fig. 8 is a perspective view schematically showing an example of a working unit; Fig. 9 is a perspective view schematically illustrating an example of a cutting device used to perform a holding step and a dividing step; Fig. 10 is a side view schematically illustrating a table base, a holding table, and a motor; Fig. 11 is a partially sectioned side view showing the table base and the holding table in an enlarged form; Fig. 12 is a perspective view schematically showing an example of the working unit after the dividing step; Fig. 13 is a flowchart schematically showing a modification example of the dividing method for a workpiece; Fig. 14 is a perspective view schematically illustrating an example of a tape adhering device used to perform a second working unit forming step; Fig. 15 is a partially enlarged perspective view schematically illustrating a tape adhesion part; Fig. 16 is a partially enlarged perspective view schematically showing a work unit training part, etc.; Fig. 17 is a partially enlarged perspective view schematically showing a conveying part, etc.; Fig. 18 is a partially enlarged perspective view schematically showing a partition part; and Fig. 19 is a perspective view schematically showing an example of a second working unit. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

[0023] An embodiment of the present invention will be described with reference to the accompanying drawings. Fig. Figure 1 is a flowchart schematically illustrating an example of a workpiece dividing process. In this process, a working unit is first formed in which the workpiece and an annular frame are connected by a band. The band is adhered to the front surface of the workpiece in such a way that the direction in which the strain rate of the band is lowest is not parallel to the planned dividing lines (working unit forming step: S1).

[0024] Fig. Fig. 2 is a perspective view schematically illustrating an example of a tape adhesion device used for performing the working unit forming step (S1). An X1-axis direction (front-back direction) and a Y1-axis direction (left-right direction) shown in Fig. 2 are directions perpendicular to each other in a horizontal plane. Furthermore, a Z1-axis direction (up-down direction) is the direction perpendicular to the X1-axis direction and the Y1-axis direction (vertical direction).

[0025] One in Fig. The tape attachment device 2 shown in FIG. 2 includes a rectangular parallelepiped-shaped base 4 that supports the respective components. In a region on the front side of the upper surface of this base 4, three cassette placement bases 6a, 6b, and 6c are arranged so as to be lined up along the Y1 axis direction. Furthermore, a cassette 8a, for example, is placed on the cassette placement base 6a, which accommodates the workpieces.

[0026] Furthermore, on the cassette placement base 6b, for example, a cassette 8b is placed, which can accommodate work units comprising the workpiece and an annular frame connected by a tape in the tape attachment device 2. In addition, on the cassette placement base 6c, for example, a cassette 8c is placed, which accommodates the annular frames.

[0027] Fig. Fig. 3A is a perspective view schematically showing an example of the workpiece accommodated in the cassette 8a. A Fig. The workpiece 11 shown in Figure 3A has a circular, disc-shaped substrate 13 made of a single-crystal semiconductor material such as silicon (Si), silicon carbide (SiC) or gallium nitride (GaN).

[0028] At the outer edge of this substrate 13, a notch 15 is formed, which indicates a specific crystal orientation of the single-crystal semiconductor constituting the substrate 13. Furthermore, an impurity region doped with an impurity is disposed on a part of the front surface 13a side of the substrate 13.

[0029] Furthermore, the workpiece 11 is divided into a plurality of regions 19 by a plurality of planned division lines (first planned division lines) 17a, each extending along the same direction (first direction), and a plurality of planned division lines (second planned division lines) 17b, each extending along a second direction intersecting the first direction. The first direction is the direction parallel to the direction from the center of the substrate 13 to the notch 15, and the second direction is the direction perpendicular to the direction from the center of the substrate 13 to the notch 15. That is, the first direction is orthogonal to the second direction.

[0030] Furthermore, a device is formed in each of the plurality of regions 19. This device is configured by a part of the front surface 13a side of the substrate 13 (intrinsic semiconductor region in which no impurity is present and impurity region) and stacked layers comprising various insulating layers and electrically conductive layers formed over the front surface 13a of the substrate 13.

[0031] Similar stacked layers are not formed in regions corresponding to the plurality of planned dividing lines 17a and 17b in the front surface of the workpiece 11. Thus, the front surface of the workpiece 11 has a recessed / protruding shape (the plurality of regions 19 in which the components are formed are protruding parts, and the regions corresponding to the plurality of planned dividing lines 17a and 17b are recessed parts).

[0032] Furthermore, the material, shape, structure, size, etc. of the substrate 13 are not limited. For example, the substrate 13 could be made of materials such as ceramic, plastic, and metal. In some cases, no impurity region is arranged in the substrate 13. Additionally, a flattened portion could be formed on the outer edge of the substrate 13 instead of the notch to indicate a specific crystal orientation, which is referred to as an orientation flattening.

[0033] Fig. Fig. 3B is a perspective view schematically illustrating an example of the annular frame (first annular frame) housed in the cassette 8c. Fig. The annular frame 21 shown in Figure 3B is made of a metallic material such as aluminum or stainless steel. A circular opening 21a, whose diameter is larger than the workpiece 11 (substrate 13), is formed in a central portion of this annular frame 21.

[0034] That is, the inner circumference of the annular frame 21 extends in a circular shape, and its diameter (inner diameter) is larger than that of the workpiece 11 (substrate 13). Furthermore, the outer edge of the annular frame 21 has four circular arc portions 21b, each extending in a circular arc, and four rectilinear portions 21c, each extending in a rectilinear shape.

[0035] Furthermore, the four circular arc portions 21b are arranged to overlap with a circle whose diameter is larger than the inner diameter of the annular frame 21 and whose center corresponds to the center of the opening 21a. In addition, the four circular arc portions 21b are arranged at substantially equal intervals along the circumferential direction of the annular frame 21.

[0036] Furthermore, the four rectilinear parts 21c are arranged to overlap with a square whose center corresponds to the center of the opening 21a. Each side of this square is longer than the inner diameter of the annular frame 21 and shorter than the diameter of the circle overlapping the four circular arc parts 21b. In addition, each of the four rectilinear parts 21c is arranged between a pair of circular arc parts 21b adjacent to each other along the circumferential direction of the annular frame 21.

[0037] Furthermore, a pair of frame cutouts 23a and 23b are formed between each of the four rectilinear parts 21c and the pair of circular arc parts 21b adjacent to this rectilinear part 21c. Furthermore, the frame cutout 23a is formed to cut out the outer edge of the annular frame 21 at an acute angle. In addition, this frame cutout 23b is formed to cut out the outer edge of the annular frame 21 at a right angle.

[0038] The pair of frame cutouts 23a and 23b are used to indicate the orientation of the workpiece 11 connected to the annular frame 21 by a band. For example, the workpiece 11 is connected to the annular frame 21 such that the above-described first direction is perpendicular to the rectilinear part 21c located between the pair of frame cutouts 23a and 23b, and the above-described second direction is parallel to the rectilinear part 21c located between the pair of frame cutouts 23a and 23b. In this case, position adjustment of the workpiece 11 becomes easy when machining the workpiece 11.

[0039] With further reference to Fig. 2 the remaining components of the tape attachment device 2 are described. In Fig. 2, the workpiece 11 accommodated in the cassette 8a, the working unit (workpiece 11 and the annular frame 21 connected by a belt) accommodated in the cassette 8b and the annular frames 21 accommodated in the cassette 8c are shown by dashed lines.

[0040] In an area in the upper surface of the base 4 located at the rear of the three cartridge placement pedestals 6a, 6b, and 6c, an opening 4a extending along the Y1 axis direction is formed. A first conveying unit 10a, which conveys the annular frame 21 and the work unit, and a second conveying unit 10b, which conveys the workpiece 11, are arranged in this opening 4a.

[0041] The first conveying unit 10a and the second conveying unit 10b have movable support members 12a and 12b, respectively, that can move along the Y1-axis direction. These movable support members 12a and 12b each have a piston rod that can move along the Z1-axis direction and each have an actuator (not shown) such as an air cylinder that can rotate in a straight line along the Z1-axis direction, which is the rotation axis.

[0042] Furthermore, an opening through which this piston rod passes is formed in the upper surface of each of the movable support members 12a and 12b. In addition, lower end portions of the conveying arms 14a and 14b are connected to the upper end portions of these piston rods. These conveying arms 14a and 14b are robot arms that have multiple joints, each of which can rotate in a straight line along the Z1-axis direction, which is the rotation axis.

[0043] The upper end portions of these conveying arms 14a and 14b each have a motor that rotates a spindle that can rotate rectilinearly along a direction perpendicular to the Z1-axis direction, which is the rotation axis. These spindles pass through openings formed in the side surfaces of the upper end portions of the conveying arms 14a and 14b and are connected to the base end portions of the robot hands 16a and 16b.

[0044] For example, a plurality of suction holes (not shown) are formed in a surface of each of these robot hands 16a and 16b. Furthermore, these suction holes are connected to a suction source (not shown) such as a vacuum pump via a flow path formed inside the robot hand 16a or 16b, a valve that controls the flow of a gas, and so on.

[0045] Furthermore, by opening the valve in a state where this suction source is operating, negative pressure is generated in a space near one surface of the robot hand 16a or 16b. Thus, one surface of the robot hand 16a of the first conveying unit 10a functions as a holding surface that holds the annular frame 21 under suction. Similarly, one surface of the robot hand 16b of the second conveying unit 10b functions as a holding surface that suctions the workpiece 11.

[0046] Furthermore, in the first conveying unit 10a, it is also possible to turn over the annular frame 21 by rotating the spindle installed in the upper end part of the conveying arm 14a in a state where the annular frame 21 is held by the holding surface of the robot hand 16a under suction.

[0047] Similarly, in the second conveying unit 10b, it is also possible to turn the workpiece 11 upside down by rotating the spindle built in the upper end part of the conveying arm 14b in a state where the workpiece 11 is sucked by the holding surface of the robot hand 16b.

[0048] In a region of the upper surface of the base 4 located at the rear of the opening 4a, an X1-axis direction movement mechanism 18 is arranged, which moves a support base 20 along the X1-axis direction. This X1-axis direction movement mechanism 18 has a pair of guide rails 18a, each extending along the X1-axis direction.

[0049] Furthermore, the lower surface side of the support base 20 is slidably connected to the upper surface side of the pair of guide rails 18a. Additionally, a threaded shaft 18b extending along the X1 axis direction is arranged between the pair of guide rails 18a.

[0050] A motor 18c for rotating the threaded shaft 18b is connected to a front end portion of this threaded shaft 18b. Additionally, a nut member (not shown) that houses a large number of balls rolling on the surface of the rotating threaded shaft 18b is arranged on the surface where a spiral groove is formed in the threaded shaft 18b, thus forming a ball screw.

[0051] That is, when the threaded shaft 18b rotates, the large number of balls circulate in the nut part, and the nut part moves along the X1 axis direction. Furthermore, this nut part is fixed to the bottom surface of the support base 20. Thus, when the threaded shaft 18b is rotated by the motor 18c, the support base 20 moves along the X1 axis direction along with the nut part.

[0052] This allows the support base 20 to be positioned either in a feed-in / feed-out zone located above the front side of the pair of guide rails 18a or in a belt-adhering zone located above the rear side thereof. The feed-in / feed-out zone is a region of the support base 20 in which the workpiece 11 and the annular frame 21 can be fed into the support base 20 and the process unit can be fed out from the support base 20.

[0053] In addition, the belt adhesion zone is a zone of the support base 20 in which a formation of the working unit (connecting the workpiece 11 and the annular frame 21 by a belt) can be carried out. In addition, Fig. 2 shows the support base 20 arranged in the tape adhesion zone.

[0054] The formation of the working unit is carried out by a tape adhesion unit 36 ​​arranged above the tape adhesion zone of the support base 20. Fig. 4 is a partially enlarged perspective view schematically illustrating the support base 20 and the tape adhesion unit 36. The support base 20 includes a rectangular parallelepiped-shaped frame support base 22 that supports the annular frame 21.

[0055] A circular opening 24 is formed in the center of this frame support base 22, and the frame support base 22 has a square-shaped upper surface 26 having a pair of sides 26a and 26b extending along the X1-axis direction and a pair of sides 26c and 26d extending along the Y1-axis direction. Furthermore, in this opening 24, a spindle (not shown) extending along the Z1-axis direction and a motor (not shown) that rotates this spindle in a straight line along the Z1 direction, which is the rotation axis, are arranged.

[0056] A lower part of a circular columnar workpiece support base 28, which holds the workpiece 11, is connected to an upper part of this spindle. In addition, the workpiece support base 28 rotates together with the spindle when the motor built into the frame support base 22 is operating. The rotation axis is a straight line passing through the center of the upper surface of the workpiece support base 28 and extending along the Z1-axis direction.

[0057] Furthermore, a lifting-lowering mechanism (not shown) is arranged in this opening 24, which moves (raises and lowers) the workpiece support base 28 along the Z1-axis direction. For example, this lifting-lowering mechanism adjusts the height of the workpiece support base 28 to align the height between the upper surface of the annular frame 21 supported by the frame support base 22 and the upper surface of the workpiece 11 supported by the workpiece support base 28.

[0058] Furthermore, on the upper surface 26 of the frame support base 22, a pair of fixed protrusions 30a and 30b are arranged, the height of which is less than the thickness of the annular frame 21. This fixed protrusion 30a is arranged on the side 26a of the upper surface 26 of the frame support base 22, as viewed from the upper surface of the workpiece support base 28, and extends along the X1-axis direction. Similarly, the fixed protrusion 30b is arranged on the side 26c of the upper surface 26 of the frame support base 22, as viewed from the upper surface of the workpiece support base 28, and extends along the Y1-axis direction.

[0059] Furthermore, a pair of openings 32a and 32b extending along the Y1-axis direction and a pair of openings 32c and 32d extending along the X1-axis direction are formed in the upper surface 26 of the frame support base 22. These two openings 32a and 32b are located on the side 26b of the upper surface 26 of the frame support base 22, as viewed from the upper surface of the workpiece support base 28. Similarly, the two openings 32c and 32d are located on the side 26d of the upper surface 26 of the frame support base 22, as viewed from the upper surface of the workpiece support base 28.

[0060] Furthermore, a movable projection 34a, which can move along the Y1-axis direction, is formed to pass through each of the two openings 32a and 32b. Similarly, a movable projection 34b, which can move along the X1-axis direction, is guided through each of the two openings 32c and 32d. In addition, two actuators that move the movable projections 34a and 34b are incorporated into the frame support base 22.

[0061] Specifically, the frame support base 22 includes a first actuating element (not shown), such as an air cylinder having a first piston rod movable along the Y1-axis direction. Furthermore, lower portions of the movable protrusions 34a are connected to a tip portion of this first piston rod via a coupling component (not shown).

[0062] Similarly, the frame support base 22 includes a second actuating element (not shown), such as an air cylinder with a second piston rod that can move along the X1-axis direction. Furthermore, lower portions of the movable projections 34b are connected to a tip portion of this second piston rod via a coupling component (not shown).

[0063] The tape adhesion unit 36 ​​arranged above the tape adhesion zone of the support base 20 has a feed roller 38. This feed roller 38 receives a plurality of circular tapes (first tapes) 27 in a state of adhesion to a release base 25.

[0064] The diameter of the band 27 is longer than the inner diameter of the annular frame 21 (diameter of the opening 21a) and shorter than the sides of the square that overlaps with the rectilinear parts 21c at the outer edge of the annular frame 21 (see Fig. 3B).

[0065] Furthermore, each of the plurality of tapes 27 includes, for example, a film-shaped, flexible tape base and an adhesive layer (adhesive layer) disposed on a surface of this tape base (surface on the side of the release base 25). In addition, both the tape base and the adhesive layer are formed of a material through which visible light is transmitted.

[0066] The base of the tape is typically made of polyolefin (PO), polyethylene terephthalate (PET), polyvinyl chloride (PVC), polystyrene (PS), or similar. Furthermore, the adhesive layer is made of an ultraviolet-curing silicone rubber, an acrylic-based material, an epoxy-based material, or similar.

[0067] Furthermore, an anisotropy in the strain rate exists in each of the plurality of bands 27 when a predetermined force is applied to the band 27. For example, for each of the plurality of bands 27, the strain rate is lowest when a predetermined force is applied to the band 27 along the tensile direction (MD) of the band 27 during manufacture of the band 27.

[0068] Furthermore, the plurality of bands 27 are pulled out together with the release base 25 by inserting insert rollers 40 toward an inclined lower side. At this time, each of the plurality of bands 27 adheres to the release base 25 such that the direction in which the bands 27 are pulled out by the insert rollers 40 is parallel to the pulling direction (MD).

[0069] In addition, the direction in which the plurality of belts 27 are pulled out by the insertion rollers 40 is parallel to the X1-axis direction. Thus, the strain rate in each of the plurality of belts 27 becomes the smallest when a predetermined force is applied to the belt 27 along the X1-axis direction.

[0070] Furthermore, each of the plurality of tapes 27 pulled out by the insertion rollers 40 is separated from the release base 25 by a separation component 42 that is in line contact with the release base 25. Specifically, the release base 25 is pulled by insertion rollers 44 arranged on the back of the separation component 42.

[0071] As a result, the direction of movement of the release base 25 changes significantly before and after contact with the separation component 42. On the other hand, not every one of the plurality of belts 27 is pulled by the insertion rollers 44. As a result, each of the plurality of belts 27 separates from the release base 25, with the contact between the separation component 42 and the release base 25 being the trigger.

[0072] In addition, a pressing roller 46 used for adhering the tape 27 released from the release base 25 to the workpiece 11 and the annular frame 21 is arranged at a position opposite to the separating component 42 with the release base 25 interposed therebetween.

[0073] In addition, the release base 25 pulled by the insertion rollers 44 is picked up and caught by a take-up roller 48 arranged above the insertion rollers 44. Furthermore, the tape adhesion unit 36 ​​is connected to a lifting-lowering mechanism (not shown).

[0074] For example, this raising-lowering mechanism adjusts the height of the belt adhesion unit 36 ​​to position the pressing roller 46 at a height at which the pressing roller 46 can come into contact with the annular frame 21 and / or the workpiece 11 placed on the support base 20 positioned in the support device. Thus, the belt 27 can be pressed against the annular frame 21 and / or the workpiece 11 by the pressing roller 46.

[0075] In the Fig. In the tape adhering device 2 shown in FIG. 2, the working unit forming step (S1) is performed, for example, in the following order. Specifically, first, the X1-axis direction moving mechanism 18 is actuated to feed the support base 20 in the infeed / outfeed direction. Thereafter, the workpiece 11 and the annular frame 21 are carried to the support base 20.

[0076] Fig. 5 is a perspective view schematically illustrating the state in which the workpiece 11 and the annular frame 21 are carried to the support base 20. Specifically, the second conveying unit 10b is actuated to convey the workpiece 11 housed in the cassette 8a out of the cassette 8a and carry the workpiece 11 onto the upper surface of the workpiece support base 28 of the support base 20.

[0077] At this time, the second conveying unit 10b conveys the workpiece 11 to the upper surface of the workpiece support base 28 such that the front surface of the workpiece 11 (front surface 13a of the substrate 13) is directed upward and the notch 15 is arranged on the side of the side 26d of the upper surface 26 of the frame support base 22 as viewed from the upper surface of the workpiece support base 28.

[0078] That is, the workpiece 11 is supported on the upper surface of the workpiece support base 28 such that each of the plurality of planned dividing lines 17a becomes parallel to the X1-axis direction and each of the plurality of planned dividing lines 17b becomes parallel to the Y1-axis direction.

[0079] Furthermore, the first conveying unit 10a is operated to convey the annular frame 21 accommodated in the cassette 8c out of the cassette 8c and to carry the annular frame 21 to the upper surface 26 of the frame supporting base 22 of the supporting base 20.

[0080] At this time, the first conveying unit 10a conveys the annular frame 21 to the upper surface 26 of the frame support base 22 such that the straight part 21c disposed between the pair of frame cutouts 23a and 23b is located on the side of the side 26d of the upper surface 26 of the frame support base 22, as viewed from the upper surface of the workpiece support base 28.

[0081] That is, the annular frame 21 is supported to the upper surface of the frame support base 22 such that the pair of rectilinear parts 21c including this rectilinear part 21c becomes parallel to the Y1-axis direction and the remaining pair of rectilinear parts 21c becomes parallel to the X1-axis direction.

[0082] Before conveying the annular frame 21 to the frame support base 22, the movable projections 34a and 34b are positioned at the positions farthest from the workpiece support base 28. Furthermore, this annular frame 21 is guided to an inner portion relative to the fixed projection 30a and 30b and the movable projections 34a and 34b.

[0083] Thereafter, the workpiece 11 is rotated and the annular frame 21 is moved in the horizontal direction to thereby adjust the positions of both. Fig. Fig. 6 is a perspective view schematically showing the workpiece 11 and the annular frame 21 whose positions have been adjusted.

[0084] Specifically, the workpiece 11 is rotated by a predetermined angle (e.g., 45°). This causes each of the plurality of planned parting lines 17a and 17b of the workpiece 11 to be non-parallel to the X1-axis direction. That is, each of the plurality of planned parting lines 17a and 17b becomes non-parallel to the direction in which the strain rate becomes smallest when a predetermined force is applied to the belt 27 described above.

[0085] Furthermore, the movable projections 34a are moved along the Y1-axis direction to be brought closer to the workpiece support base 28. This causes the movable projections 34a to come into contact with one of the pair of rectilinear parts 21c parallel to the X1-axis direction. Then, the movable projections 34a are moved along the Y1-axis direction until the other of the pair of rectilinear parts 21c parallel to the X1-axis direction comes into contact with the fixed projection 30a.

[0086] Similarly, the movable projections 34b are moved along the X1-axis direction to be brought closer to the workpiece support base 28. This causes the movable projections 34b to contact one of the pair of straight-line parts 21c parallel to the Y1-axis direction. Then, the movable projections 34b are moved along the X1-axis direction until the other of the pair of straight-line parts 21c parallel to the Y1-axis direction comes into contact with the fixed projection 30b.

[0087] Thereafter, the raising and lowering mechanism disposed within the opening 24 is operated as needed to raise and lower the workpiece support base 28. That is, when the height difference between the upper surface of the annular frame 21 held by the frame support base 22 and the upper surface (front surface) of the workpiece 11 (front surface 13a of the substrate 13) supported by the workpiece support base 28 is very large, the height of the workpiece support base 28 is adjusted to align the heights of both.

[0088] Next, the tape 27 is adhered to the workpiece 11 and the annular frame 21. Fig. 7 is a partially sectioned side view schematically illustrating the state in which the tape 27 is adhered to the workpiece 11 and the annular frame 21. Specifically, first, the X1-axis direction moving mechanism 18 is actuated to position the support base 20 supporting the workpiece 11 and the annular frame 21 in the tape adhesion zone. At this time, the movable projections 34b are positioned substantially directly below the pressing roller 46 of the tape adhesion unit 36.

[0089] Thereafter, the movable projections 34b are moved to the positions farthest from the workpiece support base 28. Next, the tape adhesion unit 36 ​​is lowered to a height at which the pressing roller 46 can come into contact with the workpiece 11 and the annular frame 21. After that, the insertion rollers 40 and 44, the pressing roller 46, and the take-up roller 48 (pressing roller 46, etc.) are rotated to cause the tape 27 to detach from the release base 25 and face the upper surface of the annular frame 21.

[0090] Next, the support base 20 is moved forward while continuing to rotate the pressing roller 46, etc. As a result, the tape 27 is pressed downward by the pressing roller 46. Consequently, the tape 27 gradually adheres to the upper surface of the annular frame 21 and the upper surface (front surface) of the workpiece 11 (front surface 13a of the substrate 13).

[0091] Here, the shape of the front surface of the workpiece 11 is a recessed / protruding shape, including protruding portions (a plurality of component-forming regions 19) and recessed portions (regions corresponding to the plurality of planned parting lines 17a and 17b). Furthermore, the adhered portion in the tape 27 near the boundary between each of the plurality of planned parting lines 17a and 17b and the component-forming region 19 needs to stretch in order for the tape 27 to adhere to the entire front surface of the workpiece 11.

[0092] In this regard, the tape 27 is arranged such that the direction in which the strain rate becomes the smallest when a predetermined force is applied to the tape 27 is not parallel to each of the plurality of planned parting lines 17a and 17b, as described above. This allows the proportion of the area where the tape 27 does not adhere to the front surface of the workpiece 11 to be reduced near the boundary between each of the plurality of planned parting lines 17a and 17b and the component-forming region 19.

[0093] Furthermore, it is preferable that the angle formed by a straight line along the direction in which the elongation rate of the band 27 is the lowest (a straight line along the above-described third direction) and a straight line along each of the plurality of planned dividing lines 17a (a straight line along the above-described first direction) be 45°. That is, the angle formed by the straight line along the above-described third direction and a straight line along each of the plurality of planned dividing lines 17b (a straight line along the above-described second direction) is preferably 45°.

[0094] In this case, the inclination of the direction in which the elongation rate of the tape 27 is the smallest with respect to each of the plurality of planned parting lines 17a and 17b is the same. Thus, it is possible to balance the ratio of the area where the tape 27 does not adhere to the front surface of the workpiece 11 near the boundary between each of the plurality of planned parting lines 17a and 17b and the region 19 where the component is formed.

[0095] Thereby, the belt 27 is adhered to the workpiece 11 and the annular frame 21. Consequently, the working unit (first working unit) in which the workpiece 11 and the annular frame 21 are connected by the belt 27 is formed. Fig. Figure 8 is a perspective view schematically illustrating this working unit 29. In Fig. 8 shows the side of the rear surface of the workpiece 11 (rear surface 13b of the substrate 13).

[0096] This work unit 29 is then loaded into the cassette 8b. Specifically, the X1-axis direction movement mechanism 18 is first actuated to position the support base 20 in the in-feed / out-feed zone. Then, the first conveying unit 10a is actuated to move the work unit 29 carried by the support base 20 away from the support base 20 and to transfer the work unit 29 into the cassette 8b.

[0097] In the Fig. In the workpiece dividing method shown in Figure 1, after the working unit forming step (S1), the belt 27 side of the working unit 29 is held, and the back surface of the workpiece (back surface 13b of the substrate 13) is exposed (holding step: S2). After this holding step (S2), the workpiece 11 is then divided by a cutting blade from the back surface side of the workpiece 11 along each of the plurality of planned dividing lines 17a and 17b (dividing step: S3).

[0098] Fig. Fig. 9 is a perspective view schematically illustrating an example of a cutting device used to perform the holding step (S2) and the dividing step (S3). Fig. The X2-axis direction (front-back direction) and the Y2-axis direction (left-right direction) shown in Figure 9 are directions perpendicular to each other in a horizontal plane. Furthermore, the Z2-axis direction (up-down direction) is the direction perpendicular to the X2-axis direction and the Y2-axis direction (vertical direction).

[0099] One in Fig. The cutting device 50 shown in Figure 9 includes a base 52 supporting the respective components. A pair of guide rails 54, each extending along the Y2-axis direction, is arranged on the front side of the upper surface of this base 52. Furthermore, a cuboid-shaped moving table 56, extending along the X2-axis direction, is slidably connected to the upper surface side of the pair of guide rails 54.

[0100] Furthermore, a screw shaft 58 extending along the Y2-axis direction is arranged between the pair of guide rails 54. A motor 60 for rotating the screw shaft 58 is connected to one end portion of this screw shaft 58. In addition, on the surface where a spiral groove is formed in the screw shaft 58, a nut member (not shown) is arranged, which houses a large number of balls that roll on the surface of the rotating screw shaft 58, thus forming a ball screw.

[0101] That is, when the screw shaft 58 rotates, the large number of balls circulate in the nut part, and the nut part moves along the Y2-axis direction. Furthermore, this nut part is fixed to the bottom surface of the motion table 56. Thus, when the screw shaft 58 is rotated by the motor 60, the motion table 56 moves along the Y2-axis direction with the nut part.

[0102] Furthermore, a Y2-axis scale 62 is arranged in an area adjacent to the guide rail 54 on the upper surface of the base 52. This Y2-axis scale 62 is used when measuring the position of the moving table 56 in the Y2-axis direction.

[0103] A pair of guide rails 64, each extending along the X2-axis direction, is arranged on the upper surface of the motion table 56. Additionally, a table base 66 is slidably connected to the upper surface side of the pair of guide rails 64. The detailed structure of the table base 66 will be described later.

[0104] Furthermore, a threaded shaft 68 extending along the X2-axis direction is arranged between the pair of guide rails 64. A motor 70 for rotating the threaded shaft 68 is coupled to a front end portion (one end portion) of this threaded shaft 68. In addition, on the surface where a spiral groove is formed in the threaded shaft 68, a nut member (not shown) is arranged, which houses a large number of balls that roll on the surface of the rotating threaded shaft 68, thus forming a ball screw.

[0105] That is, when the threaded shaft 68 rotates, the large number of balls circulate in the nut part, and the nut part moves along the X2-axis direction. Furthermore, this nut part is fixed to the bottom surface of the stage base 66. Thus, when the threaded shaft 68 is rotated by the motor 70, the stage base 66 moves along the X2-axis direction along with the nut part.

[0106] In addition, an X2-axis scale 72 is arranged in an area adjacent to the guide rail 64 on the upper surface of the movement table 56. This X2-axis scale 72 is used when measuring the position of the table base 66 in the X2-axis direction.

[0107] A holding table 74 is arranged on the upper surface of the table base 66. Furthermore, a motor 84 for rotating the holding table 74 is arranged on a side surface of the table base 66, with the rotation axis being a straight line passing through the center of the holding table 74 and along the Z2-axis direction. Fig. 10 is a side view schematically illustrating the table base 66, the support table 74, and the motor 84.

[0108] The table base 66 includes a lower plate portion 66a having a rectangular parallelepiped shape. The lower surface side of this lower plate portion 66a (the lower surface side of the table base 66) is connected to the pair of guide rails 64. Additionally, a rectangular parallelepiped-shaped upright portion 66b extending upward is disposed at an upper portion of the front end of the lower plate portion 66a.

[0109] Furthermore, at a rear portion of the upper end of this upright portion 66b, a rectangular parallelepiped-shaped upper plate portion 66c is disposed, extending rearward. A circular columnar through-hole (not shown) is formed in the center of this upper plate portion 66c, penetrating the upper plate portion 66c in the up-down direction. Additionally, an open space 66d exists in the table base 66 between the upper surface of the lower plate portion 66a and the lower surface of the upper plate portion 66c.

[0110] Furthermore, the support table 74 is arranged on the upper surface of the table base 66 (upper surface of the upper plate part 66c) to cover the through hole formed in the upper plate part 66c. This support table 74 is supported by the table base 66 so as to be rotatable, with the rotation axis being a straight line passing through the center of the support table 74 and located along the Z2-axis direction. Fig. 11 is a partially sectioned side view showing a part of the table base 66 and the support table 74 in an enlarged manner.

[0111] The support table 74 has a circular disk-shaped support component 74a arranged above the through-hole formed in the upper plate part 66c. This support component 74a is made of a material through which visible light is transmitted, such as soda glass, borosilicate glass, or quartz glass. Furthermore, a circular cylindrical fitting 74b is arranged on the periphery of the support component 74a and extends downward from the support component 74a.

[0112] Furthermore, a suction path 74c is formed within the holding component 74a and the fitting piece 74b. This suction path 74c communicates with a suction source (not shown) such as a vacuum pump via a pipe 76 connected to the outer side surface of the fitting piece 74b, etc. Furthermore, an annular fitting hole is formed in the upper plate part 66c, and a lower part of the fitting piece 74b is slidably fitted into this fitting hole.

[0113] In addition, a circular cylindrical driven roller 78 is arranged on the outer side surface of the fitting 74b. A belt 80 is wound around this driven roller 78. As shown in Fig. As shown in Figure 10, this belt 80 is also wound around an upper portion of a drive pulley 82 extending along the Z2-axis direction. Additionally, a lower portion of this drive pulley 82 is coupled to the motor 84 disposed on the front surface of the erected portion 66b.

[0114] When this motor 84 is operating, the drive roller 82 rotates in a straight line along the Z2-axis direction, which is the rotation axis, and the power that rotates the drive roller 82 is also transmitted to the driven roller 78 via the belt 80. This causes the holding table 74 to rotate together with the driven roller 78, where the rotation axis is a straight line passing through the center of the holding table 74 and running along the Z2-axis direction.

[0115] In addition, a circular columnar frame support member 86 is disposed at each of four corners of the upper surface of the table base 66 (upper surface of the upper plate part 66c). These frame support members 86 support the annular frame 21 with the belt 27 interposed therebetween when the work unit 29 is placed above the holding table 74.

[0116] The upper surfaces of these frame support members 86 are set lower than the upper surface of the holding table 74, so that the upper surface of the annular frame 21 is located on the lower side relative to the upper surface of the holding table 74 (upper surface of the holding component 74a) when the work unit 29 is placed above the holding table 74.

[0117] With further reference to Fig. 9 describes the remaining components of the cutting device 50. A support structure 88 having a rectangular parallelepiped shape is arranged on the rear side of the upper surface of the base 52. A pair of guide rails 90, each extending along the Z2-axis direction, is arranged on one side surface of this support structure 88.

[0118] Furthermore, a rectangular parallelepiped-shaped spindle housing 92 extending along the X2-axis direction is slidably connected to the surface side of the pair of guide rails 90. Furthermore, a threaded shaft 94 extending along the Z2-axis direction is arranged between the pair of guide rails 90.

[0119] A motor 96 for rotating the threaded shaft 94 is coupled to an upper end portion (one end portion) of this threaded shaft 94. Additionally, on the surface where a spiral groove is formed in the threaded shaft 94, a nut member (not shown) is disposed, which houses a large number of balls that roll on the surface of the rotating threaded shaft 94, thereby forming a ball screw.

[0120] That is, when the threaded shaft 94 rotates, the large number of balls circulate in the nut part, and the nut part moves along the Z2-axis direction. Furthermore, this nut part is fixed to the side surface opposite the support structure 88 in the spindle housing 92. Thus, when the threaded shaft 94 is rotated by the motor 96, the spindle housing 92 moves along the Z2-axis direction together with the nut part.

[0121] This spindle housing 92 houses a spindle (not shown) extending along the X2-axis direction and a motor (not shown) that rotates this spindle in a straight line along the X2-axis direction, which is the rotation axis. Furthermore, a tip portion (front end portion) of this spindle is exposed from an opening formed in the front surface of the spindle housing 92.

[0122] In addition, a circular cutting blade 98 is mounted on the tip portion of the spindle, which is exposed from the spindle housing 92. Thus, when this spindle rotates, the cutting blade 98 rotates along with the spindle, with a straight line along the X2 axis direction forming the axis of rotation. Additionally, an upper imaging unit 100 is arranged on the side surface of the spindle housing 92 on the side farther from the support structure 88.

[0123] This upper imaging unit 100 images a structural object located below it with visible light. Furthermore, a lower imaging unit 102 is arranged at a position opposite the upper imaging unit 100 in the up-down direction. This lower imaging unit 102 images a structural object located above it with visible light.

[0124] Furthermore, the lower imaging unit 102 is coupled to a lifting-lowering support mechanism 106 extending along the Z2-axis direction, with a coupling part 104 extending along the X2-axis direction interposed therebetween. This lifting-lowering support mechanism 106 is arranged on the upper surface of the base 52 and supports the lower imaging unit 102 in such a manner that the lower imaging unit 102 can be lifted and lowered.

[0125] In the cutting device 50, the holding step (S2) and the dividing step (S3) are performed, for example, in the following order. Specifically, first, the work unit 29 is placed over the holding table 74 with the back surface of the workpiece 11 (back surface 13b of the substrate 13) facing upward. That is, the workpiece 11 is placed over the holding component 74a with the belt 27 interposed, and the annular frame 21 is placed over the frame support members 86 with the belt 27 interposed.

[0126] Subsequently, the suction source is activated, which is connected via the pipe 76 to the suction path 74c formed inside the holding component 74a and the fitting 74b of the holding table 74. This causes the workpiece 11 to be sucked in with the belt 27 placed on the holding component 74a interposed. This completes the holding step (S2).

[0127] Next, the moving table 56 and the table base 66 are moved to cause the through hole formed in the holding component 74a to be positioned between the upper imaging unit 100 and the lower imaging unit 102. That is, the lower imaging unit 102 is positioned in the open space 66d between the lower plate part 66a and the upper plate part 66c of the table base 66.

[0128] Thereafter, the lower imaging unit 102 images the front surface of the workpiece 11 through this through-hole and the transparent holding component 74a and the tape 27. Next, the holding table 74 is rotated based on an image formed by the imaging by the lower imaging unit 102 to cause the plurality of planned parting lines 17a or the plurality of planned parting lines 17b to be parallel to the Y2-axis direction.

[0129] Thereafter, the moving table 56 and the table base 66 are moved to position one of the plurality of planned dividing lines 17a and 17b in the Y2-axis direction as viewed from the cutting blade 98. Next, the spindle housing 92 is moved to position the lower end of the cutting blade 98 at a position higher than the lower surface of the tape 27 and lower than the upper surface thereof.

[0130] After that, the cutting blade 98 is rotated. Next, the moving table 56 is moved with the cutting blade 98 rotated to cause the area from one end to the other end of the workpiece 11 to pass through the cutting blade 98 in the Y2-axis direction. As a result, the workpiece 11 is divided from the rear surface side by the cutting blade 98 along one of the plurality of planned parting lines 17a and 17b.

[0131] By further repeating a similar operation, the workpiece 11 is divided from the rear surface side by the cutting blade 98 along each of the plurality of planned dividing lines 17a and 17b. Thus, the dividing step (S3) is completed. Fig. 12 is a perspective view schematically illustrating the working unit 29 after the dividing step (S3).

[0132] In the dividing step (S3), the cutting blade 98 is caused to cut into the belt 27, and therefore grooves 27a are formed in the belt 27. However, the belt 27 is not divided. Thus, the working unit 29 in which the divided workpiece 11 and the annular frame 21 are connected through the belt 27 is maintained.

[0133] As described above, the Fig. 1, the belt 27 is adhered to the front surface of the workpiece 11 such that the direction in which the strain rate becomes the smallest when a predetermined force is applied to the belt 27 is not parallel to each of the plurality of planned dividing lines 17a and 17b. In this case, none of the plurality of planned dividing lines 17a and 17b extends along the direction perpendicular to this direction.

[0134] Thereby, the ratio of the area where the tape 27 does not adhere to the front surface of the workpiece 11 near the boundary between each of the plurality of planned parting lines 17a and 17b and the component-forming area 19 can be reduced, and deterioration of machining quality can be suppressed when the workpiece 11 is divided from the rear surface side by the cutting blade 98.

[0135] Furthermore, the dividing method for a workpiece according to the present invention may include a step of causing a direction indicating a specific crystal orientation of the workpiece 11 to correspond to a direction indicated by frame cutouts of an annular frame (with the angle formed by both directions set to 0°) after the dividing step (S3). Fig. Figure 13 is a flowchart schematically illustrating an example of such a workpiece dividing process. In this process, the above-described working unit forming step (S1), the holding step (S2), and the dividing step (S3) are first executed sequentially.

[0136] Then, a second working unit is formed in which the workpiece 11 and a second annular frame are connected by a second tape adhered to the back surface of the workpiece 11 such that a direction indicating a specific crystal orientation of the workpiece 11 (for example, direction from the center of the workpiece 11 toward the notch 15) corresponds to a direction indicated by frame cutouts of the second annular frame (second working unit formation step: S4).

[0137] Fig. Fig. 14 is a perspective view schematically illustrating an example of a tape-adhering device used to carry out the forming step of the second working unit (S4). Fig. The X3-axis direction (front-back direction) and the Y3-axis direction (left-right direction) shown in Figure 14 are directions perpendicular to each other in a horizontal plane. Furthermore, the Z3-axis direction (up-down direction) is the direction perpendicular to the X3-axis direction and the Y3-axis direction (vertical direction).

[0138] One in Fig. The tape attachment device 108 shown in Figure 14 has a rectangular parallelepiped-shaped base 110 that supports the respective components. Two cassette placement sockets 112a and 112b are each arranged at a pair of corners located on the front side of the upper surface of this base 110.

[0139] Furthermore, a cassette 114a is placed on the cassette placement base 112a, which accommodates the work units 29 containing the divided workpiece 11. Additionally, a cassette 114b is placed on the cassette placement base 112b, which can accommodate the second work units formed in the tape attachment device 108.

[0140] Furthermore, an opening 110a extending along the Y3-axis direction is formed in a region on the upper surface of the base 110 located at the rear of the two cartridge placement bases 112a and 112b. A conveying unit 116, which conveys the working cartridge, is disposed in this opening 110a. This conveying unit 116 has a similar structure to the first conveying unit 10a shown in FIG. Fig. 2 is shown.

[0141] In addition, a tape adhesion part 110b is arranged at one of two corners arranged at the back of the upper surface of the base 110. Fig. 15 is a partially enlarged perspective view schematically illustrating the tape adhesion portion 110b. A support base 118 is disposed in this tape adhesion portion 110b, and a second annular frame 31 is placed on this support base 118.

[0142] This second annular frame 31 has a similar structure to that shown in Fig. 3B, etc. In addition, the second annular frame 31 is placed on the support base 118 such that a direction indicated by a pair of frame cutouts 33a and 33b (direction from the center of the opening 31a to a rectilinear part 31b disposed between the pair of frame cutouts 33a and 33b) is parallel to the X3-axis direction, and the rectilinear part 31b is placed on the front side.

[0143] In addition, a tape adhesion unit 120 is arranged above the support base 118. This tape adhesion unit 120 has a similar structure to that of the Fig. 4, etc. In addition, a plurality of circular second tapes 37 in the state of adhering to a release base 35 are taken up by a feed roller 122 of the tape adhering unit 120.

[0144] The diameter of each of the plurality of second bands 37 is longer than the inner diameter of the second annular frame 31 and shorter than the sides of a square overlapping with the rectilinear part 31b at the outer edge of the second annular frame 31. In addition, each of these plurality of second bands 37 has a structure similar to, for example, that shown in Fig. 4 etc. is similar to bands 27.

[0145] In addition, the support base 118 is coupled to an X3-axis direction movement mechanism (not shown), similar to the one shown in Fig. 4 etc. In addition, the tape adhesion unit 120 is coupled to a lifting-lowering mechanism (not shown), similar to the one shown in Fig. 4 etc. shown tape adhesion unit 36.

[0146] In addition, in an area at the front of the Fig. 14, a working unit forming part 110c is arranged. Fig. 16 is a partially enlarged perspective view schematically illustrating the process cartridge forming part 110c, etc. In this process cartridge forming part 110c, a cutting table 124 is arranged, and the process cartridge 29 discharged from the cassette 114a by the conveying unit 116 can be conveyed to this cutting table 124.

[0147] In addition, a cutting device 126 is arranged above the cutting table 124, which cuts the band 27 present between the workpiece 11 and the annular frame 21 of the working unit 29 conveyed to the cutting table 124.

[0148] This cutting device 126 is coupled to a rotary drive source 128 located above the center of the cutting table 124, and this rotary drive source 128 causes the cutting device 126 to perform a rotary movement with a predetermined rotation radius. Additionally, the rotary drive source 128 is coupled to a raising and lowering mechanism (not shown).

[0149] Furthermore, on a lateral side of the cutting table 124, a housing 130 for the X3-axis direction movement mechanism is arranged, extending along the X3-axis direction. An opening 130a is formed in the side surface of this housing 130 for the X3-axis direction movement mechanism on the side of the cutting table 124, extending from a portion on a lateral side of one end of the cutting table 124 in the X3-axis direction to a portion on the lateral side of the other end. An adhesive roller support member 132 is caused to pass through this opening 130a.

[0150] A base end portion of this adhesive roller support member 132 is coupled to an X3-axis direction moving mechanism (not shown) housed in the X3-axis direction moving mechanism housing 130. Furthermore, an adhesive roller 134 is disposed in the adhesive roller support member 132 at the portion exposed from the X3-axis direction moving mechanism housing 130. Furthermore, this adhesive roller 134 moves along the X3-axis direction when the X3-axis direction moving mechanism coupled to the base end portion of the adhesive roller support member 132 is operating, so that it is in contact with the upper surface of the cutting table 124.

[0151] Furthermore, an opening is also formed in the side surface opposite the side surface in which the opening 130a is formed in the X3-axis direction movement mechanism housing 130. A conveyor support member 136 is caused to pass through this opening. A base end portion of this conveyor support member 136 is connected to an X3-axis direction movement mechanism (not shown) incorporated in the X3-axis direction movement mechanism housing 130.

[0152] Furthermore, the conveyor unit support part 136 bends to extend to the side of the support base 118 and the cutting table 124, and a conveyor unit 138 is arranged at the lower end of a tip portion thereof. This conveyor unit 138 includes a circular columnar coupling part 138a that houses an air cylinder with a piston rod (not shown) that can move along the Z3-axis direction. A tip portion (lower end portion) of this piston rod is fixed to the upper end of a circular disk-shaped coupling part 138b.

[0153] At the upper side of each of the two end portions of this coupling portion 138b, a rectangular parallelepiped-shaped coupling portion 138c extending along the X3-axis direction is arranged. In addition, tip portions of the coupling portions 138c are each fixed to a side surface of a central portion of a rectangular parallelepiped-shaped coupling portion 138d extending along the Y3-axis direction.

[0154] Furthermore, suction pads 138e are arranged on the lower side of the two end portions of each of these coupling parts 138d. Furthermore, the suction pads 138e communicate with a suction source (not shown) such as a vacuum pump via a flow path (not shown) formed within the coupling part 138d and a pipe connected to this flow path.

[0155] In addition, a conveying part 110d is provided in an area on a lateral side of the Fig. 14 shown work unit training part 110c. Fig. 17 is a partially enlarged perspective view schematically illustrating the conveying part 110d, etc. In this conveying part 110d, a rectangular parallelepiped-shaped casing 140 for the Y3-axis direction moving mechanism is arranged, which extends along the Y3-axis direction from a portion at the rear of the cutting table 124 to a portion at the rear of a separation table 148 to be described later.

[0156] An opening is formed on the rear surface of this Y3-axis direction movement mechanism housing 140. The front side of lower end portions of a pair of elevation-lowering-rotation mechanism housings 142a and 142b, each extending along the Y3-axis direction and having a rectangular parallelepiped shape, is caused to pass through this opening. Furthermore, a lower end portion of each of the two elevation-lowering-rotation mechanism housings 142a and 142b is coupled to a Y3-axis direction movement mechanism (not shown) incorporated into the Y3-axis direction movement mechanism housing 140.

[0157] Furthermore, an opening is formed in the front surface of each of the two elevating-lowering-rotating mechanism housings 142a and 142b, and rectangular parallelepiped-shaped conveyance unit support members 144a and 144b extending along the X3 axis direction are caused to pass through this opening. Base end portions of these conveyance unit support members 144a and 144b are connected to elevating-lowering mechanisms (not shown) and rotating mechanisms (not shown) installed in the elevating-lowering-rotating mechanism housings 142a and 142b.

[0158] These raising and lowering mechanisms raise and lower the conveying unit support members 144a and 144b along the Z3-axis direction. Furthermore, these rotating mechanisms rotate the conveying unit support members 144a and 144b in a straight line along the X3-axis direction, which is the rotation axis. Furthermore, conveying units 146a and 146b are arranged on the lower side of tip portions of the conveying unit support members 144a and 144b. These conveying units 146a and 146b have a structure similar to that shown in Fig. 16 is similar to the transport unit 138 shown.

[0159] In addition, a separating part 110e is arranged in a region which is separated from the Fig. 14, is opposite the work unit training part 110c. Fig. 18 is a partially enlarged perspective view schematically illustrating the separation part 110e. The separation table 148 is arranged in this separation part 110e. This separation table 148 includes a circular, disc-shaped porous plate 148a with an exposed upper surface.

[0160] This porous plate 148a communicates with a suction source (not shown) such as a vacuum pump via a suction path (not shown) formed inside the separation table 148, etc. When this suction source is operated in a state where the working unit is placed above the upper surface of the porous plate 148a, the working unit is held by the separation table 148.

[0161] An X3-axis direction movement mechanism 150 is arranged above the separation table 148. This X3-axis direction movement mechanism 150 includes a pair of guide rails 150a, each extending along the X3-axis direction. Furthermore, the rear surface side of a movement plate 152 is slidably connected to the front surface side of the pair of guide rails 150a. Furthermore, a threaded shaft 150b extending along the X3-axis direction is arranged between the pair of guide rails 150a.

[0162] A motor 150c for rotating the threaded shaft 150b is coupled to a front end portion of this threaded shaft 150b. Additionally, on the surface where a spiral groove is formed in the threaded shaft 150b, a nut member (not shown) is disposed, which houses a large number of balls that roll on the surface of the rotating threaded shaft 150b, thus forming a ball screw.

[0163] That is, when the threaded shaft 150b rotates, the large number of balls circulate in the nut part, and the nut part moves along the X3-axis direction. Furthermore, this nut part is fixed to the rear surface of the motion plate 152. Thus, when the threaded shaft 150b is rotated by the motor 150c, the motion plate 152 moves along the X3-axis direction along with the nut part.

[0164] On the front surface of this moving plate 152, a pair of air cylinders 154 and 156 are arranged in a row in the front-rear direction. Furthermore, the air cylinder 154 arranged on the front side has a piston rod 154a capable of moving along the Z3-axis direction, and a gripping claw 158, which grips a tape 39 to be described later for separation, is coupled to a lower end portion of this piston rod 154a.

[0165] The gripping claw 158 includes an L-shaped fixed claw 160. This fixed claw 160 includes a rectangular parallelepiped-shaped upright portion 160a extending along the Z3-axis direction and a rectangular parallelepiped-shaped lower portion 160b extending rearward from a lower end portion of this upright portion 160a. Furthermore, a rectangular parallelepiped-shaped movable claw 162 capable of moving along the Z3-axis direction is disposed on the rear surface of this upright portion 160a.

[0166] Furthermore, the air cylinder 156 disposed at the rear of the air cylinder 154 has a piston rod 156a capable of moving along the Z3-axis direction, and a rectangular parallelepiped-shaped heating plate 164, which heats the belt 39 (to be described later) for separation, is connected to a lower end portion of this piston rod 156a. A heating wire is integrated into this heating plate 164, and the heating plate 164 is heated by generating a current in this heating wire with a focus near the lower surface of the heating plate 164.

[0167] Additionally, a Y3-axis direction movement mechanism 166 is disposed on the rear side of the air cylinder 156. This Y3-axis direction movement mechanism 166 includes a pair of guide rails 166a, each extending along the Y3-axis direction. Furthermore, the rear surface side of an air cylinder 168 is slidably connected to the front surface side of the pair of guide rails 166a. Furthermore, a threaded shaft 166b extending along the Y3-axis direction is disposed between the pair of guide rails 166a.

[0168] A motor 166c for rotating the threaded shaft 166b is connected to one end portion of this threaded shaft 166b. Additionally, on the surface where a spiral groove is formed in the threaded shaft 166b, a nut member (not shown) is arranged, which houses a large number of balls that roll on the surface of the rotating threaded shaft 166b, thus forming a ball screw.

[0169] That is, when the threaded shaft 166b rotates, the large number of balls circulate in the nut part, and the nut part moves along the Y3-axis direction. Furthermore, this nut part is fixed to the rear surface of the air cylinder 168. Thus, when the threaded shaft 166b is rotated by the motor 166c, the air cylinder 168 moves along the Y3-axis direction along with the nut part.

[0170] Furthermore, the air cylinder 168 has a piston rod 168a that can move along the Z3-axis direction, and a cutter 170 having a circular disk is connected to a lower end portion of this piston rod 168a. Additionally, a work table 172 is arranged below the cutter 170, which is used for cutting the tape 39 for a separating device to be described later.

[0171] A groove 172a is formed in this work table 172 along the Y3-axis direction. Furthermore, when the cutter 170, whose lower end is positioned within the groove 172a, is moved along the Y3-axis direction in a state where the tape 39 for separation is present on the work table 172, this tape 39 is cut for separation by the cutter 170.

[0172] Furthermore, a separation tape feed unit 174 is arranged at the rear of the work table 172. This separation tape feed unit 174 has a feed roller 176. The separation tape 39 is received by this feed roller 176. The separation tape 39 has a tape base and a thermosetting plastic layer arranged on a surface (surface on the side of the feed roller 176) of this tape base.

[0173] Furthermore, a pair of insertion rollers 178 lined up along the Z3-axis direction are arranged below the feed roller 176, and the separation tape 39 is pulled out downward by this pair of insertion rollers 178. Furthermore, a pair of discharge rollers 180 lined up along the Z3-axis direction are arranged below the pair of insertion rollers 178, and the separation tape 39 is fed forward by this pair of discharge rollers 180.

[0174] In the Fig. In the tape adhesion device 108 shown in Figure 14, the second working unit formation step (S4) is performed, for example, in the following sequence. Specifically, first, the second annular frame 31 is conveyed into the support base 118 of the tape adhesion part 110b.

[0175] At this time, this second annular frame 31 is arranged on the support base 118 so that the direction indicated by the pair of frame cutouts 33a and 33b (direction from the center of the opening 31a toward the rectilinear part 31b arranged between the pair of frame cutouts 33a and 33b) is parallel to the X3-axis direction and the rectilinear part 31b is positioned on the front side.

[0176] Thereafter, the second tape 37 is adhered to the upper surface of the second annular frame 31 by a method similar to the above-described method for adhering the tape 27 to the annular frame 21. Next, the conveying unit 116 is actuated to convey the process cartridge 29 housed in the cassette 114a out of the cassette 114a and convey the process cartridge 29 to the cutting table 124 of the process cartridge forming part 110c.

[0177] At this time, the conveying unit 116 conveys the work unit 29 to the cutting table 124 so that the rear surface of the workpiece 11 faces upward and the notch 15 is positioned at the front side as viewed from the center of the workpiece 11. This causes the direction from the center of the divided workpiece 11 to the notch 15 to become parallel to the X3-axis direction.

[0178] Thereafter, the tape 27 is circularly cut by the cutting device 126 along the outer circumference of the workpiece 11 of the working unit 29. As a result, the working unit 29 is divided into the workpiece 11, which has the lower surface (front surface) to which the tape 27 adheres in a circular disc shape, and the annular frame 21, which has the lower surface to which the tape 27 adheres in a circular ring shape.

[0179] Next, the conveying unit 116 is operated to convey the annular frame 21 separated from the workpiece 11 away from the cutting table 124 and to convey the annular frame 21 into the cassette 114a. Thereafter, the conveying unit 138, etc., is operated to convey the second annular frame 31, with the upper surface to which the second tape 37 adheres, away from the support base 118 and to convey the second annular frame 31 to the cutting table 124.

[0180] Specifically, first, the X3-axis direction movement mechanism connected to the base end portion of the conveying unit support member 136 is actuated to position the suction pads 138e directly above the second annular frame 31. Next, the air cylinder housed in the coupling portion 138a is actuated to bring the suction pads 138e into contact with the upper surface of the second annular frame 31 or the second tape 37 adhered thereto.

[0181] Next, the suction source connected to the suction pads 138e is activated. This causes the second annular frame 31 to be held in place by the suction pads 138e. Next, the air cylinder housed in the coupling part 138a is activated to lift the second annular frame 31.

[0182] Thereafter, the X3-axis direction moving mechanism coupled to the base end part of the conveying unit support part 136 is actuated to cause the second belt 37 adhered to the second annular frame 31 to be positioned directly above the workpiece 11 placed above the cutting table 124.

[0183] Next, the air cylinder housed in the coupling part 138a is actuated to cause the second annular frame 31 to approach the cutting table 124. After that, the operation of the suction source connected to the suction pads 138e is stopped. This completes the transfer of the second annular frame 31, with the upper surface to which the second tape 37 adheres, from the support base 118 to the cutting table 124.

[0184] Next, the X3-axis direction movement mechanism coupled to the base end portion of the adhesion roller support member 132 is actuated to cause the second belt 37, which is in contact with the upper surface (rear surface) of the workpiece 11, to be pressed by the adhesion roller 134. As a result, the second belt 37 is adhered to the upper surface (rear surface) of the workpiece 11, and the workpiece 11 and the second annular frame 31 are bonded.

[0185] At this time, the direction indicated by the pair of frame cutouts 33a and 33b of the second annular frame 31 (direction from the center of the opening 31a to the straight part 31b arranged between the two frame cutouts 33a and 33b) corresponds to the direction from the center of the divided workpiece 11 to the notch 15. That is, the angle formed by the direction formed by the pair of frame cutouts 33a and 33b of the second annular frame 31 and the direction from the center of the divided workpiece 11 toward the notch 15 is 0°.

[0186] Thereafter, the conveying units 146a and 146b etc. of the conveying part 110d are operated to convey the second annular frame 31 connected to the workpiece 11 away from the cutting table 124 and convey the second annular frame 31 to the separating table 148 of the separating part 110e.

[0187] Specifically, first, the Y3-axis direction movement mechanism incorporated in the Y3-axis direction movement mechanism housing 140 is actuated to cause the suction pads of the conveying unit 146a to be positioned directly above the second annular frame 31. Next, the raising-lowering mechanism incorporated in the raising-lowering rotation mechanism housing 142a is actuated to cause the suction pads of the conveying unit 146a to come into contact with the upper surface of the second annular frame 31 or the second tape 37 adhered thereto.

[0188] Next, the suction source connected to the suction pads of the conveying unit 146a is actuated. As a result, the second annular frame 31 is held by the suction pads of the conveying unit 146a. Next, the lifting-lowering mechanism incorporated in the raising-lowering-rotation mechanism housing 142a is actuated to lift the second annular frame 31. After that, the rotating mechanism incorporated in the raising-lowering-rotation mechanism housing 142a is actuated to turn over the conveying unit support part 144a.

[0189] As a result, the conveying unit 146a is positioned above the conveying unit support member 144a. Furthermore, the conveying unit 146a holds the second annular frame 31 connected to the workpiece 11 in a state where the front surface of the workpiece 11, to which the tape 27 adheres, faces upward and the rear surface of the workpiece 11, to which the second tape 37 adheres, faces downward.

[0190] Next, the raising-lowering mechanism and / or the rotating mechanism accommodated in the raising-lowering-rotating mechanism housing 142b is operated to cause the conveying unit 146b to be positioned at a position higher than the second annular frame 31 supported by the conveying unit 146a and to cause the conveying unit supporting part 144b to be positioned above this conveying unit 146b.

[0191] Thereafter, the Y3-axis direction movement mechanism housed in the Y3-axis direction movement mechanism housing 140 is actuated to cause the elevating-lowering-rotating mechanism housing 142a and the elevating-lowering-rotating mechanism housing 142b to approach each other. Next, the elevating-lowering mechanism housed in the elevating-lowering-rotating mechanism housing 142a and / or the elevating-lowering-rotating mechanism housing 142b are actuated to bring the suction pads of the conveying unit 146b into contact with the upper surface of the second annular frame 31.

[0192] Thereafter, the operation of the suction source connected to the suction pads of the conveying unit 146a is stopped, and the suction source connected to the suction pads of the conveying unit 146b is activated. As a result, the second annular frame 31 connected to the workpiece 11 is transferred from the conveying unit 146a to the conveying unit 146b.

[0193] Next, the Y3-axis direction movement mechanism housed in the Y3-axis direction movement mechanism housing 140 is actuated to cause the second annular frame 31 to be positioned directly above the separation table 148. Thereafter, the raising-lowering mechanism housed in the raising-lowering rotation mechanism housing 142b is actuated to cause the second annular frame 31 to approach the separation table 148.

[0194] Next, the operation of the suction source connected to the suction pads of the conveying unit 146b is stopped. This completes the conveyance of the second annular frame 31 connected to the workpiece 11 from the cutting table 124 to the separation table 148. As a result, the workpiece 11 is placed above the separation table 148 with the upper surface (front surface) to which the tape 27 adheres, and the second tape 37 adhering to the lower surface (rear surface) interposed.

[0195] Thereafter, the tape 27 adhering to the front surface of the workpiece 11 is separated in the separating part 110e. Specifically, first, the suction source connected to the porous plate 148a of the separating table 148 is activated. This causes the workpiece 11 to be held by the separating table 148 with the second tape 37 interposed. Next, the X3-axis direction moving mechanism 150 moves the moving plate 152 to cause the gripping claw 158 to approach the tape feeding unit 174 for separation.

[0196] Next, the pair of insertion rollers 178 and the pair of discharge rollers 180 are actuated to cause the tape 39 to be discharged toward the gripping claw 158 for separation. This positions a tip portion of the tape 39 for separation between the lower portion 160b of the fixed claw 160 and the movable claw 162.

[0197] Thereafter, the movable claw 162 is brought close to the lower part 160b of the fixed claw 160 to cause the tip part of the tape 39 to be separated by the lower part 160b of the fixed claw 160 and the movable claw 162, that is, to be gripped by the gripping claw 158. Next, the X3-axis direction moving mechanism 150 moves the moving plate 152 to cause the gripping claw 158 to be separated from the tape separation feeding unit 174 and positioned above the separation table 148.

[0198] At this time, the separation tape 39, whose tip portion is gripped by the gripping claw 158, is pulled by the gripping claw 158 and pulled along the X3-axis direction. This gripping claw 158 is positioned at a higher position than the worktable 172. Furthermore, the X3-axis direction moving mechanism 150 moves the moving plate 152 along the X3-axis direction to cause the vicinity of the outer periphery of the tape 27 adhering to the front surface of the workpiece 11 to be positioned directly below the heating plate 164.

[0199] Thereafter, the air cylinder 156 lowers the piston rod 156a to press a portion of the separation tape 39 located immediately below the heating plate 164 against the tape 27. Next, a current is generated in the heating wire built into the heating plate 164, and the vicinity of the lower surface of the heating plate 164 is heated. As a result, a portion of the separation tape 39 hardens in a state where it is in contact with the tape 27.

[0200] Thereafter, the air cylinder 168 lowers the piston rod 168a, and the Y3-axis direction moving mechanism 166 moves the air cylinder 168 along the Y3-axis direction so that a part located above the groove 172a of the work table 172 in the tape 39 for separation can be cut by the cutter 170.

[0201] Next, the air cylinder 154 raises the piston rod 154a to raise the gripping claw 158. This separates the belt 27 in contact with the part of the belt 39 for separation from the front surface of the workpiece 11. Furthermore, the X3-axis direction movement mechanism 150 could move the movement plate 152 to cause the gripping claw 158 to move along the X3-axis direction if necessary to completely separate the belt 27 from the front surface of the workpiece 11.

[0202] This completes the separation of the tape 27 adhering to the front surface of the workpiece 11. This forms the second working unit in which the workpiece 11 and the second annular frame 31 are connected by the second tape 37. Fig. 19 is a perspective view schematically illustrating this second working unit 41. In Fig. 19 shows the side of the front surface of the workpiece 11 (front surface 13a of the substrate 13).

[0203] Thereafter, the operation of the suction source connected to the porous plate 148a of the separation table 148 is stopped. Next, the conveying unit 116 is actuated to discharge the second working unit 41 from the separation table 148 and convey the second working unit 41 to the cassette 114b. This completes the second working unit formation step (S4).

[0204] In the Fig.In the workpiece dividing method including this second processing unit forming step (S4) shown in FIG. 13, the direction from the center of the divided workpiece 11 toward the notch 15 is made to correspond to the direction indicated by the pair of frame cutouts 33a and 33b of the second annular frame 31 (the direction from the center of the opening 31a to the rectilinear part 31b located between the pair of frame cutouts 33a and 33b) (the angle formed by both directions is set to 0°). This facilitates position adjustment of the workpiece 11 when machining the workpiece 11 after the second processing unit forming step (S4).

[0205] The above-described contents are one aspect of the present invention, and inventions having features other than the above-described contents are also included in the present invention. For example, the second annular frame used in the second working unit forming step (S4) may be the same as the annular frame 21 used in the working unit forming step (S1).

[0206] That is, it is not necessary to prepare an annular frame other than the annular frame 21 as this second annular frame. Specifically, the second work unit forming step (S4) included in the workpiece dividing method according to the present invention may be performed in the following order.

[0207] First, the second tape 37 is adhered to the rear surface of this workpiece 11 and the other surface of the annular frame 21 without separating the workpiece 11 and the annular frame 21 by the tape 27 adhering to the front surface of the workpiece 11 and one surface of the annular frame 21. Then, the tape 27 adhering to the front surface of the workpiece 11 and one surface of the annular frame 21 is separated. In this case, the workload for the second processing unit formation step can be reduced.

[0208] On the other hand, when the second annular frame used in the second working unit forming step (S4) is different from the annular frame 21 used in the working unit forming step (S1) as described above, the part other than the part adhering to the front surface of the workpiece 11 in the tape 27 can be removed in advance before the tape 27 is separated from the front surface of the workpiece 11. This can reduce the possibility of the tape 27 remaining on the second working unit 41 formed by separating the tape 27 from the front surface of the workpiece 11.

[0209] Furthermore, in the second processing step (S4), the direction from the center of the divided workpiece 11 to the notch 15 does not need to correspond to the direction indicated by the pair of frame cutouts 33a and 33b of the second annular frame 31. That is, the angle formed by both directions does not need to be 0°. For example, in the second processing step (S4), the second tape 37 adhered to the second annular frame 31 may be adhered to the back surface of the workpiece 11 such that the angle formed by both directions is 90°, 180°, or 270°.

Claims

[1] A dividing method for a workpiece (11, 13), in which the workpiece (11), which is divided into a plurality of regions (19) by a plurality of first planned dividing lines (17a) each extending along a first direction and a plurality of second planned dividing lines (17b) each extending along a second direction intersecting the first direction, and has a component formed on one side of a front surface of each of the plurality of regions (19), is divided by a cutting blade (98) from one side of a rear surface (13b) of the workpiece (11) along each of the plurality of first planned dividing lines (17a) and each of the plurality of second planned dividing lines (17b), the dividing method comprising: a first work unit forming step of forming a first work unit in which the workpiece (11) and a first annular frame (21) are joined by adhering a first band (27) having an anisotropy of a strain rate when a predetermined force is applied to the first band (27) to the first annular frame (21) in such a manner as to cover an opening of the first annular frame (21), and adhering the first band (27) to the front surface of the workpiece (11); a holding step of holding one side of the first belt (27) of the first working unit by a holding table and exposing the rear surface (13b) of the workpiece (11) after the first working unit forming step; a dividing step of dividing the workpiece (11) by the cutting blade (98) from the rear surface (13b) side along each of the plurality of first planned dividing lines (17a) and each of the plurality of second planned dividing lines (17b) after the holding step; and a step of determining a third direction in which the strain rate becomes lowest when the predetermined force is applied to the first band (27), wherein in the forming step of the first working unit, the first tape (27) is adhered to the front surface of the workpiece (11) in such a manner that the third direction is not parallel to both the first direction and the second direction. [2] A dividing method for the workpiece (11) according to claim 1, wherein the first direction is orthogonal to the second direction, and, in the forming step of the first working unit, the first tape (27) is adhered to the front surface of the workpiece (11) in such a manner that an angle formed by a straight line along the third direction and both a straight line along the first direction and a straight line along the second direction is 45 degrees. [3] A dividing method for the workpiece (11) according to claim 1 or 2, wherein the dividing method further comprises: after the dividing step, a second working unit forming step of forming a second working unit in which the workpiece (11) and a second annular frame (31) having an outer edge on which a frame cutout is formed are joined by dividing the first band (27) from the workpiece (11), after a second band (37) is adhered to the second annular frame (31) in such a manner that an opening of the second annular frame (31) is covered, and the second band (37) is adhered to the rear surface (13b) of the workpiece (11), wherein a notch (15) or an orientation flat for indicating a crystal orientation is formed on an outer edge of the workpiece (11), and, in the forming step of the second working unit, the second tape (37) adhered to the second annular frame (31) is adhered to the rear surface (13b) of the workpiece (11) in such a manner that an angle formed by a direction from a center of the workpiece (11) to the notch or the orientation flat and a direction indicated by the frame cutout is 0°, 90°, 180° or 270°. [4] A dividing method for the workpiece (11) according to claim 1 or 2, wherein the dividing method further comprises: after the dividing step, a second working unit forming step of forming a second working unit in which the workpiece (11) and a second annular frame (31) having an outer edge on which a frame cutout is formed are joined by separating the first band (27) from the workpiece (11), after a second band (37) is adhered to the second annular frame (31) in such a manner that an opening of the second annular frame (31) is covered, and the second band (37) is adhered to the rear surface (13b) of the workpiece (11), wherein a notch or an orientation flat for indicating a crystal orientation is formed on an outer edge of the workpiece (11), and, in the forming step of the second working unit, the second band (37) adhered to the second annular frame (31) is adhered to the rear surface (13b) of the workpiece (11) in such a manner that an angle formed by a direction from a center of the workpiece (11) to the notch or the orientation flat and a direction indicated by the frame cutout is 0°, 90°, 180° or 270°.

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